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LEYBOLD 250000V01, Руководство по эксплуатации

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Troubleshooting

100

  GA10218_002_C0 - 10/2016 - © Leybold GmbH

E60 p2>10mbar after 5 minutes since 

power on

Run-up time of the fore vacuum pump is too long.

Fore pump is faulty.

Valve V2 does not open.

Leak in the high vacuum system.

E61 Emission fail.

Emission could not be switched on. MSV subassembly indicates a fault. 
MENB emission current not within range.

MSV board is defective.

Both cathodes are defective, replace ion source.

W62 Flow through capillary to low.

In the sniffer mode the intake pressure of the sniffer line is controlled. If the 
pressure falls below the minimum limit, the flow through the capillary is too 
low (contamination) or the capillary is blocked (foreign objects, particles).

The minimum limit can be set by the menu. Default value is 0.05 mbar. 

Filter in the tip is clogged.

W63 Capillary broken

In the sniffer mode the intake pressure of the sniffer line is controlled. If the 
pressure exceeds the maximum limit, the flow through the capillary is too 
high (no leak tightness, broken capillary).

The maximum limit can be set by the menu. Default value is 0,15 mbar. 

The capillary is broken or has been torn off.

E64 TMP error: Nominal speed has 

been exceeded by over 10%

Nominal speed of the pump has been exceeded by over 10%

EMC problems: Check connecting cable, insert it properly. Switch the power 
supply voltage off and then on again.

Turbo.Drive S faulty: Inform Leybold Service

E65 TMP error: Pass through time 

exceeded

Max. time for passing through the critical frequencies has been exceeded.

Fore vacuum or high-vacuum pressure to high: Reduce the inlet pressure of 
the PHOENIX L300i

Bearing defective: Inform Leybold service for repair

E66 TMP error: Bearing temperature 

too high (>67°C)

Max. bearing temperature has been exceeded

Fore vacuum or high-vacuum pressure to high: Reduce the inlet pressure of 
the PHOENIX L300i

Fan defective: Replace the fan

Ambient temperature too high: Feed cooler air to the PHOENIX L300i

Bearing defective: Inform Leybold service for repair

E67 TMP error: Short circuit in TMP-

motor or connecting cable

Short circuit in the pump’s motor or the connecting cable

Check to see if the connecting cable is undamaged, exchange if required.

Inform Leybold service in case of short circuit in TMP motor

No. Displayed Message

Description and possible solutions

Содержание 250000V01

Страница 1: ...Leak detector Operating Manual GA10218_002_C0 PHOENIX L300i Part numbers 250000V01 250001V01 250002V01 251000V01 251001V01 251100V01 251101V01...

Страница 2: ...RY 17 1 3 3 Technical Data PHOENIX L300i MODUL 19 1 3 4 Dimensional Drawings 21 1 4 Ordering Information 24 1 5 Accessories 24 1 6 Default Settings 26 2 Installation 27 2 1 Placement 27 2 2 Conforming...

Страница 3: ...to Manual 55 3 6 5 Time Axis 56 3 6 6 Contrast 56 3 6 7 Background in standby 57 3 6 8 Lower Display Limit 57 3 7 Mode 58 3 8 Trigger Alarms 59 3 8 1 Trigger Level 1 59 3 8 2 Trigger Level 2 60 3 8 3...

Страница 4: ...enance 89 4 1 Safety Information 89 4 2 Maintenance Intervals 89 4 3 Service at Leybold 89 4 4 Maintenance Work 90 4 4 1 Opening of the PHOENIX L300i 90 4 4 2 Exchanging the Filter Mats 91 4 4 3 Excha...

Страница 5: ...s It must be operated and maintained by trained personnel only Consult local state and national agencies regarding specific requirements and regulations Address any further safety operation and or mai...

Страница 6: ...t has to be put out of doors so that the oil vapor can not be breathed in Ensure a sufficient air cooling The air inlet as well the air discharge openings must never be obstructed By using the optiona...

Страница 7: ...g 1 2 consist of the Fig no and the item No in that order We reserve the right to alter the design or any data given in these Operating Instructions The illustrations are not binding Retain the Opera...

Страница 8: ...ectable leak rate is 1 10 7 mbar l s FINE is a measurement mode with inlet pressure 0 2 mbar The minimum detectable leak rate is 5 10 12 mbar l s Precision is a measurement mode for the PHOENIX L300i...

