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Appendix C:  Gas Density Table

65

GAS

SYMBOL

DENSITY

g/l @ 0oC

Hydrogen Chloride

Hydrogen Fluoride

Isobutylene

Krypton

Methane

HCl

HF

C

4

H

8

Kr

CH

4

1.627

0.893

2.503

3.739

0.715

Methyl Fluoride

Molybdenum Hexafluoride

Neon

Nitric Oxide

Nitrogen

CH

3

F

MoF

6

Ne

NO

N

2

1.518

9.366

0.900

1.339

1.250

Nitrogen Dioxide

Nitrogen Trifluoride

Nitrous Oxide

Octafluorocyclobutane

(Freon - C318)

Oxygen

NO

2

NF

3

N

2

O

C

4

F

8

O

2

2.052

3.168

1.964

8.937

 1.427

Pentane

Perfluoropropane

Phosgene

Phosphine

Propane

C

5

H

12

C

3

F

8

COCl

2

PH

3

C

3

H

8

3.219

8.388

4.418

1.517

1.967

Propylene

Silane

Silicon Tetrachloride

Silicon Tetrafluoride

Sulfur Dioxide

C

3

H

6

SiH

4

SiCl

4

SiF

4

SO

2

1.877

1.433

7.580

4.643

2.858

(Table continued on next page)

Содержание 640A/641A

Страница 1: ...service in house repair center WE BUY USED EQUIPMENT Sell your excess underutilized and idle used equipment We also offer credit for buy backs and trade ins www artisantg com WeBuyEquipment REMOTE IN...

Страница 2: ...Rev C 12 99 Instruction Manual MKS Type 640A 641A Pressure Controller Six Shattuck Road Andover MA 01810 2449 800 227 8766 or 978 975 2350 Fax 978 975 0093 E mail mks mksinst com Web site http www mk...

Страница 3: ...haser The foregoing shall constitute the exclusive and sole remedy of the purchaser for any breach by MKS of this warranty The purchaser before returning any equipment covered by this warranty which i...

Страница 4: ...116669 P1 Rev C 12 99 MKS Type 640A 641A Pressure Controller...

Страница 5: ...rk of MKS Instruments Inc Andover MA Cajon is a registered trademark of Cajon Company Macedonia OH Kalrez and Viton are registered trademarks of E I DuPont de Nemours and Co Inc Wilmington DE NUPRO is...

Страница 6: ...640 Series Controller 9 Unpacking Checklist 9 Product Location and Requirements 10 Interface Cables 11 Generic Shielded Cable Description 12 The I O Connector 13 Gas Pressure and Control 15 Pressure...

Страница 7: ...Pressure 42 Labels 42 Chapter Four Operation 43 How To Check the Zero 43 How To Zero a Type 640 Absolute Unit 43 How To Zero a Type 641 Gage Unit 44 How To Adjust the Span 45 How To Tune the 640 Serie...

Страница 8: ...General Information 57 Checking the Orifice Size 57 How To Verify the Orifice Selection 58 Using Different Gases 60 Appendix C Gas Density Table 63 Appendix D Model Code Explanation 67 Model Code Desc...

Страница 9: ...Table of Contents vi...

Страница 10: ...loded View of the C Seal Components 24 Figure 11 Exploded View of the W Seal Components 26 Figure 12 Exploded View of the Z Seal Components 28 Figure 13 Top View of the 640 Series Controller 33 Figure...

Страница 11: ...List of Figures viii...

Страница 12: ...mbers 23 Table 6 0 445 Inch Diameter C Seal Retainer 23 Table 8 Initial Configuration 31 Table 9 Highest Pressure Suggested for Zero Adjustment of an Absolute Transducer 44 Table 10 Orifice Size 57 Ta...

Страница 13: ...List of Tables x...

Страница 14: ...a procedure practice condition or the like which if not correctly performed or adhered to could result in injury to personnel Caution The CAUTION sign denotes a hazard to equipment It calls attention...

