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114

Maintenance Work

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9.12

Scroll Pumps (UL1000 and UL1000 Fab only)

The maintenance intervals of the scroll pump (Agilent TS620) is given in the
maintenance plan detailed in

9.4

We recommend to have this maintenance work done by the INFICON Service or a
service partner authorised by INFICON.

Содержание UL1000

Страница 1: ...software version T E C H N I C A L H A N D B O O K UL1000 Fab and UL1000 Helium Leak Detector UL 1000 550 000A 550 001A 550 002A UL 1000 Fab 550 100A 550 101A V5 14 iina70e1 m 1408 Translation of the original handbook ...

Страница 2: ...2 iina70e content fm Technical Handbook 1408 ...

Страница 3: ...ing 16 1 4 1 Supplied Equipment 17 1 4 2 Accessories and Options 18 1 4 2 1 Sniffer line SL200 18 1 4 2 2 Toolbox 18 1 4 2 3 Helium Bottle Holder 18 1 4 2 4 ESD Mat 18 1 4 2 5 RC1000 Remote control 19 1 4 2 6 Test chamber TC1000 20 2 Installation 21 2 1 Transportation 21 2 2 Working Location 23 2 3 Electrical Connections 25 2 3 1 Mains Power 25 2 3 2 Connections for the Data Acquisition Systems 27...

Страница 4: ... 4 2 2 7 Numerical Entries 43 4 3 Working Modes 45 4 3 1 Vacuum Mode 45 4 3 2 Sniffer Mode 47 4 3 3 Auto Leak Test Mode 47 5 Operation of the UL1000 and UL1000 Fab 48 5 1 Display 48 5 2 The Screen in Run Up Mode 48 5 3 Display in stand by mode 49 5 3 1 Purging 49 5 4 The Screen in Measurement Mode 49 5 4 1 Call for Calibration 49 5 4 2 Speaker Volume 50 5 4 3 Status Line in the Display 50 5 4 4 Nu...

Страница 5: ... 2 Zero Background 73 6 6 2 1 Background Suppression 73 6 6 2 2 Zero 73 6 6 3 Mass 74 6 6 4 Interfaces 75 6 6 4 1 Control Location 75 6 6 4 2 RS232 Protocol 76 6 6 4 3 Recorder output 77 6 6 4 4 Scaling Recorder Output 78 6 6 5 Miscellaneous 79 6 6 5 1 Time Date 79 6 6 5 2 Language 79 6 6 5 3 Leak rate filter 80 6 6 5 4 Mains Frequency 80 6 6 5 5 Service interval exhaust filter 80 6 6 5 6 Service ...

Страница 6: ... Maintenance Groups 102 9 5 1 1500 Hours Maintenance 102 9 5 2 4000 Hours Maintenance 102 9 5 3 8000 Hours Maintenance 103 9 5 4 16000 Hours Maintenance 103 9 5 5 Notes refering the maintenance of the SplitFlow 80 104 9 6 Description of the Maintenance Work 104 9 6 1 Opening the Instrument for Maintenance Purposes 105 9 7 Checking and Replacing the Filter Insert 106 9 8 Replacing the Exhaust Silen...

Страница 7: ...right to modify the design and the specified data The illustrations are not binding 1 1 Notes on the Use of this Handbook 1 1 1 Safety Symbols Important remarks concerning operational safety and protection are emphasised as follows Caution Information on correct handling or use Disregard can lead to malfunctions or minor equipment damage Warning Information on preventing extensive equipment and en...

Страница 8: ... and the vacuum ranges are selected automatically The autoranging feature of the UL1000 Fab covers the entire range or leak rates depending on the selected operating mode Not only the leak rate signal but also the pressure in the test sample inlet pressure P1 and the forevacuum pressure P2 are used for control purposes Range switching between the main ranges is performed via valves Fine range swit...

Страница 9: ...00 Fab when supplied by the factory GROSS GROSS is a measurement mode which allows high inlet pressure 1 to 15 mbar The smallest detectable leak rate is 1x10 6 mbar l s FINE FINE is the medium measurement mode with inlet pressure between 2 and 0 4 mbar Detection limit is 1x10 10 mbar l s ULTRA ULTRA is the most sensitive measuring range with inlet pressures below 0 4 mbar The minimum detectable le...

Страница 10: ...one Fax Email Name Date and legally binding signature Companystamp 1 or not containing any amount of hazardous residues that exceed the permissible ex posure limits Process related contamination of product toxic no 1 yes caustic no 1 yes biological hazard no yes 2 explosive no yes 2 radioactive no yes 2 other harmful substances no 1 yes The service repair and or disposal of vacuum equipment and co...

Страница 11: ... Blackburn Phone 44 1254 678 250 Fax 44 1254 698 577 Central America infoqro meisa com Italy davide giovanetti inficon com MEISA S a de C V Querètaro Phone 52 44 22 25 42 80 Fax 52 44 22 25 41 57 INFICON GmbH Castelnuovo Phone 39 045 6 40 25 56 Fax 39 045 6 40 24 21 China reach china inficon com Israel urimark mark tec co il INFICON LTD Hong Kong Phone 852 2862 8863 Fax 852 2865 6883 Mark Technolo...

Страница 12: ...8 112 Fax 49 221 56788 9112 Republic of South Africa vacuquip hotmail com Turkey jhj agramkow dk Vacuquip Randburg Phone 27 73 15 78 355 Agramkow Sonderborg Phone 45 741 236 36 Fax 45 744 336 46 Russia leakdetection service inficon com Ukraine leakdetection service inficon com INFICON GmbH Cologne Phone 49 221 56788 112 Fax 49 221 56788 9112 INFICON GmbH Cologne Phone 49 221 56788 112 Fax 49 221 5...