Страница 9: ...arched from the outside with a sniffer probe which is attached to the inlet port sniffer mode 1 1 Design and Function The PHOENIX L300i basically is a helium leak detector for vacuum applications i e...

Страница 10: ...ollowing a circular path the radius of which depends on the mass to charge ratio of the ions When mass 4 is selected Default setting only helium ions can pass this filter and reach the ion collector w...

Страница 11: ...acuum pump Valve V7 opens and closes the internal test leak during calibration With the pressure in the test part being lower than ambient pressure sprayed helium or Hydrogen as forming gas can penetr...

Страница 12: ...the side or under the bottom of the PHOENIX L300i MODUL Pos Description 1 MS Mass Spectrometer Helium sensor 180 magnetic field mass spectrometer 2 Turbo molecular pump TMP provides high vacuum condit...

Страница 13: ...he mass spectrometer where it is detected This measurement mode is called GROSS In this mode leak rates down to 10 8 mbar l s can be detected Since the rotary vane vacuum pump continues to evacuate th...

Страница 14: ...to make measurements already at an inlet pressure of 1000 mbar 1 1 6 Sniffer Mode The PHOENIX L300i may simply be converted into a sniffer leak detector via the rugged sniffer line Cat No 252003 For t...

Страница 15: ...ctive Max inlet pressure 15 mbar Minimum detectable Helium leak rates in vacuum mode 5 10 12 mbar l s in sniffer mode 1 10 7 mbar l s Minimum detectable Hydrogen leak rates in vacuum mode 1 10 8 mbar...

Страница 16: ...sions L W H in mm 495 x 456 x 314 Weight in kg 40 0 Noise level dB A 54 max Audio alarm dB A 90 Contamination level to IEC 60664 1 2 Overvoltage category to IEC 60664 1 II For use within buildings Per...

Страница 17: ...sure 15 mbar Minimum detectable Helium leak rates in vacuum mode 3 10 11 mbar l s in sniffer mode 1 10 7 mbar l s Minimum detectable Hydrogen leak rates in vacuum mode 1 10 8 mbar l s in sniffer mode...

Страница 18: ...L W H in mm 495 x 456 x 314 Weight in kg 35 5 Noise level dB A 54 max Audio alarm dB A 90 Contamination level to IEC 60664 1 2 Overvoltage category to IEC 60664 1 II For use within buildings Permissib...

Страница 19: ...inimum detectable Helium leak rates in vacuum mode with Scroll pump 8 10 12 mbar l s with oil sealed pump 5 10 12 mbar l s in sniffer mode 1 10 7 mbar l s Minimum detectable Hydrogen leak rates in vac...

Страница 20: ...95 x 456 x 314 Weight in kg 35 5 Noise level dB A 54 max Audio alarm dB A 90 Contamination level to IEC 60664 1 2 Overvoltage category to IEC 60664 1 II For use within buildings Permissible ambient te...

Страница 21: ...A10218_002_C0 10 2016 Leybold GmbH 21 1 3 4 Dimensional Drawings Fig 5 Dimensions PHOENIX L300i Abma e PHOENIX L300i Familie in mm und inch in Klammern Dimensions PHOENIX L300i family in mm and inches...

Страница 22: ...tion 22 GA10218_002_C0 10 2016 Leybold GmbH Fig 6 Dimensions PHOENIX L300i side view Abmessungen PHOENIX L300i Familie in mm und inch in Klammern Dimensions family in PHOENIX L300i mm and inches in br...

Страница 23: ...Description GA10218_002_C0 10 2016 Leybold GmbH 23 Fig 7 Dimensions PHOENIX L300i MODUL Abmessungen PHOENIX L300i in mm und inch in Klammern Dimensions PHOENIX L300i in mm and inches in brackets...

Страница 24: ...00 252003 Sniffer line SL301 4 m 252025V01 Sniffer line SL301 10 m 252026V01 Leak Ware Software for data acquisition 14090 Helium Sniffer QUICK TEST Qt 100 15594 Remote control set RC310C consisting o...

Страница 25: ...the optional partial flow pump set offers to the user the following advantages faster response time entry into the measurement mode already at an inlet pressure of 1000 mbar faster venting of large te...

