MKS 640A/641A, Руководство пользователя, Страница: 42 / 88

Chapter Two: Installation Down Port Controller Mounting Instructions
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4. Insert the 10-32 UNF x 1.25 long socket head mounting screws into the split rings from
below.
5. Use a clean room foam swab to wipe the Z-seal are clean.
Note
The Z-seal edge is so sharp it will cut a normal woven wiper and create
lint. Use only a clean room foam swab.
6. Use filtered nitrogen to blow clean the fitting face.
7. Place the Z-seal gasket over the controller gas port, with the larger diameter shoulder of
the gasket against the controller fitting.
8. Place the keeper over the gasket and the 10-32 screws (user provided).
9. Install two (2) 1-72 screws through the keeper into the controller fitting face and tighten
finger tight.
10. Confirm that the two (2) 10-32 screws are in the center of the keeper holes while
tightening the 1-72 screws with a
1
/
16
inch driver, to approximately 2 inch-lbs.
11. Repeat steps 5 through 10 for the second fitting.
Mount the controller onto the substrate(s)
1. Use a clean room foam swab to wipe the substrate Z-seal area clean.
Note
The Z-seal edge is so sharp it will cut a normal woven wiper and create
lint. Use only a clean room foam swab.
2. Use filtered nitrogen to blow clean the substrate surface.
3. Position the controller in the correct position for the flow direction and carefully lower
the controller straight onto the substrate(s). Do not slide the Z-seal against the substrate.
Caution
Avoid sliding the Z-seal against the substrate since such movement
could nick the gasket material and ruin the seal.
4. Finger-tighten the 10-32 screws.