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6 – 1

Transpector CPM Operating Manual

Chapter 6
Operation

6.1  HexBlock

The HexBlock provides several inlets, a process pressure gauge (CDG) and a 
calibration reference. It allows for up to three pressure ranges, including a high 
conductance inlet that covers various applications such as High Density Plasma 
Etch (HDP), TiN Deposition such as TDMAT, W CVD, or any other semiconductor 
process. Advantages include:

small vacuum path lengths

minimum surface area

interchangeable orifices

multiple process connection options (CF40, KF40 and KF25)

multiple sniffer (capillary) inlet options for sampling the process

The orifices mounted in the HexBlock valves are replaceable. 

Pressure ranges for the two main sampling valves are:

V1

. . .  3 mTorr–10 Torr

V2

. . .  3 mTorr–Atmosphere

CAUTION

The tool and the CPM must be vented before changing 
orifices, except when a tool isolation valve is installed.

Содержание Transpector CPM

Страница 1: ...O P E R A T I N G M A N U A L PN 074 641 P1B Cover Page Transpector CPM Compact Process Monitor ...

Страница 2: ...ok Co All other brand and product names are trademarks or registered trademarks of their respective companies Disclaimer The information contained in this manual is believed to be accurate and reliable However INFICON assumes no responsibility for its use and shall not be liable for any special incidental or consequential damages related to the use of this product Due to our continuing program of ...

Страница 3: ...Declaration Of Conformity Page 1 ...

Страница 4: ...ch written notification Seller shall not be liable for any further damages which could have been avoided if Seller had been provided with immediate written notification THIS WARRANTY IS MADE AND ACCEPTED IN LIEU OF ALL OTHER WARRANTIES EXPRESS OR IMPLIED WHETHER OF MERCHANTABILITY OR OF FITNESS FOR A PARTICULAR PURPOSE OR OTHERWISE AS BUYER S EXCLUSIVE REMEDY FOR ANY DEFECTS IN THE PRODUCTS TO BE ...

Страница 5: ...cations 1 5 1 5 2 Hex Block Orifice Sampling Inlets 1 7 1 5 3 Atmospheric Pressure Capillary Sampling 1 8 1 6 Physical Requirements 1 9 1 6 1 Physical Dimensions 1 9 1 6 2 Weight 1 10 1 6 3 Ventilation Requirements 1 10 1 7 Electrical Power Requirements 1 10 1 7 1 Required Supply Voltage 1 10 1 7 1 1 Acceptable Supply Voltage Range 1 10 1 7 1 2 Required Frequency 1 10 1 7 1 3 Power Rating 1 10 1 7...

Страница 6: ...equirements 1 15 1 13 1 Operating System 1 15 Chapter 2 Installation 2 1 Installation Overview 2 1 2 2 Transpector Electronics Module Heat Guard and Cable Box Installation 2 2 2 2 1 Attach Transpector Electronics Module 2 2 2 2 2 Attach Heat Guard 2 3 2 2 3 Attach Cable Box 2 4 2 3 Sniffer Installation 2 5 2 4 Mounting the Pumping System 2 5 2 4 1 Installing the Support Kit 2 6 2 4 2 Atmospheric S...

Страница 7: ...3 5 Changing the Computer IP Address 3 8 3 5 1 Windows 7 3 8 Chapter 4 How the CPM System Works 4 1 CPM Components 4 1 4 2 Theory of Operation 4 2 4 3 Instrument Overview 4 2 4 3 1 Input Output Aux I O 4 2 4 3 1 1 CPM Aux I O Connector 4 3 4 3 1 2 Two Digital Inputs 4 3 4 3 1 3 One Status Relay Output 4 3 4 3 1 4 One Analog Input 4 4 4 3 2 Ultra High Vacuum System 4 4 4 3 2 1 Foreline Subsystem 4 ...

Страница 8: ... 5 15 5 3 1 3 Electron Energy Effects 5 17 5 3 1 4 A Qualitative Interpretation Guide 5 19 5 3 1 5 Dry Etching Chemistries 5 22 5 3 1 6 Tungsten CVD 5 24 5 3 1 7 Copper MOCVD 5 25 5 3 2 Quantitative Interpretation of Mass Spectra Calculating Partial Pressures 5 26 5 3 3 Additional Information For Interpreting Mass Spectra 5 32 5 3 3 1 Ion Source Characteristics 5 32 5 3 3 2 Scanning Characteristic...

Страница 9: ...ntenance Procedures 7 3 7 3 1 Bakeout of Quadrupole 7 3 7 3 2 Spare Heating Jacket 7 3 7 4 General Instructions For All Repair Procedures 7 4 7 5 Required Tools Materials or Parts 7 5 7 5 1 Tools for Replacing the Filament Kit 7 5 7 5 2 Tools for Replacing the Ion Source 7 5 7 5 3 Tools for Replacing the Electron Multiplier 7 5 7 5 4 Parts Required For Maintenance 7 5 7 6 Changing Diaphragms in th...

Страница 10: ...ing to Transpector CPM 10 2 10 4 RGA Configuration CPM tab 10 4 10 4 1 Valves and Orifices pane 10 5 10 4 1 1 Inlet LP 10 5 10 4 1 2 Inlet HP 10 5 10 4 1 2 1 Inlet HC 10 5 10 4 1 2 2 Inlet Bypass 10 5 10 4 1 2 3 Inlet Calibration 10 6 10 4 2 Gauges pane 10 6 10 4 2 1 Process Gauge 10 6 10 4 3 Bypass Delay Interlock between V2 and V4 10 7 10 5 CPM Configuration Monitor 10 8 10 6 CPM Sensor Acquisit...

Страница 11: ...ion 10 24 10 6 2 3 4 Emission 10 24 10 6 2 3 5 Multiplier 10 24 10 6 2 3 6 Relay 1 10 25 10 6 2 4 Dwell 10 25 10 6 2 4 1 Dwell Mode 10 25 10 6 2 4 2 Dwell Time 10 26 10 6 2 5 Delay 10 26 10 6 2 5 1 Delay Mode 10 26 10 6 2 5 2 Time Between Scans 10 27 10 6 2 5 3 Stabilization Time 10 27 10 6 2 6 Correction 10 27 10 6 2 6 1 Baseline 10 27 10 6 2 6 2 Peak Lock 10 28 10 6 2 7 Inlet 10 28 10 6 2 7 1 Cl...

Страница 12: ...r not specified by INFICON WARNING Risk Of Electric Shock There are no user serviceable components within the Transpector CPM case WARNING Risk Of Electric Shock Potentially lethal voltages are present when the line cord is connected to Transpector CPM WARNING Risk Of Electric Shock Refer all Transpector CPM maintenance to qualified personnel ...

Страница 13: ...y their mass to charge ratio and 3 measuring the quantity of ions at each mass The sensor can indicate the partial pressures of gases characteristic of processes occurring within a vacuum or other vessel and is used to investigate the nature of a process or to monitor process conditions Electronics Module Transpector controls the sensor The electronics module and quadrupole sensor are a matched se...

Страница 14: ...is useful in achieving maximum instrument efficiency while ensuring personal safety NOTE Notes provide additional information about the current topic HINT Hints provide insight into product usage CAUTION Failure to obey these messages could result in damage to the sensor WARNING Failure to obey these messages could result in personal injury WARNING Risk Of Electric Shock Potentially lethal voltage...

Страница 15: ...ts at corrective action The exact wording of any error messages received 1 4 1 Returning Transpector CPM to INFICON Do not return any component of the Transpector CPM to INFICON without first speaking with a Customer Support Representative A Return Material Authorization RMA number must be obtained from the Customer Support Representative If a package is delivered to INFICON without an RMA number ...

Страница 16: ...l Operating Pressure4 2x10 4 Torr 2 6x10 4 mbar System Operating Pressure 1x10 8 Torr 1 3x10 8 mbar 1 2 atmospheres with proper inlet configuration Sensitivity Low Emission High Emission Amps Torr Amps mbar 4x10 6 3x10 6 2x10 5 1 5x10 5 Amps Torr Amps mbar 2x10 6 1 5x10 6 1x10 5 7 6x10 6 Amps Torr Amps mbar 1x10 6 7 6x10 7 5x10 6 3 8x10 6 Minimum Detectable Partial Pressure5 1x10 13 Torr 1 3x10 13...

Страница 17: ...re low emission 4 2x10 4 Torr in the ion source will produce about 1x10 5 Torr in the quadrupole region 5 MDPP at the ion source with EM on and 1 s dwell time 6 Mass 40 contribution onto 41 AMU 7 Zero blast contribution onto 2 AMU 8 Minimal detectable concentration with Krypton in air a 1 s dwell time 9 For 1 Torr orifices and lower Linearity low emission at 0 1 to 2 times the nominal orifice pres...

Страница 18: ...t Orifices V1 LP 3 mTorr no orifice 10 mTorr 15 mTorr 100 mTorr 360 mTorr 1 Torr V2 HP 3 mTorr no orifice 10 mTorr 15 mTorr 100 mTorr 360 mTorr 1 Torr bypass 3 Torr bypass 10 Torr bypass 30 Torr bypass 1 Torr Sniffer bypass 3 Torr Sniffer bypass 7 Torr Sniffer bypass 10 Torr Sniffer bypass 30 Torr Sniffer bypass 100 Torr Sniffer bypass V3 HC 1 mTorr High Conductance ...

