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TOC - 3

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SQM-160 Operating Manual

5.1.3

TCP/IP Ethernet Port . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-2

5.1.3.1

How to Set Up the Network Protocol on the PC . . . . . . . . . . . . . . . . . . . . . . 5-2

5.1.3.2

How to change the IP address of the SQM-160 . . . . . . . . . . . . . . . . . . . . . . 5-5

5.2

SQM-160 Comm Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-5

5.3

SQM-160 Communications Protocol . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-6

5.4

Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-7

5.4.1

Command: @ . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-7

5.4.2

Command: A. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-7

5.4.3

Command: B. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-8

5.4.4

Command: C . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-8

5.4.5

Command: D . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-9

5.4.6

Command: J . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-9

5.4.7

Command: L . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-9

5.4.8

Command: M . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-9

5.4.9

Command: N . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-9

5.4.10

Command: O . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-9

5.4.11

Command: P. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-10

5.4.12

Command: R . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-10

5.4.13

Command: S. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-10

5.4.14

Command: T. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .T5-10

5.4.15

Command: U . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-10

5.4.16

Command: W . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-11

5.4.17

Command: Y. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-11

5.4.18

Command: Z. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-11

5.5

CRC Examples . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-12

5.5.1

Visual Basic® 5/6 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-12

5.5.2

Java® . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-14

5.5.3

C++. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-14

Chapter 6

Troubleshooting and Maintenance

6.1

Troubleshooting Guide . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-1

6.2

Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-2

6.2.1

Troubleshooting the SQM-160 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-2

6.2.2

Troubleshooting Sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-3

6.2.3

Troubleshooting Computer Communications . . . . . . . . . . . . . . . . . . . . . . . . 6-8

6.3

Replacing the Crystal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-8

6.3.1

Front Load . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-9

6.3.2

Cool Drawer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-10

6.3.3

Bakeable Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-12

Содержание SQM-160

Страница 1: ...O P E R A T I N G M A N U A L SQM 1 60 Multi Film Rate Thickness Monitor IPN 074 511 P1C ...

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Страница 3: ...www inficon com reachus inficon com 2012 INFICON O P E R A T I N G M A N U A L SQM 1 60 Multi Film Rate Thickness Monitor IPN 074 511 P1C ...

Страница 4: ...s are trademarks or registered trademarks of their respective companies Disclaimer The information contained in this manual is believed to be accurate and reliable However INFICON assumes no responsibility for its use and shall not be liable for any special incidental or consequential damages related to the use of this product Due to our continuing program of product improvements specifications ar...

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Страница 6: ......

Страница 7: ...on Seller shall not be liable for any further damages which could have been avoided if Seller had been provided with immediate written notification THIS WARRANTY IS MADE AND ACCEPTED IN LIEU OF ALL OTHER WARRANTIES EXPRESS OR IMPLIED WHETHER OF MERCHANTABILITY OR OF FITNESS FOR A PARTICULAR PURPOSE OR OTHERWISE AS BUYER S EXCLUSIVE REMEDY FOR ANY DEFECTS IN THE PRODUCTS TO BE SOLD HEREUNDER All ot...

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Страница 9: ...ontact INFICON 1 4 1 3 1 Returning Your SQM 160 1 5 1 4 Specifications 1 5 1 4 1 Measurement 1 5 1 4 2 Film Parameters 1 5 1 4 3 System Parameters 1 6 1 4 4 Digital I O 1 6 1 4 5 General Specifications 1 7 1 5 Unpacking and Inspection 1 8 1 6 Parts and Options Overview 1 8 1 6 1 Base Configurations 1 8 1 6 2 Accessories 1 9 1 6 3 Sensors 1 9 Chapter 2 Quick Start 2 1 Introduction 2 1 2 2 Installat...

Страница 10: ...g 3 11 3 14 Time Setpoint 3 12 3 15 Thickness Setpoint 3 13 3 16 Simulate Mode 3 14 3 17 Defaulting the Memory 3 14 3 18 Relay Operation 3 15 3 19 Analog Output Configuration 3 16 3 20 I O Connections 3 16 3 21 Rack Mounting Procedure 3 18 Chapter 4 SQM 160 Comm Software 4 1 Introduction 4 1 4 2 Installation 4 1 4 3 Main Window 4 2 4 4 Data Log Menu 4 4 4 5 Films Menu 4 6 4 6 System Menu 4 8 4 7 C...

Страница 11: ...mand M 5 9 5 4 9 Command N 5 9 5 4 10 Command O 5 9 5 4 11 Command P 5 10 5 4 12 Command R 5 10 5 4 13 Command S 5 10 5 4 14 Command T T5 10 5 4 15 Command U 5 10 5 4 16 Command W 5 11 5 4 17 Command Y 5 11 5 4 18 Command Z 5 11 5 5 CRC Examples 5 12 5 5 1 Visual Basic 5 6 5 12 5 5 2 Java 5 14 5 5 3 C 5 14 Chapter 6 Troubleshooting and Maintenance 6 1 Troubleshooting Guide 6 1 6 2 Troubleshooting ...

Страница 12: ...ics Pass But Crystal Fail Message Remains 6 19 6 4 2 Sensor Cover Connection 6 20 6 4 2 1 Compatible Sensor Heads 6 20 6 4 2 2 Incompatible Sensor Heads 6 20 6 4 3 Emulator Specifications 6 21 Chapter 7 Calibration Procedures 7 1 Importance of Density Tooling and Z Ratio 7 1 7 2 Determining Density 7 1 7 3 Determining Tooling 7 2 7 4 Laboratory Determination of Z Ratio 7 2 Chapter 8 Measurement an...

Страница 13: ... sensor The rate sampling mode allows a shuttered sensor to extend sensor life in high rate processes Rate displays of 0 1 Å s or 0 01 Å s are user selectable In addition frequency or mass displays can be selected Four relay outputs allow the SQM 160 to control source or sensor shutters signal time and thickness setpoints and signal crystal failure Digital inputs allow external signals to start st...