Страница 13: ... or when using humid or wet test samples the acceptable compatibility of water vapor or capacity of water vapor respectively can be exceeded The steam in the oil of the pump condenses when the water vapor rises over the acceptable value So the attribute of the oil changes and danger of corrosion occures for the pump While using the leak detector with condensable gases and steams the oil of the for...

Страница 14: ...of the oil of the pump has to be controlled regularly The normal intervalls of changing the oil from the producer have to be taken care of See instructions of the rotary vane pump Caution Gases that contain halogen melecules i e fluorine chlorine i e refrigerants and SF6 should not be pumped by the leak detector in higher contact rations and over a longer time period The coating layer of the catho...

Страница 15: ...mit of detection in sniffer mode 5 10 8 mbar l s Maximum displayable helium leak rate in ULTRA 0 1 mbar l s Measurement range 12 decades Time constant of the leak rate signal blanked off 63 of the final value 1 s Pumping speed Helium at the inlet Max roughing capability 25 m3 h 50 Hz 17 6 cfm 50 Hz 30 m3 h 60 Hz 21 1 cfm 60 Hz in vacuum mode GROSS mode 8 l s FINE mode 7 l s ULTRA mode 2 5 l s Dete...

Страница 16: ...epartment Notice Before starting up make sure that the transportation fixing is loosened Please refer to chapter 2 1 Tipp Retain the packaging materials in the event of complaints about damage Tipp For unpacking please use the wedge which is part of the packaging Valves solenoid Dimensions L W H incl handle in mm 1068 525 850 Dimensions L W H incl handle in inches 42 21 33 Weight in kg 110 Weight ...

Страница 17: ...ow 1 power cord fixture Set of fuses see arrow 2 Set of tools see arrow 7 Bellow Clips 2 2 see arrow 5 Folder with documents Technical Handbook UL1000 and UL1000 Fab Spare Parts List UL1000 and UL1000 Fab hooks to wrap power cord with screws see arrow 6 Tool to open the UL1000 and UL1000 Fab see arrow 7 O Ring with filter for use at applications with particles Fig 1 2 ...

Страница 18: ...er The helium bottle holder allows you to carry a helium reservoir and a spray gun with the UL1000 and UL1000 Fab Only small and midsize bottles max 10 l 200 bar will fit without influencing the stability of the UL1000 and UL1000 Fab 1 4 2 4 ESD Mat This mat is put on the working surface of the UL1000 and UL1000 Fab and is clamped and grounded by the inlet port ring It avoids electrical discharges...

Страница 19: ... The data can easily be downloaded to a USB stick to save it An internal trigger can be set to provide a warning if the limit leak rates are exceeded An optical warning is shown on the display and an acoustic warning signal is sounded on the integrated loudspeaker or the connected headphones The RC1000 remote control is housed in a robust housing to enable ergonomic working Magnets on the undersid...

Страница 20: ...components Testing according to MIL STD 883 can be done easily fast and accurate The test starts automatically when the chamber lid is closed test parameters like cycle time and rejectant level can be setted in the menu Auto Leak Test see 6 6 1 6 The test cycle runs automatically the test result is also displayed by red green LEDs directly at the chamber Fig 1 4 Test chamber TC1000 ...

Страница 21: ...els on the bottom part pointing to the screws Caution The UL1000 and UL1000 Fab is not equipped with any crane eyes and must therefore not be transported using lifting equipment Warning The UL1000 and UL1000 Fab must only be pushed or pulled along using the handle provided for this purpose Don t use the handle to lift Caution Your feet can be pinched Keep your feet away from the rollers Caution Yo...

Страница 22: ...dbook 1408 For transportation fixing the screws are tightened to the chassis plate For operation of the UL1000 Fab the screws should be loosened To loosen the screws first loosen the counter nut that is accessible from underneath Fig 2 1 Fig 2 2 ...

Страница 23: ...uts 2 2 Working Location Move the UL1000 and UL1000 Fab to the desired position and arrest the castors Fig 2 3 S TOP Danger Caution Exhaust gases and fumes Exhaust gases and fumes from oil sealed pumps may be harmful to health For operation in poorly ventilated rooms an exhaust pipe should be connected to exhaust connection 5 depending on the application and gases used Caution Make sure that you c...

Страница 24: ...ated while standing in water or when exposed to drip water The same applies to all other kinds of liquids Warning Avoid contact with bases acids or solvents as well as exposure to extreme climatic conditions Warning The UL1000 and UL1000 Fab is designed for indoor use only Caution Ensure a sufficient air cooling The air inlet as well the air discharge openings must never be obstructed Caution The ...

Страница 25: ... 2 6 7 is available for this purpose at the back side of the instrument Notice The cable can be secured like shown in the following Figure Warning Before connecting the UL1000 and UL1000 Fab to the mains you must make sure that the mains voltage rating of the UL1000 and UL1000 Fab coincides with the locally available mains voltage The instrument must exclusively be connected to a single phase supp...

Страница 26: ...26 Installation iina70e 02 fm technical handbook 1408 Notice If the machine is not operating the cable can be stored at the cable holders Fig 2 4 secure fixture power cord Fig 2 5 storing power cord ...

Страница 27: ...ve the plastic pins at the plug accordingly the plug fits the socket Tipp The connections for external devices are safely seperated from the mains and safe low voltage 1 Accessories 2 Digital Out 3 Digital In 4 Recorder 5 RS232 6 Remote Control Wireless transmitter 7 Mains Socket 8 Mains Switch 9 Hole to mount cable hooks 10 Speaker 11 Vent 12 Purge UL1000 Fab Gas ballast UL1000 Fig 2 6 Caution Th...

Страница 28: ...Digital Out Trigger 1 Is open in case Trigger Level 1 is exceeded or the machine is not in condition of measuring Trigger 2 Is open in case Trigger Level 2 is exceeded or the machine is not in condition of measuring Zero active Is closed in case Zero function is running Ready Is closed in case machine is ready for measurement Emission on no error CAL active Closed when machine is in calibrating ro...