Страница 19: ...00 to 1199 mbar Capillary Size and Lengths 1 16 in OD x 1 5 m SS capillary 1 16 in OD x 3 0 m SS capillary Process Gas Consumption 2 6 sccm 300 Torr 400 mbar 17 sccm 760 Torr 1013 mbar 30 sccm 900 Torr 1199 mbar Response Time for Composition Changes response to normal inert gases Capillary Delay t 1 5m 0 3 s t 3 0m 1 s Intermediate Volume Tau 0 7 s CPM Isolation time constant 75 s ...

Страница 20: ...ons Pumping System dimensions 545 x 152 x 378 mm 21 5 x 6 0 x 14 9 in CPM Controller dimensions 195 x 207 x 89 mm 7 7 x 8 1 x 3 5 in Foreline Pump dimensions 218 x 150 x 147 mm 8 6 x 5 9 x 5 8 in NOTE See Figure 2 8 on page 2 10 for cable connections 183 mm 362 mm 7 2 in 14 3 in 378 mm 14 9 in 545 mm 21 5 in 152 mm 6 0 in ...

Страница 21: ...ystem and the fan in the Transpector CPM controller 1 7 Electrical Power Requirements The CPM system components that require AC power input are CPM controller Universal input any voltage in the range specified in section 1 7 1 1 is acceptable Personal computer Universal input any voltage in the range specified in section 1 7 1 1 is acceptable 1 7 1 Required Supply Voltage Except for the AC power i...

Страница 22: ...osive service Turbo Molecular Pump requires 10 to 25 sccm nitrogen purge gas flow through its bearings to protect the bearings from corrosion and loss of lubricant by evaporation The CPM nitrogen regulator range is 10 15 psi gauge It is set for 10 sccm flow at the factory CAUTION The corrosive service Turbo Molecular Pump CVD Etch requires nitrogen purge gas flow whenever the system is operational...

Страница 23: ...itrogen pressure must be at least 58 psi gauge 4 bar 400 kPa 1 9 Exhaust Gas Exhausting gas from the Turbo Molecular Pump is required for corrosive applications With non corrosive applications exhaust the Turbo Molecular Pump in accordance with the facility s requirements The dry Foreline Pump has a 6 35 mm 1 4 in Swagelok tube adapter for an exhaust fitting Dry Compressed Air Dry nitrogen 58 100 ...

Страница 24: ... bar 517 kPa to 552 kPa WARNING Air pressure must not exceed 100 psi gauge 6 9 bar 690 kPa CAUTION Air pressure must be at least 58 psi gauge 4 bar 400 kPa 1 10 3 Moisture Content of Compressed Air Supply The compressed air supply used for inlet valve operation must be dried to the extent that changes in compressed air pressure during operation will not produce condensation in lines solenoids or v...

Страница 25: ...10 8 mbar of base pressure no sample flow after bakeout and cool down This level of vacuum requires a foreline pressure of 10 Torr 13 mbar 1 12 Environmental Requirements 1 12 1 Use Indoor use only 1 12 2 Altitude Range Up to an altitude of 2000 m 6561 ft Contact INFICON for operation at higher altitudes 1 12 3 Maximum Humidity 80 relative humidity no condensation 1 12 4 Pollution Degree Pollution...

Страница 26: ...ates Transpector CPM System Refer to section 1 4 on page 1 4 1 13 1 Operating System FabGuard Explorer software requires either Windows 7 or Windows 8 for proper operation See Chapter 10 or the FabGuard Explorer CD for FabGuard Explorer software operation Table 1 4 Minimum computer requirements for FabGuard Explorer Parameters FabGuard Explorer Requirements Processor 2 4 GHz Dual Core Memory 4 GB ...

Страница 27: ... in this chapter 1 Install the Transpector electronics module heat guard and cable box See section 2 2 on page 2 2 2 Install sniffers if applicable See section 2 2 on page 2 2 3 Mount CPM to process tool if applicable See section 2 4 on page 2 5 4 Install the CPM controller and connect communications cables from the CPM controller to the Transpector cable box See Figure 2 6 on page 2 8 5 Connect c...

Страница 28: ...ed onto the sensor 1 The Transpector sensor mounting connector assembly includes a mounting nut and an O ring Place the nut over the end of the sensor and roll the O ring back to the groove on the sensor When the mounting nut is tightened the O ring compresses making a tight fit on the sensor housing 2 Note the recessed area on the sensor feedthrough and the ground tab on the Transpector electroni...

Страница 29: ...pector electronics module and the mounting nut using the two screws provided 3 Attach calibration reference standard bracket to the heat guard and secure the bracket to the heat guard with the provided screw Figure 2 2 Heat Guard and Calibration Reference Bracket WARNING High Temperature Metal surfaces will be hot when heating jacket is on Attach heat guard to avoid risk of burns from metal surfac...

Страница 30: ...re 2 3 To connect the cable box to the electronics module 1 Insert the Ethernet jack on the cable box into the Ethernet port on the electronics module 2 Carefully insert the 15 pin Aux I O and 62 pin extended I O connectors until they are secure and the Ethernet connector snaps into place 3 Secure the cable box on the electronics module with the three provided screws Figure 2 3 Transpector electro...

Страница 31: ...let Normally there is no need to use an additional isolation valve between the Hexblock and the process chamber If an isolation valve is needed and the CPM does not have a CDG interlock for the Hexblock inlet it is essential to pump down the volume between the Hexblock and isolation valve from the process side before the CPM is turned on If this volume is not pumped down properly filament failure ...

Страница 32: ...3 Install the right angle bracket onto the support leg using the T nut and bolts provided Finger tighten 4 Install the second bolt and T nut into the bracket leaving it loose 5 Slide the T nut into the CPM foreline block groove and adjust the position of the leg so that it is perpendicular to the floor with the adjustable foot about 12 7 mm 1 2 in from the floor 6 Tighten all hardware 7 Install th...

Страница 33: ...d with support frame for atmospheric sampling 2 5 CPM Controller Installation The CPM controller is standard 1 2 rack 2U height rack mountable The CPM controller is provided with feet and can sit on the floor or table Cable connections on the CPM controller are Cable bundle that includes the CPM interface cable connects to the cable box on the back of the Transpector electronics module heater cabl...

Страница 34: ...ting Manual The back panel of the CPM controller is shown in Figure 2 6 Connections are shown in Figure 2 8 Figure 2 6 CPM controller rear panel CPM Interface Foreline Power Heater Fuse Main Power Electrical Input On Off Ground ...

Страница 35: ...1 is available for User I O See section 4 3 1 1 on page 4 3 for additional information about Aux I O Turbo pump cable 600 1475 P1 connects to the turbo pump controller Pirani cable 600 1474 P1 connects to the foreline Pirani gauge Solenoid cable 600 1476 P1 connects to the solenoid valve block as well as the digital pressure switch CDG cable 600 1473 P1 connects to the CDG gauge CPM cable 600 1472...

Страница 36: ...5 9 Gnd 600 1154 PX 600 1480 PX 1 3 5 Or 10 m Cable Bundle 600 1477 Gx 922 205 GX Hex Block Inlet CDG 600 1475 P1 600 1474 P1 600 1473 P1 600 1476 P1 Turbo Molecular Pump Foreline Block Turbo Ctrl Valve Block Pressure Switch Fan Pirani Transpector CPM Cable Box Cable Box Bottom View IO 600 1472 P1 600 1473 P1 600 1476 P1 600 1485 P1 600 1486 P1 600 1474 P1 600 1475 P1 Ethernet 600 1130 PX ...

Страница 37: ...tandards such as SEMI S6 0707E for exhaust gas guidelines WARNING Proper exhaust connections must be installed when sampling toxic corrosive or any hazardous gases to protect the environment from lethal levels of gas CAUTION If a customer supplied foreline pump is used it must provide a continuous pressure below 10 Torr Figure 2 9 Two stage foreline pump components 2 8 Software Installation Refer ...

Страница 38: ...ly set by a host or by a server on a network Dynamic IP addresses can be set through Dynamic Host Communication Protocol DHCP NOTE When using Static IP addresses on a large network e g on a company network a block of addresses should be reserved for static IP address use and prohibited from being assigned by the DHCP server host This will avoid duplicate IP address conflicts CAUTION Use static IP ...

Страница 39: ...ices are on different subnets 3 3 Transpector CPM IP Address The default Transpector CPM IP address is 192 168 1 100 with a subnet mask of 255 255 0 0 NOTE When connecting to an existing local network there must be a static IP address for each Transpector RGA Contact the network administrator for IP address assignments Two methods of changing the Transpector CPM IP address are available INFICON Ma...

Страница 40: ...to be installed Double click INFICONMassSpecSearch exe The IMSSU will display See Figure 3 1 Figure 3 1 INFICON mass spectrometer search utility The IMSSU detects every Transpector RGA installed on the network regardless of IP address The IMSSU will run automatically or it can be manually started by clicking Search Clears List The display shows Genus MPCPM for Transpector CPM sensors Serial Number...

