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HarmonicDrive SHA - Y series, Руководство пользователя

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HarmonicDrive SHA - Y series Скачать руководство пользователя страница 15

1-2 Model Options 

1-3 

 

1 

 

2 

 

3 

 

4 

 

5 

 

6 

 

7 

  8 

  9 

  10 

  11 

 

付

 

 

Ou

tlin
e

s

 

 

1-2

  Model Options 

 
Model ordering code 
Examples of standard models: 

SHA 

32 

Y 

101 

SG 

－

 

B 

12 

A 

200 

－

 

17 

S17b 

A 

－

 

C 

 

 

 

(1) 

(2) 

(3) 

(4) 

(5) 

－

 

(6) 

(7) 

(8) 

(9) 

－

 

(10) 

(11) 

(12) 

－

  (13) 

(14) 

－

  (15) 

(1)  Model: AC Servo Actuator SHA series 
(2)  Size: 25, 32, 40, 58, 65

：

SG 

25, 32

：

HP 

25, 32, 40

：

CG 

(3)  Version symbol Y = YASKAWA   
(4)  Reduction ratio (indicated by R in 1/R format) 

Reduction ratio 11:1 is for the HPF hollow shaft planetary gearhead (Model 25, 32) 
Reduction ratios 50:1 and higher are for the HarmonicDrive

®

 SHG and CSG gears. 

HPF 

SHG 

CSG 

11 

11:1 

51 

51:1 

50 

50:1 

81 

81:1 

80 

80:1 

101 

101:1 

100 

100:1 

121 

121:1 

120 

120:1 

161 

161:1 

160 

160:1 

(5)  Speed reducer type 

HP 

HPF  Hollow  shaft  planetary 
gearhead 

SG 

HarmonicDrive

®

 SHG series 

CG 

HarmonicDrive

®

 CSG series 

(6)  Motor version symbol 

A 

Model 58, 65 

B 

Model 25, 32, 40 

(7)  Motor size 

09 

25 

12 

32 

15 

40 

21 

58, 65 

(8)  Brake 

A 

Without brake 

B 

With brake 

(9)  Motor input voltage 

200 

200V 

 

 

(10) Encoder format 

17 

Conforming to Yaskawa format 

(11)  Encoder type, resolution 

S17b 

17-bit absolute encoder, 131,072 
pulses/revolution 

(12) Encoder phase angle: Phase difference between   

induced voltage in motor phase U and absolute origin 

A 

0 degree 

(13) Connector specification 

C 

With standard connector 

N 

Without connector 

(14) Option symbol 

L 

With near origin and end limit sensors 

S 

Output shaft single revolution absolute 
model (CG type only) 

V 

With stand (CG type only) 

Y 

Side exit cable (excluding #58/65) 

 

(Please contact us for option-compatible combinations.) 

(15) Special specification 

No description 

Standard product 

SP 

Special specification product 

 

Содержание SHA - Y series

Страница 1: ...AC Servo Actuator S H A Y s e r i e s m a n u a l ISO14001 ISO9001...

Страница 2: ...roduct Read this document carefully and use the product correctly so that the product can be used safely for many years Product specifications are subject to change without notice for improvement purp...

Страница 3: ...or avoided to prevent non operation or malfunction of the product or negative effects on its performance or function LIMITATION OF APPLICATIONS The equipment listed in this document may not be used f...

Страница 4: ...ead to vibration resulting in damage of output elements CAUTIONS FOR USAGE Keep limited torques of the actuator Keep limited torques of the actuator Be aware that if arms attached to output element hi...

Страница 5: ...OPACK DESIGN PRECAUTIONS Please be sure to read the operating manual for the Servopack Japanese Document No SIJPS80000192 English Document No SIEPS80000192 OPERATIONAL PRECAUTIONS Please be sure to re...

Страница 6: ...FETY GUIDE 4 DISPOSAL All products or parts have to be disposed of as industrial waste Since the case or the box of drivers have a material indication classify parts and dispose them separately CAUTIO...

Страница 7: ...y positional accuracy 1 27 Repeatability CG 1 27 Reverse positional accuracy CG 1 28 1 9 Detector specifications Absolute encoder 1 29 1 10 Stiffness 1 31 Moment stiffness 1 31 Torsional stiffness Spe...

