Inficon SQM-160, Руководство по эксплуатации

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SQM-160 Operating Manual
Table 6-2 Troubleshooting Sensors
SYMPTOM CAUSE REMEDY
1. Large jumps of thickness
reading during deposition. a. Mode hopping. a. Mode hopping is a
byproduct of active
oscillation with a heavily
damped crystal. Temperature
stabilization is key in
diminishing this. Replace the
crystal.
b. Stress causes film to peel
from crystal surface. b. Replace crystal or use
high performance
RunSaver™ crystal; consult
factory.
c. Particulate or "spatter"
from molten source striking
crystal. c. Thermally condition the
source thoroughly before
deposition, use a shutter to
protect the crystal during
source conditioning.
d. Material build up,
scratches or foreign particles
on the crystal holder seating
surface (improper crystal
seating.) d. Clean and polish the
crystal seating surface on the
crystal holder.
e. Small pieces of material
fell on crystal (for crystal
facing up sputtering
situation.) e. Check the crystal surface
and blow it off with clean air.
f. Small pieces of magnetic
material being attracted by
the sensor magnet and
contacting the crystal
(sputtering sensor head.) f. Check the sensor cover's
aperture and remove any
foreign material that may be
restricting full crystal
coverage.