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INVUE GV148 LIQUID CHEMICAL CONCENTRATION MONITOR

User Guide | Entegris, Inc.

TABLE OF CONTENTS

—

Introduction ........................................................................ 3

Liability Ownership ............................................................ 3

General Manual Notes ...................................................... 3

Changes to the Manual .................................................. 3

Intended Audience .......................................................... 3

Intended Use/Scope ....................................................... 3

Principle of Operation ...................................................... 3

Safety .................................................................................... 4

Contacting Supplier with
Emergency Health Issues .............................................. 4

Handling ............................................................................... 4

Chemical Leaks ...................................................................5

Specifications ...................................................................... 6

Dimensions ...........................................................................7

Hardware Installation ........................................................ 8

Facility Requirements ...................................................... 8

Mounting Requirements ................................................ 8

Mechanical Installation ................................................... 8

Electrical Connections ................................................... 9

Software Operation ..........................................................11

Installing the HMI Software ..........................................11

Connect Tab ....................................................................11

Menu Features ............................................................... 12

HMI Top Menu ............................................................... 13

System Tab ...................................................................... 14

Alarms Tab ....................................................................... 15

Info Tab............................................................................. 16

Self Tests Tab ................................................................... 16

Total Internal Reflection (TIR) Tab ............................ 19

Concentration Tab.........................................................20

Temperature Compensation Coefficient
(TCC) Tab .........................................................................22

Analog/Digital IO Tab ................................................. 24

Communication Command Set ................................... 25

Maintenance ..................................................................... 25

Manual Window Cleaning Method ........................... 25

Automated In Situ Window Cleaning Method ....... 25

Diagnostic Guide .............................................................30

Ordering Information ...................................................... 32

Technical Support ............................................................ 32

Warranty Service .............................................................. 32

Limited Warranty .............................................................. 32

For More Information ..................................................... 32

Terms and Conditions of Sale ....................................... 32

Содержание InVue GV148

Страница 1: ...InVue GV148 Liquid Chemical Concentration Monitor User Guide ADVANCED MATERIALS HANDLING MANUAL ...

Страница 2: ...ents 8 Mechanical Installation 8 Electrical Connections 9 Software Operation 11 Installing the HMI Software 11 Connect Tab 11 Menu Features 12 HMI Top Menu 13 System Tab 14 Alarms Tab 15 Info Tab 16 Self Tests Tab 16 Total Internal Reflection TIR Tab 19 Concentration Tab 20 Temperature Compensation Coefficient TCC Tab 22 Analog Digital IO Tab 24 Communication Command Set 25 Maintenance 25 Manual W...

Страница 3: ...advertent errors Contents of the manual are subject to change without notice INTENDED AUDIENCE This manual is intended for technicians familiar with the proper handling of chemical and other potentially hazardous materials Users must also be familiar with installing and using software on a computer running the Windows operating system INTENDED USE SCOPE This manual is intended to be used by experi...

Страница 4: ...ns and guidelines WARNING Chemicals are not supplied with this equipment Refer to the chemical suppliers MSDS for specific health and safety information WARNING Wear chemical resistant garments and eye protection Use additional personal protective equipment PPE as directed by facility safety per sonnel the MSDS or chemical safety guidelines CAUTION Only technically qualified personnel should insta...

Страница 5: ... compatible with the chemical 6 Obtain compatible containers to collect spilled material and cleanup materials 7 Ensure adequate ventilation is provided where a buildup of vapors could occur If flammable material is in use a Monitor area for flammable levels with appropriate monitoring devices b Isolate all power sources or potential sources of sparks c Use intrinsically safe tools and monitoring ...

Страница 6: ...ftware Serial communication RS485 2 wire or 4 wire RS422 4 wire Operating system compatibility Windows 7 or 10 Network compatible Yes Pressure and thermal Maximum pressure 80 psig at 40 C 104 F Process fluid temperature range 20 to 40 C 68 to104 F Ambient temperature range 20 to35 C 68 to95 F Storage temperature range 15 to 40 C 5 to 104 F RI Measurement RI range 1 32 to 1 40 nD Accuracy 2 10 4 nD...

Страница 7: ... 2 65 80 8 mm 3 18 Inlet outlet port connection DIMENSIONS A B C 1 4 Flaretek tube fitting 114 6 mm 4 51 33 0 mm 1 30 111 0 mm 4 37 3 8 Flaretek tube fitting 117 7 mm 4 64 34 7 mm 1 37 113 5 mm 4 47 1 2 Flaretek tube fitting 120 9 mm 4 76 36 3 mm 1 43 119 6 mm 4 71 3 4 Flaretek tube fitting 126 6 mm 4 99 38 9 mm 1 53 132 6 mm 5 22 1 Flaretek tube fitting 126 6 mm 4 99 38 9 mm 1 53 154 9 mm 6 10 1 ...