Страница 8: ...or 3 1 Receiving Inspection 3 1 Inspection procedure 3 1 3 2 Notices on handling 3 2 Installation and transmission torque 3 2 Precautions on installation 3 4 Use of positioning pins 3 5 Surface treatm...

Страница 9: ...f the SHA Y series actuators are shown based on the UL1004 1 UL1004 6 File No E243316 standards Nameplate field Explanation 1 Output W at point A on the graph below 2 Voltage V between motor wires at...

Страница 10: ...87 564 570 560 480 2 Voltage at point A V 97 110 114 118 116 115 109 115 115 116 122 3 Allowable continuous current A 6 0 6 0 6 0 5 7 5 0 4 1 9 0 9 0 9 0 8 8 7 2 4 Speed at point A rpm 115 34 23 20 16...

Страница 11: ...6 Allowable range temperature 40 7 Number of phase 3 Model Item SHA32Y SHA40Y 50 80 100 120 160 50 80 100 120 160 1 Output at point A W 321 372 373 308 233 493 558 568 568 488 2 Voltage at point A V...

Страница 12: ...on cables 1 4 1 4 Specifications 1 5 1 5 Motor shaft holding brake 1 12 1 6 External dimensions 1 15 1 7 Mechanical accuracy 1 25 1 8 Positional accuracy 1 27 1 9 Detector specifications Absolute enco...

Страница 13: ...torque volume ratio has increased to approximately double the ratio of any conventional actuator Based on the maximum torque you can select a model of one smaller size Also output torque at the same...

Страница 14: ...e product lineup After reviewing the output rotary unit structure the higher accuracy of the surface runout and shaft deflection has been achieved Together with easy to index speed ratios that are div...

Страница 15: ...ary gearhead SG HarmonicDrive SHG series CG HarmonicDrive CSG series 6 Motor version symbol A Model 58 65 B Model 25 32 40 7 Motor size 09 25 12 32 15 40 21 58 65 8 Brake A Without brake B With brake...

Страница 16: ...TMC Y EWD MB D09 TMC 3 Encoder wire Standard type JZSP CSP19 E JZSP CVP E Curved type JZSP CSP29 E JZSP CVP E Note 1 in the Servopack model indicates whether or not the optional dynamic brake resisto...

Страница 17: ...motor revolution Encoder resolution Pulse rev 217 131 072 Motor multi revolution counter Count 216 65 536 Output shaft resolution Pulse rev 1 441 792 6 684 672 10 616 832 13 238 272 15 859 712 21 102...

Страница 18: ...evolution Encoder resolution Pulse rev 217 131 072 Motor multi revolution counter Count 216 65 536 Output shaft resolution Pulse rev 1 441 792 6 684 672 10 616 832 13 238 272 15 859 712 21 102 592 Mas...

Страница 19: ...131 072 Motor multi revolution counter Count 216 65 536 Output shaft resolution Pulse rev 6 684 672 10 616 832 13 238 272 15 859 712 21 102 592 Mass without brake kg 9 9 Mass with brake kg 10 7 Enviro...

Страница 20: ...40 40 40 40 40 40 40 40 Encoder type Magnetic absolute encoder Single motor revolution Encoder resolution Pulse rev 217 131 072 Motor multi revolution counter Count 216 65 536 Output shaft resolution...

Страница 21: ...der resolution Pulse rev 217 131 072 Motor multi revolution counter Count 216 65 536 Output shaft resolution Pulse rev 6 553 600 10 485 760 13 107 200 15 728 640 20 971 520 Mass without brake kg 3 95...

Страница 22: ...Encoder resolution Pulse rev 217 131 072 Motor multi revolution counter Count 216 65 536 Output shaft resolution Pulse rev 6 553 600 10 485 760 13 107 200 15 728 640 20 971 520 Mass without brake kg...

Страница 23: ...Encoder resolution Pulse rev 217 131 072 Motor multi revolution counte Count 216 65 536 Output shaft resolution Pulse rev 6 553 600 10 485 760 13 107 200 15 728 640 20 971 520 Mass without brake kg 13...

Страница 24: ...01 121 161 22 102 162 202 242 322 kgf m 1 1 5 2 8 3 10 12 16 2 2 10 17 21 25 33 Inertia moment 3 Actuator total with brake GD2 4 kg m2 0 034 0 66 1 7 2 6 3 7 6 6 1 7 2 3 5 9 9 2 13 23 J kgf cm s2 0 35...

