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PPS-60

Precision Positioner Stage

Rev: 1.04

MICRONIX USA,LLC

Irvine, California

www.micronixsusa.com

22

Reference Manual

Using: Z Bracket (P/N 430613)

X-Y 200x100mm

X-Y-Z 50x50x100mm

Using: XY Bracket (P/N 430169) & VT-21 Linear Stages

X-Y 100x10mm

X-Y-Z 100x10x35mm

[with PZS-90 Elevation Stage]

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Содержание PPS-60 Series

Страница 1: ...S e r i e s Reference Manual Precision Positioner Stage Open and Closed Loop Versions PPS 60...

Страница 2: ...S 60 Precision Positioner Stage Reference Manual Rev 1 04 MICRONIX USA LLC 15375 Barranca Parkway E 106 Irvine CA 92618 Tel 949 480 0538 Fax 949 480 0538 Email info micronixusa com http micronixusa co...

Страница 3: ...ing 11 5 Connecting the PPS 60 12 5 1 Atmospheric Environments 12 5 1 1 Open Loop Installation Wiring Diagram 12 5 1 2 Closed Loop Encoder Installation Wiring Diagram 13 5 1 Vacuum Environments 15 5 1...

Страница 4: ...Overview 30 A 6 2 Encoder Pin out 30 A 6 3 Operating and Electrical Specifications 30 A 6 4 Analog Output Pins 1 2 6 and 7 30 A 6 5 Index Window Pins 3 30 A 6 6 Resolution 30 A 6 7 Analog Encoder Wiri...

Страница 5: ...Product Description The PPS 60 is a high precision linear stage which incorporates stepper piezo or linear motors into the same form factor Precision ball bearings assure high stiffness and guiding a...

Страница 6: ...00 100 SM 001 internal 10 100 150 10 10 10 100 100 SM 003 external 10 100 150 10 10 10 100 100 LM 002 10 100 150 10 10 10 100 100 Motor option PM 003 SM 001 SM 003 LM 002 Speed max mm sec 10 10 15 100...

Страница 7: ...option 3 digital encoder Only available with Piezo motor option or externally mounted UHV stepper motor Not available in vacuum environments Only available with Piezo motor Contact MICRONIX USA for c...

Страница 8: ...be within specification at 20 C 5 C unless otherwise specified The operating conditions of the stage are as follows Mount to a clean and flat surface which is free of debris burrs and dings An indoor...

Страница 9: ...ess base mounting pattern Note that the 25mm version can only be mounted using the M4 Bottom Mount method Please note it is possible to move the carriage of the linear and piezo motor configurations m...

Страница 10: ...a www micronixsusa com 8 Reference Manual 4 1 1 2 Metric Mounting M4 Bottom Mount Travel A mm 25mm 75 50mm 75 100mm 125 200mm 225 300mm 325 Metric M4 Bottom Mount Mounting Pattern Requires 2 x M2 x 6m...

Страница 11: ...s of the optical table for precision fit wFor internal motor configurations Mounting screws must be flush with base surface Travel A mm 25mm 75 50mm 75 100mm 125 200mm 225 300mm 325 Requires 2x M2 x 6...

Страница 12: ...screws must be flush with base surface Travel A mm in 25mm 50 8 2 50mm 50 8 2 100mm 101 6 4 200mm 203 2 8 300mm 304 8 12 Imperial Base Mounting Pattern Requires 2 x M2 x 6mm Dowel Pins 4 x 4 40 Pan H...

Страница 13: ...e note that it is possible to move the carriage of the linear and piezo motor configurations manually without damaging the stage however for stepper versions the motor must be driven by a controller t...

Страница 14: ...nt for all piezo stepper and linear motor assemblies 5 1 1 Open Loop Installation Wiring Diagram Connecting the PPS 60 in an open loop configuration only requires that the D sub 9 Pin Motor Cable be c...

Страница 15: ...d Loop Encoder Installation Wiring Diagram Using the PPS 60 stage with an encoder requires a closed loop compatible controller that recognizes the proper type of encoder feedback Connect the stage as...

Страница 16: ...ion Positioner Stage Rev 1 04 MICRONIX USA LLC Irvine California www micronixsusa com 14 Reference Manual 5 1 2 2 MII 6000 Digital Encoder Wiring Diagram Internal Piezo Linear and Stepper Versions Ext...

Страница 17: ...MII 6000 digital encoder 5 1 2 Open loop Installation Wiring Diagram Connecting an open loop PPS 60 in a vacuum chamber requires the use of a feed through connector at the vacuum chamber wall The vac...

Страница 18: ...er cable The vacuum compatible PPS 60 will be supplied with wiring for a straight through feed through not a cross over gender bender MICRONIX USA supplies test connectors that simulate the vacuum fee...

Страница 19: ...A LLC Irvine California www micronixsusa com 17 Reference Manual 5 1 3 2 MII 6000 Digital Encoder Wiring Diagram Internal Piezo and Stepper Versions External Version Temporary test connectors are stan...

Страница 20: ...X USA LLC Irvine California www micronixsusa com 18 Reference Manual 6 Dimensions 6 1 PPS 60 Internal Motor Versions Travel mm A mm B mm C mm D mm 25 117 95 50 8 75 50 142 120 50 8 75 100 192 170 101...

