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Trademarks

The trademarks of the products mentioned in this manual are held by the companies that
produce them.

Sion™ is a trademark and INFICON® and FabGuard® are registered trademarks of INFICON.

Teflon® is a registered trademark of DuPont Co.

All other brand and product names are trademarks or registered trademarks of their respective companies.

Patent

Craig Garvin et al., "High Performance Miniature RF Sensor For Use In Microelectronics Plasma Processing
Tools," U.S. Patent 7 538 562 B2, May 26, 2009

Disclaimer

The information contained in this manual is believed to be accurate and reliable. However, INFICON assumes
no responsibility for its use and shall not be liable for any special, incidental, or consequential damages related
to the use of this product.

Due to our continuing program of product improvements, specifications are subject to change without notice.

Copyright

©2007 All rights reserved.
Reproduction or adaptation of any part of this document without permission is unlawful.

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Содержание Sion

Страница 1: ...O P E R A T I N G M A N U A L Sion RF Detector IPN 074 462 P1C ...

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Страница 3: ...O P E R A T I N G M A N U A L Sion RF Detector IPN 074 462 P1C www inficon com reachus inficon com 2007 INFICON ...

Страница 4: ...niature RF Sensor For Use In Microelectronics Plasma Processing Tools U S Patent 7 538 562 B2 May 26 2009 Disclaimer The information contained in this manual is believed to be accurate and reliable However INFICON assumes no responsibility for its use and shall not be liable for any special incidental or consequential damages related to the use of this product Due to our continuing program of prod...

Страница 5: ...EN 50178 1998 Safety standard for Electronic Equipment for use in Power Installations for dielectric breakdown only Note This instrument is exempt from the Low Voltage Directive 73 23 EEC as amended by 93 68 EEC since no voltage within the unit excess the limits set forth in Article 1 of this directive EMC EN 61326 1 1997 A1 1998 A2 2001 Emissions per Table 3 Class A Equipment Immunity per Table A...

Страница 6: ......

Страница 7: ...on Seller shall not be liable for any further damages which could have been avoided if Seller had been provided with immediate written notification THIS WARRANTY IS MADE AND ACCEPTED IN LIEU OF ALL OTHER WARRANTIES EXPRESS OR IMPLIED WHETHER OF MERCHANTABILITY OR OF FITNESS FOR A PARTICULAR PURPOSE OR OTHERWISE AS BUYER S EXCLUSIVE REMEDY FOR ANY DEFECTS IN THE PRODUCTS TO BE SOLD HEREUNDER All ot...

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Страница 9: ... is a Danger paragraph Failure to heed these messages has a high likelihood of resulting in serious personal injury or even death WARNING This is a Warning paragraph It warns of actions that may cause physical injury WARNING Risk Of Electric Shock This Warning paragraph warns of the presence of electrical voltages which may cause physical injury CAUTION This is a Caution paragraph It cautions agai...

Страница 10: ...ave received To contact Customer Support see Support at www inficon com Returning Your Instrument to INFICON Do not return any component of your instrument to INFICON without first speaking with a Customer Support Representative You must obtain a Return Material Authorization RMA number from the Customer Support Representative If you deliver a package to INFICON without an RMA number your package ...

Страница 11: ...ating 1 4 1 5 2 Detector RF Input Range 1 4 1 5 3 Detector RF Output 1 4 1 5 4 Converter Signal Input 1 4 1 5 5 Converter Power Input 1 4 1 5 6 Converter Output 1 4 1 5 7 Breakout Box 1 4 1 5 8 NiDAQ PCI Board 1 5 1 6 Physical Requirements 1 5 1 6 1 Detector Head Physical Dimensions 1 5 1 6 2 Converter Physical Dimensions 1 5 1 6 3 Breakout Box Physical Dimensions 1 6 1 6 4 Weight 1 6 1 7 Electric...

Страница 12: ...1 FabGuard Installation and Setup 1 26 1 12 Converter Factory Settings 1 27 1 13 Operation 1 27 1 13 1 Application Guide 1 27 1 13 1 1 Arc Detection 1 27 1 13 1 2 Endpoint Detection 1 28 1 13 2 Example of Use 1 28 Chapter 2 How The Sion Works 2 1 Theory of Operation 2 1 2 2 Instrument Overview 2 2 2 2 1 Detector 2 2 2 2 2 Converter 2 2 2 2 3 Breakout Box 2 2 2 2 4 Data Acquisition Board in PC 2 2 ...

