NOWPAK LINER-BASED CANISTER SYSTEM
27
User Manual | Entegris, Inc.
NOTE: If dispense is interrupted or discontinued for an
extended period, Entegris recommends reducing the inert
gas pressure inside the canister to minimize permeation of
the headspace gas into the chemical.
Changing Out Empty Canisters
When a liner-based canister becomes empty, the
end user removes the dispense connector from the
empty canister and replaces it with a full canister of
the same chemical.
NOTE: Different methods of detecting an “empty canister”
condition are used for each of the dispense connector
types. Refer to the appropriate dispense connector User
Guide for complete instructions.
1. Close the liquid dispense valve.
2. Depressurize the canister by turning the three-way
pressure control valve to the vent position until all
canister pressure is relieved.
WARNING: 200-liter canisters must have internal
pressure released before removing the dispense
connector. If the canister is pressurized, the
dispense connector may fly upward with great
force while being removed. Serious injury or
death may result.
3. Turn the lower connector body or collar counter-
clockwise to disengage from the canister.
4. Lift the connector away from the closure and onto
a cleanroom wipe to capture any residual chemical
on the connector.
5. If connector maintenance is required, open the
liquid dispense valve and allow any liquid in the
outlet tube to return to the canister.
6. Lift the connector away from the closure and onto
the wipe to capture any residual chemical on the
connector, Figure 45.
Figure 45. Removing the dispense connector (ND-CD shown).
7. Perform any required maintenance on the
dispense connector.
8. Install the closure or closure cap onto the empty
canister. The empty canister is ready to be returned
to a chemical supplier for refurbishment/refilling.
9. Install a new liner-based canister onto the
dispense connector.
Troubleshooting Chemical Leaks
If chemical is observed leaking from the connection
of the liquid dispense fitting to the liquid dispense line
or the connection of the liquid dispense fitting to the
upper connector body, the user should decide if the
leak is excessive.
1. Depressurize the canister. Failure to depressurize the
canister prior to adjusting or attempting maintenance
may damage the fitting and result in system failure or
possible injury.
2. Remove the dispense connector from the
canister/closure.
3. Loosen the fitting nut attached to the connector
probe so it can be turned by hand.
4. Retighten the fitting nut by hand until resistance
is felt.
5. Tighten the fitting nut an additional 1¾ turn to ensure
a proper seal is made to the end of the probe.
6. Reassemble the connector to the canister/closure.
7. Repressurize the system to normal operating
conditions and check for leakage in accordance
with internal procedures.
8. If leakage is detected refer to the appropriate
Entegris dispense connector user guide for
maintenance and troubleshooting information.
