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Series 275 Convectron

Module with DeviceNet

Catalog numbers for Series 275 Convectron Modules with DeviceNet
and Interface for Applied Materials, Inc.

This Instruction Manual is for use with the following catalog numbers:

275420-1-GQ-T-00011 Convectron Gauge with Gold-plated Tungsten Filament
275420-1-PQ-T-00001 Convectron Gauge with Platinum Filament

Replacement Convectron Gauges for the 2 modules listed above:

Gold-plated Tungsten Filament

1/4 inch VCR-type female fitting

275811

Platinum Filament

1/4 inch VCR-type female fitting

275572-PQ

VCR is a registered trademarks of Swagelok Company
All other trademarks and registered trademarks are the properties of their respective owners.

Содержание 275420-1-GQ-T-00011

Страница 1: ...Series 275 Mini Convectron Vacuum Gauge Module with DeviceNetTM Digital Interface Instruction Manual Instruction manual part number 275502 Revision C September 2021...

Страница 2: ......

Страница 3: ...ule is provided on the following page Customer Service Technical Support MKS Global Headquarters 2 Tech Drive Suite 201 Andover MA 01810 USA Phone 1 833 986 1686 Email insidesales mksinst com Visit ou...

Страница 4: ...vectron Gauge with Gold plated Tungsten Filament 275420 1 PQ T 00001 Convectron Gauge with Platinum Filament Replacement Convectron Gauges for the 2 modules listed above Gold plated Tungsten Filament...

Страница 5: ...Chapter 4 Operation 21 4 1 Theory of Operation 21 4 2 Front Panel Indicators and Adjustments 22 4 2 1 Module MOD LED Status 22 4 2 2 DeviceNet Network NET LED Status 23 4 2 3 Process Control Relay Se...

Страница 6: ...delines 45 7 2 Damage Requiring Service 46 7 3 Troubleshooting Symptoms and Possible Causes 47 7 4 Convectron Gauge Test Procedure 47 7 5 Cleaning Contaminated Convectron Gauges 48 Series 275 Convectr...

Страница 7: ...ts in these instructions In these instructions the word product refers to the Mini Convectron Module and all of its approved parts and accessories NOTE These instructions do not and cannot provide for...

Страница 8: ...xist unless all exposed conductors are maintained at Earth ground This hazard is not peculiar to this product 1 2 Damage Requiring Service Disconnect the product from all power sources and refer servi...

Страница 9: ...ni Convectron Gauge is mountedis electrically grounded It is essential for personnel safety as well as proper operation that the envelope of the gauge be connected to a facility ground Use a ground lu...

Страница 10: ...le mixtures Danger of explosion or inadvertent venting to atmosphere exists on all vacuumsystems which incorporate gas sources or involve processes capable of pressurizing the system above safe limits...

Страница 11: ...nd found to comply with the limits for a Class A digital device pursuant to Part 15 of the FCC Rules These limits are designed to provide reasonable protection against harmful interference when the eq...

Страница 12: ...truction Manual 275502 1 7 Canadian users This Class B digital apparatus meets all requirements of the Canadian Interference Causing Equipment Regulations Cet appareil numerique de la classe B respect...

Страница 13: ...tronics and gauge are packaged in an all metal package that provides a rugged enclosure and a high level of immunity to electrical noise The Convectron gauge used in the module is field replaceable Th...

Страница 14: ...P20 Power required 11 5 Vdc to 26 5 Vdc 11 5 Vdc 0 22 A 26 5 Vdc 0 1 A 3 5 watts maximum Protected against reversals transients or over voltages Digital interface DeviceNet Baud rate 125K 250K or 500K...

Страница 15: ...ual 275502 15 2 Introduction Specifications 2 3 Module Dimensions Figure 2 2 DeviceNet Mini Convectron Module Dimensions Table 2 1 Fitting Flange Dimensions Fitting Description Dimension H VCR type fe...

