3
Cold Cathode Ionization Vacuum Sensor
Specifications
Measuring Range
3.0 x 10
-10
to 5.0 x 10
-3
Torr
3.9 x 10
-10
to 6.5 x 10
-3
mbar
3.9 x 10
-8
to 6.5 x 10
-1
Pa
Set Point Range
1.0 x 10
-9
to 1.0 x 10
-3
Torr
1.3 x 10
-9
to 1.3 x 10
-3
mbar
1.3 x 10
-7
to 1.3 x 10
-1
Pa
Repeatability
Approximately ±5%
Calibration Gas
Air/nitrogen
Operating Temperature Range
0° to 50°C (32° to 122°F)
Bakeout Temperature
400°C (752°F) maximum for CF
flanged unit; without electronics,
cable, or magnet
Relative Humidity
80% maximum for temperatures
less than 31°C, decreasing linearly
to 50% maximum at 40°C
Altitude
2000 m (6561 ft) maximum
Insulation
Pollution Degree 2
Controls
1 relay set point
Relay Contact Rating
SPDT, 1 A @ 30 VDC, resistive
Relay Hysteresis
150 mV*
Relay Response
< 50 msec (0 to 99%)
for
D
P from 5.0 x 10
-8
Torr to
3.0 x 10
-4
Torr
Power Requirement
14 to 30 VDC, 150 mA maximum
Output Voltage
1.5 to 8.7 VDC, linear output,
30
W
maximum output impedance
Output Load
100 k
W
nominal
10 k
W
minimum
*150 mV is equivalent to a change in pressure of 1.41 (or 10
0.150
) times the set
point, e.g., if the relay is set to activate at 2.0 x 10
-6
Torr (5.301 V), it will
deactivate at 2.82 x 10
-6
Torr (5.451 V).
Содержание HPS 903 Series
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