Страница 14: ... 1 Definition of Notes Cautions and Warnings When using this manual please pay attention to the NOTES CAUTIONS and WARNINGS found throughout For the purposes of this manual they are defined as follows NOTE Pertinent information that is useful in achieving maximum SQM 160 efficiency when followed CAUTION Failure to heed these messages could result in damage to the SQM 160 WARNING Failure to heed th...

Страница 15: ...enance to qualified personnel CAUTION This SQM 160 contains delicate circuitry which is susceptible to transient power line voltages Disconnect the line cord whenever making any interface connections Refer all maintenance to qualified personnel 1 2 3 Earth Ground The SQM 160 is connected to earth ground through a sealed three core three conductor power cable which must be plugged into a socket out...

Страница 16: ... contact a Technical Support Engineer with questions regarding applications for and programming the SQM 160 Service Engineer with questions regarding troubleshooting diagnosing or repairing a defective SQM 160 Sales and Customer Service to contact the INFICON Sales office nearest you Repair Service to contact the INFICON Service Center nearest you is available at the Support tab a www inficon com ...

Страница 17: ...y INFICON before an RMA number is issued INFICON may require that the sensor be sent to a designated decontamination facility not to the factory 1 4 Specifications 1 4 1 Measurement Number of Sensors 2 standard 4 additional optional Sensor Frequency Range 4 0 MHz to 6 0 MHz Reference Frequency Accuracy 0 002 Reference Frequency Stability 2ppm total 0 to 50 C Thickness Display Resolution 1 Å Freque...

Страница 18: ...ampling On Off RS 232 Baud Rate 2 4 4 8 9 6 19 2 kb s Etch Mode On Off Crystal Tooling 1 6 10 399 Crystal Fail Min Max 4 0 to 6 0 MHz 4 1 to 6 1 MHz 1 4 4 Digital I O Digital Inputs 4 Functions Open Shutter Close Shutter Zero Thickness Zero Time Input Rating 5 V dc non isolated Relay Outputs 4 Functions Shutter Sample Hold or Thickness Setpoint Dual Sensor Shutter or Time Setpoint Crystal Fail Rel...

Страница 19: ... 0 to 80 RH non condensing 0 to 2 000 meters Indoor Use Only Class 1 Equipment Grounded Type Suitable for Continuous Operation Ordinary Protection not protected against harmful ingress of moisture Pollution Degree 2 Installation Overvoltage Category II for transient overvoltages Storage Environment 40 C to 70 C Rack Dimensions HxWxD 88 5 mm x 212 7 mm x 196 9 mm Weight 2 7 kg 6 pounds ...

Страница 20: ...t discard the packing materials until you have taken inventory and have at least performed a power on verification 4 Take an inventory of your order by referring to your order invoice and the information contained in section 1 6 5 To install and setup see Chapter 2 Quick Start 6 For additional information or technical assistance contact INFICON refer to section 1 3 on page 1 4 1 6 Parts and Option...

Страница 21: ... in length from 6 in 15 2 cm to 36 in 91 4 cm The 007 044 standard in vacuum cable supplied with the front load style sensors are 30 75 in 78 1 cm long 19 in Rack mount for 1 SQM 160 782 900 008 19 in Rack mount for 2 SQM 160 782 900 014 1 6 3 Sensors Front Load Single Sensor SL XXXXX Front Load Dual Sensor DL AXXX Cool Drawer Single Sensor CDS XXFXX Cool Drawer Dual Sensor CDD XFXX Sputtering Sen...

Страница 22: ...1 10 IPN 074 511 P1C SQM 160 Operating Manual This page is intentionally blank ...

Страница 23: ...ck extender kit Install the SQM 160 in a 19 in rack with the appropriate hardware See section 3 21 Rack Mounting Procedure on page 3 18 for detailed installation instructions 2 Power Connection WARNING Risk Of Electric Shock Verify that the power cable provided is connected to a properly grounded mains receptacle 3 Sensor Connections Connect the BNC cables and oscillator from your vacuum chamber f...

Страница 24: ...the Control Knob right to display each individual sensor s readings Displays the setup parameter name in program mode Display 2 Displays deposition time or the sensor displayed on Display 1 when scrolling through sensor readings Displays setup parameter values in program mode Control Section Push button to zero the thickness reading Push button to toggle display between Crystal Life and Rate Thick...

Страница 25: ...sed to adjust values or scroll though menu selections Pushing the control knob stores the current setting 2 4 Rear Panel Figure 2 2 Rear Panel Sensor 1 2 Connection to quartz crystal sensors See section 2 5 on page 2 4 for detailed hookup information Rate and Thick Outputs Provides 0 5 V analog outputs for Sensor 1 2 rate and thickness readings For connection to strip chart recorders etc Relay I O...

Страница 26: ...s Option Card Provides four additional sensor measurement channels Measurement ground terminal useful for common system and cable grounding Power Connector WARNING Use removable power cords only of the specified type and rating attached to a properly grounded receptacle 2 5 System Connections Figure 2 3 shows typical vacuum system wiring WARNING Risk Of Electric Shock WARNING Maintain adequate ins...

Страница 27: ...ough to the oscillator Keep this cable as short as possible Oscillator Contains the electronics to operate the quartz crystal The length from the oscillator to the crystal should be under 40 in 1 m 10 BNC Cable Connects the oscillator to the SQM 160 Lengths up to 100 ft 30 m are acceptable Ground Wire A wire preferably braided that connects the vacuum system to the SQM 160 ground terminal Sensor R...

Страница 28: ... to normal mode 4 Set System Parameters To Enter the System Menu press Program then Prev Select and set system parameters by turning and then pressing the Control Knob as described above Press Program to return to Normal mode If the sensor s selected during Film setup are connected properly to the SQM 160 the Crystal Status LEDs should be illuminated If not return to the Film Menu and set the Sens...