Страница 29: ...d output is set on leak rate 2 3 2 3 Digital In These inputs can be used to control the UL1000 and UL1000 Fab with a programmable logic control PLC Description of operation mode of the Digital In Zero Change from low to high activate zero Change from high to low deactivate zero Start Change from low to high activate START Stop Change from low to high activate STOP When this inlet is longer high th...

Страница 30: ...ecorder output see Fig 2 6 4 may be used to log the leak rate the inlet pressure and the forevacuum pressure The measured values are provided by way of an analogue signal in the range of 0 V 10 V The resolution is limited to 10 mV The instrument which is connected to the recorder output e g X t chart recorder should have an input resistance of no less than 2 5 k The measured values are available t...

Страница 31: ...re information refer to the Interface Description 2 3 2 6 Remote Control This Remote Control interface Fig 2 6 6 is a serial interface to control the UL1000 and UL1000 Fab by the RC1000 The RC1000 Remote Control can be connected via the wireless transmitter or via an extension cable with a RJ45 plug Refer to the RC1000 Technical Handbook for more information Pin Assignment 2 RXD 3 TXD 5 GND 7 RTS ...

Страница 32: ... is finished If it is required the parts can be vented with a different gas i e fresh air dry air nitrogen at max 1050 mbar pressure In this case a vent hose has to be connected to the hose coupling Fig 2 6 10 2 4 4 Purge connection UL1000 Fab Gas ballast UL1000 For purge modes it is recommended to use Helium free gases at atmospheric pressure Ambient air can be contaminated with Helium due to spr...

Страница 33: ...r level 1 1E 9 mbar l s Trigger level 2 1E 8 mbar l s Leak rate external test leak Vacuum 1E 7 mbar l s Leak rate external test leak Sniffer 1E 5 mbar l s Vent delay 2 seconds Automatic purge OFF Pressure unit mbar Minimum volume 0 Beep ON Maximum evacuation time 30 minutes Audio Alarm Typ Trigger Alarm Maximum inlet pressure when sniffing 1 mbar Minimum Inlet pressure when sniffing 0 1 mbar Numbe...

Страница 34: ...ption of the Initial Operation Please proceed the following description step by step to start the initial operation Refer to Chapter 5 Operation of the UL1000 and UL1000 Fab for a more detailed description 3 2 1 Start up and Measure 1 Unpack the UL1000 and UL1000 Fab and inspect it for any external damage Refer to Chapter 1 4 Unpacking 2 Connect the instrument to the mains power Refer to Chapter 2...

Страница 35: ...d the end is indicated by a beep The UL1000 and UL1000 Fab is in Stand by mode now 4 Check if the inlet port Fig 3 1 2 is blanked off If not please mount a blind flange with O Ring on the inlet port 5 Press the START Button Fig 3 2 6 The inlet will be evacuated and the measured leak rate will be displayed a moment later This is the measurement mode If a test part was connected you would start spra...

Страница 36: ... 13 the Standards will go to Stand by If you press STOP a few seconds the inlet of the Standards will be vented 8 To finish the startup procedure please proceed with 16 For calibration proceed with 9 Fig 3 2 Control Panel Pos Description Pos Description 1 LC Display 8 Soft Key no 5 2 Soft Key no 1 9 Soft Key no 6 3 Soft Key no 2 10 Soft Key no 7 4 Soft Key no 3 11 Soft Key no 8 5 Soft Key no 4 12 ...

Страница 37: ...et is vented now 3 2 3 Verification To verify the accuracy please proceed through the following steps A test leak is required If a test leak is not available please continue with 16 11 Remove the blind flange from the inlet port and connect the open helium test leak to the inlet port 12 Press the START Button Fig 3 2 6 again The inlet will be evacuated and the leak rate of the test leak will be me...

Страница 38: ... UL1000 and UL1000 Fab In addition the vacuum can be generated by pumps with are set up in parallel to the leak detector Another operating mode of the UL1000 and UL1000 Fab is the Sniff mode which can only be used when a sniffer line See Chapter 1 4 2 Accessories and Options is hooked up 4 2 Components of the UL1000 and UL1000 Fab The UL1000 and UL1000 Fab is a self contained unit in a metal housi...

Страница 39: ...ge ratio of the ions Only helium ions can pass this filter and reach the ion collector where the stream of the ions is measured as a electrical current For operation the mass spectrometer requires a vacuum level in the range of 1 10 4 mbar and lower This pressure is provided by the turbomolecular pump which in turn is backed up by a scroll pump Fig 4 1 Vacuum Diagramm UL1000 and UL1000 Fab Pos Des...

Страница 40: ...helium can penetrate into the part in case of a leakage As soon as the pressure conditions allow it one of the valves to the TMP opens Now Helium can penetrate into the mass spectrometer contrary to the pumping direction of the TMP See Chapter 4 3 Working Modes for details 4 2 2 Control Panel The Control Panel Fig 4 2 7 contains a liquid chrystal display LC Display the START STOP ZERO and MENU but...

Страница 41: ... the STOP Button Fig 4 2 13 interupts the measure procedure If the button is pressed longer the inlet is vented according to the conditions defined in the menu Vent delay Please refer to chapter 6 6 1 2 Vent delay to select the time parameters of the venting 4 2 2 4 ZERO Button Pushing the ZERO Button Fig 4 2 14 enables the zero mode When pressing ZERO the currently measured leak rate is taken as ...

Страница 42: ...ing value remains constant Increasings of the signal are displayed clearly as a leak When you want to see the measurement signal including underground please press the ZERO button about 3 seconds The saved value will be reset to zero The underground signal will not be suppressed anymore Notice The ZERO functions can be selected to a special mode that allows to use it only when the signal of the fa...

