5 - 28
Figure 5.4-7 Objective Aperture Unit and
Liner Pipe
Figure 5.4-8 Liner Pipe
8.
Install the liner pipe.
Insert the liner pipe with fingers completely. Follow the inverse procedure of 5.3
Condenser Lens Aperture Replacement from
5
to
12
, to assemble the liner tube and
anode.
Figure 5.4-9 Installing a Liner Pipe
NOTE
: If the liner pipe is not inserted completely, the anode cannot be inserted into the
right position. And leakage occurs, so the evacuation cannot be completed.
9.
Confirm that the o-ring is set to the groove, and then close the electron gun.
10.
Press the EVAC/AIR switch to evacuate the air. After completing evacuation, the lighting
pattern of EVAC LED (blue) changed from blinking to lighting. In the next step, perform
beam axis alignment (see 5.2).
Objective aperture
O-ring
Spacer
Stopper
Aperture holder
Push it in with finger
O-ring