Страница 25: ...ue 3 Nm 50 80 100 120 160 kgf m 5 1 8 2 10 12 16 Inertia moment 3 Actuator total With brake GD2 4 kg m2 0 60 1 5 2 4 3 4 6 1 J kgf cm s2 6 1 16 24 35 62 Mass with brake 4 kg 4 1 Number of cycles for b...

Страница 26: ...ess 6 The service time for emergency stop is assured when the brake activates at motor speed of 3 000 rpm or less provided the load inertia moment is 3 times of less than that of the actuator The moto...

Страница 27: ...rs are shown below SHA25Y SG Speed reducer SHG series Unit mm third angle projection Note For details on external dimensions check our illustrated specifications Tolerances may vary due to product man...

Страница 28: ...Drive CSG series Unit mm third angle projection Note For details on external dimensions check our illustrated specifications Tolerances may vary due to product manufacturing method foundry piece machi...

Страница 29: ...ft planetary gearhead Unit mm third angle projection Note For details on external dimensions check our illustrated specifications Tolerances may vary due to product manufacturing method foundry piece...

Страница 30: ...rive SHG series Unit mm third angle projection Note For details on external dimensions check our illustrated specifications Tolerances may vary due to product manufacturing method foundry piece machin...

Страница 31: ...1 6 External dimensions 1 19 1 2 3 4 5 6 7 8 9 10 11 Outlines SHA32Y CG Speed reducer HarmonicDrive CSG series Unit mm third angle projection...

Страница 32: ...shaft planetary Unit mm third angle projection Note For details on external dimensions check our illustrated specifications Tolerances may vary due to product manufacturing method foundry piece machi...

Страница 33: ...rive SHG series Unit mm third angle projection Note For details on external dimensions check our illustrated specifications Tolerances may vary due to product manufacturing method foundry piece machin...

Страница 34: ...Drive CSG series Unit mm third angle projection Note For details on external dimensions check our illustrated specifications Tolerances may vary due to product manufacturing method foundry piece machi...

Страница 35: ...Drive SHG series Unit mm third angle projection Note For details on external dimensions check our illustrated specifications Tolerances may vary due to product manufacturing method foundry piece machi...

Страница 36: ...Drive SHG series Unit mm third angle projection Note For details on external dimensions check our illustrated specifications Tolerances may vary due to product manufacturing method foundry piece machi...

Страница 37: ...ty between the output shaft and fitting part 0 060 0 065 0 070 0 080 0 080 Note All values are T I R Total Indicator Reading The values in parenthesis are those combined with the HPF hollow shaft plan...

Страница 38: ...output shaft of the output rotary unit per revolution 3 4 Parallelism between the output shaft and mounted surface The indicator on the output rotary unit measures the axial runout maximum runout widt...

Страница 39: ...is shown in the table below SG HP type Unit Second Model Reduction ratio SHA25Y SHA32Y SHA40Y SHA58Y SHA65Y 1 11 120 120 1 51 50 50 50 1 81 or more 40 40 40 40 40 CG type Unit Second Model Reduction...

Страница 40: ...fference between the stop position after this rotation and the reference position is measured The average value from repeating this 7 times in each direction is shown and the maximum value measured at...

Страница 41: ...type Single rotation optic multiple revolution magnetic sensor electronic battery backup type Resolution per motor revolution 17 bits 217 131 072 pulses Maximum cumulative motor shaft revolutions 16 b...

Страница 42: ...lute model Option With the standard actuator when it continues to rotate in just one direction the absolute encoder eventually exceeds the number of revolutions that can be detected with multi revolut...

Страница 43: ...ore Moment stiffness Nm rad 37 9 104 39 2 104 86 1 104 100 104 kgf m rad 38 7 103 40 103 87 9 103 102 103 kgf m arc min 11 3 11 6 25 7 29 6 Model Item SHA40Y SHA58Y SHA65Y Reduction ratio 1 50 or more...

Страница 44: ...e T0 and negative side T0 is applied to the output shaft This is called torque vs torsional angle diagram which typically follows a loop 0 A B A B A The torsional stiffness of the SHA series actuator...