Страница 26: ...Leak rate external test leak vacuum 1E 7 mbar l s Leak rate external test leak sniffer 1E 5 mbar l s Vent delay 2 seconds Automatic purge PHOENIX L300i DRY and PHOENIX L300i MODUL only on Pressure mb...

Страница 27: ...test sample vacuum mode or when a helium overpressure is provided in the test sample and the test sample is searched from the outside with a sniffer probe which is attached to the inlet port sniffer...

Страница 28: ...off from the name plate beneath the mains socket Fig 9 4 at the side This voltage is fixed and can not be changed A separate fuse for each of the mains conductors has been integrated into the mains sw...

Страница 29: ...igher than 60V DC 25V AC to grounding equipment conductor or reach this threshold The contacts are numbered from bottom to top The pin assignment for contacts 8 to 16 follows the same order as for pin...

Страница 30: ...The resolution is limited to 10 mV The instrument which is connected to the recorder output e g X t chart recorder should have an input resistance of no less than 2 5 kW The measured values are avail...

Страница 31: ...The remote control does not belong to the standard equipment If the remote control is connected via a cable wireless communication over REMOTE2 is exclu ded REMOTE2 Through this interface the PHOENIX...

Страница 32: ...NIX L300i is running in closed rooms the exhaust has to be put out of doors using the provided adapter So the oil steams that are harmful to health are lead off With the provided connection a hose lin...

Страница 33: ...KF flange One on the side of the PHOENIX L300i or one in the bottom measurements see Fig 5 Fig 7 As default setting the flange on the side is chosen To change the connection proceed as follows 1 Take...

Страница 34: ...e vacuum connection DN25 KF on the side or the bottom Please connect the part to be tested to the inlet port and press START The PHO ENIX L300i starts to evacuate the part The evacuation time depends...

Страница 35: ...t valve automatically to limit the loss of oil This function can be chosen automatically for the PHOENIX L300i MODUL Every time the unit changes into standby mode the purge starts automatically for 20...

Страница 36: ...wn combined with a number This number indicates the level of the current loudness ranges from 0 to 15 Refer to Chapter 3 8 Volume for information on loudness alarms and sound tracks 3 2 8 Status Line...

Страница 37: ...e leak rates are displayed over time Fig 11 In addition the actual leak rate and inlet pressure also are displayed digitally The time axis can be defined in the menu Please refer to Chapter 3 6 5 The...

Страница 38: ...ge with o ring on the inlet port 5 Press the START button The inlet will be evacuated and if the inlet pressure drops below 15 mbar a measured leak rate will be displayed 6 Press the STOP button the P...

Страница 39: ...12 10 The test object will be evacuated 17 Start spraying Helium onto the outside of the test object The leak rate of the test object will be shown in the display 18 Press the STOP button Fig 12 12 to...

Страница 40: ...Chapter 3 10 1 to select the time parameters of the venting ZERO Button Pushing the ZERO button Fig 12 11 enables the zero mode see also Chapter 3 10 2 When pressing ZERO the currently measured leak r...

Страница 41: ...When pressing the MENU button Fig 12 13 the selecting menu is shown at the display This function is not depending on the operating mode when calibrating If the menu is opened during the current sessi...

Страница 42: ...e the digit please proceed as follows 1 The digit that can be changed is displayed inverted With the arrows Soft Key no 8 and Soft Key no 4 you can choose which digit you want to change 2 To change a...

Страница 43: ...eration GA10218_002_C0 10 2016 Leybold GmbH 43 In the submenu press 3 soft key no 4 Fig 16 Fig 15 Numerical entry of the trigger level sample of the digit Fig 16 Trigger level change of the first digi...

Страница 44: ...3 Define recorder output Customer defined selection for the recorder output Softkey 4 RS232 Selection for the RS232 Softkey 5 Define PLC outputs Control digital out Customer defined selection for PLC...

Страница 45: ...at the machine are deac tivated Softkey 4 All The PHOENIX L300i is controlled via all possible controls e g PLC RS232 Local Softkey 5 Local PLC The PHOENIX L300i is controlled via the Digital In conne...

Страница 46: ...1000 mbar comply 4V with 0 5V decade logarithmic scale Users can exchange their L200 for a PHOENIX L300i without changing pin assignment Fig 18 LR mantissa The leak rate mantissa is recorded linearly...

