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Entegris

®

, the Entegris Rings Design

®

, and other product names are trademarks of Entegris, Inc. as listed

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©2013-2022 Entegris, Inc.

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All rights reserved.

|

Printed in the USA

|

7124-12018TAN-0622

129 Concord Road
Billerica, MA 01821
USA

Tel

+1

952 556 4181

Fax

+1

952 556 8022

Toll Free

800 394 4083

Corporate Headquarters

Customer Service

LIMITED WARRANTY

Entegris' products are subject to the Entegris, Inc. General Limited Warranty. To view and print this information,
visit

Legal & Trademark Notices

link in the footer. Entegris does not warrant any

failure in the case of customers using unapproved foreign components.

FOR MORE INFORMATION

Please call your Regional Customer Service Center today to learn what Entegris can do for you.
Visit

link to find the customer service center nearest you.

TERMS AND CONDITIONS OF SALE

All purchases are subject to Entegris’ Terms and Conditions of Sale. To view and print this information,
visit

and select the

Terms & Conditions

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www.entegris.com

User Manual | Entegris, Inc.

APPENDIX C: ORDERING GUIDE

—

Visit www.entegris.com for ordering information for the NOWPak liner-based canister system components.
To order accessories and spare parts, contact Entegris at +1 978 436 6500.

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Содержание NOWPak

Страница 1: ...ADVANCED MATERIALS HANDLING MANUAL NOWPak Liner Based Canister System User manual ...

Страница 2: ...0 Section 6 Refurbishing and Filling the Canisters 10 Empty Canister Disassembly and Liner Removal 10 Inserting Two Dimensional Replacement Liners Into the Canister 12 Inserting Three Dimensional Conformal Liners Into the Canister 13 Inflating a Liner Inside a Canister 15 Using a Bag Inflation Fixture BIF 15 Manual Liner Inflation Fixture 15 Canister Filling and Diptube Insertion 17 Capping a Fill...

Страница 3: ...anisters that are filled with chemicals Instructions are provided for properly storing filled canisters and staging canisters before dispensing chemicals from them REFURBISHING AND REFILLING THE CANISTER This section is for use by chemical suppliers who fill new canisters with chemicals and who receive empty canisters from end users for refurbishment and refilling Step by step procedures are provi...

Страница 4: ...ister pressure is 196 kPa 28 4 psig for canisters larger than 40 liters Do not allow the pressure inside any canister to exceed this rating TECHNICAL SUPPORT For technical support contact Entegris at 1 800 394 4084 Please have the complete model number chemical and application information ready when calling SECTION 3 SYSTEM INFORMATION The liner based canister system consists of a reusable stainle...

Страница 5: ...acement parts and for additional accessories that can be purchased for use with the canister system LINER BASED CANISTERS The stainless steel canisters are available in the following sizes 4 liters 10 liters 18 liters 19 liters 20 liters 40 liters 200 liters NOTE See Appendix B Canister Compatibility Matrix page 32 for canister model numbers and item numbers of the components to be used with each ...

Страница 6: ...etainers one packaged with each replacement liner FITMENT ADAPTERS 200 liter canisters require a fitment adapter Figure 5 to be inserted inside the retainer The fitment adapter reduces the larger 200 liter fitment opening to the size needed for diptube insertion The 4 to 40 liter canisters do not use a fitment adapter One fitment adapter is packaged with each 200 liter replacement liner Red tempor...

Страница 7: ... the closure cap is removed by hand and a dispense connector is installed for drawing chemical from the canister Canister closures are either two piece assemblies or one piece Two Piece Closures Most canisters are sealed using a two piece closure Figure 8 The closure base is torqued into place onto the canister and the closure cap is hand tightened onto the base The following two piece closures ar...

Страница 8: ...tions and for detailed user and maintenance instructions for each type of dispense connector ND CD Dispense Connectors The ND CD series pressure dispense connector Figure 10 provides a clean convenient and completely sealed method for dispensing chemicals from liner based canister system containers ND CD dispense connectors have all fluoropolymer wetted surfaces and require the use of a two piece ...

Страница 9: ...being used Refer to the ND LD data sheets or contact Entegris for model numbers and detailed user information on these dispense connectors Figure 11 ND LD dispense connector ND ED MaxMT Dispense System The MaxMT dispense system connectors Figure 12 combine pressure dispense and integrated empty detection to maximize chemical utilization The MaxMT system uses dispense pressure to detect when one ca...

Страница 10: ...in a canister to reach thermal equilibrium is determined by the properties of the contained chemical and the staging conditions Please contact the chemical supplier for appropriate staging times for each chemical SECTION 6 REFURBISHING AND FILLING THE CANISTERS The procedures in this section of the guide are performed by chemical suppliers when an empty canister is received from an end user and wh...

