MKS 640A/641A, Руководство пользователя, Страница: 40 / 88

Chapter Two: Installation Down Port Controller Mounting Instructions
27
5. Align the controller with the substrate and set the controller in place.
6. Finger-tighten the four (4) M5 x 30 mm long socket head cap screws evenly. Ensure that
the controller is level or parallel to the substrate.
7. Use a hex driver to tighten the mounting screws with increments of approximately
1
/
8
turn each. Do not make a “criss-cross” pattern; instead close the fitting to substrate gap
about halfway on one fitting then on the other. Finish the seal on the first fitting
followed by the second.
8. Refer to the screw manufacturer’s documentation for the final torque instructions.
Caution
The fastener material, plating, lubrication, and size define the torque
limitations that should be applied to the screw. Refer to the screw
manufacturer’s literature for the proper torque levels.
9. Leak check the controller using the leak port, located at the interface between the
controller and the substrate.
Refer to Figure 11, page 26, for the location of the leak detection port.