Страница 47: ...1 1 3 10 10 10 10 10 5 mbar Pa Torr 10 10 10 10 6 4 2 0 atm 0 1 2 3 4 5 6 7 8 9 10 V 12 10 8 6 10 10 10 10 mbarl s Pam s Torrl s sft yr oz yr g a 4 2 0 2 10 10 10 10 4 10 0 5 10 13 0 1 2 3 4 5 6 7 8 9...

Страница 48: ...be seen under Info View internal data page 7 The following digital out signals are selectable Trigger 1 Trigger 2 and 3 analog Trigger 1 Is open in case Trigger Level 1 is exceeded or the machine is n...

Страница 49: ...shown Gas ballast Closed when gas ballast is active Open Open all time Close Closed all time Recorder Strobe Closed in case recorder output is invalid Only used when record output is set on leak rate...

Страница 50: ...h When machine is in standby mode start internal calibration In case machine is measurement mode start external calibration Premise external calibration test leak has to be open and leak rate signal i...

Страница 51: ...models The next page gives an overview of the entire menu architecture Fig 23 The overview of the menu architecture corresponds to the PHOENIX L300i differing menu points or setting possibilities for...

Страница 52: ...he previous screen 2 View Display settings like scaling contrast sys tem background Please refer to Chapter 3 6 2 3 Mode Selection of the working modes Vacuum or Sniff Please refer to Chapter 3 7 4 Tr...

Страница 53: ...suppression Calculate inlet area background Leak rate filter Mass Interfaces Location of control Define recorder output RS232 Define PLC outputs Define PLC inputs Scaling recorder output PLC sample ra...

Страница 54: ...Usually a logarithmic scale is recommended because leak rates may change easily over several decades Default setting is logarithmic with 4 decades Fig 24 Display View Menu Explanation to Fig 24 Key No...

Страница 55: ...Pressing this key switches the display to a linear scale starting at zero Softkey 3 Number of decades Pressing this key reduces the number of displayed decades The minimum value is 2 decades Only ava...

Страница 56: ...the run up phase press the key no 3 or 7 so long until the display can be read properly again This setting is saved to the EPROM only after confirming this through the contrast menu If this setting is...

Страница 57: ...r measured signals automatically Thus it is made sure that only the net leak rate from the part under test is measured When switched to standby Vent again a new internal background is calculated after...

Страница 58: ...o select the different working modes Fig 25 Display Mode menu Explanation to Fig 25 Key No Name Description 1 Cancel Return to the main menu without any changes of the present settings 3 Sniff The sni...

Страница 59: ...as follows Display In the status line of the display the signs for Trigger 1 2 and Trigger 3 are displayed inverted if the leak rate exceeds becomes higher than the programmed value see Fig 10 Fig 26...

Страница 60: ...rigger level 3 The value of the third trigger level can be set Please refer to Numerical entries for the description of the entry If Trigger 3 is exceeded the corresponding relay will switch This is a...

Страница 61: ...ary to block an alarm for some time after pressing START This delay time of the alarm can be changed After pressing START the loudspeaker is activated as soon as the leak rate drops below trigger leve...

Страница 62: ...o 4 10 6 mbar l s Leak rate prop The frequency of the acoustic output is proportional to the reading on the bargraph display The frequency ranges from 300 Hz to 3300 Hz Please refer to Chapter 3 6 3 f...

Страница 63: ...one signal is generated The tone does not vary with the leak rate 3 9 Calibration Main menu Calibration In the menu Calibration Fig 29 the selection between internal and external calibra tion can be c...

Страница 64: ...system related func tions See chapter 3 10 1 3 Filter Background See Chapter 3 10 2 4 Mass Switching between Helium and Hydro gen See Chapter 3 10 3 5 Interfaces Settings for electrical communication...

Страница 65: ...of partial flow mode and forepump type Softkey 6 Sniffer factor Setting for the sniffer factor Softkey 7 Machine factor Setting for the machine factor Softkey 8 Leak rate internal test leak Setting f...

Страница 66: ...t change to standby mode When the STOP button is pressed for a period of time which is longer than the delay time specified here the PHOENIX L300i will vent the inlet port Softkey 2 Automatic purge De...

