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EtherCAT

Communication Protocol Manual

– p/n 20021549-001 Rev. B

Table 15:Sensor Warnings and Errors

Bit

Description

392 Comments

Heat Transfer Warnings

Reserved

Not used

Electronics warning

Not used

Sensor high temperature warning

Not used

Heat Transfer Errors

Sensor element failure

Electronics failure

Non-volatile memory failure, invalid internal communication

Electronics over temperature

3 - 14

Reserved

Not used

Configuration exception

Not used

Hot Cathode Warnings

Sensor filament 1 warning

Not used

Sensor filament 2 warning

Not used

Sensor filament 3 warning

Not used

Sensor filament 4 warning

Not used

Sensor filament 5 warning

Not used

Sensor filament 6 warning

Not used

Sensor filament 7 warning

Not used

Sensor filament 8 warning

Not used

Exceeded maximum C/E ratio

Not used

Electronics warning

Not used

Reserved

Not used

Pressure too high for Degas

Not used

Sensor warning

Not used

13 - 15

Reserved

Not used

Hot Cathode Errors

Sensor filament 1 alarm

Not used

Sensor filament 2 alarm

Not used

Sensor filament 3 alarm

Not used

Sensor filament 4 alarm

Not used

Sensor filament 5 alarm

Not used

Sensor filament 6 alarm

Not used

Sensor filament 7 alarm

Not used

Содержание 392 Series

Страница 1: ...EtherCAT Communication Protocol Manual p n 20021549 001 Rev B EtherCAT Communication Protocol User s Instruction Manual MKS p n 20021549 001 for Series 392 EtherCAT Transducers...

Страница 2: ...ules 14 12 Output Data of Modules 15 13 Semiconductor Device Profile Area 21 14 Value Range Setting 21 15 Exception Handling Data 22 16 Manufacturer Specific Device Data 23 17 SDP and CDP Device Speci...

Страница 3: ...Specific Configuration Data Objects 25 Table 20 SDP and CDP Device Specific Information Data Objects 25 Table 21 SDP and CDP Command Objects 26 Table 22 SDO Abort Codes 36 Table 23 AL Status Codes 37...

Страница 4: ...4 EtherCAT Communication Protocol Manual p n 20021549 001 Rev B...

Страница 5: ...erCAT knowledge or the specific use of EtherCAT Masters 2 Definitions Table 1 Common Definitions Term Definition B S Backup Save Backup Save Backup Save parameters are saved in NV memory CG Combo Gaug...

Страница 6: ...and one LED shows the Device State Figure 1 Control Panel Table 2 DB 15 Pinout Pin Pin Function Pin Pin function 1 No Connect 9 No Connect 2 No Connect 10 Relay 1 NC 3 24Vdc 11 Relay 1 COM 4 Power Re...

Страница 7: ...Single Flash 100 ms ON 1000 ms OFF Safe operational Flickering 50 ms ON 50 ms OFF Bootstrap ON Operational EtherCAT Link Activity The Green LEDs on the 8P8C connectors indicate the link activity of t...

Страница 8: ...rmation i e pressure see Poll Current Pressure is mapped from the Object Dictionary into PDO objects Information about setting PDOs is found in Modifying PDO Mapping and ETG 1020 Per ETG 5003 2080 eac...

Страница 9: ...P Device Specific Inputs 0xF7xx SDP and CDP Device Specific Outputs 0xF8xx SDP and CDP Device Specific Configuration Data 0xF9xx SDP and CDP Device Specific Information Data 0xFAxx SDP and CDP Device...

Страница 10: ...392 uses are reproduced here for convenience Table 9 Relevant Data Types Name Bit Length Description ARRAY 0 n OF BYTE n 1 8 Array of bytes with length n BOOL 1 0 False 1 True UDINT 32 Unsigned Integ...

Страница 11: ...Identity Object 0x01 UDINT RO Vendor ID MKS Vendor ID 1291 0x02 UDINT RO Product Code Unique product code 6012 GP 392 0x03 UDINT RO Revision Number Coded as 0xnnnnnn00 I E 0x01010100 1 1 1 0x04 UDINT...

Страница 12: ...u 0x08 PDO MAPPING R if SI SI0 W PREOP if SI 0 0x1A02 TxPDO Hot Cathode Default No default entries Can only write SI 0 0x00 0x1A03 TxPDO Hot Cathode User Up to 8 entries can be defined 0x01 thru 0x08...

Страница 13: ...Sync Manager 3 4 Process data input slave to master 0x1C12 RxPDO Assignment List of output PDOs 0x01 0x1A UINT R if SI SI0 W PREOP if SI 0 Index of PDO Mapping i e 0x17FF 0x1C13 TxPDO Assignment List...

Страница 14: ...r when the SI02 entry value changed 0x02 BOOL RW RX Process Control Emission User Mode Changes User Emission Mode Only sets a new mode if the new entry value is different from the previous value and t...

Страница 15: ...RO TX Overrange Exceeded Set to 1 if overrange exceeded 0x03 BOOL RO TX Underrange Exceeded Set to 1 if underrange exceeded 0x05 BOOL RO TX Emission Status Off On 0 Off 1 On 0x06 BOOL RO TX Degas Stat...

Страница 16: ...erent filament Each filament is degassed one at a time during degas 0x16 UINT B S RW Degas Time on Interval Time degas is on in seconds 0x800E Configuration Trip Point 1 0x01 BOOL B S RW High Trip Ena...