Страница 13: ...verter connected to the FabGuard data collection and analysis system 1 2 Purpose of the Sion The Sion provides real time high power analyses of plasma micro arcing which can cause damage to the target the film being deposited and even the wafer surface in chemical vapor deposition CVD and ETCH processes Additionally the Sion can detect plasma clean endpoint with superior accuracy allowing tighter ...

Страница 14: ...urchase order See Table 1 1 Contact your INFICON representative if any components are missing 4 Save the shipping container until the equipment is installed and performance is verified If there is a problem refer to How To Contact Customer Support Table 1 1 Sion System Components and Quantities Component and Part Number Sion System Configuration 927 600 G1 927 600 G2 927 600 G3 927 600 G4 927 600 ...

Страница 15: ...nt at the Detector when instrument is operating BE CAREFUL AROUND THIS INSTRUMENT WARNING Risk Of Electric Shock Do not open the instrument case There are no user serviceable components within the instrument case Refer all maintenance to INFICON service or technically qualified personnel WARNING Do not attempt to operate this instrument without proper training WARNING Ensure that this instrument i...

Страница 16: ...t The Converter circuit requires 5 V dc at less than 100 mA This power is supplied by the National Instrument NiDAQ 6220M or 6224M computer interface board through the Breakout box 1 5 6 Converter Output The current channel output range is 0 to 5 V dc and is proportional to the log of the sensed current The gain and offset adjustments are factory set The voltage channel output range is 0 to 5 V dc...

Страница 17: ...nterface cable NiDAQ 68 pin Cable are purchased parts from National Instruments Their specifications are included with the parts 1 6 Physical Requirements 1 6 1 Detector Head Physical Dimensions Figure 1 1 Detector Head Physical Dimensions in mm 1 6 2 Converter Physical Dimensions Figure 1 2 Converter Physical Dimensions in mm ...

Страница 18: ...quirements 5 V dc power is supplied by the NiDAQ PCI 6220M or 6224M Data Acquisition board 1 8 Environmental Requirements 1 8 1 Use Indoor use only 1 8 2 Altitude Range Up to 2 000 meters 1 8 3 Humidity 1 8 3 1 Sion Detector Assembly Operating and Storage humidity range 10 to 90 RH non condensing 1 8 3 2 Sion Converter Cables and Breakout Box Operating and Storage humidity range 10 to 90 RH non co...

Страница 19: ...stem Requirements Refer to the FabGuard Operating Manual for information regarding the Computer System 1 10 Installation 1 10 1 Required Tools Table 1 2 List Of Required Tools Description IPN Quantity 27 mm Open end Wrench or Deep Socket and Ratchet Wrench N A 1 9 16 In Open end Wrench or Socket and Ratchet Wrench N A 1 5 8 In Open end Wrench or Socket and Ratchet Wrench N A 1 3 mm or 1 8 in Drill...

Страница 20: ...ter mounting hole see section 1 10 3 on page 1 9 If it is required that the tool panel cover be opened more than 76 mm 3 in the distance between Detector and Converter must be decreased accordingly 3 Determine the orientation of the clamp when connecting the Detector Assembly to the RF strap or rod See Figure 1 4 4 With the Detector and clamp surrounding the RF strap or rod insert two thumb screws...

Страница 21: ...ried out on the tool CAUTION The Converter may be installed on tool panel covers up to 4 11 mm 0 162 in thick Installation of the Converter on a tool panel cover exceeding this thickness will result in an unreliable electrical connection between the Converter and Detector Assembly WARNING Risk Of Electric Shock The Converter must be properly grounded before the RF power is reenergized ...

Страница 22: ...t is required that the tool panel cover be opened more than 76 mm 3 in the distance between Converter and Detector must be decreased accordingly 2 Drill a 3 mm 1 8 in pilot hole at the point on the tool panel cover where the Converter will be located 3 Enlarge the pilot hole using a 10 mm 13 32 in drill bit 4 Where the hole was drilled use the hole punch refer to Table 1 2 to create a D shaped hol...

Страница 23: ...ny oil on the tool panel cover left by the hole punch CAUTION Make certain to remove any traces of oil on the tool panel cover that could prevent a good RF ground to the Converter or contaminate the clean room environment 12 Verify that the tool panel cover is not anodized If not certain whether or not the panel is anodized use an ohmmeter to measure the resistance between two points on the surfac...

Страница 24: ...3 55 mm 0 140 in but not greater than 4 11 mm 0 162 in install the connector nut onto the Converter input connector without the grounding washer See Figure 1 7 CAUTION If the tool panel cover thickness is greater than 3 55 mm 0 140 in but is not greater than 4 11 mm 0 162 in install the connector nut without using the grounding washer otherwise the integrity of the electrical connection between th...