Страница 29: ...ing 4 Start Deposition Apply power to the source evaporation supply If the SQM 160 shutter relay is connected press the Shutter switch to open the source shutter and begin deposition Rate and Thickness displays should begin to move from zero If the displays remain at zero check the system setup to assure that evaporating is actually taking place Also check that the deposited material is reaching t...

Страница 30: ...2 8 IPN 074 511 P1C SQM 160 Operating Manual This page is intentionally blank ...

Страница 31: ...isplay 2 shows the selected parameter s value NOTE If Crystal Life is shown on the SQM 160 displays press the Xtal Life switches to return the displays to normal rate thickness or frequency display To enter the Film Menu press Program The SQM 160 displays the currently selected film If desired turn then press the Control Knob to select a different film Press Next to display the first parameter for...

Страница 32: ... 3 1 to the desired setting 6 Press the Control Knob or Next to save the displayed value and move to the next material parameter Press Clear to abandon the change and return to the original setting 7 Press Program to exit the Film Menu and return to normal mode Figure 3 2 and Table 3 1 detail the parameters available in the Film Menu Refer to later sections of this chapter for instructions on sett...

Страница 33: ...int relay and illuminates Thk SP LED Not available when Sampling is ON in System Menu 0 000 99 99 0 kÅ TIME SET Elapsed time that closes the Timer Setpoint relay and illuminates Time SP LED Not available when Relay 2 is set to Dual or Sensor 2 in the System Menu 0 00 99 59 0 Min Sec SAMPLE The time for the sensor shutter to remain open when Rate Sampling is enabled in the System Menu Not available...

Страница 34: ...e original setting 6 Press Program to exit the System Menu and return to normal mode Figure 3 3 System Parameters Menu Program Prev TIMEBASE SIM MODE DISPLAY RATE RES RATEFILT RELAY 2 SAMPLING BAUDRATE ETCH xTOOLING RELAYS FM IN MAX R T BNDS THCK A THCK Nm MASS FREQ TIME SP DUAL SENS 2 FREQ MIN FREQ MAX xTLTOOL1 xTLTOOL6 RELAY 1 RELAY 4 System Parameters Menu Sub Menu RATE MIN RATE MAX THICKMIN TH...

Страница 35: ...aud rate to PC 2 4 19 2 19 2 kbps ETCH Sets rate negative for etching On Off Off xTOOLING Tooling value assigned to each sensor See the Sensor Tooling section of this chapter 10 399 100 RELAYS Assigns normally open or normally closed operation for each relay Note All relays are open with power off NO NC NO FMIN MAX Sub menu sets minimum and maximum crystal frequencies 4 00 6 00 4 10 6 10 5 00 6 10...

Страница 36: ...ogram mode 2 Use the Control Knob to scroll to the desired Film 1 9 3 Press the Control Knob or Next to enter the film parameters for the selected film 4 Press Next until SENS AVG is shown 5 Use the Control Knob to scroll through the sensors in Display 2 6 Press the Control Knob to toggle the sensor on off Sensor status can be seen by observing the Crystal Status LEDs If the LED is not illuminated...

Страница 37: ...ating frequency on Display 2 6 Press the Control Knob to accept the minimum value and display FREQ MAX 7 Adjust the Control Knob to the desired maximum operating frequency on Display 2 8 Press the Control Knob to accept the maximum value 9 Press Program to exit the System Menu and return to normal mode Crystals sometimes fail unexpectedly or exhibit erratic frequency shifts mode hopping before tot...

Страница 38: ... the average Rate and Thickness reading See section 7 3 Determining Tooling on page 7 2 for more details To adjust xTooling 1 Press Program to enter Program mode 2 Press Prev to enter the System Menu 3 Press Next until xTOOLING is shown then press the Control Knob 4 Adjust the Control Knob to set the XTLTOOL 1 value Press the Control Knob to save the value and move to XTLTOOL 2 5 Repeat Step 4 for...

Страница 39: ...the remaining crystal life based on the FMin Max values set in the System Menu refer to section 3 4 on page 3 4 To display the remaining crystal life for the sensors used by the currently active film 1 Press the Xtal Life switch in the front panel Control section 2 The sensor is shown in Display 1 and the remaining life is shown in Display 2 3 Turn the Control Knob to display the life of other sen...

Страница 40: ...or in case of primary sensor failure When Relay 2 is programmed for Dual sensors in the System menu the SQM 160 will automatically switch to Sensor 2 when Sensor 1 readings stop or become erratic To program the SQM 160 for dual sensors 1 Press Program to enter Program mode 2 Press Prev to enter the System Menu 3 Press Next until RELAY 2 is shown 4 Turn the Control Knob right to select DUAL sensor ...

Страница 41: ...until SAMPLING is shown 4 Turn the Control Knob right to turn ON rate sampling Press the Control Knob to accept the value 5 Press Program to exit the System Menu and return to normal mode 6 Press Program to re enter Program mode 7 Use the Control Knob to scroll to the desired Film 1 9 then press the Control Knob or Next to enter the film parameter menu for the selected film 8 Press Next until SAMP...

Страница 42: ... Control Knob to scroll to the desired Film 1 9 then press the Control Knob or Next to enter the Film Parameter menu for the selected film 8 Press Next until TIME SET is shown 9 Use the Control Knob to set the timer setpoint Press the Control Knob to accept the value 10 Press Program to exit the Film Menu and return to normal mode 11 Press Zero to open the relay and begin counting down the Time Se...

Страница 43: ...am to re enter Program mode 7 Use the Control Knob to scroll to the desired Film 1 9 then press the Control Knob or Next to enter the Film Parameter menu for the selected film 8 Press Next until THK SET is shown not FINL THK 9 Use the Control Knob to set the thickness setpoint Press the Control Knob to accept the value 10 Press Program to exit the Film Menu and return to normal mode When the Thick...