Страница 41: ... 3 3 Figure 3 3 TCP IP Properties window The TCP IP Properties window displays the Transpector CPM MAC Address Transpector CPM IP address Change To text box to enter a new Transpector CPM IP address DHCP On or DHCP Off selection CAUTION Set DHCP Off so the IP address cannot be automatically assigned 2 Type the new IP address in the Change To text box 3 Click Apply Transpector CPM will automaticall...

Страница 42: ...e device The indicator will flash for up to 60 seconds and then illuminate Find Device Off selected within 60 seconds after selecting Find Device On will stop the search 3 3 1 4 Show Settings Click Show Settings to display multiple settings useful for troubleshooting The display shows Serial Number Gateway IP Address DHCP Status MAC Address Description Subnet Mask Name Description Structure Versio...

Страница 43: ... address of the host computer used to control Transpector CPM must have a subnet mask of 255 255 0 0 and a network prefix of 192 168 x x If this is not the case change the computer IP address to match the network prefix of Transpector CPM For example giving the computer an IP address of 192 168 1 101 will allow Transpector CPM to communicate directly with the computer See section 3 5 Changing the ...

Страница 44: ...be created when multiple Transpector CPM sensors are connected to a single host computer instead of an existing local area network Transpector CPM must be installed on either a router or Ethernet switch The router or switch is connected to the host computer through the LAN port of the router switch 3 4 2 2 Installing Multiple Transpector CPM on an Existing Local Network Use an Ethernet switch inst...

Страница 45: ...ss to allow for communication between the host computer and Transpector CPM 3 5 1 Windows 7 NOTE Changing the IP address of the host computer requires administrator rights 1 Click Start then click Control Panel See Figure 3 4 Figure 3 4 Start menu 2 In the Network and Internet group click View network status and tasks See Figure 3 5 Figure 3 5 View network status and tasks ...

Страница 46: ...hange adapter settings See Figure 3 6 Figure 3 6 Change adapter settings 4 If the host computer is connected directly to Transpector CPM through the Ethernet port of the computer right click Local Area Connection and select Properties See Figure 3 7 Figure 3 7 Changing adapter settings ...

Страница 47: ... Manual 5 Click Internet Protocol Version 4 TCP IPv4 6 Click Properties See Figure 3 8 Figure 3 8 TCP IPv4 7 On the TCP IPv4 properties window click Use the following IP address See Figure 3 9 Figure 3 9 Use the following IP address ...

Страница 48: ...or CPM IP address See Figure 3 10 9 In Subnet mask type 255 255 0 0 10 Click OK Figure 3 10 Changing the computer IP address 11 The IP address will now be set to the manual IP address chosen in step 7 12 Exit all menus 13 Connect to Transpector CPM 14 To change the IP address back to its default settings follow steps 1 through 6 and reset the properties to their original settings ...

Страница 49: ...7 5 4 3 2 1 14 12 11 9 10 6 1 Process Pressure Gauge 2 Process Connection CF40 KF40 or KF25 3 HexBlock Inlet 4 Optional Calibration Reference 5 CPM Sensor inside manifold 6 Sensor Manifold and Heater 7 CPM Transpector Electronics Module 8 Pressure Switch 9 Valve Solenoids 10 Nitrogen Regulator for nitrogen purge and valve operation 11 Integrated Foreline Block 12 UHV Turbo Molecular Pump 13 Foreli...

Страница 50: ... with the source at 2E 4 Torr the pressure in the manifold is approximately 1 0E 5 Torr Pressure converters use orifices and or capillaries to reduce the partial pressure of the gas mixture typically by a fixed proportion with minimum mass discrimination An orifice a small disk with a defined hole acts as a conductance limitation When both the volume and the high vacuum pump speed are constant the...

Страница 51: ... to Pin 15 Ground will turn off the emission CAUTION Controlling emission through digital inputs bypasses all software and hardware interlocks When using digital inputs for controlling Transpector CPM emission develop an interlock that will not allow the emission to turn on if the pressure is too high for operation of Transpector CPM 4 3 1 3 One Status Relay Output One status relay output is activ...

Страница 52: ... process by pressure difference provide low pressure for optimum operation of the sensor A dry pumping system comprised of a Turbo Molecular Pump and Foreline Pump is used to minimize hydrocarbons in the residual gas background The Turbo Molecular Pump provides a high compression ratio between the high vacuum side and the Foreline Pump side for all gases including hydrogen Hydrogen is the major re...

Страница 53: ... C dual element silicone rubber pad heaters with silicone rubber foam insulation The CPM controller supplies power to the heaters Heaters are software controlled at low temperature 90 C or high temperature 150 C WARNING High Temperature During or immediately after bakeout the heating jacket and metal surfaces in the vicinity of the heating jacket are hot These surfaces exceed 100 C at the maximum ...

Страница 54: ...n corrosive systems Automatically opened and closed by the start stop of the pumping system V1 Low pressure orifice valve for the HexBlock or the capillary sampling option Configured depending on the application Typically used for background monitoring V2 High pressure orifice valve for the HexBlock or the capillary sampling option Typically used for process pressure sampling User configured depen...

Страница 55: ... The magnitudes of these signals are used to determine the partial pressures i e amounts of the respective gases The Transpector electronics module mounts to the sensor and provides all of the requirements for operating the sensor making the appropriate ion current measurements communicating to a computer and sending the resulting output to the computer The Transpector electronics module cable box...

Страница 56: ...e conductance CProcess Orifice determines the orifice diameters needed to produce this flow for each process pressure A selection of orifice diameters are available for reducing pressure for a multi decade range of maximum process pressures ranging 0 001 100 Torr For example a 10 Torr orifice has a 20 micron diameter hole to produce approximately 2x10 4 Torr at the CIS when the process has 10 Torr...

Страница 57: ...ce V1 and high vacuum V3 923 604 G11 Hex Block Inlet with one orifice V2 with high pressure by pass V4 and high vacuum V3 923 604 G12 Hex Block Inlet with two orifices V1 and V2 923 604 G13 Hex Block Inlet with two orifices V1 and V2 with high pressure by pass V4 923 604 G14 Hex Block Inlet with two orifices V1 V2 and high vacuum V3 923 604 G15 Hex Block Inlet with two orifices V1 V2 with high pre...

Страница 58: ...rifice 923 706 G8 100 mTorr orifice 923 706 G5 360 mTorr orifice 923 706 G7 1 Torr orifice 923 706 G4 3 Torr orifice 923 706 G9 10 Torr orifice 923 706 G3 Table 4 6 Hex Block orifices sniffers and capillaries V2 for high pressure typically process pressure Size of Orifices Sniffers and Capillaries Part Number 10 mTorr orifice 923 706 G6 15 mTorr orifice 923 706 G8 100 mTorr orifice 923 706 G5 360 ...

Страница 59: ...707 G4 300 Torr sniffer requires high pressure by pass 5 cm length 923 707 G5 30 Torr sniffer requires high pressure by pass 30 5 cm length 923 707 G6 10 Torr sniffer requires high pressure by pass 30 5 cm length 923 707 G7 Table 4 6 Hex Block orifices sniffers and capillaries V2 for high pressure typically process pressure Size of Orifices Sniffers and Capillaries Part Number ...

Страница 60: ...n the process to diffuse through the gas matrix and arrive at the sampling orifice This diffusion time is proportional to the process pressure and the square of the distance from the process to orifice This sampling method effectively shortens the diffusion distance from process change to the sampling orifice by drawing a small quantity 10 sccm of the process gas through the sampling valve and byp...

Страница 61: ...that is 10 Torr at the closed ion source See Figure 4 6 The exit orifice to the pumping line limits the flow to the Turbo Molecular Pump and establishes the interstage pressure The capillary is inserted through the Swagelok connection fitting It is locked in place and sealed by tightening the Swagelok nut with a re usable ferrule Figure 4 6 Dual Capillary sampling option shown with calibration ref...

Страница 62: ...by mass 18 continued bakeout is required to reduce water vapor 4 6 2 Avoiding Trapped Gas when Sampling Valves are Closed When V2 is closed the sampled process pressure is trapped between V2 and O2 This gas will pump out in a few minutes It is best to keep V2 open until the process pressure is evacuated Then open V1 to scan the background spectrum of the process vacuum system CAUTION Close the sam...

Страница 63: ...ects levels of impurities in process gases that are significantly lower at sub ppm levels for many components than those detected by open ion source RGA analyzers 5 2 Sensors The three main components of the Transpector CPM sensor are ion source ionizer quadrupole mass filter detector electron multiplier These components are mounted on an electrical feedthrough flange bolted to the vacuum manifold...

Страница 64: ...tects only positive ions Once a molecule is charged ionized electric fields can be used to manipulate the molecule The default filament is made of tungsten Tungsten offers the best resistance to aggressive gases particularly those containing fluorine and chlorine A yttria coated iridium filament can be used in oxygen or water vapor heavy environments that will quickly oxidize the tungsten filament...

