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tina88e1 (2014-01)

DANGER

DANGER: protective ground
Products that are not correctly connected to ground
can be extremely hazardous in the event of a fault.
Electrically connect the gauge to the grounded
vacuum chamber. This connection must conform to
the requirements of a protective connection ac-
cording to EN 61010:

•

CF and VCR flanges fulfill this requirement.

•

For gauges with a KF flange, use a conductive

metallic clamping ring.

Caution

Caution: vacuum component
Dirt and damages impair the function of the vac-
uum component.
When handling vacuum components, take appro-
priate measures to ensure cleanliness and prevent
damages.

Caution

Caution: dirt sensitive area
Touching the product or parts thereof with bare
hands increases the desorption rate.
Always wear clean, lint-free gloves and use clean
tools when working in this area.

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Содержание Cube CDGsci

Страница 1: ...tina88e1 2014 01 1 Capacitance Diaphragm Gauge Cube CDGsci Operating Manual Incl EC Declaration of Conformity ...

Страница 2: ...r convenient refer ence copy that information into the space provided below Model SN PN MAC V W LPS Validity This document applies to products of the CDGsci series Flange 1 3 E DN 16 ISO KF DN 16 CF R 8VCR female 3 6 9 C F 0 1 1 10 100 1000 Measurement range F S 3 C S 1 3 1 1 2 3 0 0 The part number PN can be taken from the product nameplate ...

Страница 3: ...phragm is deflected by pressure The deflection is measured capacitively and converted into an analog linear out put signal by the digital electronics The output signal is independent of the gas type Very accurate pressure measurement is achieved by heating the sensor to a constant temperature of 45 C which results in a compensation of changes in the ambient conditions and a re duced deposition of ...

Страница 4: ...a buttons 1 Calibration Test Report 1 Operating Manual English 1 Damping unit 2 LEMO connector 1 WLAN USB adapter IEEE822 11g 1 Swagelok 8VCR adapter gauge with VCR connection only 1 Swagelok 8VCR seal gauge with VCR connection only 1 Swagelok 4VCR seal gauge with VCR connection only ...

Страница 5: ...onnection 24 3 2 1 D Sub 15 pin Connector 25 3 2 2 RJ45 8 pin Connector 26 3 2 3 LEMO 2 pin Connector 26 3 2 4 USB Typ A Connector 26 4 Operation 27 4 1 Status Indication 27 4 2 Configuring the network interface 28 4 2 1 Changing IP Address of the Wired Network 28 4 2 2 Activating the Wireless Network 28 4 2 3 Changing IP Address of the Wireless Network 29 4 3 Websites 31 4 4 Zeroing the Gauge 32 ...

Страница 6: ...7 Returning the Product 42 8 Disposal 43 9 Accessories 44 Further Information 44 EC Declaration of Conformity 46 For cross references within this document the symbol XY is used for cross references to further documents listed under Further Information the symbol Z ...

Страница 7: ...al damage Caution Information on correct handling or use Disregard can lead to malfunctions or minor equipment damage Notice Labeling 1 2 Personnel Qualifications Skilled personnel All work described in this document may only be carried out by persons who have suitable technical training and the neces sary experience or who have been instructed by the end user of the product ...

Страница 8: ...t regulations and take the necessary precautions when handling contamin ated parts Communicate the safety instructions to all other users 1 4 Liability and Warranty INFICON assumes no liability and the warranty becomes null and void if the end user or third parties disregard the information in this document use the product in a non conforming manner make any kind of interventions modifications alt...

Страница 9: ...n nominal 0 95 ppm F S Gas type dependence none Output signal analog measurement signal Measurement range 0 10 V Voltage range 2 10 24 V limited to 10 20 V Relationship voltage pressure linear Output impedance 0 Ω short circuit proof Loaded impedance 10 kΩ Response time2 350 ms Pressure unit Torr default mbar Pa 16 1 Non linearity hysteresis repeatability in the calibrated range at 25 C ambient op...

Страница 10: ...tion Resistance RIdent Voltage 13 2 kΩ referenced to supply common 5 V Remote Zero Adjust External switching contact digital input for zero adjust ment 32 30 V dc 5 mA dc Switching functions SETPOINT 1 2 Setting range 0 99 F S 0 9 9 V Hysteresis 1 F S Relay contact 30 V dc 0 5 A dc floating NO closed p pSP LED lit solid open p pSP LED off Switching time 50 ms Status relay Relay contact 30 V dc 0 5...

