6
Cold Cathode Ionization Vacuum Sensor
Measurement of high vacuum chamber pressures
Control of high vacuum systems and process
sequencing using the relay set point
Sensing abnormal pressure and taking appropriate security
measures using the relay set point
Controlling system pressure using the analog output as
input to an automatic pressure controller
Starting or stopping system processes with the relay set point
Measuring pressures of backfilled gases
Leak testing your vacuum system
Typical Applications for the
Series 903 (IMT)
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Содержание HPS 903 Series
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