Страница 65: ...r are pulled away by the potential on the focus lens and formed into an ion beam The focus lens is also called an extractor since it extracts the ions from the region in which they are created The focus lens focuses the ion beam into the hole in the source exit lens To attract positive ions the focus lens is biased negatively with respect to the anode The potential on the source exit lens is negat...

Страница 66: ...etween the center of the square array and the closest rod surface is known as the quadrupole radius r0 Ideally the rod should have a hyperbolic shape towards the center of the assembly rather than round If the ratio of the round rod radius to r0 is equal to 1 148 the resulting electric field is a reasonably good approximation of the desired hyperbolic shape Opposite rods are electrically connected...

Страница 67: ... the mass filter can be made to discriminate against both high and low mass ions The ion energy directed along the Z axis of the mass filter is dependent on the difference between the potential at which the ions were formed the anode voltage and the pole zero The ion energy is usually only slightly modified by the electric field the fringing field between the source exit aperture and the quadrupol...

Страница 68: ...mass filter for a mixed beam of ions rejecting those of both high and low mass while passing those of an intermediate mass The selectivity of the mass filter is expressed in terms of resolution R which is numerically given by the ratio of the center mass M to the width M both in AMU of the pass band Since the number of the ions passed by the filter falls off gradually as the edge of the pass band ...

Страница 69: ...f unseparated ions is detected called the zero blast See Figure 5 4 Zero blast will interfere with the observation of masses 1 and 2 in the higher pressure range of the RGA i e 1E 6 Torr to 5E 4 Torr when significant quantities of higher mass ions are present The zero blast contribution to the mass 2 signal intensity can be between 5 ppm and 100 ppm depending on the mass range of the RGA Figure 5 ...

Страница 70: ...d surface which is at a more positive potential where additional electrons are generated This process repeats itself until a pulse of electrons emerges from the output of the EM and is collected on a Faraday Cup The result is that as many as a million electrons or more can be produced by each incident ion The current output from an EM detector is negative due to this pulse of electrons The ratio o...

Страница 71: ...EM FC performance does not degrade when exposed to air and does not need to be stored under vacuum The maximum operating temperature for the CDEM FC detector is 150 C It can be baked out at 300 C with the high voltage off The CDEM FC detector is slightly slower to recover after exposure to excessive input or output currents It may take a bit longer to stabilize its gain after the high voltage is c...

Страница 72: ...tamination Make sure diffusion pumped vacuum systems are properly trapped to reduce oil back streaming Make sure turbomolecular pumped systems are interlocked to eliminate mechanical pump oil back streaming through a nonspinning turbo pump EM gain reduction from these kinds of problems can range from 50 to more than 90 The initial gain of the EM is generally high enough to accommodate some degrada...

Страница 73: ...ass spectrum is a pattern of peaks on a plot of ion intensity as a function of ion mass to charge ratio Each chemical substance has a characteristic mass spectrum Different instruments will give slightly different spectra for the same substance The particular characteristics of the ionizer mass filter detector and the manner in which the sample is introduced into the mass spectrometer all influenc...

Страница 74: ...5 12 Transpector CPM Operating Manual Figure 5 6 Air mass spectrum N N2 O2 Ar O H2O ...

Страница 75: ...ly charged ions are possible provided the incident electron has enough energy Reactions 3 through 8 are examples where the original molecule is broken into fragments at least one of which is positively charged negative ions can also be produced in this manner Only the positive ion fragments are observed the neutral uncharged fragments are not detected The mass spectrum obtained when the parent mol...

Страница 76: ...cule is comprised of two atoms of the same element the typical partial pressure analyzer cannot distinguish between the singly charged one atom fragment ion and the doubly charged two atom molecular ion which will both have the same mass to charge ratio Refer to Figure 5 7 The peak at 28 AMU is the parent ion N2 It is not discernible from this spectrum if the peak at 14 AMU is from N or N2 2 The 1...

Страница 77: ... 21 18 mass 131 26 89 mass 132 10 44 mass 134 and 8 87 mass 136 Isotope ratios like fragmentation patterns aid in recognizing specific materials Under normal partial pressure analyzer ionization conditions the peak height ratios for the various isotopes of an element will be the same as the ratios of their natural abundance s For example the probability of ionizing the mass 35 isotope of chlorine ...

Страница 78: ... 19 100 0 Ne 20 90 92 21 0 257 22 8 82 Na 23 100 0 Al 27 100 0 Si 28 92 27 29 4 68 30 3 05 P 31 100 0 S 32 95 06 33 0 74 34 4 18 36 0 016 Cl 35 75 4 37 24 6 Ar 36 0 337 38 0 063 40 99 600 Table 5 2 Isotope ratios continued Isotope Ratios Element Mass No Relative Abundance ...

Страница 79: ...ons produced rises steeply with energy until a maximum is reached at about 55 eV As the electron energy rises above this level the rate of Ar production slowly decreases Typically in mass spectrometry electron impact ionization is carried out at an electron energy of 70 eV for two reasons 70 eV is above the minimum energy required to produce at least some positive ions from any sufficiently volati...

Страница 80: ...water vapor the OH at 17 AMU could be used instead Unfortunately OH at 17 AMU from water vapor has an intensity of only 25 of that of the parent ion H2O To detect several ppm of water vapor would require the detection of less than one ppm of current at 17 AMU This is difficult because there will be some tailing of the 510 ppm 36 Ar2 peak at 18 AMU onto 17 AMU The best solution to this argon water ...

Страница 81: ...ry to limit the electron emission current to no more than 200 μA in order to not overpower the filament Overpowering the filament will result in shortened filament life 5 3 1 4 A Qualitative Interpretation Guide A partial pressure analyzer identifies unknown substances by interpreting three characteristics fragmentation patterns multiply charged ions and isotope ratios Simple spectra are easy to i...

Страница 82: ... 11B DI 22Ne Rare 11BF3 BCl3 12 C carbon carbon monoxide F carbon dioxide F 13 CH 13 C methane F carbon isotope 14 N CH2 nitrogen methane F or Note 1 15 CH3 methane F or Note 1 16 O CH4 NH2 oxygen or carbon monoxide F ammonia 17 OH NH3 water F ammonia F 18 H2O water 19 F fluorine or freon F 20 Ar2 Ne HF argon Dl neon hydrofluoric acid 21 22 22 Ne CO2 neon DI CO2 23 24 C2 See Note 1 25 C2H See Note...

Страница 83: ...hydrocarbons 42 C3H6 See Note 1 hydrocarbons 43 C3H7 CH3CO Note 1 acetone F or methyl ethyl ketone F 44 CO2 C3H8 Carbon dioxide See Note 3 45 CH3CH2O ethanol F or isopropyl alcohol F 46 CH3CH2OH ethanol P 47 C35 Cl See Note 2 48 HC35 Cl SO See Note 2 sulfur dioxide F 49 C37Cl See Note 2 50 C37 Cl CF2 C4H2 See Note 2 freon F Note 3 NOTE 1 Fragments of several hydrocarbons such as mechanical pump oi...

Страница 84: ...able 5 5 is not an all inclusive list There may be other important species such as highly reactive intermediates which are not included The list of monitored masses for each process is a general guide Significant spectral overlap exists for example COF2 and SiF4 or CO CO2 and N2 which must be considered when interpreting the data Furthermore many cracking patterns for the important species are ver...

Страница 85: ...9 281 38 20 18 17 32 16 28 14 257 259 86 67 105 48 52 33 71 279 281 38 20 18 17 28 14 32 16 257 259 86 67 105 48 SiO2 and boro phospho s ilicate glass CHF3 CF4 CHF3 O2 CHF3 CF4 O2 SiF4 CO2 HF H2O COF2 C2F6 51 69 69 50 32 16 85 66 47 44 28 16 12 20 18 17 47 66 119 Table 5 5 Dry etching chemistries continued Etched Material Typical Reagents Important Species Monitored Masses ...

Страница 86: ...fluorides and oxides which except for WOF4 are nonvolatile and can result in particle generation The presence of Si3N4 CF4 O2 CF4 O2 SiF4 NF3 CO2 HF H2O COF2 N2 CO 69 50 31 32 16 85 66 47 52 33 71 44 20 18 17 47 66 28 14 28 12 Poly Si BCl3 Cl2 HBr Cl2 O2 BCl3 Cl2 SiCl4 HCl H2O HBr Cl2 O2 SiCl4 SiBr4 SiBrXCl 1 X H2O HCl 81 83 116 118 46 48 70 72 74 133 135 170 36 38 18 17 80 82 70 72 74 32 16 170 1...

Страница 87: ...Oxygen and water vapor are unwanted contaminants Table 5 6 Tungsten CVD materials of interest Chemical Type Monitoring Mass WF6 reagent 279 H2 reagent 2 SiH4 reagent 30 31 32 Ar reagent 40 N2 reagent 28 interference from SiH4 HF product 20 at 35 eV O2 contaminant 32 interference from SiH4 H2O contaminant 18 at 35 eV WOF4 by product 257 Table 5 7 Copper MOCVD materials of interest Chemical Types Mo...