Страница 11: ...over the top of the adapter and turn clockwise until it stops While holding the liner with one hand pull up on the liner removal tool with the other hand until the O ring is disengaged from the liner fitment 5 Drain any residual chemical from the canister before removing the liner from the canister 6 Remove the liner from the canister The liner should be fully collapsed before performing this step...

Страница 12: ...r for 200 liter only IMPORTANT Each liner is pre folded to ensure proper inflation when an automatic or manual inflation fixture is used The folds are designed to open in a determined order allowing the liner to conform to the interior of the canister and attain maximum volume Do not unfold the liner before inserting it into the canister 1 Select a new properly sized pre folded liner NOTE See Appe...

Страница 13: ...d on the upper fitment Figure 21 All liner material should be below the base of the fitment Retainer Liner fitment Figure 21 Placing the retainer around the fitment 200 liter canister shown 9 Seat the fitment and retainer into the neck of the canister Figure 22 Figure 22 Seating the fitment and retainer into the canister 10 The canister is now ready for inflation INSERTING THREE DIMENSIONAL CONFOR...

Страница 14: ...t damaging the liner while handling it For 40 liter and 200 liter liners the bottom of the liner is folded up Remove this fold prior to inserting into canister 4 Insert the liner into the canister until the fitment remains outside the canister Figure 24 Figure 24 Liner being inserted into canister observe liner folds NOTE Be sure the liner is not rotated or becomes twisted as it is inserted into t...

Страница 15: ...sult from the use of an unapproved bag inflation fixture Tools Required see Required Tools page 28 PART NUMBER Tool 4 to 20 liter canister 40 liter canister 200 liter canister Automated bag inflation fixture BIF NF 01 FR NF 40 FR NF 180 200 FR Booster locating plate for 4 liter only NA 107 Locating plate for 10 and 18 liter only NA 135 NOTE See the appropriate Entegris bag insertion fixture User G...

Страница 16: ... proper manual inflation fixture to a filtered and regulated nitrogen source Figure 28 2 Verify the three way valve is closed 3 Set the pressure regulator inlet to 586 kPa 85 psig 4 Set the pressure regulator outlet to the desired outlet pressure Table 1 and allow the system to stabilize The exact set point may vary depending on source pressure line size and length NOTE Outlet pressure from the re...

Страница 17: ...n obstruction is noted the liner may be re inflated a second time as described above If obstructions persist the liner should be removed and replaced NOTE Removing a previously inflated liner from the canister may damage the liner and may compromise its performance NOTE If the canister is not going to be filled immediately secure the red temporary cap to the canister to prevent contamination If th...

Страница 18: ...re for the canister being capped Do not overtighten If the closure or canister threads are damaged or cross threaded liquid dispense may be affected See page 19 for recommended torque values Two Piece Closures Use this procedure to cap a filled canister with a two piece closure Tools Required see Required Tools page 28 PART NUMBER Tool 4 to 40 liter canister 200 liter canister Torque wrench NA 18 ...

Страница 19: ...ot applied the closure base could come loose when the dispense connector is removed causing serious damage to the dispense connector 5 Hand tighten the closure cap There is no need to torque the cap 6 The canister is now ready to ship IMPORTANT Ensure the closure cap is tight before shipping a canister filled with chemical Do not drop filled canister or place filled canisters on their side Both ac...

Страница 20: ... filled and capped canisters for shipment to a customer WARNING 200 liter canisters are very heavy and should only be moved by trained personnel using proper equipment See Moving the Canisters page 10 for instructions and mandatory safety procedures NOTE Ensure the cap on the top of the closure is tight before shipping a canister filled with chemical Do not drop filled canisters or place filled ca...

Страница 21: ...ed after each use Tools Required see Required Tools page 28 O ring pick part number NA 27 Items Needed One O ring for each diptube being maintained See FEP Reusable Diptube Replacement O ring Part Numbers page 22 for ordering information and optional O ring materials IMPORTANT Entegris does not recommend disassembling the diptube other than to replace the O ring 1 Slide the worn O ring from the co...

Страница 22: ... NUMBER O RING MATERIAL NDT T4 NDT T5 NDT T9 NDT T8 NDT T7 NDT T40 NDT T200 2 E 4 L 10 L 18 L 19 L 20 L 40 L 200 L NA 24 Qty 50 NA 24 1000 Qty 1 000 EPDM NDT T4 C NDT T5 C NDT T8 C NDT T7 C NDT T40 C NDT T200 C 4 L 10 L 19 L 20 L 40 L 200 L 200995 Qty 1 Chemraz NDT T200 F NDT T200 2 F 200 L NA 131A 10 Qty 10 NA 131A 500 Qty 500 Semi perfluoroelastomer ...

Страница 23: ...L MEAN TIME BETWEEN REPLACEMENT MTBR Closure cap O ring NC 03 NC 04 NC 200 2 NC 200 4 200328 C 200328 C 50 200328 C 500 EDPM with PTFE coating 6 months NC 03 2 NC 04 2 NA 133 T 10 NA 133 T 100 FEP encapsulated silicone 2 uses estimated Closure body O ring NC 03 200405 C 200405 C 100 200405 C 500 EDPM with PTFE coating Each use NC 03 2 NA 133 T 10 NA 133 T 100 FEP encapsulated silicone 2 uses estim...

