Inficon Transpector XPR 3+, Руководство по эксплуатации

Страница: 90 / 130

6 - 4
Transpector XPR 3+ Operating Manual
6.7 Specifications for Transpector XPR 3+ Low Pressure EM
Option Gas Analysis System
Table 6-1 details the specifications for Transpector XPR 3+ Low Pressure EM.
Table 6-1 Transpector XPR 3+ Low Pressure EM specifications
Mass Range (amu) 1-100
Resolution
(per 1993 AVS Recommended Practice) < 1 @ 10% measured at mass
4, 20, 28 and 40
Mass Filter Type Quadrupole
Detector Type Faraday Cup and Electron Multiplier
Temperature Coefficient
(as FC, 1E-4 Torr of Ar) < 1% of peak height per °C
Mass Position Stability (as FC 1E-4 Torr
of Ar, Constant Temperature) < 0.1 amu over 24 hours**
Peak Ratio Stability (28/40) as FC Better than 2% over 24 hours
Sensitivity (nominal)
As FC at 40 eV / 200 µA Emission
As EM at 70 eV / 400 µA

4E-7 amps/Torr

8E-3 amps/Torr
Minimum Detectable Partial Pressure*
As FC at 40 eV / 200 µA
As EM at 70 eV / 400 µA

1E-9 Torr

6E-12 Torr
Minimum Detectable Concentration 50 ppm
Maximum Operating Pressure
With Pirani Interlock Option
Without Pirani Interlock
Linear Operation
20 mTorr
10 mTorr
10 mTorr
Maximum Sensor Operating
Temperature 150 °C
Maximum Bakeout Temperature
(Electronics Removed) 200 °C
Operating Temperature (Ambient) 5-50 °C
Power Input 20-30 V(dc), 24 V(dc) Typical, Latching,
4-pin Din connector, internally isolated from
system ground
Ethernet Communication Interface Standard: Cat5e Ethernet Cable
Connection