background image

 

 

 

Warranty

 

 

MKS,

 

ENI

 

Products

 

warrants

 

to

 

the

 

original

 

purchaser

 

for

 

a

 

period

 

of

 

one

 

year

 

from

 

the

 

date

 

of

 

delivery,

 

each

 

instrument

 

to

 

be

 

free

 

from

 

defects

 

in

 

materials

 

and

 

workmanship.

 

For

 

a

 

period

 

of

 

one

 

year,

 

MKS,

 

ENI

 

Products

 

will,

 

at

 

its

 

option,

 

adjust,

 

repair,

 

or

 

replace

 

defective

 

parts,

 

without

 

charge

 

to

 

the

 

original

 

purchaser,

 

so

 

that

 

the

 

instrument

 

performs

 

according

 

to

 

its

 

specifications.

 

 

When

 

warranty

 

service

 

is

 

required,

 

the

 

instrument

 

must

 

be

 

returned,

 

transportation

 

prepaid,

 

to

 

the

 

factory

 

or

 

to

 

one

 

of

 

MKS,

 

ENI

 

Products'

 

designated

 

service

 

centers.

 

If,

 

in

 

our

 

opinion,

 

the

 

instrument

 

has

 

been

 

damaged

 

by

 

accident,

 

unreasonable

 

use,

 

buyer

supplied

 

software

 

or

 

interfacing,

 

improper

 

site

 

preparation

 

or

 

maintenance,

 

or

 

abnormal

 

conditions

 

of

 

operation,

 

repairs

 

will

 

be

 

billed

 

at

 

standard

 

rates.

 

In

 

this

 

case,

 

an

 

estimate

 

will

 

be

 

submitted

 

before

 

the

 

work

 

is

 

started.

  

 

THIS

 

LIMITED

 

WARRANTY

 

IS

 

EXCLUSIVE

 

AND

 

MKS,

 

ENI

 

PRODUCTS

 

MAKES

 

NO

 

OTHER

 

WARRANTIES,

 

EXPRESS

 

OR

 

IMPLIED,

 

AND

 

ALL

 

OTHER

 

EXPRESS

 

ORAL

 

OR

 

WRITTEN

 

WARRANTIES

 

AND

 

ALL

 

WARRANTIES

 

IMPLIED

 

BY

 

LAW,

 

INCLUDING

 

ANY

 

WARRANTIES

 

OF

 

MERCHANTABILITY

 

OR

 

FITNESS

 

FOR

 

A

 

PARTICULAR

 

PURPOSE

 

OR

 

OTHER

 

WARRANTY

 

OF

 

QUALITY

 

ARE

 

EXCLUDED

 

AND

 

DISCLAIMED.

 

IN

 

NO

 

EVENT

 

SHALL

 

MKS,

 

ENI

 

PRODUCTS

 

BE

 

LIABLE

 

FOR

 

SPECIAL,

 

INDIRECT,

 

INCIDENTAL

 

OR

 

CONSEQUENTIAL

 

DAMAGES

 

RESULTING

 

FROM

 

BREACH

 

OF

 

ANY

 

WARRANTY,

 

WHETHER

 

EXPRESS

 

OR

 

IMPLIED,

 

INCLUDING

 

ANY

 

IMPLIED

 

WARRANTY

 

OF

 

MERCHANTABILITY

 

OR

 

FITNESS

 

FOR

 

A

 

PARTICULAR

 

PURPOSE,

 

OR

 

FROM

 

ANY

 

CAUSE

 

WHATSOEVER,

 

INCLUDING

 

NEGLIGENCE.

 

Buyer's

 

sole

 

and

 

exclusive

 

remedy

 

under

 

this

 

warranty

 

shall

 

be

 

repair

 

or

 

replacement

 

as

 

set

 

forth

 

above,

 

or

 

if

 

MKS,

 

ENI

 

Products

 

is

 

unable

 

to

 

repair

 

or

 

replace

 

the

 

defective

 

part

 

within

 

a

 

reasonable

 

time,

 

a

 

refund

 

of

 

the

 

price

 

of

 

the

 

part

 

or

 

goods

 

that

 

give

 

rise

 

to

 

the

 

warranty

 

claim.