Страница 16: ...2 Introduction Specifications 16 Series 275 Convectron Module with DeviceNet Instruction Manual 275502...

Страница 17: ...filed with the airline not the freight forwarder All materials have been chosen for ultra high vacuum service corrosion resistance and bakeable to 150 C The gauge tube envelope is type 304 stainless s...

Страница 18: ...e gauge tube Do not install the Mini Convectron where high amplitudes of vibration are present Excessive vibration will cause forced convection at high pressure giving erroneous readings Do not use a...

Страница 19: ...ge is critical to obtaining reliable pressure measurements Long tubing or other constrictions can cause large errors in pressure readings If you mount the gauge near the pump the pressure in the gauge...

Страница 20: ...wapping Doing so may cause damage to the equipment or severe electrical shock to personnel 3 3 I O Connector Wiring DeviceNet requires a 121 ohm terminating resistor to be installed at each end of the...

Страница 21: ...ected by changes in ambient temperature The sensing wire is designated R1 in the Wheatstone bridge circuit The temperature compensator is designated R2 At bridge null the following equation applies Br...

Страница 22: ...4 and 4 1 5 Figure 4 2 Series 275 DeviceNet Mini Convectron Front Panel 4 2 1 Module MOD LED Status Table 4 1 Series 275 DeviceNet Mini Convectron Module LED Status LED Status Off No Power to the modu...

Страница 23: ...k Duplicate MAC ID or Buss Off 4 2 3 Process Control Relay Settings Use either of the two methods below to set the process control relay to the desired pressure trip point The first method sets the tr...

Страница 24: ...d by the setpoint relay See Figure 4 3 NOTE The pressure settings and voltages listed in Table 4 3 are for use with Air or N2 ONLY Table 4 3 Pressure Torr vs Setpoint Voltage Pressure Torr Setpoint Vo...

Страница 25: ...re will read the address switch settings Specific address values range from 0 to 63 Set the switch labeled MSD to a value of 0 to 6 for the most significant first digit Set the switch labeled LSD to a...

Страница 26: ...4 Operation 26 Series 275 Convectron Module with DeviceNet Instruction Manual 275502 Notes...

Страница 27: ...data Table 5 1 Polled I O Messaging Summary Instance Master data Device data Data type Description Type 1 None 00 00 UINT UINT vacuum pressure Open Note Unsigned binary is used to represent the posit...

Страница 28: ...e Instance 1 is assigned to the Explicit Message Connection Instance 2 is assigned to the Polled I O Connection Table 5 4 and Table 5 5 show the attributes and the predefined values of each Table 5 4...

Страница 29: ...x None 01 EPATH Get produced connection path Open 0Ehex 5 2 0Fhex None 06 00 UINT Get consumed connection path length Open 0Ehex 5 2 10hex None 00 EPATH Get consumed connection path Open Parameter Obj...

Страница 30: ...sure Conversion Pressure Torr A D Counts decimal A D Counts Hex 0 0 0 0 0 0001 14 E 0 0002 30 1E 0 0005 78 4E 0 001 157 9D 0 002 311 137 0 005 749 2ED 0 01 1424 590 0 0193 2500 9C4 0 02 2515 9D3 0 05...

Страница 31: ...5 DeviceNet Operation Series 275 Convectron Module with DeviceNet Instruction Manual 275502 31...

Страница 32: ...5 DeviceNet Operation 32 Series 275 Convectron Module with DeviceNet Instruction Manual 275502...

Страница 33: ...uctivity gauge The following books are useful reference volumes Dushman S Lafferty J M Scientific Foundations Of Vacuum Technique John Wiley Sons Inc Second Edition New York 1962 Redhead P A et al Ult...

Страница 34: ...ure levels of some other gases For example N2 at 24 Torr causes the same heat loss from the Convectron sensor as argon will at atmospheric pressure If the pressure indication of the Convectron Gauge i...

