MKS 275420-1-GQ-T-00011, Инструкция по эксплуатации

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6 Calibration
38 Series 275 Convectron Module with DeviceNet
Instruction Manual - 275502
1000
Ar
freon 12
CO
2
N
2
, air
100
CH
4
10
He
1
10
-1
Use only when gauge axis is horizontal
.
Do not use this data with
transducers other than the G-P
Series 275 Convectron Gauge.
Pressure units equivalence:
1
µ
m Hg = 1 mTorr = 1 x 10
-3
Torr
1000
µ
m Hg = 1 Torr
10
-2
10
-1 1 10
Indicated Pressure (Torr)
(nitrogen equivalent)
100 1000
Figure 6-2
Convectron Gauge Indicated vs. True Pressure Curve; 10 -1 to 1000 Torr.
Tru
e
Pr
es
su
re
(T
o
rr
)