MKS HPS 903 Series, Руководство по эксплуатации и обслуживанию

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10
Cold Cathode Ionization Vacuum Sensor
The power supply input may range from 14 to 30 VDC. The positive side of
the power supply is connected to pin 3 and the negative side to pin 4 of the
male D-sub connector.
Damage may occur to the circuitry if excessive voltage is applied
or if a wrong connection is made.
The
analog output voltages are pins 5 (+) and 8 (-). Connect them to a
differential input voltmeter or an analog-to-digital (A/D) converter with a
differential input in a system controller.
Do not connect the negative side of the analog output, pin 8, to
the negative side of the power supply input, pin 4, or to any
other ground. Half of the power current would flow through this
wire. Measurement errors in the output voltage may be seen due
to the voltage drop from this current. The longer the cable, the
worse the error will be.
To enable the high voltage with an external switch, connect pin 9 to the power
supply input (-), pin 4.
An open connection turns off the high voltage. The high voltage should be
turned off at pressures above 10
-2
Torr to prevent effects of contamination at
higher pressures. An output of greater than 9.5 V indicates the high voltage is
off and an output of less than 0.5 V indicates no power to the transducer or
that discharge has not yet started.
Connect pin 7 to the power supply input (-), pin 4 to disable the set point relay.
Do not connect the set point relay terminals to the analog output.
Male, 9-pin D-sub connector
Pin Description
1 Set point relay - normally open contact
2 Set point relay - normally closed contact
3 Power supply input (+)
4 Power supply input (-)
5 Analog output voltage (+)
6 Set point relay - common
7 Set point relay - disable
8 Analog output voltage (-)
9 High voltage - enable
1
9 6
5