Страница 44: ...e value 6 Press Program to exit the System Menu and return to normal mode 3 17 Defaulting the Memory CAUTION Performing this procedure wil default the SQM 160 to its factory setting All Parameters set by the user will be deleted Do not perform this procedure until you have created a back up database file using SQM160 Comm 1 Power cycle the unit while pressing and holding select buttons until an er...

Страница 45: ...s turned off or loses power See section 3 20 on page 3 16 for relay wiring To set the relay operating mode 1 Press Program to enter Program mode 2 Press Prev to enter the System Menu 3 Press Next until RELAYS is shown and then press the Control Knob to display Relay 1 4 Turn the Control Knob left or right to select NO normally open or NC normally closed Press the Control Knob to accept the value a...

Страница 46: ... Press the Control Knob to save the value and display the RATE MAX setting 7 Adjust the Control Knob to the Rate desired for a 5 V output 8 Press the Control Knob to save the value and display the THICK MIN setting 9 Repeat steps 5 8 to adjust the Thickness output values 10 Press Program to exit the System Menu and return to normal mode Refer to section 3 4 on page 3 4 for more information on sett...

Страница 47: ... value If DUAL is selected contacts close when Sensor 1 fails If SENS2 is selected contacts close when shutter is pushed if Sensor 2 is programmed for the active film 5 6 Relay 3 Shutter Relay Controlled by front panel shutter switch Contacts close when Shutter Open is selected If SENS2 is selected for Relay 2 in the System menu the shutter relay contacts close only if Sensor 1 is programmed for t...

Страница 48: ...ve screws until their threads are completely exposed on one side 3 Attach the Extender Place the extender next to the SQM 160 and thread the captive screws into the SQM 160 threaded holes that were previously used to mount the rack ear Tighten the captive screws to secure the extender to the SQM 160 4 Attach the Mounting Ears Attach the mounting ear previously removed from the SQM 160 to the exten...

Страница 49: ...monitor s system setup parameters Consult Chapter 5 Communications for information on connecting a SQM 160 and establishing communication with this program 4 2 Installation To install the SQM 160 program insert the 074 5000 G1 INFICON CD ROM If the setup program does not start automatically click Start then Run then type d UtilityDisk where d is the drive you are using The Program Disk main menu s...

Страница 50: ...e 4 1 Program Disk Menu 4 3 Main Window Figure 4 2 SQM 160 Comm Main Window The main window allows for basic SQM 160 setup and data logging On program startup it may take a few seconds to display the main window and read the Monitor s setup information ...

Страница 51: ...M 160 data acquisition Graphing and display of readings from the SQM 160 start stop immediately when this control is toggled Open Close Shutter Toggles the SQM 160 shutter relay Opening the shutter automatically starts SQM 160 data acquisition However closing the shutter does not automatically stop data acquisition Zero Zeros the thickness reading on the SQM 160 The remaining main window controls ...

Страница 52: ...og Dialog Box Data is saved in tab delimited format for easy viewing or importing into a spreadsheet See example below Start Date 5 7 02 Time 14 04 41 Film ALUM Time AvgThk AvgRate Thk1 Rate1 0 00 0 000 1 10 0 000 1 10 0 50 0 000 1 11 0 000 1 11 1 00 0 001 1 10 0 001 1 10 1 50 0 001 1 10 0 001 1 10 2 00 0 002 1 10 0 002 1 10 End Date 5 7 02 Time 14 04 44 Film ALUM Controls on the Data Log screen a...

Страница 53: ...alue is minutes and the left value is hours End Time The elapsed time when data logging ends The right value is seconds the middle value is minutes and the left value is hours Log Interval The elapsed time between data log entries in seconds An interval value of zero causes data to be logged as quickly as possible This time will vary depending on system configuration Once communications have been ...

Страница 54: ...tabase of films available for editing and download When films are uploaded from the SQM 160 they are automatically added to the database Download Transfers the film currently being viewed in detail to the SQM 160 Films stored on the SQM 160 are overwritten Download all Transfers all films to the SQM 160 Films stored on the SQM 160 are overwritten Upload all Transfers films stored in the SQM 160 to...

Страница 55: ...Materials named UnitMat are unknown materials uploaded from the SQM 160 Density Density of the selected material Values from 0 5 to 99 99 gm cc are valid Z Factor Z Ratio Z Ratio of the selected material Consult the Material Table on page A 1 for some material Z Ratio values Values of 0 1 to 10 are valid Add Material Enter a new material into the materials database Tooling Correction for differenc...

Страница 56: ...x without sending parameters to the SQM 160 Read Reads the SQM 160 system menu parameters into the System dialog box Simulate Mode In simulate mode the SQM 160 simulates sensor inputs for test purposes only Freq Display Selects whether or not to display crystal frequency Rate Resolution Selects high 0 01 Å s or low 0 1 Å s rate resolution on the SQM 160 main window Etch Mode Sets the rate and thic...

Страница 57: ...Thickness for Zero Output zero volts Max Thickness Thickness for Full Scale Output five volts Min Rate Rate for Zero Output zero volts Max Rate Rate for Full Scale Output five volts 4 7 Communications Menu The communications setup screen allows setup and troubleshooting of the SQM 160 serial communications connection Figure 4 6 Communicatons Dialog Box To connect the SQM 160 Thin Film Monitor to y...

Страница 58: ...axis and grid settings Figure 4 7 Graph Dialog Box The graph tabbed window allows for complete control of the graph appearance To make the changes permanent select Control tab followed by the General subtab and select Save Save to the Avg_dep oc2 or Ch_dep oc2 disk files In most cases The only tab that may need adjustment is the axis tab Under the axis tab in the scale subtab Y Axis Max The maximu...

Страница 59: ...n The help menu contains the information found in this chapter while the about menu displays program revision and technical support information Figure 4 8 About Dialog Box Click System Information to display detailed information about your computer and operating system Depending on your Windows installation this feature may not be available ...

Страница 60: ...4 12 IPN 074 511 P1C SQM 160 Operating Manual This page is intentionally blank ...

