NOWPAK LINER-BASED CANISTER SYSTEM
9
User Manual | Entegris, Inc.
ND-CD-XC Type
Optional pressure relief valve
Liquid outlet fitting
Gas inlet fitting
Figure 10. ND-CD dispense connectors.
ND-LD Dispense Connectors
The one-piece ND-LD dispense connectors, Figure 11,
are available for use only with 20-liter canisters. The
ND-LD dispense connector has a different thread size
and a built-in diptube and is used only on canisters that
have been sealed with the one-piece plastic closure.
See Appendix B:
Canister Compatibility Matrix, page 32,
for information on matching ND-LD dispense connectors
with appropriate Liner-based canisters and components.
The ND-LD series connectors have an FEP/PFA/PTFE
fluid path. The diptube can be removed easily and
changed, if necessary. A nitrogen or helium source
is necessary to pressurize in between the liner and
overpack to dispense chemical from the canister.
At the end user’s site, the one-piece closure (NC-W2)
is removed from the canister, exposing the chemical.
The ND-LD dispense connector is then connected
directly to the canister neck threads with no breakseal
being used.
Refer to the ND-LD data sheets or contact Entegris
for model numbers and detailed user information
on these dispense connectors.
Figure 11. ND-LD dispense connector.
ND-ED MaxMT Dispense System
The MaxMT dispense system connectors, Figure 12,
combine pressure dispense and integrated empty
detection to maximize chemical utilization. The MaxMT
system uses dispense pressure to detect when one
canister is empty and automatically switches dispense
to the second canister.
MaxMT dispense system connectors are used with
10- to 40-liter liner-based canisters. See Appendix B:
Canister Compatibility Matrix, page 32, for more
information. A complete MaxMT system comprises two
MaxMT system connectors and a control box used with
liner-based canisters, diptubes, closures, and liners.
Refer to the MaxMT system, data sheets or contact
Entegris for model numbers and detailed user
information on these dispense connectors.
MaxMT dispense
connectors
MaxMT
control box
Figure 12. ND-ED MaxMT dispense connectors (installed on 19-liter
canisters) and control box.
SECTION 5: HANDLING THE CANISTERS
—
Use the information in this section of the guide for
handling, storing, and staging liner-based canister
system canisters. Chemical suppliers and end users
must follow proper procedures for handling and
moving canisters.
