
Issued September 11, 2008
OWNER’S OPERATION
AND
MAINTENANCE MANUAL
OF THE
MAK
SPUTTERING SOURCES
5830 Hellyer Avenue
San Jose, CA 95138
PH: (408) 362.1000 FX: (408) 362.1010
E-MAIL: [email protected]
YOUR S/N _____________________________
WARNING
AS WITH ALL ELECTRICAL DEVICES, THERE IS A SHOCK HAZARD
ASSOCIATED WITH THIS DEVICE. ALL INSTRUCTIONS SHOULD BE
FOLLOWED PERTAINING TO THE USE OF SUITABLE INTERLOCKS ON ALL
POWER SUPPLIES TO BE USED TO POWER THIS PRODUCT.
TM
Содержание MAK 1.3 inch
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Страница 52: ...1 Simplicity in Sputtering INTRODUCING Planar Magnetron Sputtering Source The MAK...
Страница 53: ...2 Simplicity in Sputtering Target Installation on the MAK Target Keeper Cathode Magnets...
Страница 55: ...4 Simplicity in Sputtering MAK without target installed Target Keeper Cathode Adjustable Anode...
Страница 56: ...5 Simplicity in Sputtering MAK with target installed Target mounted with magnetic keeper Anode retracted...