Страница 45: ...3 8 K3 x104 Nm rad 4 4 5 7 9 8 12 18 23 kgf m arc min 1 3 1 7 2 9 3 7 5 3 6 8 Model SHA58Y SHA65Y Reduction ratio 1 81 or more 1 81 or more T1 Nm 168 235 kgf m 17 24 K1 x104 Nm rad 40 54 kgf m arc min...

Страница 46: ...ion is provided below on how to calculate the total torsional quantity on one side from a no load state after a load has been applied by the speed reducer The zero torque part widths of 2 and 4 in the...

Страница 47: ...etting n 0 CCW counterclockwise direction CW clockwise direction Default n 1 CW clockwise direction CCW counterclockwise direction CG As a default the rotation direction is defined as clockwise CW rot...

Страница 48: ...value is the same in up down left right and front rear directions Impact acceleration 300 m s2 In our shock resistance test the actuator is tested 3 times in each direction Actuator operation is not...

Страница 49: ...e actuator is as follows and this value is the same in up down left right and front rear directions Vibration acceleration 25 m s2 frequency 10 to 400Hz In our test the actuator is tested for 2 hours...

Страница 50: ...tion ranges in each graph are measured on the condition where the radiation plate specified in the graph is installed When the SHA Y series SG type is operated at a constant speed motor shaft speed of...

Страница 51: ...Radiation plate 350 350 18 mm Motion range during acceleration and deceleration 50 duty motion range Continuous motion range Rotation speed rpm Torque Nm Note Values in graphs are measured with alumin...

Страница 52: ...on range Rotation speed rpm Torque Nm SHA32Y101SG 400 400 20 0 50 100 150 200 250 300 350 400 450 500 0 10 20 30 40 50 r min Nm 50 mm Radiation plate 400 400 20 mm Motion range during acceleration and...

Страница 53: ...10 20 30 40 r min Nm 50 mm Motion range during acceleration and deceleration Radiation plate 500 500 25 mm 50 duty motion range Continuous motion range Rotation speed rpm Torque Nm SHA40Y121SG HA 8 50...

Страница 54: ...plate 650 650 30 mm Radiation plate 650 650 30 mm Motion range during acceleration and deceleration Motion range during acceleration and deceleration Motion range during acceleration and deceleration...

Страница 55: ...ation plate 650 650 30 mm Motion range during acceleration and deceleration Motion range during acceleration and deceleration Motion range during acceleration and deceleration Motion range during acce...

Страница 56: ...Radiation plate 350 350 18 mm Motion range during acceleration and deceleration 50 duty motion range Continuous motion range Rotation speed rpm Torque Nm SHA25Y120CG Radiation plate 350 350 18 mm Moti...

Страница 57: ...uty motion range 50 duty motion range Continuous motion range Continuous motion range Rotation speed rpm Rotation speed rpm Torque Nm Torque Nm Torque Nm SHA32Y120CG Radiation plate 400 400 20 mm Moti...

Страница 58: ...Radiation plate 500 500 25 mm Motion range during acceleration and deceleration 50 duty motion range Continuous motion range Rotation speed rpm Torque Nm SHA40Y100CG Motion range during acceleration a...

Страница 59: ...onnection Brake 6 Yellow No connection Brake Connector pin layout Size 58 65 Pin number Name Color Extension cables Without brake With brake A No connection Brake Blue B No connection Brake Yellow C N...

Страница 60: ...d 5 PS Serial signal differential output 6 PS Serial signal differential output Shell FG Connector pin layout Size 58 65 Pin number Signal name Remarks 1 PS Serial signal differential output 2 PS Seri...

Страница 61: ...1 15 Cable specifications 1 49 1 2 3 4 5 6 7 8 9 10 11 Outlines...

Страница 62: ...elines This chapter explains how to select a proper SHA Y series actuator 2 1 SHA Y series selection 2 1 2 2 Change in load inertia moment 2 5 2 3 Verifying and examining load weights 2 6 2 4 Examinin...

Страница 63: ...o the Servopack are adjusted or the Servopack s vibration suppression function is used Refer to A 2 Calculating inertia moment P5 3 for the calculation of inertia moment SG type 1 10 100 0 20 40 60 80...

Страница 64: ...rption capacity of the built in regenerative resistor of the Servopack an additional regenerative resistor and dynamic brake resistor must be connected externally to the driver Allowable load inertia...

