Inficon SQM-160, Руководство по эксплуатации

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SQM-160 Operating Manual
3.7 Sensor Tooling
Sensor Tooling adjusts for the difference in deposition rate between the sensor and
the substrate being coated. It is an empirically determined value that matches the
sensor readings to the vacuum system.
Figure 3-4 Sensor Tooling
xTooling is set in the System Menu. It adjusts the tooling for each individual sensor
before it is averaged. xTooling for a sensor applies to all films. If the individual
sensor xToolings are set properly, a sensor failure will not cause a jump in the
average Rate and Thickness reading. See
section 7.3, Determining Tooling, on
page 7-2 for more details.
To adjust xTooling:
1
Press Program to enter Program mode.
2
Press Prev to enter the System Menu.
3
Press Next until xTOOLING is shown, then press the Control Knob.
4
Adjust the Control Knob to set the XTLTOOL 1 value. Press the Control Knob
to save the value and move to XTLTOOL 2.
5
Repeat Step 4 for each of the installed sensors.
6
Press Program to exit the System Menu and return to normal mode.
Film Tooling is set in the Film Menu and is applied to the averaged Rate and
Thickness for all sensors assigned to that film. Film Tooling is a film-specific value,
and is seldom required.
Tooling
Over 100%
Tooling
Under 100%
Substrate
Substrate