Страница 43: ...enu two of the Soft Keys always have the same function Soft Keys no 1 Fig 4 2 2 is Cancel It allows to escape from the submenu without any changes of the present settings and return to the previous menu page Soft Keys no 8 Fig 4 2 11 is OK The selected settings or edited values will be stored and the previous menu page will be displayed again 4 2 2 7 Numerical Entries If you have opened a menu pag...

Страница 44: ...na70e 04 fm technical handbook 1408 Example To change the trigger level 1 0x10 7 mbar l s to 3x 10 7 mbar l s please press 2 3 Soft Key no 3 Fig 4 5 In the submenu press 3 Soft Key no 4 Fig 4 6 Fig 4 5 Numerical entry of the Trigger Level 1 ...

Страница 45: ...uum no further gas is pumped Thus the pressure p2 remains constant or increases only slowly If the pressure p2 even though increases e g because of a very long pumping down process then the evacuation will be broken V1a and V1b closed at p2 10 mbar and V2 will open shortly to restore an appropriate foreline p2 1 mbar The following diagrams show the gas flow during evacuation and during the modes G...

Страница 46: ...he sample and after the pressure p1 has reduced below 0 4 mbar the UL1000 and UL1000 Fab switches into ULTRA mode i e V1a and V4a close and V4b opens The entrance into the turbo pump is on a higher level now The pumping speed at the inlet port is now 2 5 l s the detection limit is 5 10 12 mbar l s Tipp A special set up of the UL1000 and UL1000 Fab stopps the autoranging procedure as described abov...

Страница 47: ... messages are generated The detection limit in sniff mode is 1 10 7 mbar l s INFICON s sniffersystem QT100 may also be used to sniff Since the QT100 provides a lower inlet pressure it is recommended to keep the system in vacuum mode to avoid a wrong generation of pressure warnings The machine factor has to be adjusted to value 400 4 3 3 Auto Leak Test Mode In this mode the test of hermetically sea...

Страница 48: ...on in the part under test Since the UL1000 and UL1000 Fab continues to pump down the part this background leak rate will further reduce As soon as the leak rate is low enough in respect to your requirements you may start spraying Helium to search for possible leaks When you are finished please press STOP and hold the button a few seconds to vent the part under test 5 1 Display The display is used ...

Страница 49: ...will be discontinued too 5 4 The Screen in Measurement Mode In measurement mode the leak rates can be diplayed in two different modes Numerically combined with a bargraph Fig 5 1 Trend mode leak rate versus time Fig 5 2 In the lower right corner of the display next to the Soft Key no 8 you will find a symbol that allows to switch between the display modes by pressing Soft Key no 8 Please refer to ...

Страница 50: ...to the audio alarm for a short time or use ear protection Symbol of display Meaning Explanation Volume level Please refer to Chapter 5 4 2 Speaker Volume S1 Trigger 1 If the trigger values are exceeded these signs are inverted White on black background S2 Trigger 2 see Trigger 1 Detected mass Number of dots indicates the mass number 4 dots Helium 2 dots Hydrogen Warning triangle Please refer to Ch...

Страница 51: ...in the menu Please refer to Chapter 6 2 2 Display range auto manual The programmed trigger levels Please refer to Chapters 6 4 1 and 6 4 2 are indicated at the bar by short vertical lines a straight line for trigger 1 and a dotted line for trigger 2 In addition the inlet pressure is displayed in smaller figures above the bargraph 5 4 5 Trend Mode In trend mode the leak rates are displayed over tim...

Страница 52: ... indicated by a dot The next page gives an overview of the entire menu architecture Fig 6 2 Fig 6 1 The Main Menu Key No Name Description 1 Back Return to the previous screen 2 View Display settings like scaling contrast system background Please refer to Chapter 6 2 3 Mode Selection of different working modes like Vacuum Sniff Please refer to Chapter 6 3 4 Trigger Alarms Settings of units trigger ...

Страница 53: ...Vacuum ranges Leak rate internal test leak Machine factor Zero Background Background Suppression Zero Mass Interfaces Control Location RS232 Protocol Scaling Recorder Output Recorder output Miscellaneous Time Date Language Leak rate filter Mains Frequency Service interval exhaust filter Service message exhaust filter Parameter save load Load parameter set Save parameter set Monitoring functions Ca...

Страница 54: ...or bargraph and trend mode Please refer to Chapter 6 2 1 3 Display range auto manual Manual or automatic scaling Please refer to Chapter 6 2 2 4 Time axis Time axis in trend Please refer to Chapter 6 2 3 5 Contrast Display contrast Please refer to Chapter 6 2 4 6 Background in Stand by Background displayed or not Please refer to Chapter 6 2 5 7 Decimal places Number of decimal places Please refer ...

Страница 55: ...r logarithmic If linear scale is selected the lower limit is always zero The upper limit is only a default value You can change this on the measurement screen with the Soft Key 6 and 7 if you have chosen manual display ranging Softkey 2 Linear Pressing this key switches the display to a linear scale starting at zero Softkey 3 Arrow down Number of decades Pressing this key reduces the number of dis...

Страница 56: ... or 7 so long until the display can be read properly again This setting is saved to the EPROM only after confirming this through the contrast menu If this setting is not confirmed the former setting will be appled after switching on the instrument on again Softkey 3 Arrow down Decrease the length of the time axis The minimum time value is 16 seconds The time slice is extended during the measuremen...

Страница 57: ...sured signals automatically Thus it is made sure that only the net leak rate from the part under test is measured When switched to Stand by Vent again a new internal background is calculated after 25 s The updated value is underlined This means that if you press START when the value is underlined the actual background signal will be subtracted If you press START when the value is not underlined th...