Страница 25: ...e knurled nut at the end of the Detector Assembly cable clockwise onto the Converter input connector until the knurled nut stops turning See Figure 1 8 NOTE The rough sensation when turning the knurled nut onto the Converter input connector is due to a ratchet mechanism designed to prevent the nut from loosening CAUTION Do not turn the hex nut located below the knurled nut or damage to the Detecto...

Страница 26: ...ntact with the connector nut the electrical connection could still be good but make sure to verify that the tool panel cover does not exceed the maximum allowed thickness refer to step 15 on page 1 12 Figure 1 8 Detector Assembly To Converter Connection 3 Reattach the tool panel cover and apply the caution label to the panel at a spot near the Converter where it is clearly visible See Figure 1 9 F...

Страница 27: ...the FabGuard CD and locate the WinZip file named NIDAQmx 8 3 0 Runtime4 installer path Installs NI DAQmx 8 3 0 NIDAQmx 8 3 0 Runtime4 installer See Figure 1 10 Extract the WinZip file to a temporary directory Figure 1 10 NIDAQmx 8 3 0 Runtime4 Installer 2 In the temporary directory where the extracted files reside open the Runtime4 directory and double click the Setup application See Figure 1 11 F...

Страница 28: ...on Operating Manual 3 After the installer initialization see Figure 1 12 is completed click Next at the Product Information screen see Figure 1 13 Figure 1 12 Installer Initialization Progress Figure 1 13 Product Information ...

Страница 29: ...o install the software to the default destination directory of C Program Files National Instruments See Figure 1 14 NOTE A directory different than the default can be selected if required Figure 1 14 Destination Directory 5 Click Next at the Features screen See Figure 1 15 Figure 1 15 Features ...

Страница 30: ...creen select I accept the License Agreement and click Next See Figure 1 16 Figure 1 16 License Agreement 7 Click Next at the Start Installation screen see Figure 1 17 A screen showing software installation progress will appear see Figure 1 18 Figure 1 17 Start Installation ...

Страница 31: ...ating Manual Figure 1 18 Software Installation Progress 8 Click Next at the Installation Complete screen See Figure 1 19 Figure 1 19 Installation Complete 9 Click Shut Down at the pop up window See Figure 1 20 Figure 1 20 Shut Down ...

Страница 32: ...computer motherboard CAUTION Turn off power to the computer before installing the NiDAQ board CAUTION Static Sensitive Device Observe ESD precautions when handling the NiDAQ board 11 Power up the computer Steps 12 through 16 pertain only to Windows XP For Windows Vista continue with step 17 12 At the Found New Hardware Wizard screen select No not this time and click Next See Figure 1 21 Figure 1 2...

Страница 33: ...a list or specific location and click Next See Figure 1 22 Figure 1 22 Found New Hardware Wizard Install From List 14 Select Don t search I will choose the driver to install and click Next See Figure 1 23 Figure 1 23 Found New Hardware Wizard Choose Driver To Install ...

Страница 34: ...led DAQ board PCI 6220 or PCI 6224 and click Next See Figure 1 24 Figure 1 24 Found New Hardware Wizard Select Board Model 16 Click Finish to complete the installation of the driver software for the NiDAQ PCI board See Figure 1 25 Figure 1 25 Found New Hardware Wizard Complete ...

Страница 35: ...I Product Registration 18 Open the National Instruments Measurement Automation Explorer by double clicking the newly created icon on the Windows desktop 19 Expand Devices and Interfaces and then expand NI DAQmx Devices Verify that NI PCI 6220 or NI PCI 6224 is listed under NI DAQmx Devices See Figure 1 27 Figure 1 27 Measurement Automation Explorer Devices and Interfaces ...

Страница 36: ...click on NI PCI 6220 or NI PCI 6224 and click Self Test see Figure 1 28 Verify that the board passed the Self Test and click OK see Figure 1 29 Figure 1 28 Measurement Automation Explorer Self Test Figure 1 29 Measurement Automation Explorer Self Test OK ...

Страница 37: ...ify that the device is now named NI PCI 6220 Dev 16 or NI PCI 6224 Dev 16 see Figure 1 31 NOTE Only Dev 16 or higher is allowed Figure 1 30 Measurement Automation Explorer Rename Device Figure 1 31 Measurement Automation Explorer Device Renamed Dev 16 22 The NiDAQ board installation and configuration is now complete and Measurement Automation Explorer can be closed ...