Страница 88: ...re analyzer The substance dependent part is called the material factor Mab The instrument dependent part is called the analyzer factor Ab and depends primarily on the ion mass b Therefore the original equation 4 can therefore be rewritten as follows 5 The material factor Mab depends on the fragmentation pattern for the particular substance the fragmentation pattern for a reference gas usually nitr...

Страница 89: ...a Base by Heller and Milne and an extensive library of spectra is available from the National Institute of Standards and Technology Table 5 8 lists the fragmentation factors FF for the major peaks for selected substances NOTE Actual fragmentation factors vary significantly depending especially on the ionizer electron energy and mass filter turning For best accuracy measure fragmentation factors wi...

Страница 90: ...92 24 40 87 krypton Kr 39 07 20 13 84 45 65 04 86 13 63 03 benzene C6H6 82 10 78 43 83 10 trichlorethylene C2HCl3 51 09 130 17 52 09 methane CH4 95 16 50 08 16 44 132 16 15 39 97 10 carbon dioxide CO2 14 09 60 08 44 86 13 05 28 06 12 02 water H2O 16 05 17 01 18 77 12 01 17 21 methanol CH3OH 16 02 carbon monoxide CO 31 31 28 87 32 21 xenon Xe 12 08 29 07 132 26 16 04 28 04 129 26 29 01 131 22 neon ...

Страница 91: ...essure of the substance of interest The ratio of the gauge reading to the known true pressure is the relative ionization probability To determine the true pressure use a gauge which is gas species independent e g a capacitance manometer or a gauge with a known sensitivity factor e g a spinning rotor gauge Table 5 9 Ionization Probabilities For Some Common Substances Substance Formula Relative Ioni...

Страница 92: ...t mass 28 for nitrogen is the EM output current divided by the Faraday mode output current under otherwise identical conditions The multiplier gain is a strong function of the high voltage applied The sensitivity of the instrument S is the Faraday mode ion current from a given pressure of pure nitrogen measured at mass 28 and is typically expressed in A Torr cyclohexane C6H12 6 4 propane C3H8 3 7 ...

Страница 93: ... as the relative ion gauge sensitivity as shown in dimensionless TFb transmission factor the fraction of total ions at mass b which pass through the mass filter relative to ions with a mass of 28 AMU nominally TFM 28 M dimensionless DFab detection factor for mass b ions from substance a relative to nitrogen at 28 AMU assumed to be 1 00 for Faraday detectors but varies for EM detectors dimensionles...

Страница 94: ...mposition of the gas in the vacuum chamber Significant temporary pumping effects will frequently occur following degassing the ion source Reactions involving gas molecules on surfaces of the analyzer can result in a change of composition Gases can either be consumed by the surfaces or produced by the surfaces One example of gas consumption is the reaction of oxygen with a hot filament particularly...

Страница 95: ...nization Although the total ion yield that is the sum of ions of all masses is electron energy and ionizer dependent a reasonable estimate for the number of ions produced relative to a standard usually nitrogen in a partial pressure analyzer is the relative ionization gauge sensitivity 5 3 3 2 Scanning Characteristics Quadrupole mass filters can also exhibit mass discrimination characteristics dep...

Страница 96: ...peaks in a mass spectrum cannot exceed 1 00 The sum can be less than 1 00 if only some of the peaks are listed either there are many peaks or some of the ions produced lie outside the mass range of the particular instrument used The data presented in Table 5 8 on page 5 28 are typical fragmentation factors for some common gases at an electron energy of 70 eV These fragmentation factors can vary co...

Страница 97: ...as TDMAT W CVD or any other semiconductor process Advantages include small vacuum path lengths minimum surface area interchangeable orifices multiple process connection options CF40 KF40 and KF25 multiple sniffer capillary inlet options for sampling the process The orifices mounted in the HexBlock valves are replaceable Pressure ranges for the two main sampling valves are V1 3 mTorr 10 Torr V2 3 m...

Страница 98: ...To prevent pressure bursts to the RGA V4 should open before V2 to ensure the pressure is correct for the V2 orifice When V2 is closed V4 should remain open for several seconds to pump out residuals left from sampling the process V5 Calibration Reference Used for mass tuning and as a sensitivity reference providing a means to tune the RGA a reference for adjusting the EM voltage a way to check whet...

Страница 99: ...system does not allow other valves to be opened with the calibration reference to ensure that no calibration mix enters the tool NOTE Refer to the software operating manual for more information regarding Mass Tuning Results using FabGuard Explorer or FabGuard with this calibration mixture may be different than shown above due to the programming of the ionization probability and material factors Ta...

Страница 100: ...a high molecular weight and a vapor pressure of 100 Pa 1 Torr at 22 C 71 6 F The mass spectrum is given as mass and characteristic peak intensity in Table 6 3 The masses of abundant peaks can be used with the Tune option of FabGuard Explorer to calibrate the mass scale particularly for 200 AMU and 300 AMU sensors Table 6 3 Mix 2 FC5311 reference mass spectrum 70 eV peak intensity ranging 1 100 Mas...

Страница 101: ...tware interlock will turn on the heater only when the Turbo Molecular Pump is at normal speed 72 000 RPM There are two temperature settings low 90 C high 150 C l 6 3 Pumping System The pumping system is preconfigured at the factory The pumping system can be reconfigured with a different Foreline Pump either System Controlled or customer supplied Turbo Molecular Pump either standard or corrosive In...

Страница 102: ...lecular Pump There are two types of pumping systems Standard non corrosive and corrosive The standard Turbo Molecular Pump is used in both applications The corrosive pump configuration is selected for applications such as CVD or Etch or whenever corrosive gases are being sampled The purge valve is automatically opened when the CPM Turbo Molecular Pump is operating The corrosive service high vacuum...

Страница 103: ...urned on and closes when the pump is shut down Over pressurization is avoided by pressure relief of the Foreline Pump valves Over pressure exits the exhaust There is no software control of the nitrogen purge valve it is coupled with Foreline Pump operation 6 5 Filament Control 6 5 1 Interlock On pump down emission will automatically turn on when the Turbo Molecular Pump reaches full speed 90 000 R...

Страница 104: ...er the target gas pressure in the CIS that produces the total pressure measurement Using the process gas pressure measured by the CDG or other gauge and the conductance of the orifice in use the PCIS Hi P and PCIS Lo P values can be calculated to use the automatic TW 32 Total Pressure Calibration software 6 5 3 Filament Lifetime Tungsten filament material is used in corrosive applications The melt...

Страница 105: ...th oxygen or water vapor partial pressure in Torr The graph predicts a filament lifetime of approximately 200 seconds at 1 Torr the maximum pressure at which Transpector can maintain electron emission Figure 6 1 Tungsten Filament MTBF At 1 Torr at the filament the pressure inside the anode cylinder will be approximately five times higher assuming the bulk of the gas load is entering the CPM manifo...

Страница 106: ...off NOTE In Region II there is a six second delay in turning emission on and off At 5 Torr in Region III there is no overpressure and no emission error but the filament would last only hours At 100 Torr the filament would be destroyed instantly Figure 6 2 CPM over pressure trip calculations CPM Over pressure Trip Calculations 1 E 11 1 E 10 1 E 09 1 E 08 1 E 07 1 E 06 1 E 05 1 E 04 1 E 03 1 E 02 1 ...

Страница 107: ... proper pressure for the CPM to function If the pressure has decreased below 58 psi 3 999 bar 399 9 kPa or exceeds 100 psi 6 895 bar 689 5 kPa the CPM system will shut itself down Figure 6 3 Location of pneumatic digital pressure switch and gauge 6 6 1 Setup Procedure This setup procedure assumes no pressure is applied psi is the pressure unit Figure 6 4 depicts the location of the display and con...

Страница 108: ...lt is psi 5 Change to the desired Pressure Unit by pressing or Display Color 6 Press The display will show the Display Color Mode The default is Sor Red on 7 To change the Display Color Mode press or Operating Mode 8 Press The display will show the current operating mode The default is und 9 To change the Window Mode press or to select und Window Mode Output Mode 10 Press The display will show the...

Страница 109: ... limit 16 Press to change the lower limit to 58 psi 16a The least significant digit will flash and can be changed using or 16b Press to set the digit to the desired number 16c The next digit will flash 16d Change the digit using either or then press 16e Continue this process until 58 0 is achieved 16f Press The display will flash 58 0 with a vertical bar showing to the left of the 58 0 17 Press Th...

Страница 110: ...d the display color should illuminate green In normal operating conditions the display is red when the pressure is below 58 psi or above 100 psi Interlocks ensure that the system will not be damaged by an air pressure failure and the CPM will shut itself safely down after ten seconds 6 6 3 How to Lock and Unlock the Settings To lock the settings to protect them from accidental change 1 In Measurem...

Страница 111: ...ection 1 4 How to Contact INFICON on page 1 4 7 2 Safety Considerations WARNING If Transpector CPM is used in a manner not specified by the manufacturer the protection provided by Transpector CPM may be impaired WARNING Transpector CPM maintenance should only be performed by qualified personnel WARNING There are no user serviceable parts inside the Transpector electronics or the CPM controller mod...