Страница 58: ...he submenu to select the different working modes Softkey 3 7 Changing of the lower detection limit between 1 10 5 and 1 10 12 Softkey 5 Help Fig 6 4 The Mode Menu Key No Name Description 1 Cancel Return to the main menu without any changes of the present settings 3 Sniff The normal vacuum mode will be used See Chapter 4 3 2 sniffer mode 4 Not used in this menu 5 Auto Leak Test See Chapter 4 3 3 7 ...

Страница 59: ... Leak Test Menu Mode Auto leak test After selecting the Auto leak test mode this message pops up By pressing OK button the settings menu is called see 6 6 1 6 Notice If the UL1000 requests a calibration due to the mode change a calibration message will come up Fig 6 5 Fig 6 6 ...

Страница 60: ... The test can be stopped any time by STOP button After starting the test procedure runs according to the setted measurement period 1 Remaining measurement time Shut down When the test chamber should remain under vacuum after switching off the UL1000 or UL1000 Fab push the button cup of coffee follow the instruction on the display and switch off the leak detector This function can also be used when...

Страница 61: ...or Trigger 1 and Trigger 2 are displayed inverted if the leak rate exceeds becomes higher than the programmed value Relay Output The trigger relais of the digital out switches Please refer to Chapter 2 3 2 2 Digital out for further details Alarm Loudspeaker Additionally Trigger level 1 defines at which level the various alarm types react See Chapter 6 4 6 Audio alarm type Fig 6 9 The Trigger Alarm...

Страница 62: ... adjusted The minimum loudness is the minimum speaker volume that cannot be exceeded to even lower values Thus it is avoided that the actual volume is accidentally adjusted to a value that is below the noise level of the environment The actual volume can be adjusted between 15 maximum and the value defined as minimum loudness Softkey 2 Arrow down Decrease the minimum loudness The minimum value is ...

Страница 63: ...a chamber test system it might be necessary to block an alarm for some time after pressing START This delay time of the alarm can be changed After pressing START the loudspeaker is activated as soon as the leak rate drops below trigger level 1 or after the entered alarm delay time has elapsed This setting is only active for the audio alarm types SETPOINT and TRIGGER ALARM See Chapter 6 4 6 Softkey...

Страница 64: ...ches from 4 10 8 mbar l s up to 4 10 6 mbar l s 6 4 6 2 Leak rate prop The frequency of the accoustic output is proportional to the reading on the bargraph display The frequency ranges from 300 Hz to 330 Hz Please refer to Chapter 6 2 1 Scale linear logarithmic for the definition of the number of decades Softkey 2 Pinpoint Use this function to localize a leak with a well known size Please refer to...

Страница 65: ...al to the leak rate Fig 6 11 6 4 6 4 Trigger alarm As soon as the leak rate increases above trigger level 1 a multi tone signal is generated The tone does not vary with the leak rate 6 5 Calibration Main Menu Calibration Please refer to Chapter 7 Calibration for a detailed description of the calibration Fig 6 11 Setpoint f LR Tr 1 no tone 375 Hz 1000 TR 1 3000 Hz Fig 6 12 The Calibration Menu ...

Страница 66: ...tings of vacuum system related functions See chapter 6 6 1 3 Zero Background See Chapter 6 6 2 4 Mass Switching between helium and hydrogen See Chapter 6 6 3 5 Interfaces Define the recorder output analog output and choose the control location local RS232 PLC See Chapter 6 6 4 6 Miscellaneous Change rarely necessary settings Date language See Chapter 6 6 5 7 Parameter save load See Chapter 6 6 6 8...

Страница 67: ...n When the STOP button is pressed for a period of time which is shorter than the delay time specified here the UL1000 and UL1000 Fab will just change to Stand by mode When the STOP button is pressed for a period of time which is longer than the delay time specified here the UL1000 and UL1000 Fab will vent the inlet port Softkey 2 Automatic purge UL1000 Fab only Refer to chapter 6 6 1 1 Softkey 3 V...

Страница 68: ...n showing the pressure at the inlet flange 0 4 mbar the UL1000 and UL1000 Fab switches immediately into evacuation mode Softkey No 3 FINE only In this mode the UL1000 and UL1000 Fab remains after falling below 2 mbar at the inlet flange in FINE mode Valve V1a will be closed When the pressure at the inlet flange is increasing 1 mbar the UL1000 and UL1000 Fab switches immediately into evacuation mod...

Страница 69: ...result of the measured leak rate of an external test leak on the test sample once with and then without the external pump The difference between the two results is the machine factor Adjust the machine factor to the value 400 when using the helium sniffer QUICK TEST The machine factor can be used to correct the leak rate indication to an air equivalent reading By using this setting the display rea...

Страница 70: ... measurement period is not reached Examples for time settings using the Inficon Test Chamber with a volume of 430 cm external calibration with a 10E 9 test leak i e TL 9 recommended Notice After changing the measurement time a calibration request could be asked Settings Interval time 1 20 sec 1 sec steps 20 30 sec 2 sec steps 30 60 sec 5 sec steps 1 30 min 10 sec steps 3 10 min 30 sec steps 10 30 ...

Страница 71: ...from 10 1 to 10 9 mbar l s Series error messages The number of failed parts in series can be set from 1 to 9 In disable mode this function is switched off Now a REFERENCE MEASUREMENT see no 1 in fig 6 19 can be started to clean the test chamber and measure the background level that will be subtracted from the following measurements Fig 6 15 Fig 6 16 ...

Страница 72: ...s mode can be used to clean up the chamber after a helium contamination or after a series of failed parts The chamber will be pumped down and vented 3 times The Reference measurement includes a calibration procedure with the internal test leak TL of UL1000 After this clean up the actual helium background is measured and will be subtracted from the following measurements The new values of the measu...