Страница 11: ...e Power Connection For further information on the RS232C interface 3 Ethernet interface IP address Architecture 192 168 0 248 default REST services websites For further information on the Ethernet interface 1 For further information on the REST services and websites 4 and 5 Wireless interface IP address Architecture DHCP 192 168 0 240 default REST services websites DHCP capable no server The wirel...

Страница 12: ... at operating temperature 20 W 17 W The gauge is protected against reverse polarity of the supply voltage and overload Electrical connection 15 pin D Sub male Sensor cable 15 pin plus shielding Cable length Supply voltage 15 V 4 m 0 14 mm conductor 7 m 0 25 mm conductor Supply voltage 24 V 20 m 0 14 mm conductor 35 m 0 25 mm conductor Supply voltage 30 V 40 m 0 14 mm conductor 70 m 0 25 mm conduct...

Страница 13: ...aterials exposed to vacuum ceramics Al2O3 99 5 stainless steel AISI 316L Internal volume DN 16 ISO KF DN 16 CF R 8VCR 5 9 cm3 5 4 cm3 7 1 cm3 Admissible pressure absolute 100 1000 F S 1 10 F S 0 1 F S 3 bar 2 bar 1 3 bar Bursting pressure absolute 6 bar Admissible temperatures Storage Operation 10 C 50 C 0 C 40 C Relative humidity 80 at temperatures 31 C decreasing to 50 at 40 C Use indoors only a...

Страница 14: ...14 tina88e1 2014 01 Dimensions mm 110 DN 16 ISO KF DN 16 CF R 8VCR female 110 40 1 4 4 105 190 1 194 5 ...

Страница 15: ...tina88e1 2014 01 15 Damping unit mm 110 36 90 200 188 4 ø5 5 Magnet Weight without damping unit 1 7 kg ...

Страница 16: ...out V 0 0 F S p Uout 10 V p F S Conversion Torr Pascal 3 Torr mbar 4 Pa 4 c 1 00 1013 25 760 1 3332 101325 760 133 3224 Example Gauge with 10 Torr F S Measurement signal Uout 6 V p 6 V 10 V 10 Torr 0 6 10 Torr 6 Torr 3 The pressure unit can be set via RS232C ASCII REST services and websites 4 Source NPL National Physical Laboratory Guide to the Measurement of Pressure and Vacuum ISBN 0904457x 1998...

Страница 17: ...and harm caused by escaping process gases can result if clamps are opened while the vacuum system is pressurized Do not open any clamps while the vacuum system is pressurized Use the type clamps which are suited to overpressure DANGER DANGER overpressure in the vacuum system 2 5 bar KF flange connections with elastomer seals e g O rings cannot withstand such pressures Process media can thus leak a...

Страница 18: ...1010 CF and VCR flanges fulfill this requirement For gauges with a KF flange use a conductive metallic clamping ring Caution Caution vacuum component Dirt and damages impair the function of the vac uum component When handling vacuum components take appro priate measures to ensure cleanliness and prevent damages Caution Caution dirt sensitive area Touching the product or parts thereof with bare han...

Страница 19: ... installed with the damping unit If adjustment should be possible after the gauge has been installed be sure to install it so that the buttons can be accessed with a pin 32 Remove the protective lid and connect the product to the vacuum system Keep the protective lid Mounting the damping unit DANGER DANGER magnetic fields Strong magnetic fields can disturb electronic devices like heart pacemakers ...

Страница 20: ...20 tina88e1 2014 01 Carefully remove two covers with e g a small screwdriver Cover Keep the covers ...

Страница 21: ...tina88e1 2014 01 21 Carefully slide the gauge with both openings onto the retaining hooks until the mechanical stop is reached Hook Hook ...

Страница 22: ...22 tina88e1 2014 01 and place it on the magnet Magnet ...

Страница 23: ...tina88e1 2014 01 23 Vacuum connection Remove the protective lid and connect the product to the vacuum system Dichtung mit Zentrierring Spannelement Schutzkappe Keep the protective lid ...

Страница 24: ...asurement signal For optimum signal quality please do observe the following notes Use an overall metal braided shielded cable The connector must have a metal case Connect the cable shield to ground at one side via the connector case Make sure the connector case has direct contact to the cable s shield on its whole cir cumference Do not connect the other side of the shield Connect the supply common...