Страница 61: ...ng male connector is required for attachment of a host interface The host and the SQM 160 can be separated by up to fifty feet using multiconductor shielded data cable For successful communciations the baud rate of the host and SQM 160 must match Avaiable baud rate options are 2 400 4 800 9 600 19 200 38 400 57 600 115 200 Baud The SQM 160 is configured as DCE Data Communication Equipment NOTE Unp...

Страница 62: ...te directly with the SQM 160 the Internet protocol IP on the PC must be configured manually and an ethernet cable must be connected between the PC and the SQM 160 Some PC s will auto configure and work with either straight or crossover ethernet cable Instructions are provided here for manually configuring the Internet protocol NOTE If the PC only has one ethernet port that is one network connectio...

Страница 63: ...ea Connection to be changed right click and select Properties See Figure 5 2 Figure 5 2 Local Area Connection Properties On the General tab select Internet Protocol TCP IP and press the Properties button See Figure 5 3 Figure 5 3 Internet Protocol TCP IP Properties ...

Страница 64: ...INFICON with a pre assigned address of 192 168 1 200 To communicate directly with the SQM 160 from a PC the PC must also be assigned an address that starts with 192 168 1 but cannot be set to 192 168 1 200 The example in Figure 5 4 uses the address 192 168 1 201 for the PC Figure 5 4 Entering the IP Address and Subnet mask Click OK to all open dialogs to close out the Internet Protocol setup for t...

Страница 65: ...ssword dbps 4 Click Login 5 Click Configuration Network and set 6 1 Change IP 192 168 1 200 to your new IP address Click Apply then Log Out The new IP address is now configured 5 2 SQM 160 Comm Software SQM 160 Comm software is found on the 074 5000 G1 Thin Film Instrument and Manuals CD supplied with your SQM 160 This program provides real time instrument control and process data logging Data can...

Страница 66: ...CRC characters NOTE If you do not want to use CRC checking in your application send two Null characters CHR 0 for the CRC The SQM 160 will ignore the CRC The SQM 160 will still return a CRC in its response but you can ignore it The CRC is computed using the following algorithm 1 The CRC is initialized to 3FFF hex 2 Each character in the message is examined bit by bit and added to the CRC in the fo...

Страница 67: ...page 5 6 The CRC characters are calculated as described above 5 4 Commands 5 4 1 Command Parameters None Description Returns the model number and software version number Example AMON Ver 2 01 5 4 2 Command A Parameters 1 99 Values Description Film parameters The parameters available for change or inspection are Label Density Tooling Z Factor Final Thickness Thickness Setpoint Time Setpoint Sensor ...

Страница 68: ... of the Set Get command for Film 4 is A4 LENS_1 6 23 125 1 05 1 525 0 450 30 1 A4 A LENS 1 6 23 125 1 05 1 525 0 450 30 1 5 4 3 Command B Description System 1 parameters The parameters available for change or inspection are Time Base Simulation Mode Frequency Mode Rate Resolution Rate Filter Crystal Tooling and the parameters are sent retrieved in that order Example B A0 25 0 0 0 8 100 100 100 100...

Страница 69: ...ls available 5 4 7 Command L Parameters 1 6 Description Read the current Rate for a channel Example L1 A9 32 Channel one s rate is 9 32 Å S 5 4 8 Command M Parameters None Description Read the current Average Rate Example M A10 42 Average Rate is 10 42 Å S 5 4 9 Command N Parameters 1 6 Description Read the current thickness for a channel Example N4 A1 187 Channel four s Thickness is 1 187 kÅ 5 4 ...

Страница 70: ... Crystal Life for a channel Example R3 A57 82 Channel three s remaining life is 57 82 5 4 13 Command S Parameters None Description Zero Average Thickness and Rate Example S A 5 4 14 Command T Parameters None Description Zero Time Example T A Zeroes time display on SQM 160 5 4 15 Command U Parameters 0 1 or Description Toggles shutter open closed or reads shutter state Example U1 A Shutter is opene...

Страница 71: ...nsor 2 Rate Å s Sensor 2 Thickness Å Sensor 2 Frequency Hz etc 5 4 17 Command Y Parameters None Description Read the Power Up Reset flag The Power Up Reset flag is set during boot up of the SQM 160 and stays set until read through the RS 232 interface After the flag is read it is reset and will not be set again until the SQM 160 is power cycled Example Y A1 Power Up Reset flag is set Y A0 Power Up...

Страница 72: ...g Dim i As Integer Dim j As Integer LastIndex UBound ByData Avoid on length messages If ByData 1 0 Then Set 14 bit CRC to all ones CRC H3FFF For j 1 To LastIndex 2 XOR current character with CRC CRC CRC Xor ByData j Go thru lower 8 bits of CRC For i 1 To 8 Save CRC before shift TmpCRC CRC Shift right one bit CRC Shri CRC 1 If TmpCRC And 1 1 Then If LSB is 0 before shift XOR with hex 2001 CRC CRC X...

Страница 73: ...ber Err Description _ LoByte Resume PROC_EXIT End Function Public Function Shri _ ByVal lngValue As Long _ ByVal bytPlaces As Byte _ As Integer Comments Shifts a long Value right the selected number of places Parameters lngValue integer Value to shift bytPlaces number of places to shift Returns Shifted value Source Total VB SourceBook 6 Dim lngDivisor As Long On Error GoTo PROC_ERR if we are shift...

Страница 74: ...ength 1 str 1 34 if length 0 crc short 0x3fff for int jx 1 jx length jx crc short crc short str jx for int ix 0 ix 8 ix tmpCRC crc crc short crc 1 if tmpCRC 0x1 1 crc short crc 0x2001 crc short crc 0x3fff return crc private byte crcHigh short crc byte val byte crc 7 0x7f 34 return val private byte crcLow short crc byte val byte crc 0x7f 34 return val 5 5 3 C class CRC14 public CRC14 void crc 0x0 p...