Страница 24: ...g gland taking care to avoid twisting 6 Install the compression ring by pressing it firmly into the closure base 7 Blow off the closure assembly using filtered nitrogen to remove any surface contamination 4 to 40 liter closures Closure cap O ring Compression ring Closure seal O ring 200 liter closures Closure cap O ring Compression ring Closure seal O ring Figure 40 Two piece closure components NO...

Страница 25: ...quipment and application and on the type of dispense connector used However all systems provide inert gas pressure to the canister to dispense chemical from the canister to the production tool NOWPak canister Chemical source container Liquid dispense control valve Three way N2 pressure control valve Pressure relief valve Inert gas source Vent 14 7 psig bar maximum regulator To point of use Drain v...

Страница 26: ...ense connector and apply slight downward pressure Rotate the lower threaded portion of the connector clockwise to engage and seal the connector to the interior diptube Figure 44 Do not overtighten If the closure or canister threads are damaged or cross threaded liquid dispense may be affected Figure 44 Installing the dispense connector ND CD shown Dispensing Chemical from the Canister Once the dis...

Страница 27: ...y liquid in the outlet tube to return to the canister 6 Lift the connector away from the closure and onto the wipe to capture any residual chemical on the connector Figure 45 Figure 45 Removing the dispense connector ND CD shown 7 Perform any required maintenance on the dispense connector 8 Install the closure or closure cap onto the empty canister The empty canister is ready to be returned to a c...

Страница 28: ... to 40 liter for use with NC W2 polypropylene closure NA 92 200 liter Torque adapter tool NA 10 4 to 40 liter with two piece NC 03 or NC 04 type aluminum closure NA 03 20 liter with one piece NC W2 polypropylene closure DA 06 200 liter CONTAINER SIZE TORQUE WRENCH TO OPEN AND CLOSE CANISTER CLOSURE USED WITH THIS TORQUE ADAPTER TOOL 4 to 40 liter with two piece closure NA 18 NA 10 4 to 40 liter wi...

Страница 29: ...06 4 to 40 liter DA 04 200 liter Liner insertion tool NA 60 4 to 40 liter NA 60 200 200 liter Breakseal insertion tool NA 23 O ring removal tool kit NA 27 Manual inflation fixture NA 41 20 liter with one piece closure NA 41 200 2 200 liter NA 41 8990 4 to 40 liter with two piece closure ...

Страница 30: ...ted bag inflation fixture BIF 4 to 20 liter NF 01 FR Optional booster locating plate for NF 01 FR adjusts height for 4 liter canister liner inflation NA 107 Optional locating plate for 10 and 18 liter canister NA 135 Automated bag inflation fixture BIF 40 liter NF 40 FR ...

Страница 31: ...NOWPAK LINER BASED CANISTER SYSTEM 31 User Manual Entegris Inc Automated bag inflation fixture BIF 200 liter NF 180 200 FR ...

Страница 32: ...NL 004 N500C 1 KA NC 04 NC 04 2 EPDM FEP encapsulated silicone NDT T4 NDT T4 C EPDM Chemraz ND CD SXXX XXX 10 liters NO 05 NL 010 T420A 1 NL 010 N500C 1 KA NC 03 NC 03 2 EPDM FEP encapsulated silicone NDT T5 NDT T5 C EPDM Chemraz ND CD SXXX XXX ND ED S 2 MaxMT 10 liters NO 05 63 NL 010 T420A 1 NL 010 N500C 1 KA NC 04 NC 04 2 EPDM FEP encapsulated silicone NDT T5 NDT T5 C EPDM Chemraz ND CD SXXX XX...

Страница 33: ...N500G 1 KA NL 040 NS50D 1 NL 040 NS50A 1 NC 03 NC 03 2 EPDM FEP encapsulated silicone NDT T40 NDT T40 C NDT P40 NDT P40 C EPDM Chemraz EPDM Chemraz ND CD SXXX XXX ND ED S 2 MaxMT 40 liters NO 40 63 NO 40A 63 NL 040 N500D 1 KA NL 040 N500G 1 KA NL 040 NS50D 1 NL 040 NS50A 1 NC 04 NC 04 2 EPDM FEP encapsulated silicone NDT T40 NDT T40 C NDT P40 NDT P40 C EPDM Chemraz EPDM Chemraz ND CD SXXX XXX ND E...

Страница 34: ...ew and print this information visit entegris com and select the Legal Trademark Notices link in the footer Entegris does not warrant any failure in the case of customers using unapproved foreign components FOR MORE INFORMATION Please call your Regional Customer Service Center today to learn what Entegris can do for you Visit entegris com and select the Contact Us link to find the customer service ...

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