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8
Cold Cathode Ionization Vacuum Sensor
Installing the Series 903 (IMT)
Location
Locate the (IMT) where it can measure process chamber or manifold
pressure. Install it away from pumps, other vibration sources, and gas
sources to give the most representative values.
Orientation
The (IMT) can be installed with the body set in any
direction. Operating position does not affect accuracy.
Where space is limited, it may be difficult to position an
(IMT) with a CF flange. If the bolts cannot be fed through
the flange toward the electronics assembly, it will first be
necessary to remove the electronics assembly from the
sensor to install the (IMT).
Remove the two Phillips head screws on top of the (IMT)
and remove the electronics assembly. Note the alignment
of the feed through pins with the orientation of the
electronics assembly as shown to the right.
Before assembling the (IMT), inspect the pins to make sure
they have not been bent. Straighten them if necessary. The
sensor is keyed to the electronics assembly. Rotate the
electronics assembly onto the sensor until it is fully seated.
Install the two Phillips head screws.
Contamination
Locate and orient the (IMT) where contamination is least
likely. If it is installed directly above a diffusion pump, for
example, oil vapor could contaminate the cathode, anode, or other vacuum
exposed components, causing the calibration to shift.
Installing it with the vacuum port facing down is preferable as this helps
prevent contaminants falling into it.
Operation at pressures above 10
-3
Torr for extended periods can promote the
negative effects of contamination in the sensor.
Alignment of sensor with
electronics assembly
Feed through
pins
Key
Содержание HPS 903 Series
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