Gamma Vacuum SPCe Скачать руководство пользователя страница 3 | Manualshive

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Contents

Safety and compliance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7

1.1. Definition of Warnings and Cautions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
1.2.

Safety symbols. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8

1.3. Warnings. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
1.4. Safety notices. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9

General information. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11

2.1. Approvals. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11

3.

Unpacking the controller. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12

3.1. Inspect for any obvious damage. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
3.2. Check the equipment received. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12

Installation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13

4.1. Required items. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
4.2. Installation procedure. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13

Operation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14

5.1. Front panel. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
5.2. High voltage operation (quick start). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14

Display menu. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16

6.1. Display during ion pump operation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  16
6.2. System information menu (Sys). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .   17
6.3. High voltage output menu (output). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .   19
6.4. Supply menu (supply). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  21
6.5. Communications mode (Comm). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  23
6.6. Serial parameters menu (Serial). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .   24
6.7. Ethernet parameters menu (Ethnt). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .   26
6.8. Configuration menu (Config). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  27
6.9. Diagnostics menu (Diag). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .   28
6.10. SPC. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .   30

Display messages. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32

Back panel operation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34

8.1. Remote hardware option (J1). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
8.2. Power supplies. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37

Serial (J3) and ethernet (J2) operation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38

9.1. Ethernet connector. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38
9.2. Serial connector. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38

04/2021 - ©Gamma

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Содержание SPCe

Страница 1: ...Small Pump Controller SPCe Instruction manual www gammavacuum com 900026_F Original instructions...

Страница 2: ...he content As far as practical we have ensured that the products have been designed and constructed to be safe and without risks when properly installed and used in accordance with their operating ins...

Страница 3: ...ltage operation quick start 14 6 Display menu 16 6 1 Display during ion pump operation 16 6 2 System information menu Sys 17 6 3 High voltage output menu output 19 6 4 Supply menu supply 21 6 5 Commun...

Страница 4: ...cksum example 49 9 10 Serial command examples 50 10 Warranty and service 52 10 1 Service 52 10 1 1 Cleaning procedure 52 10 1 2 Service requests 52 10 1 3 Direct support 52 10 2 Warranty 53 10 2 1 Gen...

Страница 5: ...22 Figure 18 HV enable 22 Figure 19 Battery mode 23 Figure 20 Communication mode 23 Figure 21 RS protocol 23 Figure 22 Mode 24 Figure 23 Address 24 Figure 24 Handshaking 24 Figure 25 Serial menu 24 Fi...

Страница 6: ...eatures 30 Figure 46 Events 31 Figure 47 Update firmware 31 Figure 48 DIGITEL SPCe 31 Figure 49 Back panel view 34 Figure 50 Remote hardware 34 Figure 51 Pressure output 35 Figure 52 Current output 36...

Страница 7: ...estions about safety operation or maintenance of the device please contact our nearest subsidiary Important safety information is highlighted as warning and caution instructions Obey these instruction...

Страница 8: ...es a possible hazard from a heavy object Warning Read the manual 1 3 Warnings WARNING Shock hazard Can cause injury or death Remove power before servicing AVERTISSEMENT Risque de choc lectrique Peut e...

Страница 9: ...rstand operator s manual before using this machine Failure to follow operating instructions could result in injury or damage to equipment AVERTISSEMENT Lisez et comprenez le mode d emploi avant d util...

Страница 10: ...the power on After turning off the SPCe allow at least one minute before disconnecting electrical equipment 4 Do not operate the SPCe without a proper electrical ground or near water The SPCe may be...

Страница 11: ...el or remotely through serial or Ethernet ports The serial port supports RS 232 422 485 protocols Individual model specification information is located on our website at www gammavacuum com WARNING Do...

Страница 12: ...e returned for inspection or repair obtain authorization from Gamma Vacuum prior to shipping Contact Gamma Vacuum for authorization and return instructions 3 2 Check the equipment received Ensure that...

Страница 13: ...will need the following items to install the controller 1 A 3 wire detachable universal input power cable that connects to the 24 V power supply both included for most part numbers 2 A high voltage H...

Страница 14: ...pressing the left and right arrow keys Soft keys Main Power Turns on and off the controller High Voltage Enables high voltage when pressed and held for 1 2 seconds OK and arrow keys Open and navigate...

Страница 15: ...tem 3 If an ion pump is used or has been exposed to atmospheric pressure it may be necessary to bake the pump into the roughing pump to achieve the best pressure See the Operation section in the Pump...

Страница 16: ...n Menu Settings The main menu categories are System Output Supply Communications Serial Ethernet Configuration Diagnostics SPC To access and navigate the main menu Refer to Figure Front panel Press OK...

Страница 17: ...pump size allows the controller to properly monitor power delivered to the ion pump and calculate pressure Figure 5 Pump size Pressure is calculated using the following current to pressure calculatio...