Страница 112: ... 3 Electrical Voltages The Transpector CPM does not present electrical hazards when enclosed and grounded according to the specifications given in the installation instructions WARNING Risk Of Electric Shock The Transpector electronics and CPM controller modules should never be operated with their covers removed Hazardous electrical voltages present a shock hazard Such operation should not be atte...

Страница 113: ...lament Replacement on page 7 18 and do section 7 7 3 Transpector Sensor Ion Source Replacement on page 7 20 If the problem remains contact INFICON Refer to section 1 4 How to Contact INFICON on page 1 4 CAUTION When heating the sensor above 200 C the electronics module and the signal contact must be removed from the sensor 7 3 2 Spare Heating Jacket INFICON offers several heating jackets to help i...

Страница 114: ...es CAUTION Do servicing in a clean well illuminated area WARNING Obey all cautions and warnings CAUTION Wear clean nylon lint free lab gloves or finger cots Do not touch the vacuum side of any component with unprotected fingers CAUTION Use clean tools for sensor disassembly and assembly ...

Страница 115: ...1 16 in flat blade screwdriver 2 Phillips head screwdriver Precision pliers 7 5 3 Tools for Replacing the Electron Multiplier 1 16 in flat blade screwdriver Phillips head screwdriver 1 5 x 50 mm hex driver 2 0 x 75 mm hex driver Precision pliers Non Metallic tweezers 7 5 4 Parts Required For Maintenance filament kit ion source kit diaphragm kit replacement valves orifice gaskets VCR gaskets copper...

Страница 116: ... The foreline pump diaphragm disks valve seals valve disks and O rings must be replaced every 8000 hours of operation 7 6 2 Diaphragm kit PN 923 418 G1 Figure 7 1 Diaphragm kit contents Valve Disk Valve Seal Thick Thin Diaphragm Disk O ring O ring Diaphragm Disk Valve Seal Valve Disk Thin O ring Thick O ring ...

Страница 117: ...1 Using two 9 16 in open end wrenches remove the interstage tubing between the two pump heads See Figure 7 2 Figure 7 2 Removing the interstage tubing 2 Using a 1 Phillips screw driver remove the cam cover from the top side of the foreline pump See Figure 7 3 Figure 7 3 Removing the cam cover Interstage Tubing Cam Cover ...

Страница 118: ...ery substance indicates bearing wear requiring pump replacement 4 The diaphragm disks are screwed into the cams See Figure 7 4 Figure 7 4 Foreline pump cams 5 Unscrew the head covers of the foreline pump using a 3 mm hex key See Figure 7 5 Figure 7 5 Removing the head cover Spacers Diaphragm Disk Cams Head Cover ...

Страница 119: ...7 9 Transpector CPM Operating Manual 6 Remove the foreline pump head cover and diaphragm plate See Figure 7 6 Figure 7 6 Diaphragm and diaphragm plate Thin O ring Diaphragm Plate Diaphragm Head Cover ...

Страница 120: ...ad cover See Figure 7 7 NOTE Take note of the orientation of the valves in the head cover and diaphragm plate They must be reassembled in exactly the same orientation Figure 7 7 Diaphragm plate separated from head cover Valve Seal Valve Disk Head Cover Diaphragm Plate Thick O ring ...

Страница 121: ...ng Manual 8 Remove the old valve disks valve seals and O rings from both sides of the diaphragm plate See Figure 7 8 Figure 7 8 Removed valve seals valve disks and O rings Diaphragm Plate Diaphragm Side Diaphragm Plate Valve Side ...

Страница 122: ... head cover and on either side of the diaphragm plate CAUTION Read and understand the entire Methanol Material Safety Data Sheet Follow the precautions specified in the MSDS 10 Rotate the diaphragm disk counterclockwise to unscrew the diaphragm disk from the cam If necessary carefully use a flat head screwdriver to pry up the diaphragm disk See Figure 7 9 Figure 7 9 Unscrew diaphragm disk Rotate C...

Страница 123: ...on the new replacement diaphragm in exactly the same order as they were on the old diaphragm See Figure 7 11 CAUTION The spacers cam diaphragm disks and electric motor are balanced at the manufacturer for optimal performance Therefore one side of the diaphragm may have a different number of spacers than the other in order to achieve balance To maintain the balance the original spacers must be tran...

Страница 124: ...diaphragm 13 Clean the channel that the diaphragm disk is seated in with methanol and lint free wipes See Figure 7 12 14 Screw the diaphragm disk with original spacers into the cam screw hole See Figure 7 12 CAUTION Screw in the diaphragm disk tightly A loose disk can damage the pump ...

Страница 125: ...he thin O ring into the groove on the diaphragm side of the diaphragm plate See Figure 7 13 Figure 7 13 Thin O ring 16 Carefully place the diaphragm plate over the diaphragm head so that the screw holes line up See Figure 7 14 Diaphragm Disk with Spacers Cam Screw Hole Clean Channel Thin O ring ...

Страница 126: ... 20 Perform steps 5 19 again for second pump head 21 Replace the cam cover 22 Replace the interstage tubing See Figure 7 15 Figure 7 15 Reassembled interstage tubing 7 7 Transpector Sensor Maintenance Sensors must be cleaned only by qualified factory personnel Refer to section 1 4 How to Contact INFICON on page 1 4 for assistance Maintenance of the Transpector CPM sensor is limited to filament ion...

Страница 127: ... 16 A failed filament will measure open while an intact filament will measure 0 8 Figure 7 16 Sensor pinout NOTE Although the following measurements may measure below 30 M with the filament assembly and ceramic shield in place they must be above 30 M when measured with the filament assembly and ceramic shield removed Table 7 2 Pin assignment Pin Assignment Pin Assignment 1 PP 8 GND 2 EM HV 9 RF 3 ...

Страница 128: ...ith the exception of the measurement between the filament pins if the filament has not failed 7 7 2 Transpector Sensor Filament Replacement 1 Remove the ceramic sealing disk A by carefully pulling the wire hold downs B away from the edges of the disk and pulling off the sealing disk 2 Remove spring C 3 Remove the filament lead screw D1 loosen the filament lead screw D2 and remove the filament lead...

Страница 129: ...hers holding the filament assembly in place Be careful do not to lose the two ceramic sealing disk wire hold downs See Figure 7 18 Figure 7 18 Removing sensor filament assembly 5 Carefully remove the filament assembly See Figure 7 19 Figure 7 19 Filament assembly removed F ...

Страница 130: ...l the wire hold downs CAUTION To avoid cracking the ceramic plate do not overtighten the three nuts 9 Reattach the filament leads and tighten the filament lead screws 10 Reinstall spring and ceramic sealing disk 7 7 3 Transpector Sensor Ion Source Replacement 1 Remove filament lead screw A1 loosen filament lead screw A2 and loosen the three screws B in the ion source lead connectors See Figure 7 2...

Страница 131: ... away from the sensor 3 Remove the three ion source retaining screws C around the bottom of the ion source assembly See Figure 7 21 one screw is not visible in the figure They hold the ion source onto the quadrupole assembly Figure 7 21 Ion source retaining screws C ...

Страница 132: ...rce by reversing the above steps See Figure 7 22 Figure 7 22 Ion Source and quadrupole assembly 5 Using an ohm meter check that the filament is not shorted to ground or to any of the ion source plates and that the two filament leads show a filament resistance of approximately 1 at the feed through approximately 0 5 at the lead connectors ...

Страница 133: ...osen filament lead screw A2 and loosen the three screws B in the ion source lead connectors Using the 1 5 x 50 mm hex driver unscrew the screws C that secure the two RF leads Make sure to remove the lock washers as well There are a total of seven leads that must to be loosened See Figure 7 23 Figure 7 23 Detach leads 2 Gently pull the electrical leads away from the sensor CAUTION Do not bend the l...

Страница 134: ...sing the 2 0 x 75 mm hex driver unscrew three screws D one is hidden in the figure holding the sensor assembly to the feedthrough Gently remove the sensor assembly from the feedthrough See Figure 7 24 Figure 7 24 Removing the sensor assembly D ...

Страница 135: ...rating Manual 4 Using the Phillips head screwdriver remove three gold screws E one is hidden in the figure holding the EM assembly inside of the sensor assembly See Figure 7 25 Figure 7 25 Removing the screws holding the EM E ...

Страница 136: ...7 26 Transpector CPM Operating Manual 5 Gripping the bottom of the EM assembly gently remove the EM assembly from the sensor assembly See Figure 7 26 Figure 7 26 EM assembly ...

Страница 137: ...7 27 Transpector CPM Operating Manual 6 Remove the ceramic shield on the bottom of the old detector assembly See Figure 7 27 Figure 7 27 Removing the ceramic shield Ceramic Shield ...

Страница 138: ...stall the new Electron Multiplier assembly into the sensor can 9 When installing the sensor back into the feedthrough ensure that the two pins on the bottom of the detector align with the two pins on the feedthrough See Figure 7 28 Figure 7 28 Pin location 10 Reverse steps 1 4 to reassemble the Transpector CPM sensor Detector Pins ...

Страница 139: ... and the gases processed valve and or orifice replacement may be necessary 1 Remove valve cover by loosening two screws A with 2 5 mm allen wrench See Figure 7 29 Figure 7 29 Removal installation of valve cover 2 Loosen four silver plated screws B See Figure 7 30 Figure 7 30 Removal installation of four silver plated screws 3 Remove the valve 4 Carefully remove the old C ring for HexBlock or viton...

