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Satellite XT R Version
8-2
Substance / Sensor
Part No.
sensor
Nominal
Range
Unit
Note
Dust Filter
allowed
PH3
Phosphine (3 El.)
9602-6102
0 ... 1.00
ppm
Sí
PH3
Phosphine (2 El.)
9602-6100
0 ... 1.00
ppm
1)
Sí
SF6
Sulfur Hexafluoride
9602-9710
0 ... 0.500
% vol.
3)
Sin datos
SiH4
Silane
9602-6301
0 ... 50.0
ppm
Sí
SO2
Sulfur Dioxide
9602-5900
0 ... 25.0
ppm
Sí
TEOS
Tetraethyl Orthosilicate
9602-7500
0 ... 100
ppm
No
TMB
Trimethyl borate
9602-7510
0 ... 500
ppm
No
TMP
Trimethyl phosphite
9602-7800
0 ... 30.0
ppm
Sí
Notas: 1) Special application
2) Special range
3) Pyrolyzer Module required for detection
Further gases and ranges on request
Reference Information - Section 8
Содержание Satellite XT
Страница 1: ...Guide to Operation Satellite XT R Version Including Options Extractive Module XT Pyrolyzer Module XT ...
Страница 15: ...Satellite XT R Version 2 8 Installation and Start Up Section 2 ...
Страница 49: ...Satellite XT R Version 6 16 Configuration Section 6 ...
Страница 53: ...Satellite XT R Version 7 4 Troubleshooting Section 7 ...