Cold Cathode Ionization Vacuum Sensor
Table of Contents
Table of Contents
Package Contents ..................................................................... 1
Symbols Used in this Manual .................................................... 1
Safety Precautions .................................................................... 2
Specifications ............................................................................ 3
Feature and Control Locations .................................................. 5
Typical Applications for the Series 903 (IMT) ............................ 6
Products Series 903 (IMT) ............................. 7
Installing the Series 903 (IMT) ................................................... 8
Location .................................................................................................... 8
Orientation ................................................................................................ 8
Contamination ........................................................................................... 8
Vacuum Connection .................................................................................. 9
Electrical Connection ................................................................................ 9
Input/Output Wiring ................................................................................... 9
Relay Inductive Loads and Arc Suppression ........................................... 11
Operating the Series 903 (IMT) ............................................... 12
Starting the (IMT) ................................................................................... 12
Reading Pressure ................................................................................... 12
Equation for Converting Voltage to Pressure ........................................... 13
Using the Set Point ................................................................................. 13
Venting to Atmosphere ............................................................................ 14
Analog-to-Digital (A/D) Converter ............................................................ 14
Preparing for Bakeout ............................................................................. 14
Leak Detection ........................................................................................ 14
Using the Series 903 (IMT) with Other Gases ......................... 16
Calibrating for Other Gases ..................................................................... 17
Maintaining the Series 903 (IMT) ............................................ 18
Troubleshooting and Service ................................................................... 18
Contamination of the (IMT) Sensor ......................................................... 19
Disassembly .................................................................................................................. 19
Cleaning .......................................................................................................................... 19
Assembly ........................................................................................................................ 20
Содержание HPS 903 Series
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