 

 

 

Service

 

And

 

Technical

 

Assistance

 

 

For

 

Service

 

or

 

Repair

 

contact

 

the

 

closest

 

Customer

 

Service

 

Department

 

with

 

the

 

following

 

information:

 

 

Model

 

and

 

serial

 

number

 

 

Purchase

 

order

 

number

 

 

Detailed

 

description

 

of

 

malfunction

 

 

Your

 

company's

 

"Bill

 

To"

 

and

 

"Ship

 

To"

 

address

 

You

 

will

 

receive

 

a

 

RMA

 

(Return

 

Materials

 

Authorization)

 

number,

 

the

 

warranty

 

status

 

of

 

the

 

unit

 

to

 

be

 

returned

 

and

 

estimated

 

repair

 

charge,

 

if

 

any.

 

The

 

RMA

 

number

 

is

 

your

 

authorization

 

number.

 

Please

 

type

 

this

 

number

 

on

 

your

 

purchase

 

order

 

and

 

shipping

 

label.

 

After

 

MKS,

 

ENI

 

Products

 

receives

 

the

 

unit,

 

a

 

firm

 

quote

 

and

 

estimated

 

date

 

of

 

completion

 

will

 

be

 

given.

 

 

For

 

Technical

 

Assistance

 

for

 

your

 

particular

 

application,

 

contact

 

the

 

nearest

 

MKS,

 

ENI

 

Products

 

Sales

 

and

 

Service

 

Center.

 

The

 

following

 

information

 

will

 

help

 

us

 

provide

 

you

 

with

 

prompt

 

and

 

efficient

 

service:

 

 

All

 

of

 

the

 

information

 

contained

 

on

 

the

 

unit's

 

nameplate.

 

 

Names

 

and

 

telephone

 

numbers

 

of

 

important

 

contacts.

 

 

Detailed

 

description

 

(i.e.,

 

physical

 

damage

 

and/or

 

performance

 

anomalies,

 

quantitative

 

and/or

 

qualitative

 

deviation

 

from

 

specifications),

 

including

 

miscellaneous

 

symptoms,

 

dates

 

and

 

times.

 

 

The

 

environment

 

and

 

circumstances

 

under

 

which

 

the

 

issue

 

developed.

 

 

Supporting

 

test

 

data

 

and/or

 

records

 

that

 

can

 

be

 

provided.

 

 

Any

 

previous,

 

related

 

conversations

 

and/or

 

correspondence

 

with

 

MKS,

 

ENI

 

Products.

 

Содержание elite 300

Страница 1: ...nce of the product The use of CFCs for cleaning or maintenance may result in partial liquification of the no clean flux residue which will damage the unit and void the warranty ISO 9001 QUALITY SYSTEM...

Страница 2: ...OM ANY CAUSE WHATSOEVER INCLUDING NEGLIGENCE Buyer s sole and exclusive remedy under this warranty shall be repair or replacement as set forth above or if MKS ENI Products is unable to repair or repla...

Страница 3: ...ngen Stetten Stuttgart Germany Tel Fax 49 711 947700 49 711 9477025 JAPAN 1 21 15 Aoyagi Kunitachi Tokyo 186 0013 Japan Tel Fax 81 425 229 011 81 425 222 636 KOREA 1ST Floor DK Plaza I 375 1 Geumgok d...

Страница 4: ...This page intentionally left blank...

Страница 5: ...ngle 10 1 2 3 Service Warning 10 1 2 4 Non ionizing Electromagnetic Radiation Warning Triangle 11 1 2 5 Technical Support 11 1 2 6 Earth Ground 12 1 2 7 Protective Earth Ground 12 1 2 8 Frame or Chass...

Страница 6: ...ions and indicators 27 Status LEDs 29 2 9 Power Requirements 31 2 9 1 AC Mains Connection 31 2 11 Maintenance Cleaning 32 2 12 System Check 33 Chater 3 eliteTM Operation 34 3 1 Basic Operation through...

Страница 7: ...Contents eliteTM iii Chapter 4 Troubleshooting 44 4 1 Hardware Faults 44 Appendix A eliteTM Specifications 45 Appendix B Glossary of Terms 48...

Страница 8: ...Contents iv eliteTM This page intentionally left blank...

Страница 9: ...er output within 2 of set point over a Dynamic Power Range of 1 to 300 600 or 750 watts The RF output can be pulsed at up to 1kHz with duty cycles from 1 to 99 Precise power calibration is traceable t...

Страница 10: ...ructions are also given in Chapters 2 and 3 It is essential that you become thoroughly familiar with the contents of this manual prior to using your generator If used properly the information containe...

Страница 11: ...on Chapter 2 This chapter acquaints the user with the eliteTM Plasma Generator It covers major features and front and rear panel descriptions This chapter covers everything needed to install and set u...

