Inficon Transpector CPM, Руководство по эксплуатации

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1 – 6
Transpector CPM Operating Manual
Minimum Background
Pressure
1x10
-8
Torr
(1.3x10
-8
mbar)
Maximum Sensor and
Inlet Temperature
150°C
1
Ion source pressure reading @ low emission using total pressure lens
2
Total pressure accuracy @ low emission
3
Maximum ion source operating pressure @ low emission
4
2x10
-4
Torr in the ion source will produce about 1x10
-5
Torr in the quadrupole region
5
MDPP at the ion source with EM on and 1 s dwell time
6
Mass 40 contribution onto 41 AMU
7
Zero blast contribution onto 2 AMU
8
Minimal detectable concentration with Krypton in air @ a 1 s dwell time
9
For 1 Torr orifices and lower. Linearity @ low emission at 0.1 to 2 times the nominal orifice pressure
Table 1-1 General specifications (continued)
Mass Range (AMU) 1 – 100 1 – 200 1 – 300