Inficon Sion, Руководство по эксплуатации, Страница: 13 / 52

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Sion Operating Manual
Chapter 1
Introduction, Specifications,
Installation and Operation
1.1 Introduction
The INFICON® Sion™ RF detector is an ultra fast, ultra small, non intrusive RF
detector capable of measuring both voltage and current signals from a
Semiconductor Process tool. The Sion
1
has been designed with tool connectivity
in mind, being the first high speed clamp-on detector providing an extremely
compact, non-intrusive connection directly to the process chamber's high-power
RF delivery system. The Sion collects voltage and current signals at speeds up to
20 KHz, feeding the data directly into a high-speed signal converter connected to
the FabGuard® data collection and analysis system.
1.2 Purpose of the Sion
The Sion provides real-time, high-power analyses of plasma micro-arcing which
can cause damage to the target, the film being deposited, and even the wafer
surface in chemical vapor deposition (CVD) and ETCH processes. Additionally, the
Sion can detect plasma clean endpoint with superior accuracy allowing tighter
control of process parameters, reducing yield loss and the unnecessary use of high
cost gases during the chamber cleaning processes.
WARNING
Failure to operate the Sion in the manner intended by
INFICON can circumvent the safety protection provided
by the instrument and may result in personal injury.
1.Craig Garvin et al., "High Performance Miniature RF Sensor For Use In Microelectronics Plasma
Processing Tools," U.S. Patent 7 538 562 B2, May 26, 2009