Страница 12: ...ckets These brackets are shown for command parameters They are not part of the command and should not be entered Rounded Brackets These brackets contain hex equivalent numbers for printable or non pri...

Страница 13: ...ices The term WARNING is used to indicate a potential hazard that could result in injury or death if not avoided The term DANGER is used to indicate an imminent hazard of serious injury or death if no...

Страница 14: ...nsulated voltage within the enclosure of sufficient magnitude to constitute a risk of electric shock Only authorized service personnel with a schematic diagram and a thorough knowledge of the voltages...

Страница 15: ...e Symbol Definition Caution non ionizing electromagnetic radiation The non ionizing electromagnetic radiation warning triangle symbol reference IEC Publication 417 Symbol No 5140 and ISO Publication 3...

Страница 16: ...licitly required 1 2 7 Protective Earth Ground Symbol Definition Protective earth ground The protective earth ground symbol reference IEC Publication 417 Symbol No 5019 is used to identify equipment t...

Страница 17: ...liteTM Serial Tag Label Figure 1 3 A ENI MODEL NUMBER The number that uniquely identifies the unit D ENI REV The revision letter identifying product configuration Revision A is the initial revision le...

Страница 18: ...of the generator 2 Attach the AC Mains line cord to a 100 264V single phase 15 A outlet See section 2 9 for more information on AC Power Requirements 3 If applicable connect the 9 pin male serial digi...

Страница 19: ...recautions when RF power is active 7 If the generator is equipped with an ON OFF switch move the switch to the ON position If the switch has no ON OFF switch simply plug in the IEC linecord to the rea...

Страница 20: ...eturn the unit should this become necessary 2 1 3 Packaging for Reshipment Whenever possible the original shipping carton and packing material should be used for reshipment If the original packing mat...

Страница 21: ...handle full rack 331012 Rack handle half rack 1039014 RF Connectors Cover RF Output Connector cover 1036305 001 Connectors AC Cord Interlock Jumper 1019388 001 Basic AC linecord IEC 60320 C 13 to NEMA...

Страница 22: ...n include an upstream current limiting disconnect device rated 50 60 Hz 250V minimum and no more than 20A The upstream disconnect device must be located within sight of the eliteTM unit must remain us...

Страница 23: ...n the rear panel to the chassis ground on the cabinet For details refer to the applicable Mounting and Outline Drawing as detailed in section 2 1 4 2 4 System Interconnect The eliteTM generator may be...

Страница 24: ...upra Shield or equivalent cable and metallized backshells providing 360 shield termination 2 5 1 Communication Configuration A standard 9 pin female Type D connector provides the electrical connection...

Страница 25: ...able must be used for the RF output connection 2 7 Safety Interlocks For user safety the eliteTM generator is equipped with an RF interlock system accessed through pins 10 and 23 of the 25 pin D sub c...

Страница 26: ...ion 22 eliteTM 2 8 Panels and Controls This section describes in detail all the front and rear panel controls and connections used on your generator elite LCD Front View Figure 2 8a elite Basic Front...

Страница 27: ...applicable the attached MKS Matchworks The six button keypad can be used to setup the generator and Matchworks operating parameters and control the RF output The LCD has two different menus that can b...

Страница 28: ...M ENTRY DESCRIPTION ON RF is ON RF STATUS OFF RF is OFF FP Forward Power Leveling Mode LP Load Power Leveling Mode LVL MODE EX External Leveling Mode DC Bias FWD 0 750 Forward Power Watts REV 0 200 Re...

Страница 29: ...eTM 25 Pulse Menu PL DUTY 10 FREQ 1000Hz STATUS DUTY FREQUENCY MENU ITEM ENTRY DESCRIPTION CW RF output is CW continuous wave STATUS PL RF output is pulsing DUTY 1 99 Pulsing duty cycle FREQUENCY 1 10...

Страница 30: ...ecrement value of the selected control parameter When cursor mode is disabled the DOWN key can be used to switch from the Main menu to the Pulse menu LEFT In cursor mode push to move to the next contr...

Страница 31: ...nterface allows control of the generator through various analog voltages 0 10Vdc See section 3 2 1 for more information RS 232 Interface Type DB9F This interface is used to connect the generator to a...

Страница 32: ...ork when the optional Profibus Interface Board is installed This allows the generator to control the Matchworks capacitor positions via the generator front panel control Profibus Connector Type DB9F T...

