MKS Newport IDL280-1200LM, Руководство пользователя

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IDL280-LM Series Long Travel Industrial Linear Stages
Table of Contents
Warranty .................................................................................................................ii
Declaration of Incorporation ................................................................................v
Definitions and Symbols.......................................................................................vi
Warnings ...............................................................................................................vii
Caution ...................................................................................................................ix
1.0 — Introduction
.................................................................................1
2.0 — Description
...................................................................................2
2.1 Design Details ............................................................................................2
3.0 — Characteristics
............................................................................3
3.1 Definitions ..................................................................................................3
3.2 Mechanical Specifications .......................................................................4
3.3 Hard Stop: Speed Limitation Versus Load .............................................4
3.4 Load Characteristics and Stiffness .........................................................5
3.5 Stage Weights ............................................................................................5
4.0 — Drive and Motor
.........................................................................6
4.1 Motor characteristics (Direct Drive Brushless Motor) ........................6
4.2 Command Signals ......................................................................................6
4.3 Sensor Positions........................................................................................7
4.4 Position Feedback Signals........................................................................7
4.5 General Wiring ...........................................................................................8
4.6 Pinouts........................................................................................................8
Hall Effect Sensor (SUB-D15F Connector) ..............................................8
Encoder (SUB-D15M Connector) .............................................................8
Encoder (SUB-D26HDM Connector on E5820A Adapter) .....................9
Motor (DB9W4M Connector)...................................................................9
4.7 IDL280-LM Cable Wirings .........................................................................9
4.8 Air Tube....................................................................................................10
5.0 — Stage Installation
.....................................................................11
5.1 Unpacking ................................................................................................11
5.2 Setting Up .................................................................................................11
5.3 Mounting Conditions ..............................................................................13
5.4 Air Blowing...............................................................................................13
A1045F0 - EDH0362En1050 — 02/20