entegris NOWPak, Руководство пользователя

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NOWPAK LINER-BASED CANISTER SYSTEM
User Manual | Entegris, Inc.
NF-01-FR NF-40-FR NF-180/200-FR
Canister size
4-, 10-, 18-, 19-, 20-liter 40-liter 200-liter
Liner type
All All All
Fill timer (no units)
3.5 3.5 3.5
Test timer (no units)
1 1 1
Exhaust timer (no units)
2.5 2.5 3.25
N
2
switch
62.0 ±1.7 kPa
(9.00 ±0.25 psig) 62.0 ±1.7 kPa
(9.00 ±0.25 psig) 62.0 ±1.7 kPa
(9.00 ±0.25 psig)
N
2
regulator
82.7 ±6.9 kPa
(12.00 ±1.00 psig) 82.7 ±6.9 kPa
(12.00 ±1.00 psig) 165.5 ±6.9 kPa
(24.00 ±1.00 psig)
CDA regulator
276 – 483 kPa (40 – 70 psig) 276 – 483 kPa (40 – 70 psig) 345 – 483 kPa (50 – 70 psig)
Flow rate at fill head
≥75 L/min ≥170 L/min ≥270 L/min
Equipment cycle
time (reference):
fill test exhaust
4-liter 15 – 20 sec
10-liter 20 – 25 sec
18-, 19-, 20-liter 30 – 35 sec 60 sec 120 sec
No load set up
reading (reference):
N
2
regulator gauge
35 – 55 kPa (5 – 8 psig) 35 – 55 kPa (5 – 8 psig) 35 – 55 kPa (5 – 8 psig)
No load set up
reading (reference):
control panel gauge
14 – 21 kPa (2 – 3 psig) N/A N/A
Table 1
1. Connect the proper manual inflation fixture to a
filtered and regulated nitrogen source, Figure 28.
2. Verify the three-way valve is closed.
3. Set the pressure regulator inlet to 586 kPa (85 psig).
4. Set the pressure regulator outlet to the desired
outlet pressure, Table 1, and allow the system to
stabilize. The exact set point may vary depending
on source pressure, line size and length.
NOTE: Outlet pressure from the regulator must be at
least 6 kPa (9 psig). Increasing the outlet pressure causes
the liner to inflate more quickly; however, increasing the
pressure beyond the recommended setting, Table 1,
may damage the liner during inflation and should be
avoided.
PET tubing
(see table for required diameter)
4 m (13 ft.) max. length
Manual inflation
fixture
N
2
source
Inlet Outlet
Pressure
regulator
Cv = 1.0
3-way
valve
Figure 28. Connecting the manual inflation fixture (typical setup).
NOTE: Ensure a filter is installed on the gas pressure
source to prevent contamination of the liner.
The use of any manual inflation fixture not
manufactured by or approved by Entegris may
cause inflation problems that result from the
use of an unapproved manual inflation fixture.