Страница 140: ...lic tweezer Figure 7 31 Removal installation of C ring 5 Carefully remove by turning counterclockwise the old orifice using the 2 mm allen wrench See Figure 7 32 CAUTION Use only the provided 2 mm allen wrench or similar particle free tool Other allen wrenches can produce particles that can plug the orifice Figure 7 32 Removal installation of orifice ...

Страница 141: ...ce with orifice gasket 8 Install a new C ring HexBlock or a new O ring Foreline Block Refer to Figure 7 31 9 Install the valve and four silver plated screws Refer to Figure 7 30 The screws must be tightened 9a Using two fingers lightly turn one screw until resistance is felt then back the screw out 1 8 turn Repeat on the other three screws 9b Using fingers evenly tighten all four screws 9c In 5 in...

Страница 142: ...cation problems do the following Is the Ethernet cable connected to the Transpector electronics module and the host computer either directly or through a router switch Does the Transpector sensor IP address have the same network prefix as the host computer Is Port 80 open on the host computer Is there an IP address conflict between the Transpector sensor and another network device NOTE Refer to Ch...

Страница 143: ...Verify incoming pneumatic pressure is between 58 and 100 psi Turbo Molecular Pump does not reach operating speed Foreline pressure too high due to gas leak or forepump diaphragm failure Find Leak s Replace diaphragm refer to section 7 6 on page 7 6 Turbo Molecular Pump bearing drag excessive Replace pump Foreline pressure too high due to water vapor in foreline hose Run pumpdown and purge with dry...

Страница 144: ...NFICON for repair Power Indicator on Transpector cable box does not illuminate Controller is not on Refer to section 2 2 1 Attach Transpector Electronics Module on page 2 2 CPM control cable is disconnected Check control cable at controller end and at cable box end No communication to HOST computer Sensor IP address not compatible with network Refer to Chapter 3 Connecting Transpector CPM Transpec...

Страница 145: ...module not fully engaged on sensor Make sure that the Transpector CPM electronics module is pushed completely on sensor Cable box not fully seated on Transpector electronics module Ensure cable box is fully seated on Transpector electronics module ANODE error Defective sensor anode shorted Check sensor with Ohm meter for shorts See sensor pin out diagram Fix or replace sensor Electronics failure R...

Страница 146: ... in local proximity Verify that the internal fan is providing adequate airflow Electronics failure Return to INFICON for repair Overpressure Total Pressure Plate current exceeded trip threshold Reduce pressure at the ion source to less than 5E 4 Torr Total Pressure plate is contaminated Replace ion source Process pressure too high for sampling orifice Reduce process pressure Install proper orifice...

Страница 147: ... INFICON for repair DEC Communications Error Incorrect DEC response detected Reset electronics module Return electronics module to INFICON for repair Peakfind Error No peak at target mass Upload original configuration file Return electronics module to INFICON for repair Filament potential error Insufficient vacuum Verify pressure is less than 5E 4 Torr at the ion source Filament broken Verify inte...

Страница 148: ...ain focus voltage Reset Electronics module Return electronics module to INFICON for repair No spectra Emission is OFF Turn Emission ON EM is ON when operating Turn EM OFF Contaminated sensor Degas or service sensor Replace sensor Electronics Failure Return to INFICON for repair Pressure too low for FC Use EM detector EM voltage too low Increase voltage Transpector CPM electronics module not fully ...

Страница 149: ...ectron energy ion energy focus emission current Improper calibration Ensure that the total pressure gauge used for sensitivity calibration was properly calibrated Electronics failure Return to INFICON for repair EM has low gain Replace sensor or EM Poor peak shape Sensor contaminated Degas sensor Bake out sensor Service sensor Ion source pressure too high Verify pressure is less than 5E 4 Torr at ...

Страница 150: ...g problems See FabGuard Explorer Operating Manual PN 074 528 P1 for additional information High noise level System grounding Verify that vacuum system is grounded Electronics failure Return to INFICON for repair Transpector CPM electronics module not mounted properly on sensor Ensure the Transpector CPM electronics module is fully seated on sensor EM defective Replace EM assembly or sensor Scan sp...

Страница 151: ...tion 059 196 4 VCR gasket 059 0400 Replacement c ring 070 1042 Viton O ring V4 only 923 706 G6 10 mTorr HexBlock orifice with gasket 923 706 G8 15 mTorr HexBlock orifice with gasket 923 706 G5 100 mTorr HexBlock orifice with gasket 923 706 G7 360 mTorr HexBlock orifice with gasket 923 706 G4 1 Torr HexBlock orifice with gasket 923 706 G9 3 Torr HexBlock orifice with gasket 923 706 G3 10 Torr HexBl...

Страница 152: ...9 2 Transpector CPM Operating Manual 922 204 G1 1 5 m capillary assembly kit 922 204 G3 3 m capillary assembly kit 923 706 G8 Bypass orifice kit Table 9 1 Consumables Part Number Description ...

Страница 153: ...ament Kit 964 710 G2 CPM Coated Filament Kit 964 711 G1 CPM Tungsten Ion Source Kit 964 711 G2 CPM Tungsten Ion Source Kit with Anode Liner 964 712 G1 CPM Coated Ion Source Kit 964 712 G2 CPM Coated Ion Source Kit with Anode Liner 923 418 G1 Replacement Diaphragm Kit for Two Stage Pump Table 9 3 Replacement spare parts INFICON Part Number Description 964 403 P1 CPM Manifold Heater 059 0400 Replace...

Страница 154: ...on FabGuard Explorer software operates under Windows 7 and Windows 8 FabGuard Explorer provides valve control through recipes manual control of components and status information It provides basic residual gas analyzer features including trend analysis bar graph leak check and analog selected peak modes Process monitoring includes recipe generation automated data collection norm generation and proc...

Страница 155: ...orer 2 When FabGuard Explorer is opened for the first time the message shown in Figure 10 1 will display Figure 10 1 Transpector connection prompt 3 Click Yes 4 The Connection Type message is displayed Select MP RGA HTTP as the connection type and Click OK See Figure 10 2 Figure 10 2 Transpector connection type ...

Страница 156: ...Type the Transpector IP address in the IP box See Figure 10 4 7 Type the port number in the Port box 8 Click Add OK Figure 10 4 Device IP address NOTE Transpector MP sensors ship with a default IP address of 192 168 1 100 and a default Port of 80 If this IP address is not compatible with your network the IP address can be changed using the INFICON Mass Spectrometer Search Utility 9 Click Add OK ...

Страница 157: ...PM system must be configured before use This section explains the CPM tab in detail See Figure 10 5 but not the additional tabs in the RGA Configuration window Additional information is located in the FabGuard Explorer Operating Manual PN 074 528 P1 Figure 10 5 RGA Configuration CPM tab ...

Страница 158: ...e scale is in millitorr If no orifice is installed in V1 clear the check box Figure 10 6 Inlet LP 10 4 1 2 Inlet HP Defines the size of the orifice in the V2 High Pressure HP valve Enter the pressure for the orifice currently installed in V2 Note that the scale is in millitorr If using a sniffer enter the appropriate sniffer pressure range If using an atmospheric CPM enter 760000 millitorr If no o...

Страница 159: ...gas is installed select FC5311 standard If V5 is not installed select No Valve Figure 10 10 Inlet Calibration 10 4 2 Gauges pane 10 4 2 1 Process Gauge The Transpector CPM includes an optional CDG capacitance diaphragm gauge If the CDG is installed enter its appropriate pressure range Note that the scale is in millitorr If the CDG is not installed clear the check box Figure 10 11 Process gauge ...

Страница 160: ...seconds determines 1 How long the V4 Bypass valve will be open before the V2 HP valve will be opened 2 How long the V4 Bypass valve will remain open after the V2 HP valve has been closed This interlock between V4 Bypass and V2 HP is only active when using V2 HP in recipes When opening V2 HP in Configuration monitor this interlock is not active Figure 10 12 Pumping Timers pane ...

Страница 161: ...s on the CPM Figure 10 13 Transpector CPM configuration monitor 1 Pump down the system 1a Click Pump Down inlets closed to start the foreline and turbo pumps and open the foreline valve Select Pump Down inlets open if there is an additional isolation valve in front of the Hexblock and the volume between the isolation valve and the Hexblock needs to be pumped down See Figure 10 14 on page 10 9 for ...

Страница 162: ...lect a bakeout time A normal bakeout is eight hours 3 Click Configure to change CPM Hardware Configuration settings 4 Click Emission The sensor filament is off the first time Configuration Monitor is run The Emission button will be dark blue It will progress to yellow and finally green to signify that the EM is on See Figure 10 15 Figure 10 15 Emission status 0 1 1 10 100 1000 10000 10 100 1000 Tr...

Страница 163: ...data acquisition parameters refer to the FabGuard Explorer Operating Manual NOTE Maintain a detailed log of the changes to the sensor s data acquisition parameters Figure 10 17 Monitor Setup 7 Choose which if any inlets to open to monitor the sensor configuration Do not open an inlet when monitoring the residual gas inside of the CPM to obtain a background scan of the CPM sensor The illustration i...

