tina88e1 (2014-01)
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If not indicated otherwise in the legends, the illustrations in this
document correspond to gauges with DN 16 ISO-KF vacuum
connection. They apply to the other gauges by analogy.
We reserve the right to make technical changes without prior
notice.
Intended
Use
The temperature compensated Capacitance Diaphragm Gauges
of the CDGsci series are intended for absolute pressure mea-
surement of gases in their respective pressure ranges.
Functional
Principle
A ceramic diaphragm is deflected by pressure. The deflection is
measured capacitively and converted into an analog linear out-
put signal by the digital electronics.
The output signal is independent of the gas type.
Very accurate pressure measurement is achieved by heating the
sensor to a constant temperature of 45°C which results in a
compensation of changes in the ambient conditions and a re-
duced deposition of process products and by-products in pro-
cess applications. An integrated baffle protects the sensor
against coating.
Trademarks
SKY
®
INFICON
GmbH
VCR
®
Swagelok Marketing Co.
Cube™ INFICON
GmbH
Windows CE Microsoft
Patents
EP 1070239 B1, 1040333 B1
US Patents 6528008, 6591687, 7107855, 7140085
Содержание Cube CDGsci
Страница 14: ...14 tina88e1 2014 01 Dimensions mm 110 DN 16 ISO KF DN 16 CF R 8VCR female 110 40 1 4 4 105 190 1 194 5 ...
Страница 15: ...tina88e1 2014 01 15 Damping unit mm 110 36 90 200 188 4 ø5 5 Magnet Weight without damping unit 1 7 kg ...
Страница 20: ...20 tina88e1 2014 01 Carefully remove two covers with e g a small screwdriver Cover Keep the covers ...
Страница 22: ...22 tina88e1 2014 01 and place it on the magnet Magnet ...
Страница 47: ...tina88e1 2014 01 47 Notes ...
Страница 48: ...LI 9496 Balzers Liechtenstein Tel 423 388 3111 Fax 423 388 3700 reachus inficon com t i na88e1 www inficon com ...