Страница 15: ...arth ground IEC 417 No 5019 Frame or chassis IEC 417 No 5020 Equipotentiality IEC 417 No 5021 Direct current IEC 417 No 5031 Alternating current IEC 417 No 5032 Both direct and alternating current IEC...

Страница 16: ...rvice must be made by qualified service personnel only USE CAUTION WHEN OPERATING WITH HAZARDOUS MATERIALS If hazardous materials are used users must take responsibility to observe the proper safety p...

Страница 17: ...urce install a suitable burst disc in the vacuum system to prevent system explosion should the system pressure rise KEEP THE UNIT FREE OF CONTAMINANTS Do not allow contaminants to enter the unit befor...

Страница 18: ...emraz refer to Appendix D Model Code Explanation page 67 for information or all metal material Full scale ranges are available from 10 Torr to 100 psi with a flow capacity of 50 sccm standard cubic ce...

Страница 19: ...e instrument in your system Chapter Three Overview gives a brief description of the instrument and its functionality Chapter Four Operation describes how to use the controller with all its functions a...

Страница 20: ...the use of your 640 Series instrument or to obtain information about companion products MKS offers contact any authorized MKS Calibration and Service Center If it is necessary to return the instrument...

Страница 21: ...Customer Support Chapter One General Information 8 This page intentionally left blank...

Страница 22: ...essary to return the unit to MKS obtain an ERA Number Equipment Return Authorization Number from the MKS Service Center before shipping Please refer to the inside of the back cover of this manual for...

Страница 23: ...on handling these gases supersedes the instructions in this manual MKS assumes no liability for the safe handling of such materials Install the 640 Series controller in a flowing system where gas is...

Страница 24: ...he CE Mark To ensure compliance with EMC Directive 89 336 EEC an overall metal braided shielded cable properly grounded at both ends is required during use No additional installation requirements are...

Страница 25: ...ne point may not suffice 4 For shielded cables with flying leads at one or both ends it is important at each such end to ground the shield before the wires exit Make this ground with absolute minimum...

Страница 26: ...Point A Out 14 Trip Point B Out 15 Chassis Ground Table 3 I O Connector Pinout Note The No Connection pin assignment refers to a pin with no internal connection Pressure Signal Output Pin 2 The 640 S...

Страница 27: ...nother signal such as a zero corrected pressure signal into the control circuitry of the 640 Series controller The corrected signal introduced on pin 10 overrides the pressure transducer signal pin 2...

Страница 28: ...twice the full scale pressure whichever is greater may damage the transducer Installing the Unit The 640 Series Pressure Controller can be mounted to provide either upstream or downstream pressure con...

Страница 29: ...rolled pressure volume in the gas flow path so that the controlled volume is upstream of the 640 Series controller The gas from the pressure system enters the controller on the transducer side labeled...

Страница 30: ...unit through either port depending upon whether you need upstream or downstream pressure control The back of the unit has the serial number tag and the pinout for the 15 pin Type D connector 15 pin Ty...

Страница 31: ...nit The test jacks enable you to measure the voltage value of each trip point while adjusting it via pots on the top of the unit The trip point setting is adjustable from 0 to 5 Volts 0 75 19 0 5 29 1...

Страница 32: ...19 Down Port Version Interface Connector Figure 5 Top View of the Down Port Type 640 Controller 5 522 140 26 0 985 0 020 25 02 0 51 0 020 0 51 Inlet Outlet 1 476 0 025 37 49 0 63 Figure 6 Front and S...

Страница 33: ...05 0 0 5 Figure 7 Bottom View of the Down Port 640 C Seal SEMI 2787 1 C Seal 0 445 in diameter 0 300 dia x 0 024 dp 7 62 x 0 610 dp 0 221 dia 5 61 0 445 dia x 0 020 dp 11 3 x 0 508 dp 0 221 dia 5 61 V...

Страница 34: ...elok compatible Mounting Hardware The Side Port 640 Series controller has four threaded mounting holes on the bottom or base of the unit Use 8 32 hardware to mount the unit Figure 9 shows the location...