Страница 8: ... provide adequate exhaust ventilation and monitoring The installation location should incorporate secondary containment and spill detection Facility must have appropriate alarm and shutdown procedures for the chemical in use MOUNTING REQUIREMENTS See dimensional details for mounting geometry below Use M6 or threaded fasteners with appropriate flat washers MECHANICAL INSTALLATION Step 1 Location Lo...

Страница 9: ...ging Company Ltd ELECTRICAL CONNECTIONS Connect Wiring NOTE The wiring table below references the 19 pin PVDF male Turck connector on the device see image below To connect to the device multiple cable options are available with specific wiring diagrams Please contact Entegris for details PIN FUNCTION A 24 VDC power input B Power supply ground C TX A D RX A E Comms ground F TX B G RX B H Digital IO...

Страница 10: ...o digital IO ground to energize Digital outputs I and K are optically isolated open collector 80 mAdc maximum output pulls load to digital IO ground when energized 4 Connect analog outputs and grounds for reading of concentration O and P fluid temperature R and S and refractive index T and U CAUTION 4 20 mAdc analog outputs are self powered Analog outputs are always on Isolate all unused connectio...

Страница 11: ...h communication 1 Connect device to serial port or USB to serial port adapter Windows will configure hardware for usage 2 Using Windows Device Manager confirm com port number 3 Place the HMI software folder in an appropriate directory 4 Open the folder and using Windows Notepad or WordPad open file hmiserver rc 5 Edit the com port number determined in Step 2 and save 6 Confirm the Baud Rate as 576...

Страница 12: ...onnections will be listed in the field below with the latest connection at the top MENU FEATURES 1 Select the menu icon to view the Menu Features 2 Utility has several useful functions a Downloading new Firmware to the device b Set the devices System Time c Recording Realtime Traces Reference the Systems Tab section for more information d Start Sensor Initialization LED only e Clear the RI re zero...

Страница 13: ...has triggered a warning Error Monitor operation has triggered an error Written monitor status Individual page tabs 2 Quick Access Group Clear Active Alarms clears active information warning and error postings Record Realtime starts and ends recording of refractive index concentration and fluid tem perature to a csv file For recording instruc tions see Data Logging Using Record Realtime on page 14 ...

Страница 14: ...onitor Re zero Stability Settings The GV148 monitor can perform an RI re zero see page 17 for more details During the re zero process the user can specify the desired RI and temperature stability values which are measured as 1 standard deviation of the readings during the re zero period If the RI or temperature deviates more than the user values the re zero result will fail Recommended values are ...

Страница 15: ...display alarms from memory Clear Active clears all active alarms Write Note allows the user to add a note into the alarm log file Save Log saves the alarms log to a csv file 3 Search alarm log allows the user to enter a keyword to search through the log record of the alarms displayed 4 Display field shows the alarms Alarms can be arranged by double clicking the header of each category Alarm displa...

Страница 16: ... perform standard routines like re zero Follow the instructions given in the Test Description for each test Refractive Index Re zero from the HMI The re zero function calibrates the refractive index measurement to a known baseline The typical base line for DI water is IoR 1 332987 CAUTION Process lines that cannot use DI water may use another reference chemical of a known concentration or Index of...

Страница 17: ...ax is within the defined Upper Limit and Lower Limit Default value is 0 000020 nD c Ensure the desired value of Temp Rezero Stability Max is within the defined Upper Limit and Lower Limit Default value is 2 00 Degrees 2 Select Self Tests tab a Select Select a test to run drop down menu b Select Self Test Refractive Index Rezero ...

Страница 18: ... case of DI water enter 1 332987 d Confirm monitor status is Ready before pressing Start The test will run for approximately 40 seconds and is designed to calculate an offset between the desired RI and actual measured RI e Upon completion the test will either show Pass or Fail The test field will fill in with statistics ...

Страница 19: ...est the analog output set it to low or high and press Start 2 Measure the output with appropriate device during this 30 second cycle 3 At the end of the 30 seconds the outputs will revert to represent their normal values TOTAL INTERNAL REFLECTION TIR TAB This tab allows you to view 2 TIR curves at a time To load new TIR curves press Load New for both TIR A and TIR B Notice that you can now hide on...

Страница 20: ...quires the user to run various chemical concentrations through the monitor with correspond ing refractive index readings to create the interrelation between concentration and the refractive index 1 The default table has two rows To expand the table select Add Entry It is recommended that a minimum of five concentration points be used 2 Introduce the desired chemical concentration at the temperatur...

