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Gatan, Inc.

5794 W. Las Positas Blvd.
Pleasanton, CA 94588

Tel.

(925) 463-0200

Fax. (925) 463-0204

Solarus 950

Gatan Advanced Plasma System

Owner’s Manual and User’s Guide

Part Number: 950.82001

July 2011

Revision 5

Содержание Solarus 950

Страница 1: ...tan Inc 5794 W Las Positas Blvd Pleasanton CA 94588 Tel 925 463 0200 Fax 925 463 0204 Solarus 950 Gatan Advanced Plasma System Owner s Manual and User s Guide Part Number 950 82001 July 2011 Revision...

Страница 2: ...ii Solarus 950 Owner s Manual and User s Guide...

Страница 3: ...any person or entity of such revisions or changes Copyright and Trademarks 2007 Gatan Inc The Gatan logo is a registered trademark of Gatan Inc The product names AutoFilter BioScan Clipring DigiPEELS...

Страница 4: ...l to help gatan com USA Canada Latin America Corporate Headquarters Western USA Sales Central USA Latin America Sales 5794 W Las Positas Blvd Pleasanton CA 94588 Tel 1 925 463 0200 Fax 1 925 463 0204...

Страница 5: ...49 89 358084 77 Contact mfelsmann gatan com Gatan UK 25 Nuffield Way Abingdon OX14 1RL UK Tel 44 1235 540160 Fax 44 1235 540169 Contact ukinfo gatan com Gatan France Division de ROPER Scientific SAS...

Страница 6: ...vi APS Solarus 950 Owner s Manual...

Страница 7: ...cifications 7 Gas Requirements 8 Safety and Serviceability 9 Cautionary Notes 9 Servicing 9 Installation Recommendations for Gatan Customers Flammable and Oxidizing Gases 10 Installation and Setup 12...

Страница 8: ...ving the Ion Shield 24 Operating the Gatan Advanced Plasma System 25 Theory of Operation 25 Operating Instructions 26 Creating Custom Recipes 34 Maintenance 38 Maintenance Report 46 Troubleshooting 47...

Страница 9: ...0 Figure 10 Loading TEM holder holder adapter and plug 22 Figure 11 TEM holder and adapter in place 22 Figure 12 Top loading SEM chamber side view 23 Figure 13 Sample loaded in SEM chamber 23 Figure 1...

Страница 10: ...x Solarus 950 Owner s Manual and User s Guide...

Страница 11: ...A version of this technique was adapted for EM applications by Nestor Zaluzek at Argonne National Laboratory and University of Chicago US Patent 5 510 624 dated April 23 1996 The Solarus Advanced Pla...

Страница 12: ...2 Solarus 950 Owner s Manual and User s Guide igure 1 Gatan Advanced Plasma System model Model 950...

Страница 13: ...ir probes and exhaustively verified with TEM and SEM samples in a wide variety of conditions The unique H2 O2 recipe prevents or reduces buildup of contamination after about one minute of cleaning Eve...

Страница 14: ...r SEM specimen holders For slightly faster cleaning use the left port SEM Samples A top loading chamber accepts multiple SEM stubs and large irregular shaped samples Electronics The electronics subsys...

Страница 15: ...than one minute pump down and less than a ten second vent cycle Mass Flow Controllers Mass flow controllers accurately gauge gas levels to achieve superior and repeat able cleaning results Touch Scree...

Страница 16: ...unit contains a touch screen for executing all actions two TEM holder ports and a viewing port The door to the top loading specimen chamber is on the top of the unit above the TEM holder ports All gas...

Страница 17: ...Note Dimensions The system requires a stable bench with a surface area of O 39 inches 1m in length O 24 inches 62cm in depth O 18 inches 46cm in height Clearance Allow clearance on both sides for vent...

Страница 18: ...NOTE sccm standard cubic centimeters per minute For example a 2 cubic foot 57 liter lecture bottle of H2 will last for 147 hours of continuous use An 80 cubic foot 2265 liter bottle of O2 will last fo...

Страница 19: ...AC mains cable is plugged in CAUTION High pressure cylinders can be dangerous when not properly secured Be sure all cylinders are secured according to applicable safety codes CAUTION The RF power sup...

