Inficon PGE500, Руководство по эксплуатации

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tinb21e1 (2016-06)
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Particles in the process chamber may be swept into the gauge
during the vent cycle. The PGE500 has a screen built into the
gauge port to help keep the largest particles out of the gauge. In
very dirty applications, or where particles are small enough to
get through the screen, an additional filter installed on the inlet
may help prolong the gauge life.
In some vacuum processes, desorbed and sputtered materials
from the process may enter vacuum components connected to
the process vacuum chamber by line-of-sight transport, espe-
cially under high vacuum conditions, i.e., in the molecular flow
regime. To prevent materials that may be transported via line-of-
sight momentum from entering your vacuum gauge or other
components, it is advisable to install some form of apparatus that
will block the line-of-sight. In many cases a simple 90° elbow
may help prevent or reduce the transport of particles from enter-
ing your vacuum gauge.
In the event of gauge contamination please contact the factory to
return the gauge for possible cleaning if the gauge has not been
exposed to hazardous materials.
9.5 Module and sensor replacement
The PGE500 module is factory calibrated for the specific sensor
(gauge tube) installed in it. If the sensor inside the module fails
for any reason, the PGE500 module should be replaced or re-
turned to the factory for replacement of the sensor and recalibra-
tion of the complete PGE500 module. If you prefer to have your
sensor replaced and the module recalibrated, contact the factory
for return authorization, as described below.