Страница 67: ...300i remains at the inlet flange after falling below 15 mbar When the pressure is increasing over 15 mbar the PHO ENIX L300i switches automatically into evacuation mode The smallest detectable leak ra...

Страница 68: ...S only In this mode the PHOENIX L300i DRY remains at the inlet flange after fal ling below 15 mbar When the pressure is increasing over 15 mbar the PHOENIX L300i DRY switches automatically into evacua...

Страница 69: ...de and display leak rates This is recommended if it is acceptable to wait for a while until measurement mode is reached and leak rate reading at high inlet pressures are not needed With times between...

Страница 70: ...y of the nominal pumping speed of the partial flow pump can be decreased The minimum pumping speed is 4 m3 h Softkey 3 Forepump type The PHOENIX L300i MODUL with partial flow system can be operated wi...

Страница 71: ...arge volumes and dirty objects At TQ endless valve V10 will open when pressing start At an inlet pres sure p1 15 mbar the PHOENIX L300i switches to measurement mode and display leak rates This is reco...

Страница 72: ...external calibrated leak for example 2 0 10 6 mbar l s to the test chamber 4 Measure leak rate of the external test leak for example 5 0 10 8 mbar l s 5 The machine factor is the quotient of the desir...

Страница 73: ...ground Calculate inlet area background This function calculates the background of the inlet area The PHOENIX L300i has to be in the following conditions 1 Mode vacuum 2 Mode VENTED min 25 seconds Soft...

Страница 74: ...he internal offset background the offset of the inlet area will be subtracted This function for the inlet area is only possible in standby mode therefore this value has to be determined with the menu...

Страница 75: ...hanged on two subsequent pages Please refer to Numerical entries for the description of the entry Softkey 2 H2 2 amu Hydrogen with the mass of 2 amu will be measured Softkey 3 3 He 3 amu Isotope of he...

Страница 76: ...Service interval forepump Setting for the service interval of the forepump This setting depends on the use of the PHOENIX L300i but latest after 4000 running hours or one year the oil in the pump shou...

Страница 77: ...correct function of the PHOENIX L300i If the service message is activated the PHOENIX L300i reminds you of the required maintenance This setting is only possible for the PHOENIX L300i If the service...

Страница 78: ...g functions Softkey 2 to 4 The names of the current values can be saved under a free selectable name The saving of 3 different sets is possible Softkey 5 load default values The factory settings will...

Страница 79: ...of the mechanical pump should be checked more often Contamination Protection Main menu Settings Surveillance Contamination Protection If enabled this mode will cause the PHOENIX to close all inlet val...

Страница 80: ...ure limits EVAC GROSS and FINE can be changed This might be necessary if other gases than air will be pumped by the PHOENIX L300i The pressure signal from the gas dependent inlet pressure P1 will dump...

Страница 81: ...ase change over threshold EVAC GROSS Selectable between 3 15 mbar Softkey No 7 Increase change over threshold GROSS FINE Selectable between 0 05 0 2 mbar respectively 0 05 0 1 mbar for PHOENIX L300i D...

Страница 82: ...Softkey 3 View internal data Information on measured internal data is provided on 10 screens Softkey 4 Vacuum diagram The vacuum diagram of the PHOENIX L300i is shown Here you can see which valves are...

Страница 83: ...or allow access to specific functions of the PHOENIX L300i 3 12 1 Zero Main menu Access control Zero This setting enables respectively disables the ZERO button at the control panel With Zero at FINE t...

Страница 84: ...Internal calibration by means of a built in test leak or external calibration by means of an additional test leak which then is attached to the inlet port or the component under test During the calib...

Страница 85: ...d by pressing button CAL Softkey 5 via 3 different locations main menu Fig 23 standby mode Fig 12 measurement mode Fig 10 The access via standby mode or measurement mode can possibly be blocked see Ch...

Страница 86: ...rate printed on the test leak and compare it with the leak rate at the dis play If the leak rates are not identical press Edit leak rate Soft Key no 4 and correct the value If the leak rates are okay...

Страница 87: ...st not decrease any more There might be a small fluctuation which is okay If so please press OK Soft Key no 8 Fig 37 Display External Calibration Step 5 When the signal is stable confirm with o k Fig...

Страница 88: ...configuration or not e g because of maloperation When calibration is started via SPS or RS232 no testing for plausibility is occuring When calibrating internal it is also monitored if the newly calcul...

