Inficon PGE500, Руководство по эксплуатации

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tinb21e1 (2016-06)
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attempting to increase the reading up to 760 Torr, you will over
pressurize your chamber which may present a hazard.
Example C: If the gas is helium (He), the gauge will over pres-
sure (OP) when pressure reaches about 10 Torr true pressure
and opening the chamber to atmosphere prematurely may pre-
sent other hazards for both people and product.
CAUTION! What these examples illustrate is that using gases
other than nitrogen (N
2
) without using accurate gas conversion
data and other proper precautions could result in injury to per-
sonnel and/or damage to equipment.
Suggested precautions when using gases other than
nitrogen (N
2
):
Install a pressure relief valve or burst disk on your chamber, to
protect it from overpressure. Post a warning label on your gauge
readout that states "Do Not Exceed ____ Torr Indicated Pres-
sure" (fill in the blank for maximum indicated pressure for the gas
you use) so that an operator using the gauge will not exceed a
safe pressure.
6 Display
6.1 Display - Torr / mTorr
Displayed pressure readings vs. true pressure for selected
gases - engineering units in Torr / mTorr (see following table):
Pressure shown in bold italic font in the shaded areas are in
mTorr.
Pressure shown in normal font in non shaded areas are in Torr.