Страница 164: ... the CPM figure at the bottom of the screen The Valve Status indicator will switch from dark blue to green 8 Click Start Configuration Monitor The sensor will begin collecting data with the configuration set up using the chosen data acquisition parameters 9 If the data is satisfactory log the parameters and save the configuration Use these data acquisition parameters in any data collection method ...

Страница 165: ...is very similar for both CPMs and Open Ion Source RGAs 10 6 1 1 Acquisition Modes There are two different acquisition modes Spectrum Scans and Selected Masses Bins See Figure 10 19 Figure 10 19 Acquisition modes Spectrum Scans is the default mode of data acquisition in FabGuard Explorer This mode will take data across a user defined mass range See Figure 10 20 Figure 10 20 What to Acquire Spectrum...

Страница 166: ...10 13 Transpector CPM Operating Manual Selected Masses Bins mode allows data collection of specific masses Figure 10 21 What to Acquire Selected Masses ...

Страница 167: ... scanning Points per amu The number of points per amu ppamu that the RGA will monitor Setting a Stop Mass value outside of the sensor s 2222range will create an error For example if a 200 amu sensor is installed FabGuard Explorer will not allow a 250 amu Stop Mass Increasing the number of ppamu will increase the total time it takes to perform a full scan In FabGuard Explorer there are four differe...

Страница 168: ...lected Masses Mode It is possible to define specific masses of interest in Selected Masses Mode Transpector CPM advanced sensor functions can be tracked as individual bins in this data acquisition mode See Figure 10 23 Figure 10 23 Selected masses mode ...

Страница 169: ...equire monitoring of carbon monoxide Since carbon monoxide has the same mass as nitrogen 28 amu the identity of mass 28 must be changed from nitrogen to carbon monoxide in the Identity list Dwell time can be changed in the Dwell list In the Relay list thresholds can be set up to open or close relays based on the signal of the mass bin See Figure 10 24 Figure 10 24 Mass properties CAUTION Editing a...

Страница 170: ...list for the sensor Dwell Time for New Bins When collecting data with Bin Independent dwell times the Dwell Time for New Bins can be set to any value NOTE The dwell time for each mass can be changed by editing the mass This new dwell time will be used for all newly created masses Figure 10 28 Dwell time for new bins Add Mass Adds a mass to monitor by identifying a specific mass in amu either defin...

Страница 171: ...10 18 Transpector CPM Operating Manual Figure 10 29 Add mass ...

Страница 172: ...hat shares a mass with a compound that has previously been added FabGuard Explorer can only associate each mass with one chemical compound For instance if air is added to the active mass list and then nitrogen added afterwards an error will display because two masses have already been assigned 14 amu and 28 amu Figure 10 31 Sensor bin already exists Add Advanced Sensor Information Adds bins that m...

Страница 173: ...w to Acquire CPM The How to Acquire menu for the CPM see Figure 10 33 is similar to the Open Ion Source RGAs However there are a number of differences due to the additional valve assembly and pumping system of the CPM Figure 10 33 How to acquire CPM ...

Страница 174: ...y after the run is started Maximum Signal starts the run after the sensor sees a defined maximum signal The signal is set by the Data Threshold See section 10 6 2 2 2 Pressure Above starts the run immediately after an increase in the internal RGAtotal pressure above the user defined Data Threshold Emission must be ON prior to recipe start for this mode to function Pressure Below starts the run imm...

Страница 175: ...s not turned on data will not be collected Figure 10 37 Emission As Is uses the current status of the filament Off starts the data acquisition with the filament off On starts the data acquisition with the filament on 10 6 2 2 4 Multiplier Defines the mode of the electron multiplier when the run starts See Figure 10 38 Figure 10 38 Multiplier As Is uses the current status of the EM Off starts the d...

Страница 176: ...ops the run immediately after a decrease in the internal RGA total pressure below the user defined Data Threshold Analog 1 Above stops the run after an increase in voltage above the user defined Data Threshold Analog 1 Below stops the run after a decrease in voltage above the user defined Data Threshold Number of Points stops the run after collecting a user defined number of scans 10 6 2 3 2 Data ...

Страница 177: ...ission Defines the mode of the filament when the run stops It is recommended to turn off the filament if the sensor will be exposed to high pressures following a run See Figure 10 42 Figure 10 42 Emission As Is uses the current status of the filament Off stops the data acquisition with the filament off On stops the data acquisition with the filament on 10 6 2 3 5 Multiplier Defines the mode of the...

Страница 178: ...mines how the dwell is chosen for each data point This option is changeable only when in Selected Masses mode See Figure 10 44 Figure 10 44 Dwell mode Bin Independent uses the same dwell time for each data point Bin Specific is only available when running in Selected Masses mode This choice allows for each mass to have a specific dwell time This methodology is desirable if a peak of interest has a...

Страница 179: ...y selectable when Bin Independent is chosen as the Dwell Mode See Figure 10 45 Figure 10 45 Dwell time 10 6 2 5 Delay Defines whether FabGuard Explorer will add additional wait time after the sensor has completed a full scan 10 6 2 5 1 Delay Mode Figure 10 46 Delay mode Minimum sets the Time Between Scans to its minimum value After the sensor has completed a scan no additional wait time will be ad...

Страница 180: ...mount of time FabGuard Explorer waits after the Start Mode condition has been met before setting the Emission and EM to their specified Start states and beginning data acquisition For example if the recipe starts based on an analog input and an additional wait time is desired before the Emission is turned on 10 6 2 6 Correction Defines the type of Baseline correction used by FabGuard Explorer if a...

Страница 181: ... Inlet Defines the inlet that is opened for the run and whether it is closed after the data acquisition is over See Figure 10 50 Figure 10 50 Inlet None does not open any valves for the data acquisition This would give data that is only representative of the background of the CPM LP opens the V1 low pressure valve HP with bypass opens the V2 high pressure valve with the bypass valve V4 HP without ...

Страница 182: ...e gas for long periods of time The CPM Inlet can be automatically opened and closed in a duty cycle To use the duty cycle feature the Open time and Close time must be defined See Figure 10 52 Figure 10 52 Duty cycle 10 6 2 8 Heater The Heater parameter controls the CPM heating jacket while the RGA is acquiring data The heater can be set to As Is Off Low 90ºC or High 150ºC Figure 10 53 Heater 10 6 ...

Страница 183: ... a vacuum apparatus when no gases are being deliberately introduced Bakeout A bakeout is the process of heating a vacuum chamber above the ambient temperature in order to accelerate the desorption of species such as water vapor and hydrocarbons which are adsorbed onto the inner surfaces of the vacuum chamber Center Voltage The center voltage is the DC potential to which the quadrupole rod RF and d...

Страница 184: ...otential times the electron charge Electron Multiplier An electron multiplier is a in situ amplifier which is used to increase the sensitivity of a mass spectrometer When a high voltage is applied to an electron multiplier positive ions are accelerated into the multiplier causing the release of a large number of electrons per incident ion at the output Emission Current The emission current is the ...

Страница 185: ...ier The gain of an electron multiplier is the ratio of incident ion current to electron current output The gain of the multiplier is a strong function of the bias potential applied across it Ion An ion is a molecule or atom which has either lost or added one or more electrons Those molecules which have lost electrons are positive ions Those molecules which have added electrons are negative ions Io...

Страница 186: ... relationship between an ion current and the total or partial pressure giving rise to that current A mass spectrometer is said to have good linearity when the ion current is proportional to the pressure over a specified pressure range within a specified tolerance Typically but not always the ion current will be linear with pressure at the low end of an instrument s pressure range At some pressure ...

Страница 187: ...en element which have the same number of neutrons For example 99 985 of all naturally occurring hydrogen atoms have no neutrons giving an atomic mass of approximately 1 while 0 015 have one neutron giving an atomic mass of approximately 2 There is a third isotope of hydrogen which contains two neutrons giving an atomic mass of 3 but this isotope is unstable with such a short radioactive half life ...

Страница 188: ...sed to determine the quantities and chemical nature of gases present in a vacuum system The instrument is typically a mass spectrometer equipped with an open ion source Resolution Resolution is the ability of a mass filter to select between nearby masses It is typically measured as the mass of the peak divided by the width of a given mass peak at 10 or 50 of the peak maximum intensity Secondary El...

Страница 189: ...o of ion current detected at the exit end of the mass filter set to transmit a given mass to the current of ions of the same mass entering the filter from the ion source Typically the transmission factor for nitrogen ions at 28 AMU is set equal to 1 The transmission factor at other masses is given relative to that for nitrogen Viscous Flow Viscous flow is that motion of gas molecules wherein the c...

Страница 190: ...41 P1B 2016 INFICON Chapter 12 Bibliography For further information on partial pressure analyzers see Partial Pressure Analyzers and Analysis M J Drinkwine and D Lichtman American Vacuum Society Monograph Series or A User s Guide to Vacuum Technology J F O Hanlon John Wiley and Sons 1989 The latter book also contains a wealth of information on related topics including gas flow pressure gauges pump...

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