Страница 20: ...buildup O Maintenance and Inspections Place safety critical equipment such as flam mable gas detection and grounding on a periodic calibration and test schedule Oxygen Guidance O Compressed gas cylind...

Страница 21: ...operating and off hour work shifts In addition provide employee training on proper compressed gas cylinder inspection handling hookup and deinstalla tion procedures Additional Guidance for the Solarus...

Страница 22: ...arus 950 s internal purging process cycle has been completed The clearly labeled gas inputs are located on the rear panel Figure 4 and connect directly to the input of the mass flow controllers From l...

Страница 23: ...the unit or a customer supplied 1 8 OD tube gas line The Gas 2 H2 inlet has an 0 5 micron filter attached via a short length of stain less steel tubing The gas line from the H2 regulator should be co...

Страница 24: ...sure the nut is finger tight 2 Insert the gas tubing into the fitting making sure the tubing is pressed firmly into the shoulder of the fitting 3 Tighten the nut 3 4 turn clockwise using a wrench Cle...

Страница 25: ...t the system configuration must be changed When a mass flow controller is operated on a gas other than the gas it was calibrated with a scale shift will occur in the flow reading If the orifice size i...

Страница 26: ...the multiplier for the gas you have connected e g 1 2 8 touch Apply This sets the MFC multiplier which compensates for using a gas other than the Ar gas the MFC was cali brated for at the factory 6 T...

Страница 27: ...ing process will never complete You may purge all the installed gas lines at the same time or purge the lines individually one after the other by repeating this process 8 Select Yes to confirm and fol...

Страница 28: ...gas tubing into the fitting making sure the tubing is pressed firmly into the shoulder of the fitting 4 Tighten the nut 3 4 turn clockwise using a wrench Connecting Vent Gas Line The system typically...

Страница 29: ...making sure the tubing rests firmly on the shoulder of the fitting 5 Tighten the nut 3 4 turn clockwise 6 Turn on the vent gas 7 Touch Vacuum wait for the system to pump down 8 Touch VENT 9 Lift up ge...

Страница 30: ...ction for instructions 4 Select the custom recipe on the touch screen panel and touch START Note that the custom recipe is added to the end of the list and may be on the next page It will not be autom...

Страница 31: ...ove 5 Touch VENT when complete NOTE At high elevations the air pressure may not be sufficient to meet the required gas flow rate A simple solution if a gas cylinder is not available is to pressurize a...

Страница 32: ...t coating of Kry tox vacuum grease may be added to the o ring on the outside of the holder adapter so that it is easily inserted and removed NOTE TEM samples must be protected by a sample shield to mi...

Страница 33: ...e VENT but ton and wait until the touch screen indicates that the system is vented igure 12 Top loading SEM chamber side view NOTE No part of the sample should extend higher than 1 cm below the chambe...

Страница 34: ...ve a sample installed you may remove the ion shield in order to increase the cleaning speed although it is not necessary This should not be done if a sample is installed or the sample may experience i...

Страница 35: ...ed Plasma Cleaner Please note that not all carbon films are equivalent Carbon films are volatilized and removed during plasma cleaning however pure carbon films will be removed at a slower and consist...

Страница 36: ...the rear panel 2 Place the sample in the chamber using either the SEM table or TEM holder as applicable 3 Select the appropriate recipe for your sample type and available gas setup Presets are availa...

Страница 37: ...switch located on the rear panel This brings up the operating system and vacuum pumps The chamber will remain in the idle vented state igure 15 System in idle state 2 Place a sample in the chamber us...

Страница 38: ...c display providing information on system operating conditions Rough Vacuum State 2 After touching START the system initiates a rough vacuum state in which the following events occur O The chamber ven...

Страница 39: ...the chamber reaches a preset value of 70 mTorr The pumping combination is designed to reach a pressure of about 20 mTorr in the specimen chamber NOTE Errors in this state may occur if the 70 mTorr pre...

Страница 40: ...e the gas flow Errors are typically caused by a closed gas cylinder valve empty gas cylinder or improper gas pressure Plasma Cleaning State 5 When the gas flow has been stabilized the system enters th...

