OPERATION
MANUAL
Manual Order Number: 1036315
Copyright © 2009 MKS Instruments, Inc. All rights reserved.
Revision Level: 00A
MATCHWORK
®
is a registered trademark of MKS Instruments, Inc.
elite
TM
RF
Plasma
Generator
elite
300
/
600
/
750
WARNING:
POTENTIALLY
LETHAL
VOLTAGES
ARE
USED
BY
AND
PRODUCED
BY
THIS
UNIT.
A
thorough
understanding
of
this
manual
is
required
before
attempting
to
install
this
unit
into
a
system.
CFC's
DO
NOT
USE
ANY
CFC
(CHLOROFLUOROCARBON)
SOLVENT
IN
THE
MAINTENANCE
OF
THIS
PRODUCT.
In
recognition
of
our
responsibility
to
protect
the
environment,
this
product
has
been
manufactured
without
the
use
of
CFCs.
The
no
‐
clean
flux
now
used
in
all
soldering
operations
may
leave
a
small
inert
residue
that
will
not
affect
the
performance
of
the
product.
The
use
of
CFCs
for
cleaning
or
maintenance
may
result
in
partial
liquification
of
the
no
‐
clean
flux
residue,
which
will
damage
the
unit
and
void
the
warranty.
ISO 9001
QUALITY
SYSTEM
This
product
is
manufactured
at
an
MKS
Instruments’
ISO
‐
9001
‐
Quality
‐
System
‐
compliant
facility.
Notice
The
material
contained
in
this
manual
is
subject
to
change
without
notice.
No
part
of
this
manual
may
be
reproduced
or
utilized
in
any
form
or
by
any
means,
electronic
or
mechanical,
including
photocopying
or
electronic
transmission
or
other
means
of
reproduction
or
distribution
without
prior
written
consent
of
MKS,
ENI
Products.
The
drawings,
specifications
and
other
technical
information
contained
in
this
manual
are
the
property
of
MKS,
ENI
Products
and
shall
not
be
copied,
reproduced
or
used
in
any
way,
in
whole
or
in
part,
as
the
basis
of
manufacture
or
sale
of
similar
items
without
the
prior
written
consent
of
MKS,
ENI
Products.
Содержание elite 300
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