MKS 640A/641A, Руководство пользователя, Страница: 77 / 88

Appendix C: Gas Density Table
64
GAS SYMBOL DENSITY
g/l @ 0oC
Dichlorosilane
1,2-
Dichlorotetrafluoroethane
(Freon - 114)
1,1-Difluoroethylene
(Freon - 1132A)
2,2-Dimethylpropane
Ethane
SiH
2
Cl
2
C
2
Cl
2
F
4
C
2
H
2
F
2
C
5
H
12
C
2
H
6
4.506
7.626
2.857
3.219
1.342
Fluorine
Fluoroform
(Freon - 23)
Freon - 11
Freon - 12
Freon - 13
F
2
CHF
3
CCl
3
F
CCl
2
F
2
CClF
3
1.695
3.127
6.129
5.395
4.660
Freon - 13 B1
Freon - 14
Freon - 21
Freon - 22
Freon - 23
CBrF
3
CF
4
CHCl
2
F
CHClF
2
CHF
3
6.644
3.926
4.592
3.858
3.127
Freon - 113
Freon - 114
Freon - 115
Freon - 116
Freon - C318
C
2
Cl
3
F
3
C
2
Cl
2
F
4
C
2
ClF
5
C
2
F
6
C
4
F
8
8.360
7.626
6.892
6.157
8.397
Freon - 1132A
Helium
Hexafluoroethane
(Freon - 116)
Hydrogen
Hydrogen Bromide
C
2
H
2
F
2
He
C
2
F
6
H
2
HBr
2.857
0.1786
6.157
0.0899
3.610
(Table continued on next page)