Страница 38: ...eakout Box SENSORS jack as shown by Figure 1 32 2 Connect the NiDAQ 68 Pin Cable to the NiDAQ PCI 6220M or 6224M board and to the FABGUARD COMPUTER connector on the Breakout Box Figure 1 32 System layout 1 11 FabGuard Installation and Setup Refer to the FabGuard operating manual for FabGuard software installation and setup instructions ...

Страница 39: ...iate reactant gases providing the ions needed for depositing and etching films Monitoring the voltage and current of the RF power can provide valuable process information for these critical plasma processes 1 13 1 1 Arc Detection Plasma arcing in physical vapor deposition processes PVD can cause damage to the target the film being deposited and the wafer surface Particles generated during these ar...

Страница 40: ...e Sion directly measures the chamber impedance that directly correlates to the chamber condition which can eliminate frequent over etch and under etch processing conditions 1 13 2 Example of Use Figure 1 34 is an example of a chamber clean endpoint signal from a 200 mm Producer tool The clean endpoint signal is visible from around 168 seconds using the voltage data from the Sion detector Figure 1 ...

Страница 41: ...ncy Following the leveling circuit the signals are applied to a log amp detector that generates a voltage proportional to the log of the magnitude of the RF Current and RF Voltage signals The detector output drives an amplifier stage that provides adjustment of the gain and offset of each channel For better noise immunity the scaled Voltage and Current Outputs are buffered by a current source befo...

Страница 42: ...t at its input Operating with its factory setting the Converter outputs will track the entire operating range of the Detector Offset and Gain adjustments are available to change the operating window if more gain is desired for a particular application The Converter outputs are current signals that are sent over the CAT5 interface cable to the Breakout box 2 2 3 Breakout Box In the Breakout box the...

Страница 43: ...2 3 IPN 074 462 P1C Sion Operating Manual 2 2 5 System Block Diagram Figure 2 1 System Block Diagram ...

Страница 44: ...2 4 IPN 074 462 P1C Sion Operating Manual This page is intentionally blank ...

Страница 45: ...r serviceable components within the instrument case Refer all maintenance to INFICON service or technically qualified personnel 3 2 Disconnecting One Detector While Other Detectors Are Running CAUTION When routine maintenance is conducted on a process tool and more than one Detector is connected to the Breakout box a signal level variance may occur if a Detector is disconnected The signal variance...

Страница 46: ...9 3 Signal level fluctuates 3a Converter not properly grounded to tool panel cover 3a Tighten connector nut on Converter input connector Refer to section 1 10 3 on page 1 9 4 Slow data collection 4a NiDAQ PCI Board not configured for high speed data acquisition 4a NiDAQ PCI board must be named Dev 16 or higher Refer to section 1 10 5 on page 1 15 steps 18 21 5 Intermittent signal noisy signal no s...

Страница 47: ...PCI Board failure 6b Test NiDAQ PCI board using National Instruments DAQ Diagnostic Utility 2 0 download utility and instructions from National Instruments web site at http digital ni com Replace NiDAQ PCI board 6c Breakout Box failure 6c Check Breakout Box for illuminated red LED next to FABGUARD COMPUTER connector If LED is illuminated Breakout Box is bad Replace Breakout Box 6d Converter failur...

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Страница 49: ...NiDAQ PCI 6220M Board one cable connector 035 0057 NiDAQ PCI 6224M Board two cable connectors 068 0451 Signal Cable 8 m 25 ft 068 0447 NiDAQ 68 Pin Cable 068 0450 Signal Cable 4 m 14 ft 068 0452 Signal Cable 15 m 50 ft 144 225 Thumb Screw M4 x 40 mm 600 1318 G1 Detector Assembly 927 201 G1 Converter 927 202 G1 Breakout Box 927 331 P1 Strap Rod Clamp ...

Страница 50: ...4 2 IPN 074 462 P1C Sion Operating Manual This page is intentionally blank ...

Страница 51: ...ical dimensions 1 5 input frequency 1 4 installation 1 8 output signals 1 4 voltage input 1 4 E electrical power 1 6 endpoint method 1 28 endpoint signal 1 28 etching 1 27 F FabGuard 2 1 2 2 H humidity 1 6 M maintenance 3 1 N NiDAQ 68 pin Cable 4 1 NiDAQ PCI 6220M Board 4 1 O Operation 1 27 P Plasma arcing 1 27 plasma clean endpoint 1 1 plasma micro arcing 1 1 power transmission strap 2 1 R reacta...

Страница 52: ...Index 2 IPN 074 462 P1C Sion Operating Manual This page is intentionally blank ...

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