Страница 25: ...M 4 1 8 9 10 Ident 13 14 TxD RxD 7 11 5 15 100nF 18 V 6 3 SP1 SP2 Status Pin 1 4 Relay SETPOINT 1 closing contact Pin 3 Status Pin 5 Supply common Pin 6 Supply 15 V Pin 7 11 Supply 14 30 V or 15 V Pin 8 9 Relay SETPOINT 2 closing contact Pin 10 Gauge identification or Remote Zero Adjust Pin 13 RS232 TxD Pin 14 RS232 RxD Pin 15 Housing Chassis Ground case Connector case 15 8 9 1 D Sub 15 pin female...

Страница 26: ... Pin 4 RD Received data Pin 5 RD Received data Pin 6 CT_R Pin 7 NC Pin 8 NC 8 1 RJ45 8 pin plug soldering side 3 2 3 LEMO 2 pin Connector If no sensor cable is available make one according to the following diagram cable length and conductor cross sections 13 Pin 1 Signal Pin 2 Signal common 1 2 Red mark LEMO 2 pin plug soldering side 3 2 4 USB Typ A Connector For WLAN USB adapter only enclosed in ...

Страница 27: ...green measurement mode blinking green short blinks long blinks over underrange warming up ERROR lit solid red main CPU error temperature PCB 90 C temperature sensor defective blinking red while zero adjust 8 s heating temperature too high end of life EOL initialization of the gauge SETPOINT 1 lit green green p setpoint 1 blinking green waiting for setpoint 1 input off p setpoint 1 SETPOINT 2 lit s...

Страница 28: ...ace with REST services connect Cube with a computer via Ethernet cable 12 set the Ethernet interface of the computer to any IP address in the subnet 192 168 0 248 255 255 255 0 e g 192 168 0 247 open a web browser e g Mozilla Firefox version 20 or Windows Internet Explorer version 10 0 set the new IP address with the REST services command http 192 168 0 248 1 cmd IPL 20 IP address Subnet mask An a...

Страница 29: ... computer to any IP address in the subnet 192 168 0 248 255 255 255 0 e g 192 168 0 247 open a web browser e g Mozilla Firefox version 20 or Windows Internet Explorer version 10 0 search for wireless networks by using command http 192 168 0 248 1 cmd WLA 20on After the wireless network has been successfully acti vated the gauge is rebooted automatically Using the RS232 ASCII command WLA or the RES...

Страница 30: ...work password For networks without a password only the SSID needs to be stated Ethernet interface with REST services connect Cube with a computer via Ethernet cable 12 set the Ethernet interface of the computer to any IP address in the subnet 192 168 0 248 255 255 255 0 e g 192 168 0 247 open a web browser e g Mozilla Firefox version 20 or Windows Internet Explorer version 10 0 search for wireless...

Страница 31: ...ask e g 10 0 1 6 255 255 255 0 4 3 Websites The gauge is equipped with a web server Via its websites user can poll the status of the gauge query gauge errors set setpoints or change communication parameters e g IP address URL of the web sites http IP address 8087 e g 192 168 0 248 8087 Internet browser e g Mozilla Firefox version 20 or Windows Internet Explorer version 10 0 IP addresses default 11...

Страница 32: ... adjusting the zero operate the gauge under the same con stant ambient conditions and in the same mounting orientation as normally 4 4 1 ZERO Adjustment The zero can be adjusted via the ZERO button on the gauge the diagnostic port 3 briefly apply the supply voltage to the digital input Remote Zero pin 10 the RS232 interface 2 3 the Ethernet interface 1 the wireless network 4 5 While the gauge is b...

Страница 33: ...6 mbar If the final pressure is too high for zero adjustment 25 of the F S the zero cannot be reached and the STATUS LED blinks green If this is the case activate the factory setting and adjust the zero again 39 Operate the gauge for at least 90 minutes under constant ambient conditions until the signal is stable Briefly press the ZERO button with a pin The zero adjustment runs automatically The E...

Страница 34: ...hould not exceed 2 of the F S 200 mV At a higher positive offset the upper limit of the measurement range is exceeded Zero adjustment using the ramp function can be performed via the ZERO button on the gauge the diagnostic port 3 the RS232 interface 2 3 the Ethernet interface 1 the wireless network 4 5 Operate the gauge for at least 90 minutes under constant ambient conditions until the signal is ...