Страница 89: ...the PHOENIX L300i is used heavily in particular in sniffer mode then this check should be performed more frequently The rotary vane pump is located on the side of the mechanical section at the bottom...

Страница 90: ...section 2 Four screws for loosening the cover for the electronics section 3 Mechanical cover 4 Electronic cover To open the PHOENIX L300i please follow the next steps 1 Switch the PHOENIX L300i off 2...

Страница 91: ...engage properly in the openings at the bottom 4 4 2 Exchanging the Filter Mats The filter mats have been built in to filter the dust out the air which is taken in In order to ensure that the filter m...

Страница 92: ...d closely As already stated before only Leybonol LVO Cat no L31001 must be used for the Trivac D 2 5E pump in the PHOENIX L300i After completion of all maintenance work the cover of the mechanical sec...

Страница 93: ...tall the covers for the electronics and mechanical section in the reverse order No 1 F1 on MSV Fuse rating T 2A 24 V system voltage of the mass spectrometer supply Loosen control panel two Phillips sc...

Страница 94: ...xiglas cabinet hand tight 7 Check the oil level of the rotary vane pump and fill it up when necessary see instructions for rotary vane pump 8 Finally re install the cover for the mechanical section 4...

Страница 95: ...rated leak TL7 being less than 2 per year is negligible Nevertheless the leak rate may change over years due to external influences A factory inspection is therefore advisable once a year A test certi...

Страница 96: ...bly with some restrictions As long as a warning status exists the status line shows a warning triangle Errors are events which force the PHOENIX L300i to interrupt its measurement operations In this c...

Страница 97: ...The 24 V voltage for the external output 2 RS232 is too low Fuse F2 on the I O board has blown E27 24V for external output 3 is too low The 24 V voltage for the external output 3 optional is too low F...

Страница 98: ...ulty E41 The anode potential has dropped below its nominal value by over 10 The actual anode potential has dropped below its nominal value by 10 The nominal value can be displayed in the service menu...

Страница 99: ...electronics Turbo Drive S is defective E51 Unknown TMP error The frequency converter Turbo Drive S indicates an unknown error code Inform Leybold service E52 TMP frequency is too low TMP frequency is...

Страница 100: ...nu Default value is 0 15 mbar The capillary is broken or has been torn off E64 TMP error Nominal speed has been exceeded by over 10 Nominal speed of the pump has been exceeded by over 10 EMC problems...

Страница 101: ...S Check connecting cable E72 Emission off P1 too high Air inrush E73 Emission off p2 too high The emission is switched off as soon as the pressure P2 0 2 mbar or 1 5 mbar in the measurement mode If a...

Страница 102: ...calibration have not been maintained The leak rate of the internal calibrated leak which was entered is much too small The internal test leak is defect W82 CAL Factor too high The calculated factor i...

Страница 103: ...available on request Contaminated parts can be detrimental to health and environment Before beginning any work first find out whether any parts are contaminated Adhere to the relevant regulations and...

Страница 104: ...Waste Disposal GA10218_002_C0 10 2016 Leybold GmbH 104...

Страница 105: ...Certificates GA10218_002_C0 10 2016 Leybold GmbH 10 7 Certificates Fig 43...

Страница 106: ...Certificates GA10218_002_C0 10 2016 Leybold GmbH 106...

Страница 107: ...G Gas ballast connection 32 GASBALLAST 28 gross 8 I Inlet Port 32 Internal Calibration 85 L List of Errors Warnings 96 M mains socket 28 Menu 8 MENU Button 41 N Numerical Entries 42 O On Off switch 28...

Страница 108: ...Appendix 107 GA10218_002_C0 10 2016 Leybold Vacuum...

Страница 109: ...Appendix GA10218_002_C0 10 2016 Leybold Vacuum 108...

Страница 110: ...Appendix 109 GA10218_002_C0 10 2016 Leybold Vacuum...

Страница 111: ...Appendix GA10218_002_C0 10 2016 Leybold Vacuum110...

Страница 112: ...rvice zh leybold com Spain Leybold Spain S A C Huelva 7 E 08940 Cornell de Llobregat Barcelona Sales T 34 93 666 43 11 F 34 93 666 43 70 sales ba leybold com Service T 34 93 666 46 11 F 34 93 685 43 7...

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