Страница 35: ...U 2787 2 Consult factory for availability No SEMI Specification applies Table 5 SEMI Specifications for Down Port Fitting Options Caution 1 Handle the 640 Down Port Controller with extreme care Be es...

Страница 36: ...C Seal Retainer EG G Part Numbers Type of C Seal Part Number Alpha C 201015 Beta C 201027 The SEMI 2787 1 retainer is 0 004 thick The gland depth is 0 024 in both the substrate and the controller Tab...

Страница 37: ...roller and place the C seal in the retainer onto the controller bottom surface M5 0 8 x 30 mm Long Mounting Screw 1 of 4 C Seal and Retainer Assembly Screw Retaining Tab Figure 10 Exploded View of the...

Страница 38: ...bout halfway on one fitting then on the other Finish the seal on the first fitting followed by the second Caution Tighten the screws so that the seal is evenly tightened and the controller is not twis...

Страница 39: ...t number IGS Gasket tool available to facilitate the assembly process 2 Hold the W seal gasket by the retainer and remove the protective packaging 3 Use filtered nitrogen to blow clean the controller...

Страница 40: ...nstead close the fitting to substrate gap about halfway on one fitting then on the other Finish the seal on the first fitting followed by the second 8 Refer to the screw manufacturer s documentation f...

Страница 41: ...complete kit that contains all the hardware necessary for one fitting Seal Kit UII Mass Flow Flange part number 750 001 A0522 You need two kits per controller one for each fitting Pre assemble the sea...

Страница 42: ...face and tighten finger tight 10 Confirm that the two 2 10 32 screws are in the center of the keeper holes while tightening the 1 72 screws with a 1 16 inch driver to approximately 2 inch lbs 11 Repe...

Страница 43: ...o that the seal is evenly tightened and the controller is not twisted Caution Tighten the screws so that the seal is evenly tightened and the controller is not twisted Incorrectly tightening the screw...

Страница 44: ...stream Set Point Input 0 to 5 V 0 to 10 V Pressure Output 0 to 5 V 0 to 10 V Trip Point A Setting Action 100 F S Trip high TH 1 to 100 F S Trip low TL Trip Point B Setting Action 1 F S Trip low TL 1 t...

Страница 45: ...Initial Configuration Chapter Two Installation 32 This page intentionally left blank...

Страница 46: ...rough two test jacks located on the side of unit as shown in Figure 4 page 18 Span Pot Zero Pot Trip Point Adjustments Proportional Adjustment Integral Adjustment Trip Point Status LEDs Figure 13 Top...

Страница 47: ...ure transducer Control electronics Control valve Pressure system whose pressure is being controlled The 640 Series Pressure Controller provides the first three components The pressure transducer is an...

Страница 48: ...ume is positioned before the 640 Series controller so the controller will regulate the amount of gas entering the pressure system Downstream Pressure Control Gas Flow Controlled Volume Figure 14 Sampl...

Страница 49: ...ntrol setting yields a faster response However too high a proportional control setting will cause the pressure to oscillate around the set point Too low a proportional control setting will result in a...

Страница 50: ...e 16 shows the effects of the Integral term Set Point Signal Pressure Signal Time Pressure Integral term set too low integration time too long system slow to reach set point Pressure Signal Set Point...

Страница 51: ...again The pressure response was tracked using a digital storage oscilloscope Note The following three graphs were generated on a system consisting of a 640 controller positioned for downstream control...

Страница 52: ...onse with Increased P Term The controller responds much faster however some overshoot occurs Controller Response with Increased I Term Reducing the P term to 0 and increasing the I term to 5 yields P...

Страница 53: ...nd Valve Close commands are issued the valve will move to the fully closed position Set Point Recognition Operating Mode The 640 Series controller can control pressure over the range from 2 to 100 of...

Страница 54: ...ip points can be turned on when the pressure is above or below the trip point value depending upon the location of jumpers on the Transducer board The initial configuration is Trip Point A is set to t...