Страница 73: ... will be subtracted at every measurement after pressing START This function helps to save clean up of the UL1000 and UL1000 Fab after a helium contamination 6 6 2 2 Zero Main Menu Settings Zero Background Zero This setting enables respectively disables the ZERO button at the control panel Softkey 3 Background suppression Refer to Chapter 6 6 2 1 Softkey 7 Zero Refer to Chapter 6 6 2 2 Softkey 3 Of...

Страница 74: ...nction I Zero enables the ZERO button only at stable leak rate signals This is displayed in the status bar through the STABLE signal By the standard Zero function the actual background value will subtracted when pressing ZERO At falling background signals smaller leaks could be missed because the subtracted background value is higher than the leakrate signal at the moment of measuring By I Zero th...

Страница 75: ...ntrol panel are locked Softkey 3 RS232 The UL1000 and UL1000 Fab is controlled via RS232 interface by an external computer In this mode the UL1000 and UL1000 Fab can not be controlled via keyboard The START STOP and ZERO button at the machine are deactivated Taste Nr 4 All UL1000 and UL1000 Fab can be operated via the digital input the RS232 interface and the keyboard Softkey 5 Local PLC The UL100...

Страница 76: ...w the symbol leak rate is less then the stated value or leak rate is greater than the stated value is output accordingly 1 00E 10 Output of the measured value in the unit set up followed by date and time MEAS The UL1000 UL1000Fab is in the measure mode When pressing the START button once again in the measure mode or activation of the START input at the DIGITAL IN port the leak rate will be send ou...

Страница 77: ... can be recorded The signals p1 and p2 have the characteristics of the Pirani gauge TPR265 see chart in appendix Softkey 1 Cancel Return to the previous menu without any changes of the present settings Softkey 2 Arrow up Adress recorder output 1 or 2 Softkey 3 Arrow down Adress recorder output 1 or 2 Softkey 5 Help Softkey 6 Arrow up Behaviour recorder output For further information see keywords b...

Страница 78: ...order Output Here the scaling of the recorder output can be adjusted This adjustment is only valid for the setting LR lin or LR log refer to Chapter 6 6 4 3 Recorder output Example Chart recorder output LRlog Upper limit value is adjusted to 10 5 10V Scaled to 5 V decade Lower limit value consequently is 10 7 0 V Fig 6 21 Example of range of leak rate log 0 5 V decade 0 1 2 3 4 5 6 7 8 9 10 V 12 1...

Страница 79: ...scellaneous Language The prefered language can be selected by pressing Softkey 3 and 7 The default setting is english Selectable languages English German French Italian Spanish Polish Chinese Mandarin Japanese Katakana Korean Notice The default setting can be resetted by pressing the softkey 2 and 6 simultaneously during run up of the leak detector Softkey 2 Time Date Please refer to Chapter 6 6 5...

Страница 80: ... Settings Miscellaneous Mains Frequency The mains frequency takes the different pumping speed of the scroll pump into account The frequency of the mains power supply can be selected The default setting is 50 Hz for 230 V and 60 Hz for 115 V 6 6 5 5 Service interval exhaust filter Here you can enter the service intervall of the exhaust filter Softkey 3 Fixed A filter with a fixed time constant will...

Страница 81: ... settings 6 6 6 1 Load parameter set Main Menu Settings Parameter save load Save Save the current parameter settings Softkey 3 Off Softkey 5 Help Softkey 7 On Warning If the service messages are ignored and the exhaust is not replaced a risk for overheating the pump motor exists Softkey 2 to 4 The names of the current values can be saved under a free choosable name The saving of 3 different sets i...

Страница 82: ...ed after power on or if the temperature of the UL1000 and UL1000 Fab has changed by more than 5 C 9 F since the last calibration Particle protection Main Menu Settings Monitoring functions Particle Protection This mode can be switched on and off If switched on the UL1000 and UL1000 Fab will not start pumping down before the inlet has not dropped below 1 mbar e g it is assumed that the part under t...

Страница 83: ...irani may vary at other gases than air Therefore it may be necessary to adjust the switching points Pressure limits for sniff mode Main Menu Settings Monitoring functions Pressure limits for sniff mode This function is automatically activated in sniff mode The pressure limits define an upper and lower limit of the inlet pressure The upper limit is 2 mbar the lower limit is 0 02 mbar If the pressur...

Страница 84: ...volume of the test sample and the effective pumping speed Caution If the evacuation time was set to endless the oil level of the mechanical pump should be checked more often Softkey 3 and 6 Setting of the maximal pressure upper limit 2 mbar Softkey 4 and 7 Setting of the minimal pressure lower limit 0 02 mba Softkey 5 Help Softkey No 2 Decreasing maximum evacuation time until p1 100 mbar Within th...

Страница 85: ...he service menu see instructions iipa74e1 Fig 6 22 The Information Menu Softkey 2 View settings The current settings will be displayed on 4 pages e g trigger levels test leak mass date and time Softkey 3 View internal data Information on measured internal data is provided on 4 screens Softkey 4 Vacuum diagram The vacuum diagram of the UL1000 and UL1000 Fab is shown Here you can see which valves ar...

Страница 86: ...enu Softkey 2 Access to CAL function Please refer to Chapter 6 8 1 Softkey 3 Access to Trigger Alarme menu Please refer to Chapter 6 8 2 Softkey 7 Change device PIN Please refer to Chapter 6 8 3 Softkey 8 Change Menu PIN Please refer to Chapter 6 8 4 Softkey 3 Off The calibration function is only available at the main menu If the Menu PIN See Chapter 6 8 4 is activated you need this PIN to start a...

Страница 87: ...b will ask for this PIN directly after power on Without device PIN the UL1000 and UL1000 Fab foes not even switch on the pumps Notice Under all circumstances memorize the PINs The PIN can only be reset by INFICON s service organization 6 8 4 Change Menu PIN Main Menu Access Control Change Menu PIN The access to the menu can be restricted by entering or changing the personal identification number P...