Страница 18: ...below this pressure Off Point The setpoint relay will activate when the pressure is equal to or above this pressure The off point pressure must be equal to or greater than the on point When the off po...

Страница 19: ...ion factor 1 for Torr 1 33 for mbar and 133 for Pascal F MPCe LPCe programmed calibration factor typically set to 1 S Configured pump size in l s 6 3 High voltage output menu output Figure 10 Output N...

Страница 20: ...in the range of 1x10 5 to 1x10 12 Torr The default is 9x10 9 Torr The Foldback voltage can be programmed in the range of 3000 V to 6900 V done in 100 V increments The default voltage is 3500 V Figure...

Страница 21: ...er the offset value the higher the output Figure 14 System output supply 6 4 Supply menu supply Figure 15 Supply menu Arc Detection Arc Arc detection provides protection for the ion pump by lowering h...

Страница 22: ...rameter controls the high voltage on off via the HVE interlock signal When enabled the SPCe is controlled by a signal on the miscellaneous I O port J1 connector If the signal is High high voltage will...

Страница 23: ...ypad The controller will accept read only commands via serial Ethernet It will not however accept write change commands via serial Ethernet Remote The controller will accept all serial and Ethernet co...

Страница 24: ...ddress Handshaking This parameter is used to set serial handshaking The default value is set to disabled Figure 24 Handshaking 6 6 Serial parameters menu Serial Figure 25 Serial menu SW protocol This...

Страница 25: ...This parameter is used to set the parity party check of the SPCe The default value is None Figure 28 Parity Data bits This parameter is used to set the serial data bits of the SPCe The default value i...

Страница 26: ...t When enabled as a DHCP client the SPCe will obtain needed network information from a DHCP server When DHCP is disabled the user may change the SPCe Ethernet address Currently IPv4 is the only suppor...

Страница 27: ...This screen shows the controller s MAC address Figure 34 MAC address 6 8 Configuration menu Config Figure 35 Configuration menu Contrast This function is used to adjust the contrast of the display Us...

Страница 28: ...st key press This feature is off by default Figure 38 Adjust LCD timeout 6 9 Diagnostics menu Diag Figure 39 Diagnostic menu Zero offset calibrate supply Prior to operating an ion pump the controller...

Страница 29: ...of 10 5 kV for hi pot cleaning of an ion pump The ion pump will attempt to reach a preset voltage up to 10 5 kV Figure 42 High pot Supply Jump Start Jump Mode Enabling Jump Start causes the SPCe to i...

Страница 30: ...10 vs 1 5e 10 Fan Mode This mode can be set to on or auto When set to on the fan is always on when HV is on When set to auto the fan is on when in pump starting mode and not in pump running mode Figu...

Страница 31: ...sion of SPCe software can be download from www gammavacuum com Reference Service Bulletin 00 056 092 in that download for full details Figure 47 Update firmware About This screen displays manufacturer...

Страница 32: ...n voltage detected during pump starting 19 Unknown Error Used internally for troubleshooting 20 SAFE_CONN Intrlock Safety interlock connection is not detected Check safe conn connection 21 HVE Interlo...

Страница 33: ...Voltage Control Err Supply HV control mechanism malfunctioning Voltage output level is malfunctioning 35 Voltage Measure Err Supply voltage measuring mechanism malfunctioning 37 HV Not Installed Inte...

Страница 34: ...aneous I O 15 pin sub d connector Pin number Function 1 Setpoint relay common 2 Setpoint relay NC 3 GND 4 GND 5 14 V 6 14 V 7 5 V 8 Remote HV Enable 3 3 12 V 9 Setpoint relay NO 10 14 V 11 Setpoint lo...

Страница 35: ...The SPCe unit is in error mode Note There is a delay after turning on the HV until the SPCe considers the calculated pressure reading to be valid This reading can take up to one minute The setpoint re...

Страница 36: ...offset value 7 7 8 0 3 Volts Vpin12 Example 2 Offset 8 Current 5 x 10 6 5 uA Step 1 Calculate the log of the current Log 5 x 10 6 5 3 Step 2 Add the offset value 5 3 8 2 7 Volts Vpin12 Example 3 Offs...

Страница 37: ...tor is 1 V per 1 KV out 8 2 Power supplies The following power supply pins are available on the misc I O connector These power supplies are not protected and should be used with care Do not attempt to...

Страница 38: ...g command in the Telnet session spc 12 1200 Unlike the serial command protocol no opening tilde no address field and no checksum are required It is important that the command code be two digits For ex...

Страница 39: ...nd packet sent by the controlling computer and a response packet returned by the remote controller All characters in these packets are ASCII All fields are separated by a space not required between th...

