14
General Information
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For UL1000 Fab use only:
If you plan to detect noxious matters please contact the manufacturer. Rules for
decontamination will be developed then. If the leak detector alreay has been in
contact with dangerous gases please fill the declaration of contamination, too, and
send it to INFICON
before
you send the parts.
Warning
The leak detector must not directly be switched off after the process, in which
condensable gases or steams are pumped, is finished. It must be running (at least
20 minutes) with opend gas ballast valve (see Chapter
) until the oil of the
pump is free from detachted steams.
When not taking care of this instruction there can be a corrosion within the pump.
So damages will occure.
The height of the oil of the pump has to be controlled regularly.
The normal intervalls of changing the oil from the producer have to be taken care
of. See instructions of the rotary vane pump.
Caution
Gases that contain halogen melecules (i.e. fluorine, chlorine), i.e. refrigerants and
SF6, should not be pumped by the leak detector in higher contact rations and over
a longer time period.
The coating layer of the cathodes (at the ion source) can be affected. This could
cause a burn out of the cathodes.
Caution
Condensable gases and steams can attain the inside of the leak detector and
destruct the fore pump.
With the water vapor that is in the air - especially in humid areas or when using
humid or wet test samples - the acceptable compatibility of water vapor or capacity
of water vapor respectively can be exceeded.
STOP
Danger
Dangerous gases pollute the machine.
So you must not use the machine for detecting toxical, acidity, microbiological,
explosive, radioactive or other noxious matters.
