Inficon PGE500, Руководство по эксплуатации

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tinb21e1 (2016-06)
9 Service
9.1 Calibration
Every INFICON module is calibrated prior to shipment using ni-
trogen (N
2
). However, you can calibrate the instrument by adjust-
ing zero (vacuum) and span (atmosphere) using the procedure
described previously in section 4.3 titled "Programming". Zero
and span (atmosphere) calibration affect the displayed value and
the output signal. Zero calibration optimizes performance of the
gauge when operating at a low pressure range of 1.00×10
-4
Torr
to 1.00×10
-3
Torr. If your minimum operating pressure is higher
than 1.00×10
-3
Torr, it is not normally necessary to perform cali-
bration at zero and thus span calibration should be adequate. If
you are able to evacuate your system to below 1.00×10
-4
Torr, it
is always a good practice to check and set zero if necessary.
This will also improve performance in cases where gauge con-
tamination is causing higher readings than 1.00×10
-4
Torr even
though the system has been evacuated to below 1.00×10
-4
Torr.
Care should be exercised when using gases other than nitrogen
(N
2
).
9.2 Maintenance
In general, maintenance is not required for your INFICON mod-
ule. Periodic performance checks may be done by comparing
the gauge to a known reference standard.