PPS-60
Precision Positioner Stage
Rev: 1.04
MICRONIX USA,LLC
Irvine, California
www.micronixsusa.com
4
Reference Manual
1.2
Recommended Controllers
The following controllers are available from MICRONIX USA:
§
MMC-100
–
Piezo
§
MMC-110
–
Piezo
§
MMC-200
–
Stepper
1.3
Technical Data
†
-achievable with external stepper motor
1.4
Load Characteristics
Load Characteristics
F
x
[N]
F
y
[N]
F
z
[N]
M
x
[Nm]
M
y
[Nm]
M
z
[Nm]
k
αx
[μrad/Nm]
k
αx
[μrad
/Nm]
PM-003
10
100
150
10
10
10
100
100
SM-001 (internal)
10
100
150
10
10
10
100
100
SM-003 (external)
10
100
150
10
10
10
100
100
LM-002
10
100
150
10
10
10
100
100
Motor option
PM-003
SM-001/SM-003
LM-002
Speed, max. [mm/sec]
10
10 (
†
15)
100
Encoder option
Open Loop
Analog
(1 V
pp
)
Digital
(RS-422)
Digital
Low Cost
(RS-422)
Open Loop
Analog
(1 V
pp
)
Digital
(RS-422)
Digital
Low Cost
(RS-422)
Analog
(1 V
pp
)
Digital
(RS-422)
Digital
Low Cost
(RS-422)
Resolution, typical
[
μ
m]
0.001
0.01
0.0012
0.5
0.1
0.1
0.05
0.5
0.01
0.002
0.5
Repeatability,
bi-directional
[
µ
m]
-
± 0.05
± 0.02
± 1
± 4
± 0.1
± 0.1
± 1
± 0.05
± 0.02
± 1
Repeatability,
uni-directional [µ
m]
-
0.05
0.02
1
0.2
0.1
0.1
1
0.05
0.02
1
Accuracy [µm]
-
± 1
± 1
± 3
± 10
± 1
± 1
± 3
± 1
± 1
± 3
