26
INVUE GV148 LIQUID CHEMICAL CONCENTRATION MONITOR
User Guide | Entegris, Inc.
Figure 2.
Figure 3.
For the in situ window cleaner to function correctly,
N
2
/DI water facilities, as well as the appropriate valving
and control logic, need to be incorporated into the
slurry delivery/mix-blend station. Figure 4 provides a
basic plumbing and instrumentation diagram (P&ID),
which can be implemented to fully facilitate the in situ
window cleaner.
All valves should be Entegris CR4 Series Pneumatic
Valves, 1/4" orifice or larger.
N
2
pressure line monitoring should be Entegris NT
™
Flow-Through Pressure Transducer, Model 4210,
0-100 psig.
Liquid flow control (LFC) should be Entegris InVue
Integrated Flow Controller, Model 6510, 0-500 cc/min.
N
2
flow monitoring should be 0-100 slm variable area
flowmeter or 0-100 slm mass flowmeter.
N
2
facilities line should have a Cv sufficiently high
enough to provide 100 slm to the cleaning nozzle.
C
NO
NC
InVue GV148
monitor
C
NO
NC
To exhaust
To exhaust
In situ window cleaner
facility inputs
Slurry in
Slurry out
C
NO
NC
InVue GV148
monitor
C
NO
NC
To exhaust
To exhaust
In situ window cleaner
facility inputs
Slurry in
Slurry out