Страница 40: ...ket character array The command code must be two hex digits even if the first is a zero SPACE 4 DATA fields optional As needed ASCII printable characters only Data field s are for any commands that ha...

Страница 41: ...or new commands while the current one is carried out 1 MONITOR The controller monitors serial data traffic When a start character is detected the controller changes to the RECEIVE MODE 2 RECEIVE After...

Страница 42: ...the following fields and would be 12 bytes long Table 2 Response packet Address space Status space Response code space Checksum Terminator 2 bytes 1 byte 2 bytes 1 byte 2 bytes 1 byte 2 bytes 1 byte N...

Страница 43: ...the checksum field and then dividing the result by 256 base 10 The integer remainder converted to two ASCII hex digits is the packet checksum When the controlling computer receives a response packet...

Страница 44: ...S 0C READ VOLTAGE Reads pump voltage None or 1 XXXX XXXX indicates the voltage In volts 0D GET SUPPLY STATUS Reads various conditional messages displayed on the front panel None or 1 Various See Displ...

Страница 45: ...GET SETPOINT Reads configuration of the set point None or 1 N E X XE XX Y YE YY O N Setpoint Number E Enabled 1 yes 0 no X XE XX On Pressure Y YE YY Off Pressure O Setpoint On 1 yes 0 no 3D SET SETPOI...

Страница 46: ...0uA 3 Volts per 10 0uA 4 Volts per 100 0uA 5 Volts per 1 0mA 6 Volts per 10 0mA 8 Volts per 1 0 nA 9 Volts per 10 0 nA 10 Volts per 100 0 nA 61 IS HIGH VOLTAGE ON Indicates if the high voltage enable...

Страница 47: ...1 Remote 2 Full 46 GET SET SERIAL COMM Gets Sets baud rate parity data bits and stop bits If no parameters are specified the current values are returned None or B P D S set mode None or B P D S get m...

Страница 48: ...terface 0 RS232 1 RS422 2 RS485 3 RS485 full duplex 4 Ethernet 5 USB 4C INITIATE FEA Begins Fowler Nordheim field emission analysis 4D GET FEA DATA Provides Fowler Nordheim field emission analysis dat...

Страница 49: ...in the packet excluding start checksum and terminator Divide result by 256 and the integer remainder converted to two ASCII hex digits is the checksum for the command 2 Example in decimal take 290 mod...

Страница 50: ...ace 32 0x20 D 68 0x44 I 73 0x49 G 71 0x47 I 73 0x49 T 84 0x54 E 69 0x45 L 76 0x4C space 32 0x20 S 83 0x53 P 80 0x50 C 67 0x43 e 101 0x65 32 0x20 Total 1352 Total 0x548 9 10 Serial command examples For...

Страница 51: ...32 carriage return Rx 01 OK 00 1 0E 13 AMPS 91 carriage return Example 3 Command CMD_HV_READ_PRESSURE 0x0B Tx 01 0B 33 carriage return Rx 01 OK 00 1 0E 11 TORR A5 carriage return Example 4 Command CMD...

Страница 52: ...in as much detail as possible Part number Serial number Detailed description of the vacuum system hardware Detailed description of the vacuum system process gas species introduced ultimate pressure op...

Страница 53: ...ations of misuse operation outside of environmental specifications for the equipment or improper site preparation and maintenance In warranty repaired or replacement parts are warranted only for the r...

Страница 54: ...lowing information can be provided Original purchase order number Gamma vacuum sales order number Product order number and product description Product serial number All products received for repair or...

Страница 55: ...rior to returning any materials Gamma Vacuum must issue an RMA The RMA number should be clearly labelled on all shipping information and packages 04 2021 Gamma Page 55 900026_F 900026_F Warranty and s...

Страница 56: ...and national safety and environmental requirements Particular care must be taken with any components that have been contaminated with dangerous process substances Take appropriate action to avoid inh...

Страница 57: ...tion 2014 35 EU Low voltage directive LVD 2014 30 EU Electromagnetic compatibility EMC directive Class A Emissions Industrial Immunity 2011 65 EU Restriction of certain hazardous substances RoHS direc...

Страница 58: ...ents Electrical Equipment Safety Regulations 2016 Electromagnetic Compatibility Regulations 2016 Class A Emissions Industrial Immunity Restriction of the Use of Certain Hazardous Substances in Electri...

Страница 59: ...requirements Article 33 1 Declaration EU UK This product does not knowingly or intentionally contain Candidate List Substances of Very High Concern above 0 1 ww by article as clarified under the 2015...

Страница 60: ...2700 4th Avenue E Suite 100 Shakopee MN 55379 USA 1 800 237 3603 952 445 4841 1 952 445 7615 info gammavacuum com www gammavacuum com Gamma Vacuum 2020 Part of the Atlas Copco Group...

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