Страница 65: ...kgf cm s2 1 1 24 60 94 135 238 Allowable load inertia moment without external resistors 1 kg m2 0 54 11 26 37 50 70 kgf cm s2 5 5 110 260 380 510 710 Allowable load inertia moment with external resist...

Страница 66: ...s2 5 1 13 20 29 52 17 44 68 99 175 Actuator inertia moment with brake kg m2 0 60 1 5 2 4 3 4 6 1 2 0 5 1 7 9 11 20 kgf cm s2 6 1 16 24 35 62 20 52 81 116 207 Allowable load inertia moment without exte...

Страница 67: ...mulas are JS Total inertia moment converted to motor shaft JM Inertia moment of motor R Reduction ratio of SHA Y series actuator L Ratio of load inertia moment to inertia moment of motor N Rate of cha...

Страница 68: ...ial load coefficient Y Calculate the life of the bearing and verify the life is allowable 3 Verifying the static safety coefficient Calculate the static equivalent radial load Po Verify the static saf...

Страница 69: ...dial load N Refer to Fig 1 Famax Max axial load N Refer to Fig 1 Lr La mm Refer to Fig 1 R Offset amount mm Refer to Fig 1 and Table 1 Formula 2 Average radial load Frav n n 10 3 n n n 10 3 10 3 10 3...

Страница 70: ...er of a roller mm Refer to Fig 1 and Table 1 Formula 7 Cross roller bearing life 10 3 6 10 B Pc fw C N 60 10 L av Symbols used in the formulas LB 10 Life hour Nav Average output rotational speed rpm O...

Страница 71: ...by formula 9 Formula 8 Cross roller bearing life oscillating 10 3 6 Pc fw C 90 n 60 10 Loc 1 Symbols used in the formulas Loc Life hour n1 Number of reciprocating oscillation per min cpm C Basic dyna...

Страница 72: ...ppropriate reduction ratio from 11 50 51 80 81 100 101 120 121 160 and 161 so that the calculated rotation speed does not exceed the maximum rotational speed of the SHA Y series actuator Calculating a...

Страница 73: ...value shown in the graph indicates 20 of the maximum torque Linear operation horizontal operation The rotary torque when the mass W moves horizontally due to the screw of pitch P is shown below T Rot...

Страница 74: ...when it is applied in the opposite direction Calculation example 1 Select an actuator that best suits the following operating conditions Rotation speed 80 rpm Load inertia moment 1 5 kg m2 Since the...

Страница 75: ...in calculation example 1 The travel angle per cycle is 120 and the cycle time is 1 second 1 The travel angle is calculated from the area of the rotation speed vs time diagram shown above In other wor...

Страница 76: ...Td 90 Nm Tm 41 Nm ta 0 177 s tr 0 091 s td 0 141 s Then the following equation is obtained t 982 x 0 177 902 x 0 141 412 1 69 s Based on the result setting the cycle time to 1 7 seconds or more to pro...

Страница 77: ...2 4 Examining operating status 2 15 1 2 3 4 5 6 7 8 9 10 11 Selection guidelines...

Страница 78: ...Chapter 3 Installing the SHA Y actuator The following explains the installation procedures of the actuators 3 1 Receiving Inspection 3 1 3 2 Notices on handling 3 2 3 3 Location and installation 3 6...

Страница 79: ...rs refer to 1 3 Combinations with Servopacks and extension cables p 1 4 For details on Servopacks contact YASKAWA Electric Corporation customer support 4 Check if the driver input voltages being input...

Страница 80: ...are likely to fluctuate greatly during day and night 6 Do not use or store the actuator in locations subject to flammable or corrosive gases or dust particles 7 The large models SHA58Y SHA65Y are heav...

Страница 81: ...675 891 754 kgf m 44 33 2 44 38 9 92 68 9 91 76 9 The values in parenthesis are those combined with the HPF hollow shaft planetary speed reducer Model Item SHA40Y SHA58Y SHA65Y Output shaft Actuator O...

Страница 82: ...on conditions Torque efficiency 0 2 Tightening efficiency 1 4 Tightening friction coefficient 0 15 Precautions on installation When designing the assembly take note that application of any abnormal or...

Страница 83: ...Surface treatments Standard SHA Y series actuators are given the following surface treatments SG HP Location Surface treatments Housing No treatment aluminum material is exposed Output shaft bearing...