Страница 35: ...by one unit push ZERO button in intervals of 1 s Change of direction within 3 5 s the zero adjustment changes its direction the blinking frequency of the ERROR LED changes briefly If the ZERO button is released for more than 5 s the gauge returns to the measurement mode The ERROR LED will continue blinking red if the signal output is negative 20 mV ...

Страница 36: ... 25 and can be measured with a voltmeter after the SETPOINT button is pressed or can be read written via the RS232 Ethernet or wireless interface can be read written via the diagnostic port If the pressure is lower than the setpoint the corresponding LED SETPOINT 1 or SETPOINT 2 is lit solid and the corre sponding relay 25 is energized Measurement signal pressure p Time t Measurement value Off On ...

Страница 37: ...pushing the SETPOINT button the measurement signal is suppressed and the corresponding threshold value is output in stead This can cause malfunctions Push the SETPOINT button only if you are sure that no damages can arise from a malfunction Adjusting SETPOINT 1 Push the SETPOINT button with a pin max ø1 1 mm The gauge changes to the switching function mode and outputs the current threshold value a...

Страница 38: ...e adjustment within 0 3 s the zero adjustment value changes by one unit Change of direction within 3 5 s the zero adjustment changes its direction the blinking frequency of the STATUS LED changes briefly If the ZERO button is released for more than 5 s the gauge returns the measurement mode The upper threshold is automatically set 1 F S above the lower one hysteresis Adjusting SETPOINT 2 Push the ...

Страница 39: ...ssed for at least 5 s while the gauge is being put into operation Power ON 4 7 Diagnostic Port RS232C Interface The diagnostic port DIAG permits to output the pressure reading and all status information and to enter all settings at the same time 4 When a cable is attached to the diagnostic port all other interfaces except the analogue out PRESSURE are automatically deactivated To return to normal ...

Страница 40: ...ontaminated Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts Caution Caution vacuum component Dirt and damages impair the function of the vac uum component When handling vacuum components take appro priate measures to ensure cleanliness and prevent damages Caution Caution dirt sensitive area Touching the product or parts thereof with bare hands...

Страница 41: ...tina88e1 2014 01 41 Vent the vacuum system Put the gauge out of operation Unfasten the lock screws and disconnect the sensor cable Remove the gauge from the vacuum system and install the protective lid ...

Страница 42: ... contaminated products Contaminated products e g radioactive toxic caustic or microbiological hazard can be detrimen tal to health and environment Products returned to INFICON should preferably be free of harmful substances Adhere to the forward ing regulations of all involved countries and for warding companies and enclose a duly completed declaration of contamination Form under www inficon com P...

Страница 43: ... electric components operating fluids etc can be detrimen tal to the environment Dispose of such substances in accordance with the relevant local regulations Separating the components After disassembling the product separate its components ac cording to the following criteria Contaminated components Contaminated components radioactive toxic caustic or bio logical hazard etc must be decontaminated ...

Страница 44: ...ol Ethernet Interface tira88e1 English only INFICON AG LI 9496 Balzers Liechtenstein 2 www inficon com Communication Protocol RS232 ASCII Interface tira89e1 English only INFICON AG LI 9496 Balzers Liechtenstein 3 www inficon com Communication Protocol RS232C Interface tira90e1 English only INFICON AG LI 9496 Balzers Liechtenstein 6 The diagnostic software Windows NT XP can be downloaded from our w...

Страница 45: ...w inficon com Communication Protocol REST Services tira91e1 English only INFICON AG LI 9496 Balzers Liechtenstein 5 www inficon com Communication Protocol Websites tira92e1 English only INFICON AG LI 9496 Balzers Liechtenstein ...

Страница 46: ...be CDGsci Standards Harmonized and international national standards and specifi cations EN 61000 6 2 2005 EMC generic immunity standard EN 61000 6 3 2007 EMC generic emission standard EN 61010 1 2010 Safety requirements for electrical equipment for measurement control and laboratory use EN 61326 1 2013 EMC requirements for electrical equipment for measurement control and laboratory use Manufacture...

Страница 47: ...tina88e1 2014 01 47 Notes ...

Страница 48: ...LI 9496 Balzers Liechtenstein Tel 423 388 3111 Fax 423 388 3700 reachus inficon com t i na88e1 www inficon com ...

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