Страница 21: ...ess Apply to send the values to the monitor Loading Concentration Coefficients from a File This process loads saved calibration values from a csv file CAUTION The csv file must be correctly format ted to be loaded Only the first 30 data points will be uploaded 1 Create and save the csv file Column A must contain Refractive Index values with the first field containing text Column B must contain the...

Страница 22: ... manually loaded from a file or generated by the HMI CAUTION The TCC should represent the process being measured from data at various points in the expected temperature range If it takes 24 48 hours of continuous process time and or multiple chemical exchanges to realize the full temperature range this must be included in the TCC calculation for greatest accuracy Entering the TCC Manually If the F...

Страница 23: ... The HMI can generate TCC values using the Generate Coefficients section of the page 1 Confirm Plot Interval is set to 10 seconds 2 Confirm Duration is set for 24 hours NOTE It is recommended that a minimum of 24 hours be set for the monitor to incur the full range of expected thermal conditions 3 To save the data to be generated click on the Save to file box 4 Press Start 5 As data points are col...

Страница 24: ...mistry number and brief description is correct 3 Set Plot Interval to record temperatures 4 Click on the Save to File box to save if desired 5 Press Start The chart should begin plotting temperatures 6 Press Stop to end verification 7 If saved to file assign a name to the csv file and save NOTE Due to a finite response time of the temperature measurement a rapid temperature transition will result ...

Страница 25: ...en certain chemistries or CMP slurries are being monitored The in situ clean ing nozzle takes the place of the bottom cap and cleaning plug located on the bottom of the GV148 monitor Figure 1 displays an exploded view of the GV148 monitor with an in situ rinse nozzle Figure 1 To implement a GV148 monitor with an in situ window cleaner within a mix blend station or slurry delivery module supplement...

Страница 26: ...Pneumatic Valves 1 4 orifice or larger N2 pressure line monitoring should be Entegris NT Flow Through Pressure Transducer Model 4210 0 100 psig Liquid flow control LFC should be Entegris InVue Integrated Flow Controller Model 6510 0 500 cc min N2 flow monitoring should be 0 100 slm variable area flowmeter or 0 100 slm mass flowmeter N2 facilities line should have a Cv sufficiently high enough to p...

Страница 27: ...t can be periodically initiated to remove any slurry build up on the GV148 sapphire window Cleaning step Step time V1 V2 V3 V4 V5 V6 V7 V8 LFC set point Step notes Facility Line Rinse 120 sec X X X X 250 cc min Rinses in situ rinse nozzle DI water and N2 ports of any slurry deposits prior to atomized window clean Atomized Window Clean 300 sec X X X X X 250 cc min Removes slurry build up from RI mo...

Страница 28: ...c min Set point PT 0 100 slm N2 flowmeter DI water in 40 psig C NO NC V1 NC N2 On Off V5 NC DI water On Off V7 NC N2 On Off V8 NC DI water On Off DI water in 40 psig V6 3 way valve DI water purge select V3 3 way valve DI water purge select C NC NO Line Regulator 90 psig N2 In V4 NC N2 rinse On Off V2 NC DI water purge On Off PT 0 100 slm N2 flowmeter DI water in 40 psig C NO NC V1 NC N2 On Off V5 ...

Страница 29: ...P ID C NC NO Line Regulator 90 psig N2 In V4 NC N2 rinse On Off V2 NC DI water purge On Off LFC PT 0 100 slm N2 flowmeter DI water in 40 psig C NO NC V1 NC N2 On Off V5 NC DI water On Off V7 NC N2 On Off V8 NC DI water On Off DI water in 40 psig V6 3 way valve DI water purge select V3 3 way valve DI water purge select ...

Страница 30: ...re zero may be required Fluid temperature is out of specified range Operate product within specified fluid temperature range HMI displays an explanation point for refractive index and concentration Hovering mouse over it gives a message The sensor cannot obtain a valid reading The sensor may be exposed to air ensure chemistry is sufficiently being supplied to sensor No chemistry in flow cell Ensur...

Страница 31: ...easure TCC using Temperature Compensation tab in HMI TCC was calculated for a different chemistry or concentration Wrong Primary Chemistry Temperature TCC selected Verify in HMI the Primary Chemistry TCC in HMI System tab matches chemistry being used in product Rapid temperature change causes spike in concentration reading Temperature rate of change is too quick Reduce fluid temperature rate of ch...

Страница 32: ...rs using unapproved foreign components FOR MORE INFORMATION Please call your Regional Customer Service Center today to learn what Entegris can do for you Visit entegris com and select the Contact Us link to find the customer service center nearest you TERMS AND CONDITIONS OF SALE All purchases are subject to Entegris Terms and Conditions of Sale To view and print this information visit entegris co...

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