Страница 41: ...t of gas igure 19 Cleaning in process NOTE Touch Display to show this screen The standard display screen will be automatically displayed at the end of the cleaning cycle 8 The cleaning cycle runs unti...

Страница 42: ...conditions exist The user should notify the lab manager to correct the cause of the error Any uncorrectable issues should be reported to Gatan Removing the Sample 1 Touch VENT to vent the chamber to a...

Страница 43: ...amples may be removed from the chamber The vent valve will remain open for 30 seconds more before closing NOTE It is important that this valve not remain open indefinitely since a vent gas cylinder co...

Страница 44: ...hide existing recipes that are not being used For exam ple if you don t have a Gas 3 Ar configured the visibility on all Ar O2 recipes will automatically be set to No Cleaning Time Touch the digit you...

Страница 45: ...as Flow Timeout This function limits the amount of time any of the gas flow rates are allowed to fall outside the selected range before the RF process shuts down Forward RF Target 50 watts of RF power...

Страница 46: ...y This sets the title to Air 5 Touch O2 Gas Flow touch Clear touch 3 3 3 Touch Apply This sets the O2 gas flow to 33 3 sccm 6 Touch H2 Gas Flow touch Clear touch Apply This sets the H2 gas flow to zer...

Страница 47: ...lect TEM Standard H2 O2 1 Min 2 Touch Options The options screen should be displayed 3 Touch Copy This makes a copy of the recipe that can be modified 4 Touch Title touch Clear touch A r O 2 touch App...

Страница 48: ...the rates at which it will pump H and O change by different amounts This will change the H O partial pressure ratio during cleaning which can affect the plasma cleaning rate Because of this it is imp...

Страница 49: ...ocated on each side of the cabinet near the front The two screws on each side closest to the front release the bezel the other releases the covers 4 Tilt the bottom of the bezel upward making sure tha...

Страница 50: ...he captive screws located on each side of the cabinet near the back 7 Loosen the captive screw on the top front center of the cabinet 8 The remaining cabinet cover consists of two pieces First remove...

Страница 51: ...efore lifting upward on the cover Also make sure the captive screws are clear before raising the cover 10 The covers can be replaced by following the reverse of these directions Removing the Diaphragm...

Страница 52: ...er s Manual and User s Guide base plate will slide out of the cabinet together once all connections are removed 4 Disconnect the vacuum line from the left side of the pump by unscrewing the knurled kn...

Страница 53: ...g the Molecular Drag Pump 1 Shut off the power to the system and unplug the power cord The power switch is located on the rear of the cabinet near the right side 2 Remove the front bezel and both cove...

Страница 54: ...pull the clamp out Calibrating the Pirani Gauge The gauge is calibrated prior to shipment Contamination or a long time in opera tion can result in a zero drift If the gauge is severely out of calibrat...

Страница 55: ...adjusts the gauge to 750 Torr 1000 mbar A tool of less than 1 1 mm such as a small hex key diameter is needed to operate the button igure 24 Access to Pirani gauge calibration button NOTE The button i...

Страница 56: ...o the specimen chamber lid using the four screws Maintenance Report The maintenance report provides a time date log of all processes run by the sys tem as well as completion and failure statistics igu...

Страница 57: ...ppears Error Message Mass flow controller could not match the specified gas flow 1 Be sure gases are connected and the pressure is correct 25 psi 2 Be sure the system has been powered on for at least...

Страница 58: ...ure PART NUMBER DESCRIPTION 950 B Gatan Advanced Plasma System Basic 950 08350 Phillips P1 Adapter all non Compustage TEMs 950 08380 JEOL J5 adapter 1210 2010 3010 950 08410 Hitachi H3 Adapter S900 S5...

Страница 59: ...ntenance program is required as part of a regular maintenance cycle for their product In the event the battery must be replaced contact Gatan Customer Ser vice Department at www gatan com and follow t...

Страница 60: ...is a danger of explosion if the battery is incorrectly replaced or handled Do not disassemble or recharge the battery Do not dispose of the battery in fire When the battery is replaced the same type...

Страница 61: ...mber may be obtained through Gatan Service or directly from Gatan s Warrendale facility at 724 776 5260 If the item is not under warranty to obtain an RMA the customer must provide a Purchase Order PO...

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