Страница 88: ...nstantly the calibration should be performed at least once a day Otherwise the frequency of calibration depends on the frequency of use Notice To get an optimized calibration the machine has to warm up at least 20 minutes before use Test leaks for calibration should not have a range lower than 1 10 9 mbar l s to ensure a stable calibration signal 7 2 The calibration routines The calibration routin...

Страница 89: ... connected to a component under test if not please go to Automatic Internal Calibration After starting the Manual Internal Calibration the UL1000 and UL1000 Fab pumps down the test part if not already under vacuum and opens the internal leak standard Depending on the volume of the part it may take some time for the helium signal to stabilize Therefore the user has to confirm that the signal has re...

Страница 90: ... at the display If the leak rates are not identical press Edit leak rate Soft Key no 4 and correct the value If the leak rates are okay press START Soft Key no 8 No action required The bargraph display shows a signal which must not vary much If so please press OK Soft Key no 8 Fig 7 1 External Calibration Step 1 Fig 7 2 External Calibration Step 2 Fig 7 3 External Calibration Step 3 ...

Страница 91: ...hnical handbook 1408 No action required No action required Close the external leak standard and confirm with OK Soft Key no 8 Fig 7 4 External Calibration Step 4 Fig 7 5 External Calibration Step 5 Fig 7 6 External Calibration Step 6 ...

Страница 92: ... signal which must not decrease any more There might be a small fluctuation which is okay If so please press OK Soft Key no 8 The UL1000 and UL1000 Fab displays the old and the calculated new calibration factor Fig 7 7 External Calibration Step 7 Fig 7 8 External Calibration Step 8 ...

Страница 93: ...automatically When the new factor of calibration diverges stronger from the previous factor the user can decide if he wants to accept it anyway e g after changing the system configuration or not e g because of a maloperation Notice When calibration is started via SPS or RS232 no testing for plausibility is occuring When calibrating internal it is also monitored if the newly calculated factor of ca...

Страница 94: ... UL1000 Fab can be used again possibly with some restrictions As long as a warning status exists the status line shows a warning triangle See Chapter 5 4 3 The warning messages can be displayed in STANDBY by pressing the button shows up when warning message occured Error Messages Errors are events which force the UL1000 and UL1000 Fab to interrupt its measurement operations In this case the UL1000...

Страница 95: ...mp is expired W17 Forepump service interval expired The service intervall for the fore pump is expired W18 Exhaust filter service interval expired The service intervall for the exhaust filter is expired W21 EEPROM write time out EEPROM defective MC 68 defective W22 EEPROM parameter queue overflow EEPROM defective MC 68 defective E23 24V of the OPTION socket is too high The tension 24V at socket OP...

Страница 96: ...eeds its norminal value by over 10 The actual anode potential exceeds its nominal value by 10 The nominal value can be displayed in the service menu MSV is faulty E41 The anode potential has dropped below its nominal value by over 10 The actual anode potential has dropped below its nominal value by 10 The nominal value can be displayed in the service menu Air inrush MSV is faulty E42 Nominal value...

Страница 97: ...e p1 too low U 0 27 V Cathode faulty Change thermovac sensor that measures p1 E58 Foreline pressure p2 too low U 0 27 V Cathode faulty Change thermovac sensor that measures p2 E60 p2 10 mbar after 5 minutes since power on PV 3 8 mbar after t 5 minutes since switching on Run up time of the forevacuum pump is too long Forepump is faulty Valve V2 does not open E61 Emission fail Emission should be swi...

Страница 98: ...he conditions for calibration have not been maintained The leak rate of the internal calibrated leak which was entered is much too small The internal test leak is defect W82 CAL Factor too high The calculated factor is out of the valid range 10 The old factor is retained Possible fault cause The conditions for calibration have not been maintained The leak rate of the internal calibrated leak which...

Страница 99: ...ith this will then void your warranty for this equipment Signing a maintenance contract for this equipment is recommended As soon as the different maintenance intervals are reached a warning is displayed on the screen of the leak detector of the UL1000 and UL1000 Fab UL1000 each time it is switched on This message will remain on the display until the maintenance interval has been acknowledged Depe...

Страница 100: ... sender 9 3 Key to the Maintenance Plan I Service level I Customer II Service level II Customer with technical training III Service level III Authorised INFICON service technician X Run maintenance work after operating hours or period of time X1 No time limitation operating hours only X2 No operating hours limitation only period of time 1 Depending on environment and usage 2 Process dependent UL10...

Страница 101: ...e the scroll head X III 200001665R SplitFlow 80 Exchange the operating agent reservoir X2 II u III 200003801 Bearing exchange X2 III Valve block Clean the valves replace valve seals 2 X III 200000594 Disassemble and clean the valve block 2 X III 200000593 Replace filter of vent and purge gas line 1 X1 I II III 200000683 Align Pirani gauge X III Silencer UL1000 Fab Replace X1 I II III 20099183 Exha...

Страница 102: ...etector must be replaced Notice Blocked silencers can result in further damage to the scroll pump 9 5 2 4000 Hours Maintenance The 4000 hours maintenance work should be done by an INFICON service technician or a person authorised by INFICON were by this work should be done once a year The operating agent reservoir of the turbomolecular pump and the oil of the backing pump in the UL1000 must be exc...

Страница 103: ...g pump types has been reached Work to be done Required materials Part No Exchange the oil of the D16 backing pump UL1000 only Arctic Oil 1l 20099091 Check replace the filter Replacement filter cell for fan Replacement filter for venting and purge gas line Silencer for exhaust UL1000 Fab only Oil filter insert 10 pcs UL1000 only 200000685 200000683 20099183 200000694 Test and alignment Replace oper...