Страница 55: ...eater may damage the transducer The inlet pressure on the valve is 150 psig orifice sizes A through 4 or 30 psig orifice sizes 5 and 6 This is the maximum inlet pressure rating of the valve The force...

Страница 56: ...with the power on down to a pressure less than the transducer s resolution 0 01 of Full Scale Note The zero adjustment must be made at a pressure less than the transducer s resolution 0 01 of F S In...

Страница 57: ...for Zero Adjustment of an Absolute Transducer 3 Using a small screwdriver adjust the ZERO pot until the readout displays zero 0000 Refer to Figure 13 page 33 for the location of the ZERO pot How To Z...

Страница 58: ...the I term are initially set to position 0 The controls are located on the top of the unit as shown in Figure 13 page 33 Each control has a 10 position dial The P term has only 8 values positions 8 an...

Страница 59: ...ment pots located on the top of the unit allow you to vary the trip point setting The range of the trip point setting is 0 to 5 Volts corresponding to 0 to 100 of transducer full scale Note The trip p...

Страница 60: ...oller 3 Use a 3 16 hex wrench or open ended wrench to remove the hex nuts on each side of the I O connector Refer to Figure 1 page 13 for the location of the hex nuts on the I O connector Place the he...

Страница 61: ...pressure is above the trip point and TL indicates that the trip point will be on when the pressure is below the trip point 7 Slide the enclosure over the unit and press it in place 8 Attach the hex nu...

Страница 62: ...rr Full Scale Pressure Torr x TP Adjustment Range V Trip Point Voltage V where the full scale pressure is 100 Torr and the TP adjustment range is 5 Volts TP A 52 5 Torr 100 Torr 5 V 2 625 Volts TP B 4...

Страница 63: ...ex wrench or open ended wrench to remove the hex nuts on each side of the I O connector Refer to Figure 3 page 17 for the location of the hex nuts on the I O connector Place the hex nuts aside for saf...

Страница 64: ...4 Position the controller with the back side facing you and pull up on the enclosure to remove it The back side of the unit lists the I O connector pinout The board assembly will be visible with the...

Страница 65: ...ration 52 Figure 22 page 51 shows the jumper block configured to operate with a normally closed valve 7 Slide the enclosure over the unit and press it in place 8 Attach the hex nuts removed in step 3...

Страница 66: ...external Through closed metal valve Through closed Kel F valve Through closed elastomer valve 10 9 scc sec He 1 F S or 1 sccm with 1 ATM P N2 whichever is greater 0 5 F S with 1 ATM P N2 1 x 10 4 scc...

Страница 67: ...F Storage Humidity Range 0 to 95 Relative Humidity non condensing Trip Point Specifications Trip Points Rated Current State Hysteresis Status LEDs Settings Two open collector transistors adjustable f...

Страница 68: ...erpressure Limit 45 psia or 200 F S whichever is greater Pressure Signal Output 0 to 5 VDC initial configuration 0 to 10 VDC jumper selectable Set Point Input 0 to 5 V or 0 to 10 V matches the pressur...

Страница 69: ...Physical Specifications Appendix A Product Specifications 56 This page intentionally left blank...

Страница 70: ...tomer Checking the Orifice Size The orifice number is included in the model code number of your 640 controller as shown in Figure 23 The nominal flow rate range for the orifice numbers are listed in T...

Страница 71: ...a P by subtracting the outlet pressure from the inlet pressure 2 Use the inlet pressure and the pressure differential to determine the valve orifice index number listed in Table 11 For example if your...

Страница 72: ...the correct orifice would be number 2 Note If the point on the graph falls close to the maximum flow rate for an orifice you may choose to use the next largest orifice number However a larger orifice...

Страница 73: ...fice Selection page 59 to determine the correct orifice size Example 1 Using Sulfur Hexafluoride SF6 Following the example in How To Verify the Orifice Selection page 58 using 100 sulfur hexafluoride...