Страница 21: ...itioner Stage Rev 1 04 MICRONIX USA LLC Irvine California www micronixsusa com 19 Reference Manual 6 2 PPS 60 External Stepper Motor Versions Travel mm A mm B mm C mm 100 75 170 247 6 200 175 270 347...

Страница 22: ...guration Examples Additional configurations available upon request Note Stacking compatibility for all motor configurations Positioning according to No Adapters X Y 50x50mm X Y 200x50mm X Y Off Center...

Страница 23: ...Manual X Y 100x26mm with PPS 28 Linear Stage X Y Z 100x26x35mm with PPS 28 Linear Stage PZS 90 Elevation Stage X Y Z 200x26x35mm with PPS 28 Linear Stage PZS 90 Elevation Stage Using Adapter Block P...

Страница 24: ...MICRONIX USA LLC Irvine California www micronixsusa com 22 Reference Manual Using Z Bracket P N 430613 X Y 200x100mm X Y Z 50x50x100mm Using XY Bracket P N 430169 VT 21 Linear Stages X Y 100x10mm X Y...

Страница 25: ...inate the lubrication and jeopardize the longevity of the stage Follow the Installation Preparation requirements and use proper cable management to ensure a clean and safe operating environment 8 2 Un...

Страница 26: ...or A Blue 3 Motor B Green 4 Motor B Black Red 5 Limit Switch GND Brown Brown 6 Limit Switch White Violet 7 Limit Switch Violet White 8 N C N C N C 9 N C N C N C White motor wire may be changed to gree...

Страница 27: ...A Red 2 B Black 3 C White 4 N C N C 5 Limit Switch GND Brown 6 Limit Switch White 7 Limit Switch Violet 8 N C N C 9 N C N C Linear Motor Continuous Force 2 7 N Continuous Current 0 8 Arms Acceleratio...

Страница 28: ...ce Manual A 3 Piezo Motor A 3 1 Standard Atmospheric DB 9 Male Motor Connector A 3 2 2 Phase Piezo Motor Wiring Connections Piezo Motor Pin Function Wire Color 1 Phase 1 Red 2 Phase 2 Yellow 3 N C N C...

Страница 29: ...prevent the carriage from running away should the limit switches fail The mechanical limit switches are factory calibrated to ensure advertised travel length and cannot be adjusted by the customer Op...

Страница 30: ...L5 Phase 1 Red 5 5 1 1 1 Phase 2 Yellow 4 4 2 2 2 Limit Switch Violet 8 8 7 7 7 Motor Ground Green Blk 1 1 5 5 5 Limit Ground Brown 7 7 8 8 8 Limit Switch White 9 9 6 6 6 Motor Internal Stepper Motor...

Страница 31: ...er Motor Connector Pinout Description Color L1 L2 L3 L4 L5 Motor Phase A Red 5 5 1 1 Red 1 Motor Phase B Green 3 3 3 3 Green 3 Limit Switch White 9 9 6 6 White Violet TP 6 Motor Phase A Blue 4 4 2 2 B...

Страница 32: ...acuum connector that incorporates both motor and encoder signals along with an atmospheric cable splitting the signals into separate 9 pin connectors motor connector and encoder connector A 6 2 Encode...

Страница 33: ...et 6 6 3 3 Violet 3 Cos Brown 7 7 2 2 Brown 1 Sin Green 8 8 1 1 White Yellow TP 7 Motor Ground Green Blk 9 9 15 15 Green Black 2 Enc Ground Black 12 12 12 12 Black 4 Index Blue 13 13 11 11 White Viole...

Страница 34: ...Shield Shield 4 4 5 5 Shield Casing 5V Red 5 5 4 4 Red 5 Index Violet 6 6 3 3 Violet 3 Cos Brown 7 7 2 2 Brown 1 Sin Green 8 8 1 1 White Yellow TP 7 Motor Phase A Blue 9 9 15 15 Grn Grn Wht TP 2 Motor...

Страница 35: ...cates misalignment of the Encoder Head if this occurs contact MICRONIX USA Do not adjust the Encoder Head or scale For more information refer to MicroE Systems Mercury Encoders A 7 1 36BEncoder Module...

Страница 36: ...he index pulse may be aligned with other states of A or B than the ones shown Above are with reference to the sensor s optical centerline A 7 4 Resolution All closed loop stages are supplied with 20 m...

Страница 37: ...Blue TP nSS Green 8 8 6 6 Green nSS White Green TP 21 21 18 18 White Green TP CLK Brown 9 9 5 5 Brown CLK White Brown TP 22 22 17 17 White Brown TP Shield Shield 16 16 23 N C Internal Stepper Motor C...

Страница 38: ...witch Violet 16 16 23 23 Violet 7 Motor Phase B Black 4 4 10 10 Black 4 Shield 5 5 9 9 Shield Casing 5VDC Red 8 8 6 6 Red GND Black 20 20 19 19 Black DCLK Gray 9 9 5 5 Gray DCLK White Gray TP 21 21 18...

Страница 39: ...off when passing over index Yellow alignment not optimal but encoder counting integrity is still good Red alignment poor discontinue use and realign sensor to scale Technical Specifications Resolution...

Страница 40: ...LLC Irvine California www micronixsusa com 38 Reference Manual A 8 3 Operating and Electrical Specifications A 8 4 Output Signals Power Supply 5VDC 5 95mA 40mA for sensor Operating Temperature 0 to 7...

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