Страница 104: ...recommended for those customer who has to guarantee a 100 up time for the unit In this case the turbopump SplitFlow 80 will be replaced by a refurbished pump 9 6 Description of the Maintenance Work Modifications to the UL1000 and UL1000 Fab UL1000 which exceed the scope of normal maintenance work must only be performed by trained personnel Work to be done Required materials Part No Replace scroll ...

Страница 105: ...ntil the cover disengages Press the cover on both sides out of the holder Slightly fold the cover outwards and lift it out of the guide pins in the bottom of the instrument The correct position where to apply the side wall separator is marked by a dent on both the covers For this refer to Fig 9 1 2 Open both covers in the same way S TOP Danger Before removing one of the covers of the UL1000 and UL...

Страница 106: ... and the instrument itself is reduced Required tools Side wall separator from the accessories Required material Replacement filter insert P N 200 000 685 To open the leak detector refer to Chapter 1 6 1 Take hold of the filter insert with two fingers at the locations shown in Fig 1 2 a and pull the filter insert out of the guide Should this not be possible use a tool to press the filter through th...

Страница 107: ...er insert marked clean air side or the white surface of the filter insert must point in the direction of the fans Push the filter insert into the guide and place the covers back on To close the instrument insert the covers and press these on Fig 9 2 Replacement of the air filter in the chassis wall Item Description Item Description a Air filter cut out 2 Air filter guide 1 Air filter insert 3 Ejec...

Страница 108: ... Switch the UL1000 Fab leak detector off Unscrew the silencer from the connection adapter and replace it by the new silencer and tighten it For this refer to Fig 9 3 1 Fig 9 3 Replacing the silencer Item Designation Item Designation 1 Silencer 4 Reducer 2 Adapter for silencer 5 Centering ring DN 25 3 O ring 20 x 3 6 Clamping ring clip 1 2 3 4 5 6 ...

Страница 109: ...be emptied To empty the oil reservoir vessel proceed as follows Switch the instrument off and remove the side covers For this refer to Chapter 1 6 1 Loosen the hexagon screw at the bottom of the reservoir vessel and drain the oil into a suitable vessel For this refer to Fig 1 5 5 Dispose of the oil in accordance with the local waste disposal regulations Screw in the hexagon screw again and tighten...

Страница 110: ...eservoir vessel in the counter clockwise direction and empty it Dispose of the oil in accordance with the local regulations Clean the reservoir vessel with a clean piece of cloth Manually loosen the filter holding screw Fig 9 5 3 take out the filter insert and properly dispose of it Fig 9 4 Installation location of the exhaust filter Item Description Item Description 1 Clamping ring KF 16 4 Maximu...

Страница 111: ...ion 9 10 Monitoring the Oil Level of the D16 B and Topping up the Oil As a preventive measure it is recommended to check the oil level and the colour of the pump oil once a month To open the instrument observe the instructions given in Chapter 1 6 1 Fig 9 5 Filter insert exhaust filter Item Description Item Description 1 Filter cover 4 Oil reservoir vessel 2 Filter insert 5 Oil drain plug 3 Filter...

Страница 112: ...is refer to Fig 9 6 3 5 Notice Check and top up oil only after the pump has been switched off If the oil level is below the minimum mark top up oil For this note the instructions given in 9 11 9 11 Oil Change for the D16B The oil must be exchanged when it looks contaminated or is chemically or mechanically worn out Fig 9 6 Oil change for the D16 B Item Description Item Description 1 Oil fill openi...

Страница 113: ...duces screw the oil drain plug back in Switch the pump on briefly 10 s max and switch it off again Remove the oil drain plug again and let the remaining oil drain out Screw the oil drain plug back in again Check the gasket and replace it if required Affix the oil drain hose with a cable strap again Unscrew oil fill plug Fig 9 6 1 from the oil fill opening and top up fresh oil up to the maximum lev...

Страница 114: ...2 Scroll Pumps UL1000 and UL1000 Fab only The maintenance intervals of the scroll pump Agilent TS620 is given in the maintenance plan detailed in 9 4 We recommend to have this maintenance work done by the INFICON Service or a service partner authorised by INFICON ...

Страница 115: ...ix fm technical handbook 1408 Appendix A Diagram Fig 10 1 TPR265 characteristic P1 P2 recorder exit 1 0E 04 1 0E 03 1 0E 02 1 0E 01 1 0E 00 1 0E 01 1 0E 02 1 0E 03 1 500 2 500 3 500 4 500 5 500 6 500 7 500 8 500 U V pressure mbar ...

Страница 116: ...lectrical Connections 25 Exhaust 32 exhaust filter 79 external calibration 89 F FINE 45 FINE only 68 G Gas ballast 32 GROSS 45 H Hand Set 27 31 Helium leak rate 15 Humidity 16 I I CAL 80 INFICON Service 11 information 85 Inlet area background suppression 73 Inlet Port 32 Inlet port 15 Inlet pressure 15 Installation 21 Ion source 15 ion source 39 L language 79 Leak rate 15 loud speaker 50 M Machine...

Страница 117: ... 45 Service Center 11 service contract 10 Setpoint 64 sniff mode 47 sniffer line 38 47 Sniffer mode 15 START Button 35 Startup 34 STOP Button 36 Storage temperature 16 T Temperature ambient 16 storage 16 time axis 51 Time Date 79 Transportation 21 trend mode 51 Trigger 50 Trigger alarm 64 turbo pump 45 turbomolecular pump 39 Type of protection 15 U ULTRA 45 ULTRA only 68 V Vacuum Diagramm 39 Vacuu...

Страница 118: ...118 Declaration of Conformity iina70e appendix fm technical handbook 1408 C Declaration of Conformity ...

Страница 119: ... 498 D 50968 Cologne Germany UNITED STATES TAIWAN JAPAN KOREA SINGAPORE GERMANY FRANCE UNITED KINGDOM HONG KONG Visit our website for contact information and other sales offices worldwide www inficon com Dokument iina70e1 m 1408 ...

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