MeiVac MAK 1.3 inch, Руководство по эксплуатации и техническому обслуживанию владельца

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POWER HOOK-UP
All MAK sputter sources may be operated in either the DC or RF mode. All models are supplied
with an HN (Amphenol UG-496/U) for convenient electrical connection to your choice of power
source. The following US Sputtering Power Supplies come complete with output cables having the
HN mating connector.
P/N SU-500 DC
500 Watt DC Power Supply
P/N SU-1500 DC 1500 Watt DC Power Supply
P/N SU-5000 DC 5000 Watt DC Power Supply
P/N: SU-R301 300 Watt RF Generator and Automatic Tuning Network
P/N: SU-R601
600 Watt RF Generator and Automatic Tuning Network
P/N: SU-R1001
1000 Watt RF Generator and Automatic Tuning Network
DC Connection
The power supply is provided with twelve feet of RG 8/U high voltage cable. Connect the PL 259
connector to the power supply and the HN connector to the sputter source.
RF Connection
The RF Generator / Automatic Tuning Network is provided with all necessary cables for hook-up.
12’ co-axial cable for connection of the power supply to tuning network
3’ co-axial cable for connection of tuning network to sputter source (HN Connector)
24’ interface cable between network controller and tuning network
Four-foot control cable between control panel and RF supply
End Adapter
HN Connector
(Male)
HN Connector
(Female)
Water lines
Cable to RF or DC
Power Supply
Issued September 11, 2008 12