Страница 75: ...crc short 0x3fff for int jx 1 jx length jx crc short crc short str jx for int ix 0 ix 8 ix short tmpCRC crc crc short crc 1 if tmpCRC 0x1 1 crc short crc 0x2001 crc short crc 0x3fff return crc unsigned char crc2 unsigned char val unsigned char crc 7 0x7f 34 return val unsigned char crc1 unsigned char val unsigned char crc 0x7f 34 return val ...

Страница 76: ...5 16 IPN 074 511 P1C SQM 160 Operating Manual This page is intentionally blank ...

Страница 77: ...enance 6 1 Troubleshooting Guide If the SQM 160 fails to function or appears to have diminished performance the following Symptom Cause Remedy charts may be helpful CAUTION There are no user serviceable components within the SQM 160 case Refer all maintenance to qualified personnel ...

Страница 78: ...ate d Poor electrical contact in the sensor feedthroughs or in vacuum cable d Use an Ohm meter or DMM to check electrical continuity or isolation as appropriate e Failed crystal no crystal e Replace crystal with new INFICON crystal f Two crystals placed into the crystal holder f Remove one of the crystals g Frequency of crystal out of range g Verify that the crystal frequency is within the require...

Страница 79: ...iled troubleshooting guide is shipped with the sensor Refer to that manual for more detailed information in some cases 3 Frequency reading is unstable or drifting a Temperature of the crystal is changing An AT cut crystal frequency may drift as much as 10 Hz C a Control the temperature of the chamber Check watering cooling for flow and temperature Check source to crystal distance 12 in is ideal b ...

Страница 80: ...g crystal c Thermally condition the source thoroughly before deposition use a shutter to protect the crystal during source conditioning d Material build up scratches or foreign particles on the crystal holder seating surface improper crystal seating d Clean and polish the crystal seating surface on the crystal holder e Small pieces of material fell on crystal for crystal facing up sputtering situa...

Страница 81: ...NOTE Crystal life is highly dependent on process conditions of rate power radiated from source location material and residual gas composition 3 Crystal does not oscillate or oscillates intermittently both in vacuum and in air a Intermittent or poor electrical contact contacts oxidized a Use an Ohm meter or DMM to check electrical continuity clean contacts b Leaf springs have lost retentivity ceram...

Страница 82: ...ncrease a Inadequate cooling water cooling water temperature too high a Check cooling water flow rate be certain that cooling water temperature is less than 30 C refer to appropriate sensor manual b Excessive heat input to the crystal b If heat is due to radiation from the evaporation source move sensor further away from source and use silver crystals for better thermal stability install radiation...

Страница 83: ...ke use of an intermediate adhesion layer d Cyclic change in rate d Make certain source s sweep frequency is not beating with the SQM 160 s measurement frequency 7 Large drift in thickness greater than 200 Å for a density of 5 00 g cc after termination of sputtering a Crystal heating due to poor thermal contact a Clean or polish the crystal seating surface on the crystal holder b External magnetic ...

Страница 84: ...trics may not adhere strongly to the crystal surface and may cause erratic readings NOTE Thick deposits of some materials such as SiO Si and Ni will normally peel off the crystal when it is exposed to air as a result of changes in film stress caused by gas absorption When you observe peeling replace the crystals Table 6 3 Troubleshooting Computer Communications SYMPTOM CAUSE REMEDY 1 Communication...

Страница 85: ...e 6 6 on page 6 14 3 Turn the crystal holder over and the crystal will drop out 4 Install a new crystal with the patterned electrode face up 5 Push the retainer back into the crystal holder and replace the crystal holder in the sensor body Figure 6 1 Front Load Crystal Sensor Exploded Front Load Crystal Holder IPN 750 172 G1 Front Load Standard Crystal Sensor Body IPN 750 207 G1 Crystal IPN 008 01...

Страница 86: ...o remove the spent crystal 3 Install a new crystal in the drawer Observe its orientation The pattern electrode should face upward as shown in Figure 6 3 4 Hold the retainer by its sides Align its orientation notch with the drawer then gently and evenly push the retainer down until it snaps firmly into the drawer see Figure 6 3 Never push down or pull up on the contact spring doing so may permanent...

Страница 87: ...6 11 IPN 074 511 P1C SQM 160 Operating Manual Figure 6 3 Cool Drawer Replacing The Crystal Orientation Notch Handle Retainer Crystal Drawer ...

Страница 88: ...f the holder flush with the cam mechanism and lock it in place with the cam See Figure 6 4 Figure 6 4 Bakeable Crystal Sensor Crystal Holder and Retainer Spring IPN 750 218 G1 Crystal IPN 008 010 G10 Fully Coated Face Gold Crystal Retainer IPN 007 064 Clamping Spring IPN 007 094 Contact IPN 007 099 Insulator IPN 007 103 Spreader Bar IPN 007 267 P2 Shoulder Washer IPN 007 268 P1 Two Required Should...

Страница 89: ...atcher see section 6 3 5 on page 6 14 4 Turn the crystal holder over so that the crystal drops out 5 Install a new crystal into the crystal holder with the patterned electrode facing the back and contacting the leaf springs on the ceramic retainer 6 Put the ceramic retainer back into the crystal holder and put the holder into the body assembly of the sensor 7 Align the position of the body assembl...

Страница 90: ...cher into ceramic retainer 1 and apply a small amount of pressure This locks the retainer to the snatcher and allows the retainer to be pulled straight out 2 See Figure 6 6 2 Reinsert the retainer into the holder after the crystal has been replaced 3 Release the crystal snatcher with a slight side to side motion Figure 6 6 Use of the Crystal Snatcher ...

Страница 91: ...easurement system from the oscillator to the sensor head It provides a known good monitor crystal with known good electrical connections Using the emulator and the controller in a systematic manner provides a fast means of isolating measurement system cable or sensor problems See Figure 6 8 Figure 6 8 Crystal Sensor Emulator Attachment Points CAUTION This product is designed as a diagnostic tool a...