Страница 33: ...active In the case of multiple faults or warnings there will be a one second OFF period between codes Status PWR LED STAT LED AC ON Solid Green System Ready Solid Green Solid Green RF On Flashing Gree...

Страница 34: ...e from the previous page Chassis Ground AC Input RF Output CEX In CEX Out DC Bias Optional Matchwork Interface Profibus Address dipswitch Profibus Connector Status LEDs Analog Interface Connector Prof...

Страница 35: ...e supplied from two Hot conductors that meet the AC voltage range for the unit i e 220V single phase two phases of 208V 3ph 2 9 1 AC Mains Connection An IEC 60320 C 13 style AC appliance inlet is supp...

Страница 36: ...y cloth to remove any build up of dust and dirt When operated in dusty areas dust may build up in the front air intakes A hand held vacuum cleaner can used to remove any dust build up that occurs or i...

Страница 37: ...s Inspect the AC power connector and cable before use replace if damaged 2 The RS 232 serial cable if used is connected to the 9 pin D type serial connector on the rear panel 3 The Analog Interface Ca...

Страница 38: ...enerator is designed to be used with minimal input from the user In the most basic case all that is required from the user is an RF setpoint and the RF ON command In more advanced situations other com...

Страница 39: ...lly entered by the user In the examples that follow it will be shown to indicate command entry at the terminal and is only included for completeness 3 1 3 Startup Message If you are connected to the u...

Страница 40: ...mand NAK CR LF ASCII 0x0D 0x0A 0x3F This is used to indicate that the command sent was invalid or unavailable 3 1 5 Optional Argument Data Entry Integer Numbers are entered as just where the number is...

Страница 41: ...achieve P Power Setpoint XXXXXX Sets the power setpoint for the generator After the P command is issued the generator will respond with Enter New Setpoint AAAAAA BBBBBB The power setpoint must be ent...

Страница 42: ...ata can be easily used by a user built script or macro The data is returned in the following format 000000 000000 0000000000000000 0000000000001000 000056 000024 000032 000000 000005 00004E20 00004E20...

Страница 43: ...Operation EliteTM 39...

Страница 44: ...RF on enable pulse mode wait for some time and then turn RF Off User Entry Description E Enable RS 232 control P 000750 Set power set point to 750W N Turn RF on Q 000050 Set pulse high time to 50 us...

Страница 45: ...er level 0 V 0 W and 1 V 75 W Input impedance is 100 k balanced differential to ground 6 NOT USED 7 RF ON E DO Emitter side of isolated transistor switch See Note 1 Transistor ON RF ON Transistor OFF...

Страница 46: ...No fault 23 INTERLOCK This pin should connect to Pin 10 to complete the interlock chain 24 BLANKING Pulse blanking signal Ground referenced logic input LOW or OPEN RF Pulse on HIGH RF Pulse Off The no...

Страница 47: ...F setpoint a momentary overshoot of RF power may be occur if a CEX signal is applied after RF is already turned on 3 3 Pulsed Operation The eliteTM generator is capable of both CW and pulsed operation...

Страница 48: ...supplied Unit does not power up when plugged in and or power switch in ON position Internal fuse open Contact an authorized MKS ENI Products Service location for assistance INTERLOCK fault Interlock...

Страница 49: ...Appendix A EliteTM 45 Appendix A eliteTM Specifications This appendix lists the complete physical and electrical characteristics for the eliteTM Plasma Generator...

Страница 50: ...0 5ms when reflected power exceeds 200W Commanded Power Accuracy 2W 1W 100W 2 101 rated power Same Generator Repeatibility 1 Dynamic Power Range 1W to rated power RF Stability Spurious Output Uncondi...

Страница 51: ...Temperature 5C to 40C Size 17 W x 15 D x 3 5 H Weight 25lbs 11kg Rack Mounting Integral 19 inch rack ears RF Output Connection Type N Interfaces RS 232 Std Analog Opt Profibus Opt DB9F DB25F DB9F Int...

Страница 52: ...imminently hazardous situation that if not avoided will result in death or serious injury EMC Electromagnetic Compatibility Enclosure A part providing protection of equipment against certain external...

Страница 53: ...boratory Operator Person operating equipment for its intended purpose Pollution Any addition of foreign matter solid liquid or gaseous ionized gases that may produce a reduction of dielectric strength...

Страница 54: ...A component provided for the connection of a device equipment to external conductors It may contain one or several terminal contacts Tool An external device including keys and coins used to aid a per...

Страница 55: ...Appendix B EliteTM 51 This page intentionally left blank...

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