Inficon PGE500, Руководство по эксплуатации

Страница: 50 / 84

50
tinb21e1 (2016-06)
CH
4
0.3750 0.3766 0.3780 0.3825 0.3896 0.4030 0.4380 0.4920 0.5840 0.7960 1.0530
(con
tinued)
Ne
0.3750 0.3757 0.3763 0.3782 0.3810 0.3880 0.4050 0.4330 0.4840 0.6080 0.7680
D
2
0.3750 0.3760 0.3770 0.3810 0.3860 0.3960 0.4250 0.4700 0.5490 0.7270 0.9440
Freon
22
0.3750 0.3760 0.3780 0.3810 0.3880 0.4000 0.4320 0.4800 0.5660 0.7640 0.9900
Freon
12
0.3750 0.3760 0.3780 0.3820 0.3880 0.4010 0.4370 0.4880 0.5810 0.7780 1.0090
KR
0.3750 0.3755 0.3768 0.3772 0.3790 0.3840 0.3950 0.4150 0.4510 0.5440 0.6680
CO
2
0.3750 0.3760 0.3770 0.3810 0.3850 0.3950 0.4120 0.4620 0.5360 0.7050 0.9000
O
2
0.3750 0.3760 0.3770 0.3800 0.3840 0.3920 0.4170 0.4530 0.5210 0.6790 0.8680
He
0.3750 0.3755 0.3765 0.3790 0.3820 0.3890 0.4090 0.4410 0.4970 0.6370 0.8140
Ar
0.3750 0.3757 0.3760 0.3780 0.3810 0.3870 0.4030 0.4290 0.4770 0.5950 0.7450
N
2
0.3751 0.3759 0.3768 0.3795 0.3840 0.3927 0.4174 0.4555 0.5226 0.6819 0.8780
True Tot
al
Pressure
[Torr /
mTorr]
0
mTorr
0.
1
mTor
r
0.
2
mTorr
0.
5
mTorr
1
mTor
r
2
mTorr
5
mTorr
10
mTorr
20
mTorr
50
mTorr
100
mTorr