Страница 74: ...valve index number using the equation page 60 175 x 2 64 462 valve index number for He 3 Use the index number and the maximum flow rate to determine the orifice number from Figure 24 page 59 Using the...

Страница 75: ...0 The standard density of H2 is 0 0899 and N2 is 1 250 so the orifice sizing factor is 1 250 0 0899 0 3 1 250 0 7 1 18 Orifice Sizing Factor Since the gas mixture is largely nitrogen the orifice sizin...

Страница 76: ...e Freon 14 Chlorine CO2 CO CCl4 CF4 Cl2 1 964 1 250 6 86 3 926 3 163 Chlorodifluoromethane Freon 22 Chloropentafluoroethan e Freon 115 Chlorotrifluoromethane Freon 13 Cyanogen Deuterium CHClF2 C2 ClF5...

Страница 77: ...Freon 11 Freon 12 Freon 13 F2 CHF3 CCl3 F CCl2 F2 CClF3 1 695 3 127 6 129 5 395 4 660 Freon 13 B1 Freon 14 Freon 21 Freon 22 Freon 23 CBrF3 CF4 CHCl2 F CHClF2 CHF3 6 644 3 926 4 592 3 858 3 127 Freon...

Страница 78: ...NO N2 1 518 9 366 0 900 1 339 1 250 Nitrogen Dioxide Nitrogen Trifluoride Nitrous Oxide Octafluorocyclobutane Freon C318 Oxygen NO2 NF3 N2 O C4 F8 O2 2 052 3 168 1 964 8 937 1 427 Pentane Perfluoropr...

Страница 79: ...romethane Freon 11 Trichlorosilane 1 1 2 Trichloro 1 2 2 Trifluoroethane Freon 113 Tungsten Hexafluoride Xenon SF6 CCl3 F SiHCl3 CCl2 FCClF2 or C2 Cl3 F3 WF6 Xe 6 516 6 129 6 043 8 360 13 28 5 858 NOT...

Страница 80: ...describes features of the unit such as the pressure range fittings seal material and orifice size flow range Type Number Pressure Range Fittings Z XXX Y 64XA Valve Type Body Seal Material Q R Valve Or...

Страница 81: ...Code 10 Torr 11T 100 Torr 12T 1000 Torr 13T 60 psia 61P 100 psia 12P Table 12 Pressure Range Selection Fitting Number Y The 640 Series controller has a range of fitting options selected by a single l...

Страница 82: ...alve designated by a single number Valve Type Valve Order Code Normally Closed 1 Table 14 Valve Type Seal Material Q The control valve can use either one of a variety of elastomer seal materials or an...

Страница 83: ...ifice Size Selection Valve Orifice Number Valve Orifice Size Order Code A 50 A 1 200 1 2 1000 2 3 5000 3 4 10 000 4 5 20 000 5 6 50 000 6 Table 16 Valve Orifice Size Selection Trip Points S The 640 Se...

Страница 84: ...Explanation Model Code Description 71 Valve Plug Material T A single letter defines the valve plug material Valve Plug Material Material Order Code Viton V Kalrez D Metal M Kel F F Chemraz C Table 18...

Страница 85: ...Model Code Description Appendix D Model Code Explanation 72 This page intentionally left blank...

Страница 86: ...8 Dimensions 17 Downstream control 15 35 F Fittings 21 68 down port 22 Flow capacity 5 Full scale range 5 68 G Gage pressure controller 5 I I O connector 13 21 31 Inlet pressure 15 Input power 10 Inst...

Страница 87: ...4 31 36 Set point recognition 40 Span adjustment 45 Specifications environmental 54 performance 53 physical 55 trip points 54 T Temperature 10 Test jacks 20 46 Transducer board 47 Trip point action 47...

Страница 88: ...service in house repair center WE BUY USED EQUIPMENT Sell your excess underutilized and idle used equipment We also offer credit for buy backs and trade ins www artisantg com WeBuyEquipment REMOTE IN...

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