MKS 392 Series, Руководство пользователя

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EtherCAT
®
Communication Protocol Manual
– p/n 20021549-001 Rev. B
35
Change Pressure Data Units
Change pressure units using CoE Objects 0xF840:01 or 0xF840:03 (some Masters will abstract this to an Enumeration with
textual descriptions).
For example, to set the units to Torr, send an “SDO Write” to 0xF840:01 with a value of 0x00A10000.
Table 20: 0xF840:01 Pressure Data Units Supported Values
Data Unit Value
TORR 0x00A10000
MBAR 0xFD4E0000
PASCAL 0x00220000
Table 21: 0xF840:03 Pressure Data Units Supported Values
Data Unit Value
TORR 0x05
MBAR 0x04
PASCAL 0x01
Calibration
Each 392 Sensor is calibrated at the Factory for Nitrogen. User calibration is performed using CoE Objects
0xFB40 and 0xFB41. This involves writing a byte-encoded command to sub-index 0x01 and reading the
status/response in sub-indexes 0x02/0x03.
Zero Adjust
Only the Heat Transfer sensor can be zero-adjusted. During normal operation, the Heat Transfer sensor is zero-
adjusted automatically by the Hot Cathode Ion sensor.
Manual adjustment is done by writing [0x00 0x00 0x00 0x00 0x00 0x00] to 0xFB40:01. Query 0xFB41:02
– if the
response is greater than 0x01 then there is an error; 0xFB41:03 may have more information.
Full-Scale Adjust
Only the Heat Transfer has a full-scale adjustment. This adjusts the Combination pressure to 760T.
To adjust the Combination pressure to 760T, send [0x00 0x00 0x00 0x00 0x00 0x00] to 0xFB41:01. Query
0xFB41:02
– if the response is greater than 0x01 then there is an error; 0xFB41:03 may have more information.
Modifying PDO Mapping
The PDO Mapping is changed by setting a mapping configuration and assigning that configuration to a sync
manager.
For example, to assign output identifier 0xF9F5:01 to TxPDO 0x1A01
•
Go to EtherCAT PREOP State
•
Write 0 to 0x1A01:00 (enable write access to sub-indexes)
•
Write 0xF9F50108 (index 0xF9F5, sub-index 0x01, 8 bit to 0xA01:01
•
Write 0x01 (1 entry) to 0x1A01
To assign 0x1A01 to the TxPOD sync manager
•
Go to EtherCAT PREOP State
•
Write 0x00 to 0x1C13
•
Write 0x1A01 to 0x1C13:01
•
Write 0x01 to 0x1C13
•
Go to EtherCAT SAFEOP State