Страница 84: ...Refer to 1 13 Resistance to vibration P1 37 Impact 300 m s2 or less Refer to 1 12 Shock resistance P1 36 Use environment Free from condensation metal powder corrosive gases water oil mist flammable g...

Страница 85: ...a strong force The connection points may be damaged Install the cable with slack not to apply tension to the actuator Provide a sufficient bending radius at least 6 times the cable diameter especiall...

Страница 86: ...Chapter 4 Options This chapter explains the options available for the SHA Y series actuator 4 1 Options 4 1...

Страница 87: ...der eventually exceeds the number of revolutions that can be detected with multi revolution detection and it becomes impossible to manage position information accurately With the output shaft single r...

Страница 88: ...l stand is available for purchase to use the SHA CG type for table drive Outline drawing of the actuator with an optional stand For models with a stand the cable is exited from the side of the actuato...

Страница 89: ...2 M5 8 12 M6 10 12 M8 12 m mm 72 96 116 n mm 160 150 130 o Note1 mm 0 055 0 060 0 070 p Note1 mm 0 080 0 090 0 100 r 22 5 45 90 s mm 131 162 203 t mm 2 M8 depth 13 2 M8 depth 15 2 M12 depth 23 Mass No...

Страница 90: ...must use an extension cable to connect your SHA Y series actuator and the 7 Servopack For details on encoder extension cables contact YASKAWA Electric Corporation Motor extension cable Actuator model...

Страница 91: ...4 5 1 2 3 4 5 6 7 8 9 10 11 Options Actuator model Nos 58 65 EWD MB D09 TMC 15 m cable is also available The model number of the cable of this length is EWD MB15 D09 TMC Cable length 03 3m 05 5m 10 1...

Страница 92: ...Chapter 5 Appendix A 1 Unit conversion 5 1 A 2 Calculating inertia moment 5 3...

Страница 93: ...t m min2 ft min2 ft s2 in s2 Factor 2 78 x10 4 8 47x10 5 0 3048 0 0254 Unit m min2 ft min2 ft s2 in s2 Factor 3600 1 18x104 3 281 39 37 SI system m s2 4 Force SI system N Unit kgf lb force oz force Fa...

Страница 94: ...stem kg m2 Unit kgf m s2 kgf cm s2 lb ft2 lb ft s2 lb in2 lb in s2 oz in2 oz in s2 Factor 0 102 10 2 23 73 0 7376 3 42x103 8 85 5 47x104 141 6 Unit kgf m s2 kgf cm s2 lb ft2 lb ft s2 lb in2 lb in s2 o...

Страница 95: ...a gravity center Cylinder Circular pipe Slanted cylinder Ball Ellipsoidal cylinder Cone Rectangular pillar Square pipe A R L z x y L R m 2 2 R m 2 1 Ix 3 L R m 4 1 Iy 2 2 3 L R m 4 1 Iz 2 2 R1 L R2 z...

Страница 96: ...t from the gravity center I Inertia moment when the gravity center axis does not match the rotational axis kg m2 Ig Inertia moment when the gravity center axis matches the rotational axis kg m2 Calcul...

Страница 97: ...m Shape Column Since the outer diameter is 100mm the radius is 50mm Therefore the above graph gives the inertia moment as follows Approx 1 9 x 10 4kg m2 Calculated value 0 000186 kg m2 Radius Length 1...

Страница 98: ...Calculating moment of inertia 5 6 1 2 3 4 Apx 6 7 8 9 10 11 Appendix...

Страница 99: ......

Страница 100: ...3 2 3 6 3 7 Installation location 3 6 Life 2 7 Load inertia moment 2 5 2 10 Load torque 2 11 Load weight 2 6 Maximum load moment load 2 7 Mechanical accuracy 1 25 Model 1 3 Moment stiffness 1 31 Motor...

Страница 101: ......

Страница 102: ...han Harmonic Drive Systems Inc 3 imperfection caused by a non applicable product 4 disaster or others that does not belong to the responsibility of Harmonic Drive Systems Inc Our liability shall be li...

Страница 103: ...ri Building 7F 6 25 3 Minami Ohi Shinagawa ku Tokyo Japan 140 0013 Harmonic Drive AG Hoenbergstra e 14 65555 Limburg Germany Harmonic Drive LLC 247 Lynnfield Street Peabody MA 01960 U S A 1509 0R TSHA...

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