Inficon Transpector CPM, Руководство по эксплуатации

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Transpector CPM Operating Manual
1.7.1.4 Fuse Rating
 3.15 A @ 250 V
~
 Interrupt Current 35 A @ 250 V
~
 Type T (5 x 20 mm)
1.7.1.5 Overvoltage Category
Overvoltage Category II (per EN61010-1:2010)
 Short Term: 1440 V < 2 seconds
 Long Term: 490 V < 5 seconds
1.7.1.6 Electrical Connections
One of the following:
 110 V
~
, three-pronged, grounded plug
 230 V
~
, European style, two-pronged plug with ground contact
NOTE: Do not replace power cord with an inadequately rated cord. Cord must be
rated 10 A or higher.
1.8 Nitrogen Purge Gas (Corrosive System Only)
The corrosive service Turbo Molecular Pump requires 10 to 25 sccm nitrogen
purge gas flow through its bearings to protect the bearings from corrosion and loss
of lubricant by evaporation. The CPM nitrogen regulator range is
10–15 psi (gauge). It is set for 10 sccm flow at the factory.
CAUTION
The corrosive service Turbo Molecular Pump (CVD/Etch),
requires nitrogen purge gas flow whenever the system is
operational.
Normally, dry nitrogen is supplied at the acceptable pressure range for the air
pressure. (See
section 1.10.1 on page 1-13 ). In this manner, dry nitrogen can be
supplied directly to the solenoid valve block and to the pressure regulator via the
supplied 6.35 mm (1/4 in.) tee. The regulator supplies dry nitrogen at a reduced
pressure for the purge.