Страница 92: ...ix inch BNC cable to the feedthrough Go to section 6 4 1 2 If the Crystal Fail message remains continue at step 3 3 Disconnect the six inch BNC cable from the Oscillator and from the Emulator 4 Visually inspect the six inch BNC cable to verify that the center pins are seated properly 5 Use an Ohm meter to verify the electrical connections on the six inch BNC cable There must be continuity 0 2 ohms...

Страница 93: ...d to be defective replace the feedthrough re attach the BNC and in vacuum cables and repeat this procedure starting at Step 2 otherwise continue at step 6 6 Verify electrical continuity from center pin to center pin on the in vacuum cable 7 Verify that the center pin of the in vacuum cable is electrically isolated from the in vacuum cable shield If the in vacuum cable is found to be defective repl...

Страница 94: ...o Figure 6 7 on page 6 15 Connect the Crystal Sensor Emulator to the Sensor Head at Point C If the Crystal Fail message disappears after approximately 5 seconds the Sensor Head is operating properly Re insert the Crystal Cover into the Sensor Head If the Crystal Fail message remains continue at step 3 3 Disconnect the in vacuum cable from the Sensor Head and the feedthrough Remove the Crystal Sens...

Страница 95: ... in the ceramic retainer are bent to an angle of approximately 60º and 45º from flat respectively 6 4 1 4 System Diagnostics Pass But Crystal Fail Message Remains If the system is operating properly yet the Crystal Fail message is still displayed perform the following tasks 1 On the Ceramic Retainer verify that the center rivet is secure Repair or replace the ceramic retainer as necessary 2 Inspec...

Страница 96: ... Sensor Heads for which the Crystal Sensor Emulator s Sensor Cover Connector will not fit are shown in Table 6 5 NOTE The Crystal Sensor Emulator s Sensor Cover will not fit the crystal holder opening of the older style INFICON transducers that have the soldered finger springs Table 6 4 Compatible Sensor Heads Sensor Head Part Number Front Load Single Sensor Head SL XXXXX Front Load Dual Sensor He...

Страница 97: ...pecifications Dimensions 1 58 in diameter x 1 79 in 40 13 mm diameter x 45 47 mm Temperature Range 0 to 50oC Frequency 760 601 G2 5 5 MHz 1 ppm at room temperature Materials 304 Stainless Steel Nylon Teflon brass Some internal components contain zinc tin and lead ...

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Страница 99: ...rial grid The tooling factor can be experimentally established by following the guidelines in section 7 3 on page 7 2 If the Z Ratio is not known it could be estimated from the procedures outlined in section 7 4 on page 7 2 7 2 Determining Density NOTE The bulk density values retrieved from Table A 1 are sufficiently accurate for most applications Follow the steps below to determine density value ...

Страница 100: ...termine actual thickness 3 Calculate tooling from the relationship shown in equation 2 2 where Tm Actual thickness at substrate holder Tx Thickness reading in the SQM 160 TFi Initial tooling factor 4 Round off percent tooling to the nearest 0 1 5 When entering this new value for tooling into the program Tm will equal Tx if calculations are done properly NOTE It is recommended that a minimum of thr...

Страница 101: ...ng frequency Fco The starting frequency will be displayed on the main screen 3 Make a deposition on a test substrate such that the percent crystal life display will read approximately 50 or near the end of crystal life for the particular material whichever is smaller 4 Stop the deposition and record the ending crystal frequency Fc 5 Remove the test substrate and measure the film thickness with eit...

Страница 102: ...position for example two layers the Z value used for the second layer is determined by the relative thickness of the two layers For most applications the following three rules will provide reasonable accuracies If the thickness of layer 1 is large compared to layer 2 use material 1 Z value for both layers If the thickness of layer 1 is thin compared to layer 2 use material 2 Z value for both layer...

Страница 103: ...c layer of an adhered foreign material In the late 1950 s it was noted by Sauerbrey1 2 and Lostis3 that the change in frequency DF Fq Fc of a quartz crystal with coated or composite and uncoated frequencies Fc and Fq respectively is related to the change in mass from the added material Mf as follows 1 where Mq is the mass of the uncoated quartz crystal Simple substitutions lead to the equation tha...

Страница 104: ...ckness twist modes The response at about three times the frequency of the fundamental is called the third quasiharmonic There are also a series of anharmonics slightly higher in frequency associated with the quasiharmonic The monitor crystal design depicted in Figure 8 1 is the result of several significant improvements from the square crystals with fully electroded plane parallel faces that were ...

Страница 105: ...thickness consequently inferred The AT resonator is usually chosen for deposition monitoring because at room temperature it can be made to exhibit a very small frequency change due to temperature changes Since there is presently no way to separate the frequency change caused by added mass which is negative or even the frequency changes caused by temperature gradients across the crystal or film ind...

Страница 106: ... oscillation Tq 1 Fq Electronically the period measurement technique uses a second crystal oscillator or reference oscillator not affected by the deposition and usually much higher in frequency than the monitor crystal This reference oscillator is used to generate small precision time intervals which are used to determine the oscillation period of the monitor crystal This is done by using two puls...

Страница 107: ...n many cases the desired properties of these films can be lost if the layer to layer reproducibility exceeds one or two percent Ultimately the practical stability and frequency of the reference oscillator limits the precision of measurement for conventional instrumentation 8 1 3 Z match Technique After learning of fundamental work by Miller and Bolef 5 which rigorously treated the resonating quart...

Страница 108: ...illator s stability is derived from the rapid change of phase for a small change in the crystal s frequency near the series resonance point as shown in Figure 8 6 on page 8 7 Figure 8 4 Active Oscillator Circuit The active oscillator circuit is designed so the crystal is required to produce a phase shift of 0 degrees which allows it to operate at the series resonance point Long and short term freq...