Страница 17: ...n if Input Value is below this limit 0x17 REAL B S RW High Trip Hysteresis Hysteresis value for High Trip Point 0x18 REAL B S RW Low Trip Hysteresis Hysteresis value for Low Trip Point 0x1A UDINT B S...

Страница 18: ...ion Protocol Manual p n 20021549 001 Rev B Index Sub Index Data Type Backup B Save S Access PDO Assignable Name Description 0x07 UDINT RO Time Filament 1 powered in seconds 0x08 UDINT RO Time Filament...

Страница 19: ...800E F 01 1 the Trip Point will activate if the pressure p is greater than the Trip Point Limit P1 0x800E F 11 The Trip Point will switch from Active to Inactive if the pressure p is less than the Tri...

Страница 20: ...Not used 1 Sensor filament 2 warning Not used 2 Sensor filament 3 warning Not used 3 Sensor filament 4 warning Not used 4 Sensor filament 5 warning Not used 5 Sensor filament 6 warning Not used 6 Sens...

Страница 21: ...conductor Device Profile Area Contains Semiconductor specific information about the Device Profile Table 16 Semiconductor Device Profile Area Objects Index Sub Index Data Type Backup B Save S Access P...

Страница 22: ...UDINT RO TX Active Device Warning Details Heat Transfer Bit 0 Reserved Bit 1 Electronic warning Bit 2 Sensor High Temperature warning 0x02 UDINT RO TX Active Device Warning Details Hot Cathode Bit n...

Страница 23: ...nded details of the SDP specific device warnings after masks are applied See Sensor Warnings and Errors 0x01 UDINT RO TX Heat Transfer 0x02 UDINT RO TX Hot Cathode 0xF393 Latched Device Error Details...

Страница 24: ...1 Exceeded 0 In range 0x04 pad_13 Reserved 0x05 0x10 Reserved 0x11 REAL RO TX Combination Gauge Active Value Gauge Pressure 0x12 UINT RO TX Combination Gauge Active Sensor Number 0 Absolute Piezo 1 D...

Страница 25: ...r type of the first module the second nibble corresponds to the second module and so forth 3 Heat Transfer 4 Hot Cathode 0x02 USINT RO Number of sensors Number of pressure sensors in this device 2 0x0...

Страница 26: ...W RX TX Heat Transfer 0x02 USINT RW RX TX Hot Cathode Ion 0xF9F6 UDINT RO TX Time since power on Time since device has been powered on in seconds 0xF9F7 UDINT RO TX Total time powered Total time devic...

Страница 27: ...e 255 Command is executing 0x03 ARRAY 0 2 OF BYTE RO Response Byte 0 Same as sub index 0x02 Byte 1 Unused Byte 2 0 Zeroing successful 1 Zeroing failed out of range 2 Zeroing failed cumulative out of r...

Страница 28: ...just failed out of range 254 No previous Full Scale Adjust command issued 0xFB43 Degas On Off Execution of this command will initiate or cancel a degas operation 0x01 ARRAY 0 1 OF BYTE RW Command Byte...

Страница 29: ...RO Status 0 Last command completed no errors no reply available 1 Last command completed no errors reply available 2 Last command completed errors present no reply available 3 Last command completed...

Страница 30: ...0 Default value if the command has not been initiated Not a supported value otherwise 1 Reserved 2 last command completed error no response 3 Reserved 3 99 Reserved 100 200 indicates how much of the c...

Страница 31: ...n they are written Bits 2 31 reserved always 0 Write All writeable non volatile values will be stored in non volatile memory when the following is sent Byte 0 0x73 Byte 1 0x61 Byte 2 0x76 Byte 3 0x65...

Страница 32: ...s 0 Write Checksum Type Selection and Start Calculation A write access to this sub index shall only set one bit true in Bits 0 7 If other values are written the Abort Code 0x06040043 Parameter is inco...

Страница 33: ...s the non volatile parameters automatically when they are written Bits 2 31 Reserved always 0 Write All writable non volatile parameters will load from non volatile memory when the following is sent B...

Страница 34: ...s insight into the next troubleshooting step Severe electrical interference may cause communication loss resulting in an error state It is expected that the Master will evaluate this error clear the e...

Страница 35: ...sor is zero adjusted automatically by the Hot Cathode Ion sensor Manual adjustment is done by writing 0x00 0x00 0x00 0x00 0x00 0x00 to 0xFB40 01 Query 0xFB41 02 if the response is greater than 0x01 th...

Страница 36: ...ssue in the electronics contact MKS for next steps Other Troubleshooting Contact MKS for support 27 SDO Abort Error Codes The following is a list of SDO abort codes for when an SDO or CoE communicatio...

Страница 37: ...stored to the application because of local control NOTE Local Control means an application specific reason A typical example of this error is can t issue a new command because the last one hasn t com...

Страница 38: ...Background watchdog 0x002B 43 No valid inputs and outputs 0x002C 44 Fatal sync error 0x002D 45 No sync error 0x002E 46 EtherCAT cycle time is smaller than minimum cycle time supported by slave 0x0030...

Страница 39: ...EtherCAT Communication Protocol Manual p n 20021549 001 Rev B 39 EtherCAT Communication Protocol Operation and Installation Manual MKS p n 20021549 001 Rev B October 2021...

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