Страница 35: ...10 1 to 1000 mbar D2 Freon 22 Kr He 02 Note that 1 mbar 100 pascal so the mbar charts may be used for pascal units by multiplying the values on the axes by 100 A useful interpretation of these curves...

Страница 36: ...ine up from the 10 Torr N2 equivalent indicated pressure to the Helium curve and then move horizontally to the left to reveal a true pressure of 4 5 Torr Thus 4 5 Torr Helium pressure produces an indi...

Страница 37: ...10 4 10 3 10 2 10 1 Indicated Pressure Torr nitrogen equivalent Figure 6 1 Convectron Gauge Indicated vs True Pressure Curve 10 4 to 10 1 Torr True Pressure Torr Use only when gauge axis is horizonta...

Страница 38: ...gauge axis is horizontal Do not use this data with transducersother than the G P Series 275 Convectron Gauge Pressure units equivalence 1 m Hg 1 mTorr 1 x 10 3 Torr 1000 m Hg 1 Torr 10 2 10 1 1 10 In...

Страница 39: ...Indicated Pressure Torr nitrogen equivalent 100 1000 Figure 6 3 Convectron Gauge Indicated vs True Pressure Curve 10 1 to 1000 Torr True Pressure Torr Use only when gauge axis is horizontal Do not us...

Страница 40: ...2 air CO2 10 4 10 4 10 3 10 2 10 1 Indicated Pressure mbar nitrogen equivalent Figure 6 4 Convectron Gauge Indicated vs True Pressure Curve 10 4 to 10 1 mbar True Pressure mbar Use only when gauge axi...

Страница 41: ...10 2 10 1 1 10 100 Indicated Pressure mbar nitrogen equivalent 1000 Figure 6 5 Convectron Gauge Indicated vs True Pressure Curve 10 1 to 1000 mbar True Pressure mbar Use only when gauge axis is horiz...

Страница 42: ...10 2 10 1 1 10 Indicated Pressure mbar nitrogen equivalent 100 1000 Figure 6 6 Convectron Gauge Indicated vs True Pressure Curve 10 1 to 1000 mbar True Pressure mbar Use only when gauge axis is horizo...

Страница 43: ...ance 1 Attribute 1 Data 00 00 to zero the Mini Convectron Module See Table 5 6 If the base pressure is between 1 x 10 4 to 1 x 10 1 Torr use another gauge or pump specs to set zero For example If the...

Страница 44: ...libration Altitude in Feet Above Sea Level Pressure in Torr for N2 or Air Decimal CountValue Hex Count Value 0 760 57440 E060 1000 773 57272 DFB8 2000 707 57110 DF15 3000 681 56932 DE63 4000 656 56755...

Страница 45: ...packaging is the Buyer s responsibility For Customer Service Technical Support MKS Global Headquarters 2 Tech Drive Suite 201 Andover MA 01810 USA Phone 1 833 986 1686 Email insidesales mksinst com Vi...

Страница 46: ...d by MKS or that have the same characteristics as the original parts Unauthorized substitutions may result in fire electric shock or other hazards Safety Check Upon completion of any service or repair...

Страница 47: ...adout from the Mini Convectron is vastly different from that which is observed by supporting gaugeson the vacuum system The gas composition in the vacuum chamber may not be what the user believes it t...

Страница 48: ...type 304 stainless steel All metallic joints in the envelope are welded No solder is used within the envelope The following materials are exposed to the vacuum Type 304 stainless steel Carpenter Alloy...

Страница 49: ...43 D Damage requiring service 8 damage requiring service 46 E Environment for installation 19 examples 36 F FCC verification 11 G gas type selecting 33 Ground test 9 I Installation environment 19 loca...

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Страница 52: ...Digital Interface Customer Service Technical Support MKS Global Headquarters 2 Tech Drive Suite 201 Andover MA 01810 USA Phone 1 833 986 1686 Email insidesales mksinst com Visit our website at www mk...

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