Страница 109: ...happens it is often more favorable for the oscillator to resonate at one of the anharmonic frequencies This condition is sometimes short lived with the oscillator switching between the fundamental and anharmonic modes or it may continue to oscillate at the anharmonic This condition is known as mode hopping and in addition to annoying rate noise can also lead to false termination of the film becaus...

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Страница 111: ...of 1 000 is defaulted in these situations Table A 1 Material Table Formula Density Z Ratio Material Name Ag 10 500 0 529 Silver AgBr 6 470 1 180 Silver Bromide AgCl 5 560 1 320 Silver Chloride Al 2 700 1 080 Aluminum Al2O3 3 970 0 336 Aluminum Oxide Al4C3 2 360 1 000 Aluminum Carbide AIF3 3 070 1 000 Aluminum Fluoride AIN 3 260 1 000 Aluminum Nitride AlSb 4 360 0 743 Aluminum Antimonide As 5 730 0...

Страница 112: ...0 Carbon Graphite C 3 520 0 220 Carbon Diamond C8H8 1 100 1 000 Parlyene Union Carbide Ca 1 550 2 620 Calcium CaF2 3 180 0 775 Calcium Fluoride CaO 3 350 1 000 Calcium Oxide CaO SiO2 2 900 1 000 Calcium Silicate 3 CaSO4 2 962 0 955 Calcium Sulfate CaTiO3 4 100 1 000 Calcium Titanate CaWO4 6 060 1 000 Calcium Tungstate Cd 8 640 0 682 Cadmium CdF2 6 640 1 000 Cadmium Fluoride CdO 8 150 1 000 Cadmium...

Страница 113: ... Copper I Sulfide Beta CuS 4 600 0 820 Copper II Sulfide Dy 8 550 0 600 Dysprosium DY2O3 7 810 1 000 Dysprosium Oxide Er 9 050 0 740 Erbium Er2O3 8 640 1 000 Erbium Oxide Eu 5 260 1 000 Europium EuF2 6 500 1 000 Europium Fluoride Fe 7 860 0 349 Iron Fe2O3 5 240 1 000 Iron Oxide FeO 5 700 1 000 Iron Oxide FeS 4 840 1 000 Iron Sulphide Ga 5 930 0 593 Gallium Ga2O3 5 880 1 000 Gallium Oxide B GaAs 5 ...

Страница 114: ...180 1 000 Indiurn Sesquioxide In2Se3 5 700 1 000 Indium Selenide In2Te3 5 800 1 000 Indium Telluride InAs 5 700 1 000 Indium Arsenide InP 4 800 1 000 Indium Phosphide InSb 5 760 0 769 Indium Antimonide Ir 22 400 0 129 Iridium K 0 860 10 189 Potassium KBr 2 750 1 893 Potassium Bromide KCI 1 980 2 050 Potassium Chloride KF 2 480 1 000 Potassium Fluoride KI 3 128 2 077 Potassium Iodide La 6 170 0 920...

Страница 115: ...m Trioxdide MoS2 4 800 1 000 Molybdenum Disulfide Na 0 970 4 800 Sodium Na3AIF6 2 900 1 000 Cryolite Na5Al3F14 2 900 1 000 Chiolite NaBr 3 200 1 000 Sodium Bromide NaCl 2 170 1 570 Sodium Chloride NaCIO3 2 164 1 565 Sodium Chlorate NaF 2 558 1 645 Sodium Fluoride NaNO3 2 270 1 194 Sodium Nitrate Nb 8 578 0 492 Niobium Columbium Nb2O3 7 500 1 000 Niobium Trioxide Nb2O5 4 470 1 000 Niobium V Oxide N...

Страница 116: ...160 0 651 Lead Telluride Pd 12 038 0 357 Palladium PdO 8 310 1 000 Palladium Oxide Po 9 400 1 000 Polonium Pr 6 780 1 000 Praseodymium Pr2O3 6 880 1 000 Praseodymium Oxide Pt 21 400 0 245 Platinum PtO2 10 200 1 000 Platinum Oxide Ra 5 000 1 000 Radium Rb 1 530 2 540 Rubidium RbI 3 550 1 000 Rubidiurn Iodide Re 21 040 0 150 Rhenium Rh 12 410 0 210 Rhodium Ru 12 362 0 182 Ruthenium S8 2 070 2 290 Su...

Страница 117: ...27 Strontium Fluroide SrO 4 990 0 517 Strontium Oxide Ta 16 600 0 262 Tantalum Ta2O5 8 200 0 300 Tantalum V Oxide TaB2 11 150 1 000 Tantalum Boride TaC 13 900 1 000 Tantalum Carbide TaN 16 300 1 000 Tantalum Nitride Tb 8 270 0 660 Terbium Tc 11 500 1 000 Technetium Te 6 250 0 900 Tellurium TeO2 5 990 0 862 Tellurium Oxide Th 11 694 0 484 Thorium ThF4 6 320 1 000 Thorium IV Fluoride ThO2 9 860 0 28...

Страница 118: ... 000 Vanadium Boride VC 5 770 1 000 Vanadium Carbide VN 6 130 1 000 Vanadium Nitride VO2 4 340 1 000 Vanadium Dioxide W 19 300 0 163 Tungsten WB2 10 770 1 000 Tungsten Boride WC 15 600 0 151 Tungsten Carbide WO3 7 160 1 000 Tungsten Trioxide WS2 7 500 1 000 Tungsten Disulphide WSi2 9 400 1 000 Tungsten Silicide Y 4 340 0 835 Yttrium Y203 5 010 1 000 Yttrium Oxide Yb 6 980 1 130 Ytterbium Yb2O3 9 1...

Страница 119: ...0 0 770 Zinc Telluride Zr 6 490 0 600 Zirconium ZrB2 6 080 1 000 Zirconium Boride ZrC 6 730 0 264 Zirconium Carbide ZrN 7 090 1 000 Zirconium Nitride ZrO2 5 600 1 000 Zirconium Oxide Table A 1 Material Table continued Formula Density Z Ratio Material Name ...

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