INTELLIGEN MV DISPENSE SYSTEM
ENTEGRIS, INC.
INSTALLATION AND USE MANUAL P/N P92500 REV. A
7
Acetone
Adamantane (tricyclodecane)
n-Amyl acetate
Anisole (Methyl phenyl ether,
Methoxybenzene)
2-Butoxyethanol (ethylene glycol
monobutyl ether, butyl cellosolve)
n-Butyl acetate
Butyl alcohol
Butyl cyclohexane
Butyl ether (Dibutyl ether)
Cyclopentanone
Cyclohexanone
Developer (Positive, 0.26N TMAH)
Diacetone alcohol
DI water
Dichloromethane
(methylene chloride)
Diethyl maleate
DIGLYME
(Diethylene glycol dimethyl ether)
Dimethyl acetamide
Dimethyl cyclohexane
Dimethyl maleate
Dimethyl sulfoxide
1,3-Dioxolane
(glycol methylene ether)
EEP (Ethyl 3-ethoxypropionate)
ECA, EEA, EGMEA (Cellosolve acetate)
Ethanone (2,2-dimethoxy-1,2-diphe-
nyl, dimethoxy phenylacetophenone)
Ethyl acetate
Ethyl acetyl acetate
(ethyl acetoacetate)
Ethyl alcohol
Ethyl benzene
Ethyl cyclohexane
Ethyl lactate
Ethyl malonate (diethyl malonate,
malonic ester)
Ethyl pyruvate
Gamma butyrolactone
2- Heptone (methyl amyl ketone)
Hexane
2-Hexanone (methyl butyl ketone,
propylacetone)
HMDS (Hexamethyldisilazane)
Hexamethyldisiloxane
1,6-hexanediol diacrylate
2-hydroxy-2-methylpropiophenone
IPA (Isopropyl alcohol, 2-Propanol)
Isoamyl acetate
Isobutyl ketone (2,6-Dimethyl-4-
heptanone,
diisopropylacetone)
MCA (methyl cellosolve acetate,
2-Methoxyethyl acetate)
Mesitylene (1,3,5 trimethylbenzene)
Methyl acetate (methyl acetic ester)
Methyl alcohol
Methyl ethyl ketone (2-Butanone)
2-Methoxy-1-propanol
(monopropylene glycol methyl ether)
MIBK (Methyl isobutyl ketone,
4-Methyl-2-pentanone)
Mineral oil
Mineral spirits
MMP (Methyl 3-methoxypropionate)
Morpholine
NMP (N-methyl pyrrolidinone)
Octamethyltrisiloxane
Orthodichlorobenzene
(1,2-Dichlorobenzene)
2- Pentanone (methyl propyl ketone)
Petroleum spirits (Petroleum Ether)
PGE (Propylene glycol monoethyl
ether, 1-ethoxy-2propanol)
PGME (Propylene glycol monomethyl
ether, 1 methoxy-2-propanol)
PGMEA (Propylene glycol
monomethyl ether acetate,
1-Methoxy-2-propyl acetate)
PGPE (Propylene glycol propyl ether,
1-propoxy-2-propanol)
2-Propenamide
(N,N-dimethylacrylamide)
2-Propenoic acid
Propyl alcohol
Tetrahydrofuran
Trichloroethylene
2.5% TMAH (Tetramethyl ammonium
hydroxide) in DI water
Toluene
Xylene
Compatibility
The IntelliGen
®
dispense system has been optimized for the dispense of photoresists and other
photochemicals. The system is uniquely designed to deliver highly accurate dispenses even at very
low volumes with high repeatability.
The internal wettable surfaces of the dispense system are PTFE, modified PTFE and Kalrez.
The following is a partial list of compatible solvents. Please contact technical support for compatibility
of a specific solvent that is not included in the list.
